Nanoscience and Nanotechnology Commons^™

Graphene-Based Post-Cmos Architecture, Sansiri Tanachutiwat

Legacy Theses & Dissertations (2009 - 2024)

The semiconductor industry relies on CMOS technology which is nearing its scaling limitations. In order to continue the historical growth rate of the device density of digital logic chips, novel nanomaterials and nanodevices will need to be developed.

Virus Capsids As Nanoscale Delivery Vessels Of Photoactive Compounds For Site-Specific Photodynamic Therapy, Brian Alexander Cohen

Legacy Theses & Dissertations (2009 - 2024)

The research presented in this work details the use of a viral capsid as an addressable delivery vessel of photoactive compounds for use in photodynamic therapy. Photodynamic therapy is a treatment that involves the interaction of light with a photosensitizing molecule to create singlet oxygen, a reactive oxygen species. Overproduction of singlet oxygen in cells can cause oxidative damage leading to cytotoxicity and eventually cell death. Challenges with the current generation of FDA-approved photosensitizers for photodynamic therapy primarily stem from their lack of tissue specificity. This work describes the packaging of photoactive cationic porphyrins inside the MS2 bacteriophage capsid, followed …

Micropatterned Electrospun Nanofibrous Substrates As Scaffolds For Engineered Salivary Glands, David Alexander Soscia

Legacy Theses & Dissertations (2009 - 2024)

The salivary gland is a complex organ exhibiting a branching, 3-dimensional structure made up of acinar (saliva-producing), and ductal (saliva transporting and modifying) epithelial cells. The high surface area of the gland allows it to efficiently provide the mouth with saliva, maintaining oral cleanliness and comfort. Salivary gland hypofunction, a significant clinical problem often caused by the autoimmune disease Sjögren's syndrome or head and neck radiation for cancer patients, affects millions of Americans and is characterized by a loss of function of salivary gland acinar cells. Chronic xerostomia, or dry mouth, arises as a result of salivary gland hypofunction and …

Measurement Of Electron Spin Transport In Graphene On 6h-Silicon Carbide(0001), Joseph Abel

Legacy Theses & Dissertations (2009 - 2024)

The focus of this thesis is to demonstrate the potential of wafer scale graphene spintronics. Graphene is a single atomic layer of sp2-bonded carbon atoms that has high carrier mobilities, making it a desirable material for future nanoscale electronic devices. The vision of spintronics is to utilize the spin of the electron to produce novel high-speed low power consuming devices. Materials with long spin relaxation times and spin diffusion lengths are needed to realize these goals. Graphene is an ideal material as it meets these requirements and is amenable to planar device geometries.

Evaluation Of Chemical Mechanical Planarization (Cmp) For The Removal Of Surface Defects In Extreme Ultraviolet Lithography (Euvl) Mask Substrates, Bradley Halligan Wood

Legacy Theses & Dissertations (2009 - 2024)

A modified CMP process was investigated and developed with the goal of removing surface defects (nanoscale depressions or `pits') from quartz mask blank substrates. Initially, quartz glass wafers were evaluated to observe surface roughness and defect introduction due to low down-force CMP processing. Following analysis of quartz glass wafers subjected to such processing it was determined that a CMP-based processing for pit removal of maskblank substrates was potentially viable. Consequently, a specially-designed mask carrier for investigating and developing CMP-based defect removal from EUV maskblank substrates was mounted on a Strasbaugh 6DS-SP CMP laboratory tool. A series of experiments was performed …

Development Of A Gas-Based Spectral Filter For Carbon Dioxide Laser Produced Plasma Extreme Ultraviolet Sources, Chimaobi Mbanaso

Legacy Theses & Dissertations (2009 - 2024)

Currently, extreme ultraviolet (EUV) lithography is a promising next generation lithography technique for enabling the scaling of device features beyond 22 nm. Out-of-band radiation in EUV exposure tools remains one of the critical issues that must be addressed before the implementation of this lithography technique for high volume manufacturing. Laser produced plasmas which use a carbon dioxide (CO₂) drive laser pulse are more likely to be used to generate EUV radiation because of their scalability to higher source power. The out-of-band spectrum at the intermediate focus of EUV sources that use a CO₂ laser produced plasma is …

Development Of An Industrial Fabrication Process For Next Generation, Thinner And Larger Crystalline Silicon (C-Si) Wafer-Based Solar Cells, Anh Viet Nguyen

Legacy Theses & Dissertations (2009 - 2024)

The world's solar cell production has grown rapidly and steadily with an annual average of 30% over the last two decades. Single and micro-crystalline silicon solar cells have been the major reason for this production increase. In 2009, silicon-based solar cells comprised almost 90% of worldwide photovoltaic module shipments.

Experimental And Theoretical Analysis Of Strain Engineered Aluminium Nitride On Silicon For High Quality Aluminium(X)Indium(Y)Gallium(1-X-Y)Nitride Epitaxy, Mihir Hemant Tungare

Legacy Theses & Dissertations (2009 - 2024)

III-Nitrides on Si are of great technological importance due to the availability of large area, epi ready Si substrates and the ability to heterointegrate with mature silicon micro and nanoelectronics. The major roadblock with realizing this is the large difference in thermal expansion coefficients and lattice constants between the two material systems. A novel technique developed in our research lab shows the potential of simultaneous and substantial reduction in dislocation and crack density in GaN on Si (111). Research undertaken in the current doctoral dissertation, validates the superior GaN quality on Si obtained using our technique and determines the factors …

(In, Al) Co-Doped Zinc Oxide As A Novel Material System For Quantum-Well Multilayer Thermoelectrics, Sean C. Teehan

Legacy Theses & Dissertations (2009 - 2024)

Waste heat recovery from low efficiency industrial processes requires high performance thermoelectric materials to meet challenging requirements. The efficiency such a device is quantified by the dimensionless figure of merit ZT=S2σT/қ, where S is the Seebeck coefficient, σ is the electrical conductivity, T is the absolute temperature and қ is the thermal conductivity. For practical applications these devices are only cost-effective if the ZT is higher than 2.

The Influence Of Copper Substrate Orientation On Graphene Growth, Zachary Robert Robinson

Legacy Theses & Dissertations (2009 - 2024)

This dissertation is focused on determining the influence of the copper substrate on graphene grown by \ac{CVD}. Graphene, which can be grown in single atomic layers on copper substrates, has potential applications in future electronic devices. One of the key issues for the use of graphene grown by chemical vapor deposition for device applications is the influence of defects on the transport properties of the graphene. For instance, growth on metal foil substrates results in multi-domain graphene growth because the foil substrates themselves have a variety of different surface terminations. Therefore, they don't serve as a very good template for …

Molecular Vapor Deposition Of Organosilanes, Sarah Kirsten Goulet

Legacy Theses & Dissertations (2009 - 2024)

Current strategies for low temperature bonding (<300 C) and 3D integration employ polymer interfaces (1-3 um) with low thermal conductivity which can result in poor heat transfer between bonded elements. The introduction of thinner interfaces to improve heat transfer is desirable; however, deposition of thin polymer films (<100 nm) for bonding applications can lead to reduced film uniformity and negatively affect bonding strength. Self-assembled monolayer (SAM) chemistries provide a potential solution and can yield nanometer control of the interfacial layer thickness without a significant effect on surface roughness. Siloxanes are one available option to realize these nanometer thin reactive layers. Due to their propensity to crosslink and form multilayers, careful control of the reaction conditions is required. Considering this, we have evaluated the molecular vapor deposition of siloxane precursors to generate molecular layers with reactive end-groups for potential use in bonding applications. Film stability, morphology, thickness, and composition were monitored after deposition using atomic force microscopy, ellipsometry and x-ray photoelectron spectroscopy.

A Novel Fabrication Technique For Three-Dimensional Nanostructures, Ravi Kiran Bonam

Legacy Theses & Dissertations (2009 - 2024)

Three dimensional micro- and nano-structures are commonly used in the field of Photonics, Optoelectronics, Sensors and Biological applications. Although numerous physical models are developed, a major challenge has been in their fabrication which is commonly limited to conventional layer-by-layer techniques. In this dissertation, a novel method for fabricating three dimensional structures using Electron Beam Lithography (EBL) will be presented.

The Development And Simulation Of Piezoelectric Surface Acoustic Wave Devices For Euv Mask Particle Removal, Anthony Rae Davis

Legacy Theses & Dissertations (2009 - 2024)

Extreme Ultraviolet Lithography (EUVL) is a critical semiconductor fabrication process which uses 13.5 nanometer wavelength light reflected from a mask to print features on various wafers used for IC fabrication. An extensive amount of research is currently underway to make EUVL prevalent in efforts to allow for efficient sub-22 nm feature size fabrication. A number of challenges must be overcome before EUVL usage becomes feasible in terms of cost, wafer output, reliability, and throughput. One notable challenge in EUVL is the removal of mask contamination. EUV masks are required to be free of contamination to ensure precise feature printing. Particles …

Study Of The Dielectric Function Of Graphene From Spectroscopic Ellipsometry And Electron Energy Loss Spectroscopy, Florence Joan Nelson

Legacy Theses & Dissertations (2009 - 2024)

For more than 60 years, semiconductor research has been advancing up the periodic table. The first transistor was made from germanium. This later gave way to silicon-based devices due to the latter's ability to form an excellent interface with thermally-grown oxide. Now for the last ~8 years, the focus has moved up one more row to carbon for post-CMOS devices in order to comply with the scaling limitations of Moore's law. However, for each of these, the measurements of film properties and dimensions have always been required for technological applications. These measurement methods often incorporate the use of light or …

Materials Engineering For Near-Infrared Light Emission From Silicon Compatible Mos Structures, Himani Suhag Kamineni

Legacy Theses & Dissertations (2009 - 2024)

Silicon-based photonics requires several components, such as a light source, an amplifier/waveguide to transfer the signal, and a photodetector to detect the signal. The motivation for using these silicon-based technologies in photonics applications is two-fold: economic advantages offered by the compatibility with mature silicon IC manufacturing and its excellent material properties for photonic devices (high thermal conductivity, high optical damage threshold, etc.). One of the major challenges in the realization of this technology is the Si-based light source. Because of its indirect bandgap, silicon has very inefficient band-to-band radiative electron-hole recombination. To overcome this obstacle, tremendous research efforts have been …

Graphene Stuctures For Energy Storage Application, Mohammad Arif Ishtiaque Shuvo

Open Access Theses & Dissertations

Energy storage devices are receiving extensive attention in recent years due to the increasing demand of energy. Super-capacitor is one of the energy storage devices with high specific power density and wide applications in electronic vehicles, commercial mobile electronics, and military devices. Carbon based materials are widely used in making Electrochemical Double Layer Capacitor (EDLC) or super-capacitor for their excellent porous nature along with their electron transport capability. By increasing the specific surface area of the porous carbon materials, specific capacitance of the super-capacitor can be significantly improved. Graphene, a newly discovered material, has been incorporated in making super-capacitor electrodes …

Cryogenic Machining And Burnishing Of Az31b Magnesium Alloy For Enhanced Surface Integrity And Functional Performance, Zhengwen Pu

Theses and Dissertations--Mechanical and Aerospace Engineering

Surface integrity of manufactured components has a critical impact on their functional performance. Magnesium alloys are lightweight materials used in the transportation industry and are also emerging as a potential material for biodegradable medical implants. However, the unsatisfactory corrosion performance of Mg alloys limits their application to a great extent. Surface integrity factors, such as grain size, crystallographic orientation and residual stress, have been proved to remarkably influence the functional performance of magnesium alloys, including corrosion resistance, wear resistance and fatigue life.

In this dissertation, the influence of machining conditions, including dry and cryogenic cooling (liquid nitrogen was sprayed to …

Nanocrystals Of Chemotherapeutic Agents For Cancer Theranostics: Development And In Vitro And In Vivo Evaluation, Christin P. Hollis

Theses and Dissertations--Pharmacy

The majority of pharmacologically active chemotherapeutics are poorly water soluble. Solubilization enhancement by the utilization of organic solvents often leads to adverse side effects. Nanoparticle-based cancer therapy, which is passively targeted to the tumor tissue via the enhanced permeation and retention effect, has been vastly developed in recent years. Nanocrystals, which exist as crystalline and carry nearly 100% drug loading, has been explored for delivering antineoplastic agents. Additionally, the hybrid nanocrystal concept offers a novel and simple way to integrate imaging agents into the drug crystals, enabling the achievement of theranostics. The overall objective of this dissertation is to formulate …

Microfluidic Separation Of Live And Dead Yeast Cells Using Reservoir-Based Dielectrophoresis, Saurin Patel, Daniel Showers, Pallavi Vedantam, Tzuen-Rong Tzeng, Shizhi Qian, Xiangchun Xuan

Mechanical & Aerospace Engineering Faculty Publications

Separating live and dead cells is critical to the diagnosis of early stage diseases and to the efficacy test of drug screening, etc. This work demonstrates a novel microfluidic approach to dielectrophoretic separation of yeast cells by viability. It exploits the cell dielectrophoresis that is induced by the inherent electric field gradient at the reservoir-microchannel junction to selectively trap dead yeast cells and continuously separate them from live ones right inside the reservoir. This approach is therefore termed reservoir-based dielectrophoresis (rDEP). It has unique advantages as compared to existing dielectrophoretic approaches such as the occupation of zero channel space and …

Development Of Advanced Polymer Nanocomposite Capacitors, Miguel Mendoza

Open Access Theses & Dissertations

The current development of modern electronics has driven the need for new series of energy storage devices with higher energy density and faster charge/discharge rate. Batteries and capacitors are two of the most widely used energy storage devices. Compared with batteries, capacitors have higher power density and significant higher charge/discharge rate. Therefore, high energy density capacitors play a significant role in modern electronic devices, power applications, space flight technologies, hybrid electric vehicles, portable defibrillators, and pulse power applications. Dielectric film capacitors represent an exceptional alternative for developing high energy density capacitors due to their high dielectric constants, outstanding breakdown voltages, …