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Articles 1441 - 1470 of 2341

Full-Text Articles in Optics

A Gamos Plug-In For Geant4 Based Monte Carlo Simulation Of Radiation-Induced Light Transport In Biological Media, Adam K. Glaser, Stephen C. Kanick, Rongxiao Zhang, Pedro Arce, Brian W. Pogue May 2013

A Gamos Plug-In For Geant4 Based Monte Carlo Simulation Of Radiation-Induced Light Transport In Biological Media, Adam K. Glaser, Stephen C. Kanick, Rongxiao Zhang, Pedro Arce, Brian W. Pogue

Dartmouth Scholarship

We describe a tissue optics plug-in that interfaces with the GEANT4/GAMOS Monte Carlo (MC) architecture, providing a means of simulating radiation-induced light transport in biological media for the first time. Specifically, we focus on the simulation of light transport due to the Čerenkov effect (light emission from charged particle's traveling faster than the local speed of light in a given medium), a phenomenon which requires accurate modeling of both the high energy particle and subsequent optical photon transport, a dynamic coupled process that is not well-described by any current MC framework. The results of validation simulations show excellent agreement with …

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The Geometry And Sensitivity Of Ion-Beam Sculpted Nanopores For Single Molecule Dna Analysis, Ryan Connor Rollings May 2013

The Geometry And Sensitivity Of Ion-Beam Sculpted Nanopores For Single Molecule Dna Analysis, Ryan Connor Rollings

Graduate Theses and Dissertations

In this dissertation, the relationship between the geometry of ion-beam sculpted solid-state nanopores and their ability to analyze single DNA molecules using resistive pulse sensing is investigated. To accomplish this, the three dimensional shape of the nanopore is determined using energy filtered and tomographic transmission electron microscopy. It is shown that this information enables the prediction of the ionic current passing through a voltage biased nanopore and improves the prediction of the magnitude of current drop signals when the nanopore interacts with single DNA molecules. The dimensional stability of nanopores in solution is monitored using this information and is improved …

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Null Values And Quantum State Discrimination, Oded Zilberberg, Alessandro Romito, David J. Starling, Gregory A. Howland, Curtis J. Broadbent, John C. Howell, Yuval Gefen Apr 2013

Null Values And Quantum State Discrimination, Oded Zilberberg, Alessandro Romito, David J. Starling, Gregory A. Howland, Curtis J. Broadbent, John C. Howell, Yuval Gefen

Mathematics, Physics, and Computer Science Faculty Articles and Research

We present a measurement protocol for discriminating between two different quantum states of a qubit with high fidelity. The protocol, called null value, is comprised of a projective measurement performed on the system with a small probability (also known as partial collapse), followed by a tuned postselection. We report on an optical experimental implementation of the scheme. We show that our protocol leads to an amplified signal-to-noise ratio (as compared with a straightforward strong measurement) when discerning between the two quantum states.

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Rapidly Reconfigurable Optically Induced Photonic Crystals In Hot Rubidium Vapor, Bethany Little, David J. Starling, John C. Howell, Raphael D. Cohen, David Shwa, Nadav Katz Apr 2013

Rapidly Reconfigurable Optically Induced Photonic Crystals In Hot Rubidium Vapor, Bethany Little, David J. Starling, John C. Howell, Raphael D. Cohen, David Shwa, Nadav Katz

Mathematics, Physics, and Computer Science Faculty Articles and Research

Through periodic index modulation, we create two different types of photonic structures in a heated rubidium vapor for controlled reflection, transmission, and diffraction of light. The modulation is achieved through the use of the ac Stark effect resulting from a standing-wave control field. The periodic intensity structures create translationally invariant index profiles analogous to photonic crystals in spectral regions of steep dispersion. Experimental results are consistent with modeling.

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Design, Development, And In-Flight Testing Of A Pointer/Tracker For In-Flight Experiments To Measure Aero-Optical Effects Over A Scaled Turret, Matthew J. Krizo, Salvatore J. Cusumano, Steven T. Fiorino, Ryan Heap, Victor Velten, Joshua Brown, Richard J. Bartell Apr 2013

Design, Development, And In-Flight Testing Of A Pointer/Tracker For In-Flight Experiments To Measure Aero-Optical Effects Over A Scaled Turret, Matthew J. Krizo, Salvatore J. Cusumano, Steven T. Fiorino, Ryan Heap, Victor Velten, Joshua Brown, Richard J. Bartell

Faculty Publications

We address the design, development, and testing of a pointer/tracker as a probe beam for the purpose of making high-speed, aero-optical measurements of the flow over a scaled beam director turret. The tracker uses retro-reflection of the probe beam off of a Reflexite annulus surrounding the turret. The constraints of the design required a near-total-commercial off the shelf system that could be quickly installed and removed in a rented aircraft. Baseline measurements of environmental vibrations are used to predict pointing performance; mitigation of line-of-sight jitter on the probe beam is achieved through passive isolation and the design of relay optics. …

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Atmosphere Observation By The Method Of Led Sun Photometry, Gregory Garza Apr 2013

Atmosphere Observation By The Method Of Led Sun Photometry, Gregory Garza

Physics

No abstract provided.

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Violation Of Continuous-Variable Einstein-Podolsky-Rosen Steering With Discrete Measurements, James Schneeloch, P. Ben Dixon, Gregory A. Howland, Curtis J. Broadbent, John C. Howell Mar 2013

Violation Of Continuous-Variable Einstein-Podolsky-Rosen Steering With Discrete Measurements, James Schneeloch, P. Ben Dixon, Gregory A. Howland, Curtis J. Broadbent, John C. Howell

Mathematics, Physics, and Computer Science Faculty Articles and Research

In this Letter, we derive an entropic Einstein-Podolsky-Rosen (EPR) steering inequality for continuous-variable systems using only experimentally measured discrete probability distributions and details of the measurement apparatus. We use this inequality to witness EPR steering between the positions and momenta of photon pairs generated in spontaneous parametric down-conversion. We examine the asymmetry between parties in this inequality, and show that this asymmetry can be used to reduce the technical requirements of experimental setups intended to demonstrate the EPR paradox. Furthermore, we develop a more stringent steering inequality that is symmetric between parties, and use it to show that the down-converted …

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An Inverse Kinematic Approach Using Groebner Basis Theory Applied To Gait Cycle Analysis, Anum Barki Mar 2013

An Inverse Kinematic Approach Using Groebner Basis Theory Applied To Gait Cycle Analysis, Anum Barki

Theses and Dissertations

Kinematics of the human body was researched for the purposes of this study. The force protection issues of today was the motivation to research pattern recognition in the human gait cycle to identify individuals carrying a concealed load on their body. The goal of this research was to identify gait signatures of human subjects and distinguish between subjects carrying a concealed load to subjects without load. Thus, this research was focused on studying the human gait cycle as well as methods used in identifying gait signatures. The main focus herein is concerned with the movement of the lower extremities, in …

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Development Of A Spectropolarimetric Capability, Evan J. Carlson Mar 2013

Development Of A Spectropolarimetric Capability, Evan J. Carlson

Theses and Dissertations

A Bomem 200 series Fourier transform infrared spectrometer and FLIR Systems Inc InGaAs infrared (IR) camera was used to measure the degree of linear polarization (DOLP) from a metal and glass surfaces. This was accomplished by placing a wire grid polarizer in front of the aperture of the FTIR and IR camera to measure the polarized reflection from the target material. For the IR camera, an average of pixel counts was collected over the area of the target to measure to DOLP. Factors impacting the accuracy of the measurements from the FTIR are calibration, instrument self emission, and alignment error. …

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Discrimination Of Neutral Postures In Computer Based Work, Alanna R. Keith Mar 2013

Discrimination Of Neutral Postures In Computer Based Work, Alanna R. Keith

Theses and Dissertations

A biometric system recognizes users based on the way they physically interact with the system. In this work, we discover a common behavior that a typist consistently displays in non-trivial computer work. We sought to demonstrate three objectives: first, compelling proof that a user can be actively recognized over the course of a lengthy task via a neutral posture struck multiple times in that task; two, a sensing concept for capturing the neutral posture, and, third, an objective method for determine the level of work performed by each typist. This thesis develops a model for hand tracking using a simple …

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Note: A Simple Thermal Gradient Annealing Unit For The Treatment Of Thin Films, C. J. Metting, Johnathan K. Bunn, Ellen A. Underwood, Yihao Zhu, G. Koley, T. Crawford, Jason R. Hattrick-Simpers Mar 2013

Note: A Simple Thermal Gradient Annealing Unit For The Treatment Of Thin Films, C. J. Metting, Johnathan K. Bunn, Ellen A. Underwood, Yihao Zhu, G. Koley, T. Crawford, Jason R. Hattrick-Simpers

Faculty Publications

A gradient annealing cell has been developed for the high-throughput study of thermalannealing effects on thin-film libraries in different environments. The inexpensive gradientannealing unit permits temperature gradients as large as 28 °C/mm and can accommodate samples ranging in length from 13 mm to 51 mm. The system was validated by investigating the effects of annealing temperature on the crystallinity, resistivity, and transparency of tin-doped indium oxide deposited on a glass substrate by magnetron sputtering. The unit developed in this work will permit the rapid optimization of materials properties such as crystallinity, homogeneity, and conductivity across a variety of applications.

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Development And Characterization Of A Chromotomosynthetic Hyperspectral Imaging System, Randall L. Bostick Mar 2013

Development And Characterization Of A Chromotomosynthetic Hyperspectral Imaging System, Randall L. Bostick

Theses and Dissertations

A chromotomosynthetic imaging (CTI) methodology based upon mathematical reconstruction of a set of 2-D spectral projections to collect high-speed (100 Hz) 3-D hyperspectral data cube has been proposed. The CTI system can simultaneously provide usable 3-D spatial and spectral information, provide high-frame rate slitless 1-D spectra, and generate 2-D imagery equivalent to that collected with no prism in the optical system. The wavelength region where prism dispersion is highest (500 nm) is most sensitive to loss of spectral resolution in the presence of systematic error, while wavelengths 600 nm suffer mostly from a shift of the spectral peaks. The quality …

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Optical Down-Conversion In Doped Znse:Tb3+ Nanocrystals, Sandip Das, K. C. Mandal Feb 2013

Optical Down-Conversion In Doped Znse:Tb3+ Nanocrystals, Sandip Das, K. C. Mandal

Faculty Publications

No abstract provided.

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Imaging Stability In Force-Feedback High-Speed Atomic Force Microscopy, Byung I. Kim, Ryan Boehm Feb 2013

Imaging Stability In Force-Feedback High-Speed Atomic Force Microscopy, Byung I. Kim, Ryan Boehm

Physics Faculty Publications and Presentations

We studied the stability of force-feedback high-speed atomic force microscopy (HSAFM) by imaging soft, hard, and biological sample surfaces at various applied forces. The HSAFM images showed sudden topographic variations of streaky fringes with a negative applied force when collected on a soft hydrocarbon film grown on a grating sample, whereas they showed stable topographic features with positive applied forces. The instability of HSAFM images with the negative applied force was explained by the transition between contact and noncontact regimes in the force-distance curve. When the grating surface was cleaned, and thus hydrophilic by removing the hydrocarbon film, enhanced imaging …

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On-Chip Non-Reciprocal Optical Devices Based On Quantum Inspired Photonic Lattices, Ramy El-Ganainy, A. Eisfeld, Miguel Levy, Demetrios N. Christodoulides Jan 2013

On-Chip Non-Reciprocal Optical Devices Based On Quantum Inspired Photonic Lattices, Ramy El-Ganainy, A. Eisfeld, Miguel Levy, Demetrios N. Christodoulides

Department of Physics Publications

We propose integrated optical structures that can be used as isolators and polarization splitters based on engineered photonic lattices. Starting from optical waveguide arrays that mimic Fock space (quantum state with a well-defined particle number) representation of a non-interacting two-site Bose Hubbard Hamiltonian, we show that introducing magneto-optic nonreciprocity to these structures leads to a superior optical isolation performance. In the forward propagation direction, an input TM polarized beam experiences a perfect state transfer between the input and output waveguide channels while surface Bloch oscillations block the backward transmission between the same ports. Our analysis indicates a large isolation ratio …

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Simulation Of Charge Transport In Multi-Island Tunneling Devices: Application To Disordered One-Dimensional Systems At Low And High Biases, Madhusudan A. Savaikar, Douglas R. Banyai, Paul Bergstrom, John A. Jaszczak Jan 2013

Simulation Of Charge Transport In Multi-Island Tunneling Devices: Application To Disordered One-Dimensional Systems At Low And High Biases, Madhusudan A. Savaikar, Douglas R. Banyai, Paul Bergstrom, John A. Jaszczak

Department of Physics Publications

Although devices have been fabricated displaying interesting single-electron transport characteristics, there has been limited progress in the development of tools that can simulate such devices based on their physical geometry over a range of bias conditions up to a few volts per junction. In this work, we present the development of a multi-island transport simulator, MITS, a simulator of tunneling transport in multi-island devices that takes into account geometrical and material parameters, and can span low and high source-drain biases. First, the capabilities of MITS are demonstrated by modeling experimentaldevices described in the literature, and showing that the simulated device …

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Femtosecond Filament Interaction As A Probe For Molecular Alignment, Erik Mckee Jan 2013

Femtosecond Filament Interaction As A Probe For Molecular Alignment, Erik Mckee

Electronic Theses and Dissertations

Femtosecond laser filamentation is a highly nonlinear propagation mode. When a laser pulse propagates with a peak power exceeding a critical value Pcr (5 GW at 800 nm in air), the Kerr effect tends to collapse the beam until the intensity is high enough to ionize the medium, giving rise to plasma defocusing. A dynamic competition between these two effects takes place leaving a thin and weakly ionized plasma channel in the trail of the pulse. When an ultrafast laser pulse interacts with molecules, it will align them, spinning them about their axis of polarization. As the quantum rotational wave …

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Comparison Of Post-Detonation Combustion In Explosives Incorporating Aluminum Nanoparticles: Influence Of The Passivation Layer, William K. Lewis, C. G. Rumchik, M. J. Smith, K. A. Shiral Fernando, Christopher A. Crouse, Jonathan E. Spowart, Elena A. Guliants, Christopher E. Bunker Jan 2013

Comparison Of Post-Detonation Combustion In Explosives Incorporating Aluminum Nanoparticles: Influence Of The Passivation Layer, William K. Lewis, C. G. Rumchik, M. J. Smith, K. A. Shiral Fernando, Christopher A. Crouse, Jonathan E. Spowart, Elena A. Guliants, Christopher E. Bunker

Electrical and Computer Engineering Faculty Publications

Aluminum nanoparticles and explosive formulations that incorporate them have been a subject of ongoing interest due to the potential of aluminum particles to dramatically increase energy content relative to conventional organic explosives. We have used time-resolved atomic and molecular emission spectroscopy to monitor the combustion of aluminum nanoparticles within the overall chemical dynamicsof post-detonation fireballs. We have studied the energy release dynamics of hexahydro-1,3,5-trinitro-1,3,5-triazine (RDX) charges incorporating three types of aluminum nanoparticles: commercial oxide-passivated nanoparticles, oleic acid-capped aluminum nanoparticles (AlOA), and nanoparticles in which the oxide shell of the particle has been functionalized with an acrylic monomer and copolymerized into …

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External Cavity Mode-Locked Semiconductor Lasers For The Generation Of Ultra-Low Noise Multi-Gigahertz Frequency Combs And Applications In Multi-Heterodyne Detection Of Arbitrary Optical Waveforms, Josue Davila-Rodriguez Jan 2013

External Cavity Mode-Locked Semiconductor Lasers For The Generation Of Ultra-Low Noise Multi-Gigahertz Frequency Combs And Applications In Multi-Heterodyne Detection Of Arbitrary Optical Waveforms, Josue Davila-Rodriguez

Electronic Theses and Dissertations

The construction and characterization of ultra-low noise semiconductor-based mode-locked lasers as frequency comb sources with multi-gigahertz combline-to-combline spacing is studied in this dissertation. Several different systems were built and characterized. The first of these systems includes a novel mode-locking mechanism based on phase modulation and periodic spectral filtering. This mode-locked laser design uses the same intra-cavity elements for both mode-locking and frequency stabilization to an intra-cavity, 1,000 Finesse, Fabry-Pérot Etalon (FPE). On a separate effort, a mode-locked laser based on a Slab-Coupled Optical Waveguide Amplifier (SCOWA) was built. This system generates a pulse-train with residual timing jitter of

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Metrology Of Volume Chirped Bragg Gratings Recorded In Photo-Thermo-Refractive Glass For Ultrashort Pulse Stretching And Compressing, Christopher Lantigua Jan 2013

Metrology Of Volume Chirped Bragg Gratings Recorded In Photo-Thermo-Refractive Glass For Ultrashort Pulse Stretching And Compressing, Christopher Lantigua

Electronic Theses and Dissertations

Chirped Bragg gratings (CBGs) recorded in photo-thermo-refractive (PTR) glass provide a very efficient and robust way to stretch and compress ultra-short laser pulses. These gratings offer the ability to stretch pulses from hundreds of femtoseconds, to the order of 1 ns and then recompress them. However, in order to achieve pulse stretching of this magnitude, 100 mm thick CBGs are needed. Using these CBGs to both stretch, and re-compress the pulse thus requires propagation through 200 mm of optical glass. This therefore demands perfect control of the glass homogeneity, as well as the holographic recording process of the CBG. In …

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Uv-Visible Microscope Spectrophotometric Polarization And Dichroism With Increased Discrimination Power In Forensic Analysis, Dale Kevin Purcell Jan 2013

Uv-Visible Microscope Spectrophotometric Polarization And Dichroism With Increased Discrimination Power In Forensic Analysis, Dale Kevin Purcell

All Open Access Legacy Dissertations and Capstone Projects

Microanalysis of transfer (Trace) evidence is the application of a microscope and microscopical techniques for the collection, observation, documentation, examination, identification, and discrimination of micrometer sized particles or domains. Microscope spectrophotometry is the union of microscopy and spectroscopy for microanalysis. Analytical microspectroscopy is the science of studying the emission, reflection, transmission, and absorption of electromagnetic radiation to determine the structure or chemical composition of microscopic-size materials. Microscope spectrophotometry instrument designs have evolved from monochromatic illumination which transmitted through the microscope and sample and then is detected by a photometer detector (photomultiplier tube) to systems in which broad-band (white light) illumination …

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A Correlation-Based Optical Flowmeter For Enclosed Flows, Naiqian Zhang, Joseph S. Dvorak, Yali Zhang Jan 2013

A Correlation-Based Optical Flowmeter For Enclosed Flows, Naiqian Zhang, Joseph S. Dvorak, Yali Zhang

Biosystems and Agricultural Engineering Faculty Publications

A low-cost flowmeter would be very useful in a wide variety of monitoring situations. This article discusses the development of such a flowmeter based on optical components and its testing with water in an enclosed flow system. The sensor consisted of two sets of LEDs and phototransistors spaced 4 cm apart, monitoring the optical properties of the fluid at upstream and downstream locations, respectively. A small amount of dye was injected into the flow, which caused a change in the optical properties of the fluid at both locations. The time required for this change to move from the upstream to …

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Crystal Structure, Phase, And Optical Properties Of Yttrium-Doped Hafnium Oxide Nanocrystalline Thin Films, Alejandro Ortega Jan 2013

Crystal Structure, Phase, And Optical Properties Of Yttrium-Doped Hafnium Oxide Nanocrystalline Thin Films, Alejandro Ortega

Open Access Theses & Dissertations

Yttrium-doped hafnium oxide (YDH) nanocrystalline films were produced by sputter-deposition at various substrate times and temperatures, to produce YDH films in a wide range of thicknesses, dYDH∼25 to 1100 nm. The deposition was made onto optical grade quartz and sapphire substrates. Samples deposited on sapphire were subject to post-deposition annealing (PDA) at various times (3-24 hr) and temperatures (1100 - 1500 °C). The effect of d[special characters omitted]YDH on the crystal structure, surface/interface morphology and optical properties of YDH films was investigated. X-ray diffraction analyses revealed the formation of monoclinic phase for relatively thin films (<150nm). The evolution towards stabilized cubic phase with increasing dYDH [special characters omitted]is observed. The scanning electron microscopy results indicate the dense, columnar structure of YDH films as a function of dYDH. Spectrophotometry analyses indicate that the grown YDH films are transparent and exhibit interference fringes. The band gap was found to be ∼ 5.60 eV for monoclinic YDH films while distinct separation and an increase in band gap to 6.03 eV is evident with increasing dYDH and formation cubic YDH films. The PDA films band gaps were found to be between 5.31 and 5.72 eV, all of which exhibit secondary gaps. A correlation between growth conditions, annealing, phase evolution, and optical properties of the YDH nanocrystalline thin films is established.

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Surface Plasmon Polaritons And Waveguide Modes At Structured And Inhomogeneous Surfaces, Javier Polanco Jan 2013

Surface Plasmon Polaritons And Waveguide Modes At Structured And Inhomogeneous Surfaces, Javier Polanco

Open Access Theses & Dissertations

In chapter 1, properties of a p-polarized surface plasmon polariton are studied, propagating circumferentially around a portion of a cylindrical interface between vacuum and a metal, a situation investigated earlier by M. V. Berry (J. Phys. A: Math. Gen. 8, (1975) 1952). When the metal is convex toward the vacuum this mode is radiative and consequently is attenuated as it propagates on the cylindrical surface. An approximate analytic solution of the dispersion relation for this wave is obtained by an approach different from the one used by Berry, and plots of the real and imaginary parts of its wave number …

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Fast-Response Liquid Crystals For Photonic And Display Applications, Jie Sun Jan 2013

Fast-Response Liquid Crystals For Photonic And Display Applications, Jie Sun

Electronic Theses and Dissertations

Liquid crystal devices are attractive for many applications such as information displays, spatial light modulators and adaptive optics, because their optical properties are electrically tunable. However, response time of liquid crystal devices is a serious concern for many applications especially for those who require large phase modulation (≥2π). This is because a thick LC layer is usually needed to achieve a large phase shift while the response time of a nematic LC is highly determined by the cell gap.

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Optically Induced Forces In Scanning Probe Microscopy, Dana Kohlgraf-Owens Jan 2013

Optically Induced Forces In Scanning Probe Microscopy, Dana Kohlgraf-Owens

Electronic Theses and Dissertations

The focus of this dissertation is the study of measuring light not by energy transfer as is done with a standard photodetector such as a photographic film or charged coupled device, but rather by the forces which the light exerts on matter. In this manner we are able to replace or complement standard photodetector-based light detection techniques. One key attribute of force detection is that it permits the measurement of light over a very large range of frequencies including those which are difficult to access with standard photodetectors, such as the far IR and THz. The dissertation addresses the specific …

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High Flux Isolated Attosecond Pulse Generation, Yi Wu Jan 2013

High Flux Isolated Attosecond Pulse Generation, Yi Wu

Electronic Theses and Dissertations

This thesis outlines the high intensity tabletop attosecond extreme ultraviolet laser source at the Institute for the Frontier of Attosecond Science and Technology Laboratory. First, a unique Ti:Sapphire chirped pulse amplifier laser system that delivers 14 fs pulses with 300 mJ energy at a 10 Hz repetition rate was designed and built. The broadband spectrum extending from 700 nm to 900 nm was obtained by seeding a two stage Ti:Sapphire chirped pulse power amplifier with mJ-level white light pulses from a gas filled hollow core fiber. It is the highest energy level ever achieved by a broadband pulse in a …

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Peak Power Scaling Of Nanosecond Pulses In Thulium Based Fiber Lasers, Christian Gaida Jan 2013

Peak Power Scaling Of Nanosecond Pulses In Thulium Based Fiber Lasers, Christian Gaida

Electronic Theses and Dissertations

Thulium based fiber lasers represent a promising alternative for pulse energy scaling and high peak power generation with ytterbium based systems at 1µm. Advantages of thulium arise from the operation at longer wavelengths and a large gain bandwidth (1.8-2.1µm). Nonlinear effects, such as self phase modulation, stimulated Raman scattering and stimulated Brillouin scattering generally limit peak power scaling in fiber lasers. The longer wavelength of thulium fiber lasers and large mode field areas can significantly increase the nonlinear thresholds. Compared to 1µm systems, thulium fiber lasers enable single mode guidance for two times larger mode field diameter in step index …

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Surface Plasmonic Lens Driven Photoelectron Source For Multi-Beam Applications, Heon Joon Choi Jan 2013

Surface Plasmonic Lens Driven Photoelectron Source For Multi-Beam Applications, Heon Joon Choi

Legacy Theses & Dissertations (2009 - 2024)

Surface plasmon polariton (SPP) assisted photoelectron source array is proposed for use in distributed multiple electron beam lithography applications. Individual source is composed of a metal/dielectric surface structure with concentric circular grooves of subwavelength width surrounding a sub-wavelength aperture. Such optical power concentrators, called "plasmonic lenses", collect light incident over a broad area by converting it to surface electromagnetic waves, specifically SPP's, through diffraction by the sub-wavelength grooves surrounding the aperture. Through constructive interference of the generated SPPs between neighboring grooves, controlled by the periodicity of the grooves, high optical power densities can be achieved at the center of the …

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Mueller Based Scatterometry And Optical Characterization Of Semiconductor Materials, Gangadhara Raja Muthinti Jan 2013

Mueller Based Scatterometry And Optical Characterization Of Semiconductor Materials, Gangadhara Raja Muthinti

Legacy Theses & Dissertations (2009 - 2024)

Scatterometry is one of the most useful metrology methods for the characterization and control of critical dimensions (CD) and the detailed topography of periodic structures found in microelectronics fabrication processes. Spectroscopic ellipsometry (SE) and normal incidence reflectometry (NI) based scatterometry are the most widely used optical methodologies for metrology of these structures. Evolution of better optical hardware and faster computing capabilities led to the development of Mueller Matrix (MM) based Scatterometry (MMS). Dimensional metrology using full Mueller Matrix (16 element) scatterometry in the wavelength range of 245nm-1000nm was discussed in this work. Unlike SE and NI, MM data provides complete …

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