Materials Science and Engineering Commons^™

Microstructural Effects During Chemical Mechanical Planarization Of Copper, Patrick J. Andersen, Mariela N. Bentancur, Amy J. Moll, Megan Frary

Materials Science and Engineering Faculty Publications and Presentations

Novel die-stacking schema using through-wafer interconnects require vias to be filled with electroplated Cu, resulting in thick copper films, and requiring an aggressive first-step CMP. This work investigates the effects of microstructure on CMP of copper films, which are not presently well understood. Bulk and local removal rates were investigated for several different microstructures. Surface orientation maps were created and the orientations of individual grains were correlated with topographical data to elucidate local removal behavior. Cu removal depends on the details of the microstructure, and certain microstructures allowed for either faster or more uniform removal of thick Cu films.

Robust Isothermal Electric Control Of Exchange Bias At Room Temperature, Xi He, Ning Wu, Anthony N. Caruso, Elio Vescovo, Kirill D. Belashchenko, Peter A. Dowben, Christian Binek

Kirill Belashchenko Publications

Voltage-controlled spin electronics is crucial for continued progress in information technology. It aims at reduced power consumption, increased integration density and enhanced functionality where non-volatile memory is combined with highspeed logical processing. Promising spintronic device concepts use the electric control of interface and surface magnetization. From the combination of magnetometry, spin-polarized photoemission spectroscopy, symmetry arguments and first-principles calculations, we show that the (0001) surface of magnetoelectric Cr₂O₃ has a roughness-insensitive, electrically switchable magnetization. Using a ferromagnetic Pd/Co multilayer deposited on the (0001) surface of a Cr₂O₃ single crystal, we achieve reversible, room-temperature isothermal switching …

Oscillatory And Monotonic Modes Of Long-Wave Marangoni Convection In A Thin Film, Sergey Shklyaev, Mikhail Khenner, Alexei Alabuzhev

Mathematics Faculty Publications

We study long-wave Marangoni convection in a layer heated from below. Using the scaling k=O Bi, where k is the wave number and Bi is the Biot number, we derive a set of amplitude equations. Analysis of this set shows presence of monotonic and oscillatory modes of instability. Oscillatory mode has not been previously found for such direction of heating. Studies of weakly nonlinear dynamics demonstrate that stable steady and oscillatory patterns can be found near the stability threshold.

Application Of Self-Determination And Self-Regulation Theories To Course Design: Planting The Seeds For Adaptive Expertise, Linda Vanasupa, Jonathan Stolk, Trevor Harding

Materials Engineering

The paper is grounded in the premise that learning occurs within a dynamic system of social and ecological interactions in the learning environment. Our intent is to open the conversation about hose ac, as engineering educators, design effective learning experiences for this dynamic system, particularly in light of the deeply ethical, adaptive expertise required of today's graduates. Drawing from two well-researched theories of psychological development (self-determination and self-regulation), we assert that fostering the engagement and positive growth required for adaptive expertise necessitates a holistic educational approach. This approach requires us to consider both the psychological needs of the learner, and …

The Systemic Correlation Between Mental Models And Sustainable Design: Implications For Engineering Educators, Linda Vanasupa, Roger Burton, Jonathan Stolk, Julie B. Zimmerman, Larry J. Leifer, Paul T. Anastas

Materials Engineering

Many studies have illuminated our understanding of the kinds of competencies and behaviors exhibited by effective designers. Against the backdrop of global challenges made more urgent by unintentional negative impacts of engineered products and systems, however, we are left to deduce that our ways of educating engineering designers is fundamentally flawed. We assert that one can trace the cause of our collective, unintended negative consequences to the mental models of reality that we consciously or unconsciously carry. In this paper, we present the case for developing awareness and facility with mental models. We also suggest an alternate mental model as …

Oscillatory And Monotonic Modes Of Long-Wave Marangoni Convection In A Thin Film, Sergey Shklyaev, Mikhail Khenner, Alexei Alabuzhev

Mathematics Faculty Publications

We study long-wave Marangoni convection in a layer heated from below. Using the scaling k=O Bi, where k is the wave number and Bi is the Biot number, we derive a set of amplitude equations. Analysis of this set shows presence of monotonic and oscillatory modes of instability. Oscillatory mode has not been previously found for such direction of heating. Studies of weakly nonlinear dynamics demonstrate that stable steady and oscillatory patterns can be found near the stability threshold.

A Study Of Diamond Nanoparticles, Rajarshi Chakraborty

Material Science and Engineering Theses - Archive

Diamond nanoparticles grown previously by Hot Filament Assisted Chemical Vapor Deposition have been characterized by utilizing Atomic Force Microscopy, Scanning Electron Microscopy, Raman Spectroscopy and X Ray Diffraction. AFM and SEM data shows increase in nanoparticle size with growth period ranging from about 20 nm for 15 minutes to 200 nm for 105 minutes growth. Raman spectra have been analyzed by using optical phonon confinement in nanometer size crystals. Based on the SEM, Raman spectroscopy and XRD data, we present clear evidence for nanometer size (10-200 nm) diamond particles in CVD-grown diamond thin films.

Development Of Amphiphilic Biodegradable Photoluminescent Polymers, Shengyuan Zhou

Material Science and Engineering Theses - Archive

The development of amphiphilc block copolymers have been attracted much attention due to their potential use in drug delivery and targeting. Less research work focused on their prospective application as fluorescent imaging probes. Although some research reported fluorescent materials encapsulated in amphiphilc micelles has provided significant opportunities for biological labeling and imaging in biomedical fields, these fluorescent materials, such as organic dyes and quantum dots, suffer from photobleaching, cytotoxicity and lack of biodegradability. A novel and ideal amphiphilic biodegradable photoluminescent polymeric micelle was developed, which will open new avenues for biomedical filed. The objective of this reseach was to develop …

Synthesis And Characterization Of Platinum And Carbon Nanoparticle In Benzene By Electric Plasma Discharge In Ultrasonic Cavitation, Rakesh Pratapbhai Chaudhary

Material Science and Engineering Theses - Archive

Nanoparticles are of interest due to the high number of atoms located on the surface. This high surface area is conductive to higher catalytic efficiency than normal seen in bulk metals. Of numerous Nanoparticles catalysts studied, Platinum (Pt) nanoparticles have attracted particular interest due to their superior catalysis for many chemical reactions, especially for fuel cell reactions including hydrogen oxidation and oxygen reduction. Carbon supported Pt nanoparticles are active anode catalysts for fuel cells. In this thesis nano-sized Pt particles have been synthesized by an advanced and cost effective method. Pt nanoparticles embedded in carbon matrix were synthesized by an …

Nanoparticle Bridge Dna Biosensor, Hong-Wen Huang

Material Science and Engineering Dissertations - Archive

A new DNA sensing method is demonstrated in which DNA hybridization events lead to the formation of nanoparticle satellites that bridge two electrodes and are detected electrically. The hybridization events are exclusively carried out only on specific locations, the surfaces of C-ssDNA modified 50 nm GNPs. The uniqueness of this work is that only a small number of T-ccDNA molecules (<10) is required to form the nanoparticle satellites, allowing ultra-sensitive DNA sensing. The principle of this new DNA sensing technique has been demonstrated using target DNA and three-base-pair-mismatched DNA in 20nM concentrations. Three single-stranded DNA (ssDNA) system is used in our experiment which includes Capture-ssDNA (C-ssDNA), Target-ssDNA (T-ssDNA) and Probe-ssDNA (P-ssDNA). Both C-ssDNA and P-ssDNA are modified by a thiol group and can hybridize with different portions of T-ssDNA. T-ssDNA requires no modification in three ssDNA system, which is beneficial in many applications. C-ssDNA modified 50nm gold nanoparticle (C-50au) and P-ssDNA modified 30nm gold nanoparticle (P-30au) are prepared through the reaction of thiol-gold chemical bonding between thiolated ssDNA and gold nanoparticle (GNP) (C-ssDNA with 50nm GNP, P-ssDNA with 30nm GNP). We controllably place the C-50au only on the SiO2 band surface (~ 90nm width) between two gold electrodes (source and drain electrodes) by forming positively- and negatively-charged self-assembled monolayers (SAMs) on SiO2 and gold surface, respectively. DNA modified GNP is negatively charged due to ionization of phosphate group on DNA back bone. C-50au therefore is negatively charged and can only be attracted toward SiO2 area (repelled by negatively charged gold electrode surface). The amine group of positively-charged SAMs on SiO2 surface is then passivated by converting to non-polar methyl functional group after C-50au placement. P-30au is first hybridized with T-ssDNA in the solution phase (T-P-30au formed) and is introduced into DNA detection device in which C-50au are immobilized on ~90nm width SiO2 band (between two gold electrodes). The passivation step ensures every T-P-30au are attached only to C-50au through hybridization (T-P-30au will not be attracted toward SiO2 surface or gold electrodes). GNP bridges are formed across the electrodes and provide an electrical path between two gold electrodes.We ensure that every T-P-30au only hybridizes on the surface of C-50au by (1) accurately controlling C-50au placement between two gold electrodes, (2) passivating positively-charged SAMs on SiO2 surface after C-50au immobilization. When T-P-30au hybridize with C-50au on ~90nm wide SiO2 surface, GNP bridges form and provide an electrical path between two gold electrodes even with only a few hybridization events. Experimental results show that even a few GNP bridges formed on SiO2 band can provide a significant conductance change from an open circuit to a conductive circuit (current = 0.5 uA at voltage = 0.1 V with four GNP bridge). We also used 3-base-pair-mismatched ssDNA (3mm-ssDNA) as a control experiment, which always resulted in an open circuit (no GNP bridge formed). Our detection device is compatible with current CMOS fabrication technology and can be manufactured on a wafer scale. The direct electrical output of this DNA detection technique provides a promising basis for high-throughput screening (can be fabricated on a wafer scale) with no expensive equipment required.

Measurement Of The Spectral Distribution Of Low Energy Electrons Emitted As A Result Of Nvv Auger Transitions In Ag (100), Sushant Kalaskar

Material Science and Engineering Theses - Archive

Auger Photoelectron Coincidence Spectroscopy (APECS) was used to investigate the physics of the Low Energy Tail (LET) of the Auger spectrum of Ag (100) at the National Synchrotron Light Source, Brookhaven National Lab, New York. The incident photon energy was set at 180eV. The spectrum shows a peak due to the NVV Auger transition accompanied by a substantial low energy region. The APECS spectrum contains the contributions from electrons excited by the NVV Auger transition plus a background due to true coincidences between photoemitted valence band electrons that undergo inelastic scattering and transfer part of their energy with other valence …

Formation Of Au Nanoparticles Through Reaction Of Na₃Au(So₃)₂ By Electrochemically Evolved Hydrogen, Yi Jiun Li

Material Science and Engineering Theses - Archive

Hydrogen evolution during electrochemical deposition has long been regarded as undesired and deliberately suppressed since small hydrogen bubbles could cause a rough surface of deposits. Here, we demonstrate a new role for electrochemically evolved hydrogen, serving as both templates and reducing agents for synthesizing Au nanoparticles via electroless depositions from Na₃Au(SO₃)₂ electrolytes. A series of experiments have been designed to investigate this new role. A working electrode of patterned Ag strips on the non-conductive substrates has been used. It has been observed that when a potential more negative than hydrogen evolution potential was applied to metal areas, a large amount …

Self-Assembly Of Polystyrene Nanospheres And Its Applications As Templates For Plasmonic Structures, Shih-Hsin Chang

Material Science and Engineering Dissertations - Archive

Monodispersed colloidal polystyrene spheres have been self-assembled into various structures as templates for the fabrication of different nanostructures. Two unique self-assembly processes have been developed and systematically investigated. A method to make the multi-layer and mono-layer close-packed structure by means of capillary-convective force has been developed. By directly visualizing the self-assembling process using optical microscopy, a mechanism based on the 2-D crystal formation and 3-D repulsive force model has been proposed to explain the process. A vertical deposition technique to produce nanosphere crystal structure with single orientation on hydrophilic glass substrate has also been developed. Using a lithographically patterned substrate …

Thermal Detection Of Biomarkers Using Phase Change Nanoparticles, Chaoming Wang

Electronic Theses and Dissertations

Most of existing techniques cannot be used to detect molecular biomarkers (i.e., protein and DNA) contained in complex body fluids due to issues such as enzyme inhibition or signal interference. This thesis describes a nanoparticle-based thermal detection method for the highly sensitive detections of multiple DNA biomarkers or proteins contained in different type of fluids such as buffer solution, cell lysate and milk by using solid-liquid phase change nanoparticles as thermal barcodes. Besides, this method has also been applied for thrombin detection by using RNA aptamer-functionalized phase change nanoparticles as thermal probes. Furthermore, using nanostructured Si surface that have higher …

Localized Mechanical Deformation And Dissolution Of 45s5 Bioglass, Ding Li

University of Kentucky Doctoral Dissertations

Bioactive glasses react with the human physiological solution in control of their biofunctionality. The stress state in bioactive glasses determines the chemomechanical reaction and their biofunctionality. Using the microindentation technique, the effect of the indentation deformation on the surface damage and material dissolution of 45S5 bioglass was investigated.

The indentation-induced residual stresses were calculated. Complete anelastic recoveries of the indentation depths and the impression marks were observed for the first time, which was likely driven by the stored strain energy over the anelastic deformation zone. The indentation-induced local surface damages were revealed before and after the immersion tests in phosphate …

Correlation Between Preparation Parameters And Properties Of Molybdenum Back Contact Layer For Cigs Thin Film Solar Cells, Eigo Takahashi

Electronic Theses and Dissertations

Molybdenum (Mo) thin film back contact layers for thin film CuIn(1-x)GaxSe2 (CIGS) solar cells were deposited onto soda lime glass substrates using a direct current (DC) planar magnetron sputtering deposition technique. Requirements for the Mo thin film as a back contact layer for CIGS solar cells are various. Sheet resistance, contact resistance to the CIGS absorber, optical reflectance, surface morphology, and adhesion to the glass substrate are the most important properties that the Mo thin film back contact layer must satisfy. Experiments were carried out under various combinations of sputtering power and working gas pressure, for it is well known …

Tunable Infrared Metamaterials, David Shelton

Electronic Theses and Dissertations

Metamaterials are engineered periodic composites that have unique refractive-index characteristics not available in natural materials. They have been demonstrated over a large portion of the electromagnetic spectrum, from visible to radiofrequency. For applications in the infrared, the structure of metamaterials is generally defined using electron-beam lithography. At these frequencies, the loss and dispersion of any metal included in the composite are of particular significance. In this regard, we investigate deviations from the Drude model due to the anomalous skin effect. For comparison with theoretical predictions, the optical properties of several different metals are measured, both at room temperature and at …

Probing The Nanoscale Interaction Forces And Elastic Properties Of Organic And Inorganic Materials Using Force-Distance (F-D) Spectroscopy, Abhilash Vincent

Electronic Theses and Dissertations

Due to their therapeutic applications such as radical scavenging, MRI contrast imaging, Photoluminescence imaging, drug delivery, etc., nanoparticles (NPs) have a significant importance in bio-nanotechnology. The reason that prevents the utilizing NPs for drug delivery in medical field is mostly due to their biocompatibility issues (incompatibility can lead to toxicity and cell death). Changes in the surface conditions of NPs often lead to NP cytotoxicity. Investigating the role of NP surface properties (surface charges and surface chemistry) on their interactions with biomolecules (Cells, protein and DNA) could enhance the current understanding of NP cytotoxicity. Hence, it is highly beneficial to …

Electro-Optic And Magneto-Dielectric Properties Of Multifunctional Nitride And Oxide Materials, Ambesh Dixit

Wayne State University Dissertations

ABSTRACT

Materials that simultaneously exhibit different physical properties provide a rich area of research leading to the development of new devices. For example, materials having a strong coupling between charge and spin degrees of freedom are essential to realizing a new class of devices referred to generally as spintronics. However, these multifunctional systems pose new scientific challenges in understanding the origin and mechanisms for cross-control of different functionalities. The core of this Ph.D. dissertation deals with multifunctional nitride and oxide compound semiconductors as well as multiferroic magnetic oxide systems by investigating structural, optical, electrical, magnetic, magnetodielectric and magnetoelectric properties.

Thin …

Investigation Of The Threshold Voltage Shift Effect Of La2o3 On Tin/Hfo2/La2o3/Sio2/Si Stacks, Ming Di

Legacy Theses & Dissertations (2009 - 2024)

The semiconductor industry continues to scale (shrink) transistor dimensions to both increase the number of transistors per integrated circuit and their speed. One important aspect of scaling is the need to decrease the equivalent oxide thickness of the transistor gate dielectric while minimizing leakage current. Traditional thin layer SiO2 or SiOxNy films have been replaced by higher dielectric constant film stacks Here we study one example, the HfO2/La2O3/SiO2 stack. This dissertation describes an investigation of the use of La2O3 to reduce the threshold voltage of TiN/HfO2/SiO2/Si stacks (high-k/metal gate stacks). A significant aspect of this study is the determination of …