Nanotechnology Fabrication Commons^™

Rapid-Prototyping Nanofabrication: Lcd-Based Projection Lithography And Physical Vapor Deposition, Sabeel Saleem Mohammmed

University Honors Theses

The semiconductor industry's continued growth, driven in large part by demand for artificial intelligence hardware, has highlighted the need for greater workforce development in regions adjacent to major fabrication centers like Oregon's Silicon Forest. This capstone project lays the groundwork for a small scale and student led semiconductor fabrication lab at Portland State University by demonstrating two of the core steps in chip manufacturing: photolithography and thin film deposition. Rather than relying on conventional fixed reticles, this work explores a unique, low cost approach to patterning that uses an ultraviolet-compatible liquid crystal display (LCD) as a programmable reticle, allowing arbitrary …

Designing Enhanced Nonlinearity In Plasmonic Devices With Epsilon-Near-Zero Films, Kevin Tran Le

Electrical Engineering and Computer Science (MS) Theses

The growing demand for energy-efficient optical information processing motivates compact nonlinear photonic devices that can operate at low power. Silicon photonics is a mature platform for linear optical functions, but nonlinear operation remains challenging because of its weak Kerr response, two-photon absorption at telecommunication wavelengths, and limited compatibility with deeply subwavelength plasmonic confinement. This thesis computationally investigates epsilon-near-zero thin films integrated into plasmonic waveguide architectures as a route toward stronger light–matter interaction in compact nonlinear devices.

Two waveguide geometries are examined: a hybrid metal-insulator-metal plasmonic slab waveguide incorporating an ultrathin indium tin oxide epsilon-near-zero layer (5–50 nm), and a dielectric-loaded …

​Autonomous Agentic Orchestration For Physics-Aware Scientific Discovery: An Integrative Multimodal Framework For 2d Material Characterization​, Sankalp Pandey

Electrical Engineering and Computer Science Undergraduate Honors Theses

The advancement of next-generation semiconductor and quantum technologies relies on the scalability of the fabrication of two-dimensional (2D) van der Waals heterostructures. However, this process is severely bottlenecked by characterization workflows. Optical microscopy provides high-throughput imaging of 2D material flakes, but lacks the explicit physical priors required for the discernment of sub-nanometer thickness variations, such as distinguishing monolayers from bilayers. The use of computer vision models to automate the localization and characterization process of the flakes was proposed. As a part of this effort, we develop QuantumFlake, an open-source framework to streamline the integration and deployment of computer vision models …

Nanomagnet Based Reservoir Computing And Quantum Control, Fahim F. Chowdhury

Theses and Dissertations

Conventional CMOS scaling has driven remarkable advances in computing but faces increasing physical and energy constraints, motivating alternative computing paradigms that integrate memory and computation while improving energy efficiency. Nanoscale magnetic systems offer a promising platform for such approaches because their intrinsic nonlinear dynamics and localized magnetic fields can support both classical and quantum information processing. This thesis investigates nanomagnetic systems for physical reservoir computing and, with primary emphasis, for localized quantum control of spin qubits.

The first part explores dipole-coupled nanomagnet arrays as physical reservoirs. Micromagnetic simulations demonstrate nonlinear dynamical behavior with high short-term memory and parity-check capacity, enabling …

Nanomagnet Based Straintronic Devices For Unconventional Computing: Simulation And Performance Analysis, Rahnuma Rahman

Theses and Dissertations

Nanomagnetic devices are of great interest in digital hardware because of their non-volatility and dynamic ability to change magnetization but suffer from high switching error rates and temperature sensitivity. Magnetostrictive nanomagnets that utilize strain to switch between stable magnetization states encoding bit information are of interest since they are extremely energy efficient as piezoelectric layers can be used to rotate magnetization that have switching energies in the range of attojoules. Their stochasticity can also be useful in probabilistic, analog, neuromorphic, and collective computing systems, where occasional switching errors are not devastating. The dissertation extends spintronics beyond conventional computing schemes by …

Numerical Analysis And Simulation Of Enhanced Performance In Nanowire Cds/Cdte Solar Cells: A Pathway To Greater Than 25% Efficient Cdte Solar Cell, Riasad Badhan

Theses and Dissertations--Electrical and Computer Engineering

This Thesis finds a pathway to a significantly high-efficient CdTe based solar cell by demonstrating and harvesting the advantages of a nano-structure configuration in CdTe based solar cells. Nanowire CdS window layer and the “control”, planar CdS window layer films were fabricated in the laboratory and compared for their optical transmission and other characteristics affecting the performance of the CdS-CdTe solar cell. Numerical simulations were performed for a comparative evaluation of the embedded nanowire CdS-CdTe solar cell device and the traditional planar CdS-CdTe solar cell device. Experimentally measured spectral transmission of nanowire CdS film was used in the simulation environment. …

Design Of Energy-Efficient, Scalable, And Flexible Tensor Processing Architectures With Electro-Photonic Integrated Circuits, Oluwaseun Alo

Theses and Dissertations--Electrical and Computer Engineering

In recent years, artificial intelligence has achieved remarkable success across domains such as computer vision, natural language processing, and scientific computing. This progress has been driven largely by advances in deep learning, particularly deep neural networks (DNNs), including convolutional neural networks (CNNs) and transformer-based models. While these models deliver unprecedented accuracy, often surpassing human performance, their computational complexity continues to grow rapidly due to multibillion- and trillion-parameter designs. As model sizes and deployment scales expand, the demand for energy-efficient and high-throughput hardware accelerators has intensified. Conventional electronic platforms based on CPUs, GPUs, ASICs, and FPGAs are increasingly constrained by the …

Nanostructured Cathode Catalysts For Aem Electrolysis: From Catalyst Design To Degradation And Hydrogen Dynamics, Yamini Kumaran

Electronic Theses & Dissertations (2024 - present)

Anion exchange membrane water electrolysis (AEMWE) presents a promising pathway toward cost-effective and sustainable hydrogen production by integrating the chemical robustness of alkaline systems with the compact, zero-gap design of proton exchange membrane electrolyzers. However, the widespread implementation of AEMWE is limited by the availability of highly active and durable platinum-group-metal (PGM)-free catalysts and by an incomplete understanding of their degradation behavior under realistic operating conditions.

This dissertation focuses on the development, characterization, and mechanistic investigation of nanostructured MoNi₄–MoO₂-based electrodes for efficient and stable hydrogen generation under alkaline and membrane-integrated environments. MoNi₄–MoO₂ nanorods …

Development Of Alternative Plasma Etching Techniques For The Selective Removal Of Tan With Respect To Sioch Dielectric Materials To Enable Future Back-End-Of-The-Line Scaling, Ivo Otto Iv

Electronic Theses & Dissertations (2024 - present)

Transistor scaling has continued according to Moore’s Law for over fifty years. As transistor size decreases, adequate power delivery is required to enable transistor scaling without performance loss. Power delivery is provided by a metal interconnect network with insulating dielectric that connects the transistor level to the power source, the signal speed within this metal line network limiting transistor level switching speeds. Reduction of signal delay has moved from primarily dimension-based improvement towards adoption of conductor and dielectric materials with lower resistivity and a reduced dielectric constant value, respectively: transitioning from Al/SiO₂ to Cu/low-κ SiOCH. With this transition comes …

Next-Generation Computing Hardware: Advancements In Tantalum Oxide Reram For Ai And Neuromorphic Applications, Rajas Ravindra Mathkari

Electronic Theses & Dissertations (2024 - present)

The rapid development of artificial intelligence, machine learning, and data-intensive computing has exposed the fundamental limitations of conventional von Neumann architectures, in which energy and time are continuously lost transferring data between physically separate memory and processing units. In contrast, the human brain performs complex computations directly at the point of memory storage through billions of parallel synaptic connections, a paradigm known as in-memory computing. Realizing this in hardware requires memory devices that are fast, energy-efficient, non-volatile, and capable of storing multiple resistance levels in an analog manner. Resistive Random Access Memory (ReRAM) based on tantalum oxide (TaOx) is one …

Investigation Of Fine-Grain Cu And Cu Alloys For Low-Temperature Hybrid Bonding Applications, Sarabjot Singh

Electronic Theses & Dissertations (2024 - present)

Hybrid bonding has emerged as a key enabler for next-generation three-dimensional (3D) integration, offering fine-pitch interconnects and improved electrical performance. However, conventional Cu–Cu hybrid bonding typically requires elevated temperatures to achieve sufficient diffusion and interface quality, posing challenges for temperature-sensitive device integration and process compatibility. This work investigates materials engineering approaches to enable low-temperature Cu–Cu bonding through both microstructure design and alloying strategies.

This work begins by examining grain refinement in Cu as a pathway to enhance diffusion through increased grain boundary density, providing efficient atomic transport without introducing additional elements. Three Cu-based systems Cu–Co, Cu–Ag, and Cu–Al were systematically …

Development Of Periodic Plasmonic Nano-Structures For Enhanced Labeled Bio-Sensing Systems, Kyle Zackary Smith

Graduate Theses, Dissertations, and Problem Reports (ETD)

The biomedical industry has seen sustained growth over the past half century, with a continually increasing demand for flexible, easy-to-use, and cost-effective tools. One large area of commercial interest has been point-of-use or point-of-care diagnostics, using optical based Lab-On-Chip (LOC) style systems. Label and label-free fluorescence detection systems are common benchtop modalities that have seen recent integration into these portable, cost-effective LOC applications. However, despite their maturity, there are still opportunities to improve device characteristics, specifically in reference to throughput, limit-of-detection (LOD), and hybrid integration (along with associated costs).

Optical research avenues at WVU have focused on improving these systems …

Design, Modeling, And Experimental Development Of Nanoscale Confinement Structures On Planar Silicon-Based Microelectrode Arrays For Single-Entity Electrochemical Sensing, Parinaz Eskandari

Dissertations, Master's Theses and Master's Reports

Electrochemical sensing is widely used for chemical and biological detection due to its high sensitivity, label-free operation, and compatibility with miniaturized electronic systems. However, conventional microelectrode platforms operate in an ensemble-averaged regime in which the measured current represents the collective response of many molecules interacting with the electrode surface. This ensemble averaging masks localized nanoscale electrochemical events and limits the ability to detect rare interactions, such as single molecules or nanoparticles. Achieving single-entity electrochemical detection therefore requires strategies that confine electrochemical reactions to nanoscale regions while maintaining compatibility with scalable planar microfabrication.

This dissertation investigates nanoscale electrochemical confinement on planar …

Exploratory Study Of Semiconductor Nanomembranes In Em Applications, Grant D. Heileman

Electrical and Computer Engineering ETDs

Antenna systems are a cornerstone of modern technologies, playing an increasingly vital role in their advancement. As demand for compact, high-performance, and adaptable communication platforms grows reconfigurable antenna technologies are becoming essential. This research explores a novel front-end reconfigurable antenna system (FERAS) architecture that leverages the mechanical flexibility and photoconductive behavior of semiconductor nanomembrane (SNM) devices. By exploiting the emergent properties of ultra-thin silicon (Si) or gallium arsenide (GaAs) nanomaterials and optically exciting these samples using vertical-cavity surface-emitting laser (VCSEL) arrays, this study develops lightweight, low-cost, deployable antenna structures for satellite communications, remote sensing, GPS, and radar. Despite their significant …

Colloidal Quantum Dots: A Path Toward Making Mid-Wave Infrared Sensing A Ubiquitous Technology, Mohammad Mostafa Al Mahfuz

Dissertations

Reducing the size, weight, power consumption, and cost (SWaP-C) of infrared detectors could make infrared sensing more widely accessible. In the critical mid-wavelength infrared (MWIR) spectral range of 3-5 gm, commercially available detectors are limited by the high costs associated with epitaxial growth and hybridization, as well as the need for cryogenic cooling. These factors restrict their use to defense and space applications.

Colloidal quantum dots present a promising material for overcoming these challenges, with wafer-scale monolithic integration and Auger suppression being the key material capabilities to minimize the sensor's SWaP-C. Infrared sensors based on colloidal quantum dots have been …

Design Of A Subthreshold Cmos Inverter-Based Amplifier For Low-Noise And Low-Power Applications, Landon Alexander Schmucker

Electrical and Computer Engineering ETDs

Amplification is a fundamental function in most analog circuits. There is a fast-growing demand for low-power, low-noise, and high-gain amplifiers. Modern semiconductor processes are increasingly optimized for digital applications, which has introduced new challenges in analog design. To address these challenges, analog designers have investigated replacing conventional analog circuits with digital implementations. One promising application is the typical CMOS inverter as an amplifier.

This research presents a CMOS inverter-based amplifier with feedback designed to achieve low power consumption, low input noise, and high gain. Unlike typical CMOS inverter-based amplifiers, this topology has two distinctive features: (1) it uses a MOSFET …

Functional Devices Based On Freestanding 2d Materials, Shijue Xu

McKelvey School of Engineering Graduate Student Theses & Dissertations

Two-dimensional (2D) materials have attracted extensive attention in the field of nanoelectronics due to their atomic-scale thickness, high surface-to-volume ratio, tunable electronic properties, and compatibility with low-temperature processing. These characteristics make them highly suitable for the construction of emerging device architectures, particularly in both ionic and electronic devices.

In this work, we investigate the application of 2D materials in two distinct classes of devices: ionically-driven memristors and electronically-dominated metal–semiconductor contacts. For the memristor study, we fabricate heterostructure-based resistive switching devices using h-BN and WSe₂ as active layers. These 2D material-based memristors exhibit stable power consumption loops and high linearity …

Automation Programming For Uhv-Cvd Growth Of Group Iv Materials, William Hay

Electrical Engineering and Computer Science Undergraduate Honors Theses

The automation programming of a UHV-CVD reactor for group IV materials was performed. The reactor was programmed to perform all the necessary functions for a Germanium (Ge) growth with little response from the user. The overall goal was to fix an Argon purge program to clean out the process chamber of gases and create an Excel output program to ease any work on the user. There were also general fixes and address name changes that occurred throughout the program. Then, a one step and two step growth of a Ge material was formed in a UHV-CVD reaction for analysis. Germanium …

Guided-Mode Resonant Nanopatterns For Raman Generation And Photonic Devices, Renjie Chen

Electrical Engineering Dissertations - Archive

This dissertation explores advanced strategies for enhancing Raman amplification in silicon photonic devices, focusing on guided-mode resonance engineering and resonant mode manipulation. Silicon, despite its indirect bandgap, exhibits a strong Raman scattering coefficient, enabling it to function as a viable gain medium for integrated photonic systems. However, the realization of efficient, compact, and low-threshold silicon Raman amplifiers and lasers necessitates innovative design approaches that overcome inherent material and structural limitations.

The first chapter provides a fundamental overview of optics, including physical principles, spectral characteristics, guided-mode resonance, simulation methods, and nanopattern fabrication methods.

The second chapter delves into silicon-based Raman amplification …

Photonic Crystal Devices For Chip Scale Sensing Systems, Yudong Chen

Electrical Engineering Dissertations - Archive

This thesis investigates the design and integration of photonic crystal (PC) structures for compact, high-performance optical platforms, with a focus on applications in gas sensing, on-chip lasers, and flat optics. Chapter 1 introduces the fundamental principles of PC design and simulation, highlighting their potential to replace bulky components in micro-gas chromatography (µGC) systems through miniaturization and integration. Chapter 2 explores PC-based nanobeam lasers, including the Lambda-Scale Embedded Active-Region Photonic Crystal (LEAP) laser, which demonstrates strong optical confinement and energy-efficient operation, with energy consumption as low as 8 fJ/bit. These laser designs are evaluated for their suitability in low-power, high-speed on-chip …

Metasurfaces And Their Applications In Photonic Devices, Shuwei Guo

Dissertations and Theses

Metasurfaces are flat artificial optical elements composed of dielectric and/or metallic nanostructures. They can manipulate light in unprecedented ways by altering amplitude, phase, and polarization at subwavelength scales. The ability of these two-dimensional elements to perform multiple optical functions within compact optical systems—while offering high functionality, small form factors, and easy integration into optoelectronic devices—has sparked significant interest across various fields and industries. These applications span imaging, sensing, nonlinear and quantum optics, optical computing, automotive technology, augmented and virtual reality, and more.

In this dissertation, we explore and design new multifunctional metasurfaces with a focus on manipulating spectral responses. First, …

Epitaxial Quantum Dot Scintillators With Monolithic Photodetector Integration: Physics, Fabrication And Characterization Of Materials And Devices, Allan Oreave Minns

Electronic Theses & Dissertations (2024 - present)

This dissertation discloses the physics, fabrication, and characterization of high-performance scintillator detectors based on epitaxial InAs quantum dots (QDs) in GaAs. The detector crystals grown include monolithically integrated In_0.35GaAs photodetectors with Al_0.92-0.6In_0.03-0.35Ga_0.05As metamorphic buffer layers (MBL). A device fabrication process was developed for the lithographic patterning, chemical etching, contact metallization and readout integration of materials grown by means of molecular beam epitaxy (MBE) on 3-inch GaAs (001) wafers. Low capacitance integration with readout electronics was achieved through wire bonds to custom printed circuit boards (PCBs) with commercial components.

The relationship between device …

Surface Morphology And Moisture Adsorption/Desorption Characteristics Of Hybrid-Dielectric Moisture Sensors, Ronak Ali

Theses and Dissertations--Electrical and Computer Engineering

Relative humidity sensors are used for high-humidity measurement. Moisture sensors, or dew point sensors are used for low-humidity measurement (< 1 ppm_v). The dissertation contains two parts of studies. In the first part, the effect of surface morphology on the response speed of moisture sensors is studied. Moisture sensors using α-Al₂O₃ films as porous dielectric materials deposited by anodic spark deposition are studied. In this part of the study, a variety of small pores have been studied to investigate the response speed of moisture sensors. Three different surface morphologies have been studied using scanning electron microscopy. One …

Advancing 4h-Silicon Carbide Power Mosfets Through Three-Dimensional Technology Computer Aided Design Optimization, Skylar A. Deboer

Electronic Theses & Dissertations (2024 - present)

This research contributes to the advancement of 1.2 kV 4H-Silicon Carbide (SiC) Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) through the development and implementation of sophisticated three-dimensional Technology Computer-Aided Design (3D TCAD) methodologies. These advanced simulation techniques enable comprehensive evaluation of innovative unit cell architectures that remain inaccessible to conventional two-dimensional (2D) TCAD approaches. By leveraging these 3D simulation capabilities, this work facilitates significant improvements in both the performance and reliability of next-generation wide-bandgap power devices.

Power devices convert electrical energy between different forms throughout the power grid making them essential in applications ranging from personal electronics, electric vehicles, renewable energy systems, industrial …

Development Of Titanium Dioxide Coating For Self-Cleaning Photovoltaic Panels, Chau Pham

Masters Theses

As global energy demands continue to rise amid increasing environmental concerns, the transition to renewable energy sources, particularly solar power, has become imperative. Solar energy, driven by recent advancements in photovoltaic (PV) technology, presents a promising solution for achieving greater sustainability and efficiency. However, despite these technological advancements, the persistent issue of soiling caused by dust, bird droppings, and other contaminants remains a major obstacle, diminishing sunlight absorption and reducing energy conversion efficiency, presenting a significant obstacle to optimal PV performance.

This study explores the application of titanium dioxide (TiO2) nanoparticle coatings to address this challenge by enhancing the self-cleaning …

Ge/Sige Quantum Wells: Material For The Post-Moore Era, Troy Alexander Hutchins-Delgado

Optical Science and Engineering ETDs

This dissertation demonstrates high-quality germanium quantum wells on a 200 mm silicon wafer platform, enabling novel device possibilities. Partnering with a commercial silicon-germanium epitaxy supplier, we obtained shallow, undoped germanium quantum wells with high-crystalline quality, confirmed through x-ray diffraction, secondary ion mass spectroscopy, high-resolution scanning transmission electron microscopy, and energy dispersive x-ray spectroscopy. Hall bar devices fabricated on single quantum wells revealed that surface preparation can tune transport properties while maintaining peak mobilities around 10⁵ cm²V⁻¹s⁻¹. Manganese-germanide spintronic contacts were integrated via solid-state reaction, with contact quality assessed through Schottky diodes, transfer length …

Ellipticity-Controlled Exceptional Points From Nanoscale Metasurfaces, Benjamin Goldberg

McKelvey School of Engineering Graduate Student Theses & Dissertations

Precise control over light polarization is critical for advancing technologies in telecommunica- tions, quantum computing, and image sensing. However, existing methods for manipulating polarization around exceptional points in non-Hermitian systems, have exclusively focused on circular polarization and work with reflected light. To address this limitation, we de- velop a novel metasurface platform with high-Q resonators that enables tunable control of polarization exceptional points across arbitrary ellipticity for transmitted light. Our design uses orthogonally polarized guided mode resonators in a two-layer silicon metasurface, where careful tuning of the dipolar guided mode resonances (DGMRs) and layer spacing allows us to control the …

Nanostructured Silicon Meta-Waveguides And Surfaces For Enhanced Light-Matter Interaction, Saddam Gafsi

All Dissertations

In this study, we tackle the challenge of light-matter interaction engineering and local field enhancement using various silicon photonic platforms based on three different approaches. (i) The first approach is based on boundary condition engineering where we present and show through simulation and experimental results, a silicon nanodisk “diabolo” configuration able to support significant local field enhancement levels in the range ~102 to 104 in the high index medium through proper structural modifications at the nanoscale. We show that the presented optical behavior is consistent with the anapole modes characterized by the observed near-field enhancement and coinciding with far-field suppression. …

Dual Base Sige Is-Hbt For Use In Biosensing Applications, Liam Stephen Hayes

Master's Theses

The proposed research is for a novel SiGe-based Ion-Sensitive Dual Hetero-junction Bipolar Transistor (IS-HBT) to be used in both trans-dermal biological sensing as well as Lab-on-Chip (LOC) applications. The end goals for the device designed are two: For one, the research done for this work will be used to substantiate the claims made by Zafar et al. [1] that an HBT-style structure is better suited for biosensing application rather than a conventional Field Effect Transistor (FET) based geometries. Secondly, it provides the final element to be integrated along with a selectivity membrane, as well as with a reverse-iontophoresis system to …

Fabrication And Characterization Of A Monolithic Photonic Integrated Circuit With High-Aspect Ratio Photonic Device Structures, Sami A. Nazib

Optical Science and Engineering ETDs

The focus of this work was to create a process to fabricate an InP-based Photonic Integrated Circuit (PIC). The design of the PIC required the photonic components of this device to be created by deep etching of an epitaxially-grown multilayer structure. Therefore, a novel dry etching process was developed to produce very high aspect- ratio (HAR) features. This process not only involved the development of dry etch chemistry but also the engineering of a metal mask structure. The next step of the challenge was to use a polymer-based material that would have two functions: cladding for the etched photonic components …