Open Access. Powered by Scholars. Published by Universities.®

Controls and Control Theory Commons

Open Access. Powered by Scholars. Published by Universities.®

Electronic Devices and Semiconductor Manufacturing

Institution
Keyword
Publication Year
Publication
Publication Type

Articles 31 - 40 of 40

Full-Text Articles in Controls and Control Theory

Estimation Of Performance Indices For The Planning Of Sustainable Transportation Systems, Alexander Paz, Pankaj Maheshwari Jan 2013

Estimation Of Performance Indices For The Planning Of Sustainable Transportation Systems, Alexander Paz, Pankaj Maheshwari

Electrical & Computer Engineering Faculty Research

In the context of sustainable transportation systems, previous studies have either focused only on the transportation systemor have not used a methodology that enables the treatment of incomplete, vague, and qualitative information associated with the available data. This study proposes a system of systems (SOS) and a fuzzy logic modeling approach. The SOS includes the Transportation, Activity, and Environment systems. The fuzzy logic modeling approach enables the treatment of the vagueness associated with some of the relevant data. Performance Indices (PIs) are computed for each system using a number of performance measures. The PIs illustrate the aggregated performance of each …


Feedback Control For Electron Beam Lithography, Yugu Yang Jan 2012

Feedback Control For Electron Beam Lithography, Yugu Yang

Theses and Dissertations--Electrical and Computer Engineering

Scanning-electron-beam lithography (SEBL) is the primary technology to generate arbitrary features at the nano-scale. However, pattern placement accuracy still remains poor compared to its resolution due to the open-loop nature of SEBL systems. Vibration, stray electromagnetic fields, deflection distortion and hysteresis, substrate charging, and other factors prevent the electron-beam from reaching its target position and one has no way to determine the actual beam position during patterning with conventional systems. To improve the pattern placement accuracy, spatial-phase-locked electron-beam lithography (SPLEBL) provides feedback control of electron-beam position by monitoring the secondary electron signal from electron-transparent fiducial grids on the substrate. While …


A New Control Method For Input-Output Harmonic Elimination Of The Pwm Boost-Type Rectifier Under Extreme Unbalanced Operating Conditions, Ana Vladan Stankovic, Ke Chen Jul 2009

A New Control Method For Input-Output Harmonic Elimination Of The Pwm Boost-Type Rectifier Under Extreme Unbalanced Operating Conditions, Ana Vladan Stankovic, Ke Chen

Electrical and Computer Engineering Faculty Publications

Under severe fault conditions in the distribution system, not only input voltages but also input impedances must be considered as unbalanced. This paper presents a new control method for input-output harmonic elimination of the pulsewidth-modulation (PWM) boost-type rectifier under conditions of both unbalanced input voltages and unbalanced input impedances. The range of imbalance in both input voltages and input impedances, for which the proposed method is valid, is analyzed in detail. An analytical approach for complete harmonic elimination shows that PWM boost-type rectifier can operate at unity power factor under extremely unbalanced operating conditions resulting in a smooth (constant) power …


Drive-Mode Control For Vibrational Mems Gyroscopes, Lili Dong, David Avanesian Apr 2009

Drive-Mode Control For Vibrational Mems Gyroscopes, Lili Dong, David Avanesian

Electrical and Computer Engineering Faculty Publications

This paper presents a novel design methodology and hardware implementation for the drive-mode control of vibrational micro-electro-mechanical systems gyroscopes. Assuming that the sense mode (axis) of the gyroscope is operating under open loop, the drive-mode controller compensates an undesirable mechanical spring-coupling term between the two vibrating modes, attenuates the effect of mechanical-thermal noise, and most importantly, forces the output of the drive mode to oscillate along a desired trajectory. The stability and robustness of the control system are successfully justified through frequency-domain analysis. The tracking error between the real output and the reference signal for the drive mode is proved …


Real-Time Plasma Controlled Chemistry In A Two-Frequency, Confined Plasma Etcher, Vladimir Milosavljevic, Albert R. Ellingboe, Cezar Gaman, John V. Ringwood Apr 2008

Real-Time Plasma Controlled Chemistry In A Two-Frequency, Confined Plasma Etcher, Vladimir Milosavljevic, Albert R. Ellingboe, Cezar Gaman, John V. Ringwood

Articles

The physics issues of developing model-based control of plasma etching are presented. A novel methodology for incorporating real-time model-based control of plasma processing systems is developed. The methodology is developed for control of two dependent variables (ion flux and chemical densities) by two independent controls (27 MHz power and O2flow). A phenomenological physics model of the nonlinear coupling between the independent controls and the dependent variables of the plasma is presented. By using a design of experiment, the functional dependencies of the response surface are determined. In conjunction with the physical model, the dependencies are used to deconvolve the sensor …


Some Aspects Of Process Control In Semiconductor Manufacturing, Keelin Relihan, Shane Geraghty, Aidan O'Dwyer Jan 2007

Some Aspects Of Process Control In Semiconductor Manufacturing, Keelin Relihan, Shane Geraghty, Aidan O'Dwyer

Conference papers

This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.


Socio-Economic Impacts Of Computer Viruses In Tanzania, M Victor Jun 2006

Socio-Economic Impacts Of Computer Viruses In Tanzania, M Victor

Tanzania Journal of Engineering and Technology (TJET)

This paper reports on a research project conducted with an objective of identifying and assessing various approaches used by different computer users (Management, System Administrators and end users) in Tanzania to combat computer viruses (CVs), and to assess users' awareness level on CVs. Specifically, the study aimed at assessing the awareness level on CVs to the Tanzanian business community; analyze the socio -economic impact caused by CVs in Tanzania and; assess existing methods, capacity and limitations on controlling CVs in Tanzania. Data was collected using both questionnaires and interview from financial institutions such as NBC and BOT, and telecommunications sector …


Review Of The Product Development Process And Information Flow In The Manufacturing Industry: Problems And A Possible Wav Forward, E Opiyo Jun 2004

Review Of The Product Development Process And Information Flow In The Manufacturing Industry: Problems And A Possible Wav Forward, E Opiyo

Tanzania Journal of Engineering and Technology (TJET)

No abstract provided.


Application Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Arton Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Art, Silas Kajuna Dec 1999

Application Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Arton Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Art, Silas Kajuna

Tanzania Journal of Engineering and Technology (TJET)

Vibration is one of the techniques employed in the determination of dynamic properties of fruits and vegetables. It entails generation of a mechanical or acoustic vibrational signal which is propagated through the flesh of the agricultural material. A transducer is either attached or held close to the specimen to monitor the propagation of the signal through the specimen. The manner in which the signal is transmitted through the material is analyzed, and the dynamic properties of the specimen which relate to its firmness or its internal being are derived. The technique has been around for the past 30 years or …


Study Of Direct Semiconductor Materials For An Optically Controlled Switch, Sung Taek Ko Apr 1989

Study Of Direct Semiconductor Materials For An Optically Controlled Switch, Sung Taek Ko

Electrical & Computer Engineering Theses & Dissertations

A model for a bulk GaAs photoconductive switch has been developed and solved to determine the performance of the device in closing and opening switch applications. The GaAs material has been characterized by deep level transient spectroscopy (DLTS). Two electron traps (EL2 and EL5) and one hole trap (CuB} have been detected and were included in the model. Simulation studies are performed on several GaAs switch systems composed of different combinations and density of deep levels to investigate the influence of deep traps in a photoconductive switch system. The electron occupancy of each deep trap is traced in …