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Articles 23341 - 23370 of 27385
Full-Text Articles in Engineering
Electrocatalytic Reduction Of L-Cystine At Pb/Nanotio2 Film Electrode, Dao-Bao Chu, Feng Wang, Ying Xiao, Xue-Jiao Zhang
Electrocatalytic Reduction Of L-Cystine At Pb/Nanotio2 Film Electrode, Dao-Bao Chu, Feng Wang, Ying Xiao, Xue-Jiao Zhang
Journal of Electrochemistry
The nanoporous Ti-based TiO2 films electrodes modified with Pb particles(Pb/nanoTiO2) were prepared by using anodization and potentiostatic electro-deposition.The optimum deposition conditions were determined by comparing with various deposition potentials and time.The SEM analyses indicated that the TiO2 films were homogeneous nanoporous structure,and the Pb particles well dispersed on the TiO2 films.The L-cystine electrocatalytic activity reduction on the Pb/nanoTiO2 film electrodes was investigated by cyclic voltammetry and Chronoamperometric curves.The results showed that this type of the electrode posseses high acticity and stability.
Study Of Electrodes Modified With Hybrid Copper Cobalt Hexacyanoferrate-Mwcnts Composites, Shan Jiang, Yun Zhang, Xiao-Yan Wang, Xiao-Fei Yao
Study Of Electrodes Modified With Hybrid Copper Cobalt Hexacyanoferrate-Mwcnts Composites, Shan Jiang, Yun Zhang, Xiao-Yan Wang, Xiao-Fei Yao
Journal of Electrochemistry
The hybrid modified electrodes were obtained by electrochemical deposition of copper-cobalt hexacyanoferrate(CuCoHCF) /multi-walled carbon nanotubes(MWCNTs) on the surface of glassy carbon electrode.The effects of the amount of MWCNTs and composition of electrolyte on the properties of modified electrode had been researched.The copper cobalt hexacyanoferrate-MWCNTs modified electrodes show excellent electrochemical properties compared with that modified only copper-cobalt hexacyanoferrate.The CuCoHCF-MWCNTs/GCE exhibits obvious electrocatalytic activity towards oxidation of hydrogen peroxide.The oxidation peak current increased linearly with the concentration of hydrogen peroxide in the range of 3.16 × 10-5 ~ 2.92 × 10-3 mol· L-1.The linear equation is given up …
Preparation And Characterization Of Sulfur/Mesoprous Carbon Composite Cathodes, Wen-Hua Zhang, Yao Chen, Xin-Ping Ai, Yu-Liang Cao
Preparation And Characterization Of Sulfur/Mesoprous Carbon Composite Cathodes, Wen-Hua Zhang, Yao Chen, Xin-Ping Ai, Yu-Liang Cao
Journal of Electrochemistry
A sulfur/mesoporous carbon composite was prepared by thermally treating a mixture of sublimed sulfur and mesoporous carbon. The microstructure of the mesoporous carbon was characterized by BET analysis and X-ray diffraction(XRD). The electrochemical performance of the S/C composite as cathode materials was evaluated by the galvanostatic method. The results confirmed that the mesoporous carbon could not only greatly enhance the electrochemical activity of sulfur electrode, but also effectively confine the diffusion of dissolved polysulfides in organic electrolyte. As a result,the S/C composites showed high capacity, good cycle performance and excellent rate capability. The specific capacity of the S/C composite was …
The Synthesise Of Electron-Conducting Redox Hydrogel And Its Application In Microbial Fuel Cell, Kai-Peng Wang, Sheng-Li Chen
The Synthesise Of Electron-Conducting Redox Hydrogel And Its Application In Microbial Fuel Cell, Kai-Peng Wang, Sheng-Li Chen
Journal of Electrochemistry
Efficient electron transfer between the microbe and the anode is key for the electricity generation in Microbial fuel cell(MFC).Through the modification of anode,the rate of electron transfer can be accelerated,therefore the performance of MFC can be enhanced.In this paper,we report the synthesis of a type of electronconducting and bio-compatible redox hydrogel and its application.The hydrogel consists of poly(4-vinylpyridine) as backbone and neutral red as the redox center.By immobiliazing neutral red on the backbone through covalent bond,the secondary contamination due to the soluble redox mediator to external environment can be prevented.MFCs using the hydrogel-modified carbon anode significantly exhibit shorter acclimation period,and …
Electrochemical Properties Of Ni(Oh)2 Doped By Nio, Fei-Biao Chen, Bo-Rong Wu, Wei-Feng An, Zhao-Jun Yang, Feng Wu, Shi Chen
Electrochemical Properties Of Ni(Oh)2 Doped By Nio, Fei-Biao Chen, Bo-Rong Wu, Wei-Feng An, Zhao-Jun Yang, Feng Wu, Shi Chen
Journal of Electrochemistry
The Ni(OH)2 cathode material of MH/Ni was doped by NiO,which behaves as a capacitor and can improve the charge-discharge rate capacity of Ni(OH)2.The electrochemical properties of Ni(OH)2 was characterized by charge-discharge curves and cyclic voltammetry.The results showed that the material had the best discharge property when doped by 5% NiO,and the discharge specific capacity could reach 310.1 mAh/g at 0.2 C rate and remianed 79.5% at 3 C rate.The difference oxidation and reduction potentials between the of the battery was 164 mV when the Ni(OH)2 was doped by 5% NiO,which showed a good cyclic property.
Studied Corrosion Behaviors Of Reinforcing Steel In Concrete By A Single-Dimensional Array Electrode, Lan-Qiang Li, Shi-Gang Dong, Rong-Gui Du, Chang-Jian Lin
Studied Corrosion Behaviors Of Reinforcing Steel In Concrete By A Single-Dimensional Array Electrode, Lan-Qiang Li, Shi-Gang Dong, Rong-Gui Du, Chang-Jian Lin
Journal of Electrochemistry
A single-dimensional array electrode was developed as a new electrochemical technique to image corrosion potential,galvanic current and polarization curves of reinforcing steel in concrete during corrosion process.Combining with the polarization behavior for each micro-electrode,the interactions between corrosion macrocell and corrosion microcell of the steel in concrete were evaluated.It was noticed that the corrosion macrocell and microcell occurred independently in difference regions at the initial stage of corrosion.The corrosion macrocell current can be in situ followed by corrosion potential imaging.The corrosion propagation of steel in concrete is closely related to the interactions between corrosion macrocell and corrosion microcell.
Electrosynthesis Of P-Aminobenzenearsenic Acid, Chun-An Ma, Qin-An Zheng, Qiang Zhou, Ying-Hua Xu
Electrosynthesis Of P-Aminobenzenearsenic Acid, Chun-An Ma, Qin-An Zheng, Qiang Zhou, Ying-Hua Xu
Journal of Electrochemistry
The electrochemical reduction of p-nitrophenyl arsonit acid to p-aminobenzenearsenic acid was studied using controlled-current electrolysis.The results showed that the yield of p-aminobenzenearsenic acid was determinated by the following factors:the concentrations of sulphuric acid,the amount of additive,temperature and the concentrations of p-nitrophenyl arsenic acid.The optimum electrolytic conditions were obtained to be is 10% H2SO4,1% NaCl,80 ℃,25 g/350 mL p-nitrophenyl arsenic acid and 10 A·dm-2.The yield of arsanilic acid could be reached 64.7% under the optimum electrolytic conditions.
Cobalt-Doped Todorokite Prepared By Refluxing At Atmospheric Pressure As Lithium-Ion Battery Cathode, Rui-Qi Li, Chun-Hua Song, Chao Xu, Li-Xing Tu, Guo-Hong Qiu, Fan Liu
Cobalt-Doped Todorokite Prepared By Refluxing At Atmospheric Pressure As Lithium-Ion Battery Cathode, Rui-Qi Li, Chun-Hua Song, Chao Xu, Li-Xing Tu, Guo-Hong Qiu, Fan Liu
Journal of Electrochemistry
Cobalt-doped todorokites were prepared by refluxing at atmospheric pressure,and then charactered by X-ray diffraction(XRD),thermogravimetry(TG) and the analysis of chemical compositions.These measurements showed that all of the refluxing products were single phase of todorokites and the structure formulas were MgxCoyMnOz·nH2O,where 0.18 ≤ x ≤ 0.22,0 ≤ y ≤ 0.24,2.10 ≤ z ≤ 2.53,and 0.35 ≤ n ≤0.73.The electrochemical characteristics of cobalt-doped todorokites were examined as lithium insertion hosts for cathodes in rechargeable lithium batteries.The first discharge capacity of undoped todorokite electrode was 211 mAh/g and the discharge capacity became 37 mAh/g after 30 …
Fabrication And Characterization Of The Ni-Scsz Composite Anodes With A Lscm-Ceo2 Catalyst Layer In Thin Film Sofc, Yun-Yun Wang, Bo Huang, Xin-Jian Zhu, Wan-Qi Hu, Qing-Chun Yu
Fabrication And Characterization Of The Ni-Scsz Composite Anodes With A Lscm-Ceo2 Catalyst Layer In Thin Film Sofc, Yun-Yun Wang, Bo Huang, Xin-Jian Zhu, Wan-Qi Hu, Qing-Chun Yu
Journal of Electrochemistry
Solid oxide full cell(SOFC) running directly on hydrocarbon fuels has attracted much attention in recent years. In this paper, a dual-layer structure anode was fabricated by tape casting and screen printing method. The addition of a LSCM-CeO2 catalyst layer to the supported anode surface yielded better performance in ethanol fuel. The maximum power density reached 710 and 669 mW/cm2 at 850 ℃ running on hydrogen gas steam and ethanol steam,respectively. No significant degradation in performance has been observed after 216 h of cell testing when the Ni-ScSZ13 anode was exposed to the ethanol steam at 700 ℃. Very …
Fast Block Matching Using Minkowski's Inequality, Jim Zong-Chang Lai, Yi-Ching Liaw, Shih-An Fong
Fast Block Matching Using Minkowski's Inequality, Jim Zong-Chang Lai, Yi-Ching Liaw, Shih-An Fong
Journal of Marine Science and Technology–Taiwan
In this paper, we present a fast block matching algorithm by making use of the Minkowski’s inequality. Combined with other fast block matching algorithms, our method can further reduce the computational complexity significantly with little PSNR degradation. Compared to the full search block matching algorithm, our approach can reduce the computing time by a factor of 6.4 to 21.5. Compared to MSEQ, which is a wellknown block matching algorithm preserving global optimality, our method can further reduce the corresponding computing time in average by 32.4%. The combination of our algorithm and the predictive search area approach for block motion estimation …
Melnikov Analysis Of A Ship's Stability With Water-On-Deck, Ying-Guang Wang
Melnikov Analysis Of A Ship's Stability With Water-On-Deck, Ying-Guang Wang
Journal of Marine Science and Technology–Taiwan
The nonlinear ship rolling motion with water-on-deck in regular beam waves is studied by utilizing a global geometric method. A ship stability criterion based upon the Melnikov function is obtained to provide an upper bound on the domain of the potential chaotic rolling motion. Phase plane diagrams and Poincare maps are used to validate the ship stability criterion obtained in this article.
A Delay-Dependent Approach To Robust Stability For Uncertain Stochastic Neural Networks With Time-Varying Delay, Chien-Yu Lu, Chin-Wen Liao, Koan-Yuh Chang, Wen-Jer Chang
A Delay-Dependent Approach To Robust Stability For Uncertain Stochastic Neural Networks With Time-Varying Delay, Chien-Yu Lu, Chin-Wen Liao, Koan-Yuh Chang, Wen-Jer Chang
Journal of Marine Science and Technology–Taiwan
This paper investigates the global delay-dependent robust stability in the mean square for uncertain stochastic neural networks with time-varying delay. The activation functions are assumed to be globally Lipschitz continuous. Based on a linear matrix inequality approach, globally delay-dependent robust stability criterion is derived by introducing some relaxation matrices which, when chosen properly, lead to a less conservative result. Two numerical examples are given to illustrate the effectiveness of the method.
Corner Effects In Deep Excavations-Establishment Of A Forecast Model For Taipei Basin T2 Zone, Chao-Hui Wu, Chang-Yu Ou, Ningchien Tung
Corner Effects In Deep Excavations-Establishment Of A Forecast Model For Taipei Basin T2 Zone, Chao-Hui Wu, Chang-Yu Ou, Ningchien Tung
Journal of Marine Science and Technology–Taiwan
This study attempts to establish a novel model for forecasting wall deformation and ground surface settlement of deep excavations. The model is developed by considering the corner effect and examining the data from relevant case histories. The study is specifically limited to the construction works in the T2 zone of the Taipei Basin. The following results were obtained: (1) The maximum wall deformation during each excavation step was approximately 0.2%-0.5% of the excavation depth, and was influenced by the corner effect. (2) The maximum ground surface settlement took place approximately at the center of the wall; and settlements at the …
Shape Optimization Of One-Chamber Mufflers With Reverse-Flow Ducts Using A Genetic Algorithm, Min-Chie Chiu
Shape Optimization Of One-Chamber Mufflers With Reverse-Flow Ducts Using A Genetic Algorithm, Min-Chie Chiu
Journal of Marine Science and Technology–Taiwan
Shape optimization on mufflers within a limited space is essential for industry where the equipment layout is occasionally tight and the available space for a muffler is limited for maintenance and operation purposes. To proficiently enhance the acoustical performance within a constrained space, the selection of an appropriate acoustical mechanism and optimizer becomes crucial. A one-chamber muffler hybridized with reverse-flow ducts which can visibly increase the acoustical performance is rarely addressed; therefore, the main purpose of this paper is to numerically analyze and maximize the acoustical performance of this muffler within a limited space. In this paper, the four-pole system …
Optimal Heating And Energy Management For Slabs In A Reheating Furnace, Wei-Hsin Chen, Mu-Rong Lin, Tzong-Shyng Leu
Optimal Heating And Energy Management For Slabs In A Reheating Furnace, Wei-Hsin Chen, Mu-Rong Lin, Tzong-Shyng Leu
Journal of Marine Science and Technology–Taiwan
Optimal heating for slabs in a reheating furnace is investigated numerically to aid in managing energy consumption of the reheating furnace in a hot strip mill, where an arctangent function is applied as the heating curve. Particular attention is paid to the relationship among the temperature uniformity, discharging target temperature and retention time of the slabs. The results indicate that the temperature difference between the slab surface and the core increases rapidly in the initial period and the maximum value of the temperature difference is close to the inflection point of the heating curve. After that, the internal temperature tends …
Estimation Model Of Transformer Iron Loss Using Neural Network, Tai-Ken Lu, Chien-Ta Yeh, Min-Doon Dirn
Estimation Model Of Transformer Iron Loss Using Neural Network, Tai-Ken Lu, Chien-Ta Yeh, Min-Doon Dirn
Journal of Marine Science and Technology–Taiwan
When we want to calculate the transformer iron loss in operation, in addition to considering the nonlinear hysteretic phenomenon of transformer itself and the natural unbalanced characteristic, the actual situation that the transformer is operated under three phase unbalance state should also be considered. This results in very non-regular change of the transformer iron loss, and the accuracy of the polynomial model that is commonly used to estimate the iron loss of the transformer in the past is thus reduced. Since neural network has parallel processing capability, which can process highly nonlinear function problem, hence, in this study, we try …
Closed-Form Solutions Of Large Deflection For A Guyed Cantilever Column Pulled By An Inclination Cable, Jong-Dar Yau
Closed-Form Solutions Of Large Deflection For A Guyed Cantilever Column Pulled By An Inclination Cable, Jong-Dar Yau
Journal of Marine Science and Technology–Taiwan
Geometric non-linearity becomes an issue of great concern that cannot be overlooked in the analysis of cable-supported structures since their material properties may be in an elastic range but they exhibit nonlinear behavior when loaded. This study intends to present an analytical approach for analyzing the large deflection behavior of a guyed column pulled by a pre-tensioned cable at different stages of installation. The column is assumed to be naturally straight and inextensible, and each cable is modeled as an equivalent tensile bar neglecting the sag effect due to self-weight. Based on an elliptic integral formulation, closed-form solutions are derived …
An Effective Method In Bem For Potential Problems Of Thin Bodies, Yao-Ming Zhang, Yan Gu
An Effective Method In Bem For Potential Problems Of Thin Bodies, Yao-Ming Zhang, Yan Gu
Journal of Marine Science and Technology–Taiwan
The study of the effective methods dealing with problems with thin domains is an important and a difficult issue in boundary element method (BEM). For the special structures of thin bodies, the singular and nearly singular integrals often occur simultaneously in boundary integral equations (BIEs). Therefore, the conventional boundary element method (CBEM) is invalid to obtain accurate results. This paper based on the indirect variable regularized BIEs of plane potential problems, and a nonlinear variable transformation is introduced in order to improve the rapid variations of nearly singular integrals. By doing these, the boundary singular and nearly singular integrals can …
Experimental Study Of Deformation Behavior And Fatigue Life Of Aisi 304 Stainless Steel Under An Asymmetric Cyclic Loading, Yung-Chuan Chiou
Experimental Study Of Deformation Behavior And Fatigue Life Of Aisi 304 Stainless Steel Under An Asymmetric Cyclic Loading, Yung-Chuan Chiou
Journal of Marine Science and Technology–Taiwan
In this study, the cyclic deformation behavior and fatigue life of AISI 304 stainless steel with or without mean strains were studied experimentally. In the case of fully reversal cyclic straining, it is found that there is no virtually difference between the cyclic stress response curves in tension and in compression at strain amplitude of higher than 0.30%. At the controlled strain amplitude of 0.25% and 0.30%, the two cyclic stress response curves are separated quite widely. The degree of asymmetry can be attributed to the anisotropic behavior of AISI 304 stainless steel. Further, the experimental results indicate that AISI …
Effect Of Commutation Failures On Torsional Vibrations Of A Turbine Generator Nearby An Hvdc Link, Chi-Hshiung Lin
Effect Of Commutation Failures On Torsional Vibrations Of A Turbine Generator Nearby An Hvdc Link, Chi-Hshiung Lin
Journal of Marine Science and Technology–Taiwan
For an HVDC system, it is studied the torsional vibrations induced on the inverter side turbine generators due to a rectifier side ac faults. It is found there may be up to several times difference in the torsional torques induced at the turbine shafts and blades for the same fault, depending on the inverter commutation behavior. Further, if a single-phase-to-ground fault takes place with the commutation failure, it might cause a more serious impact on the turbine generator unit than a threephase-to-ground fault without commutation failure.
Fabrication Of Fully Isolated Nfets Using Oxidized Porous Silicon, A Chadwick, K D. Hirschman
Fabrication Of Fully Isolated Nfets Using Oxidized Porous Silicon, A Chadwick, K D. Hirschman
Journal of the Microelectronic Engineering Conference
SOl (Silicon on Insulator) technology is an option in improving device performance as smaller devices run into scaling challenges. The devices for this study were fabricated using a FIPOS (Fully Isolated Porous Oxidized Silicon) process, which results in localized SOl active regions. The oxidation of electrochemically etched porous silicon (PSi) has demonstrated success in the formation of device quality localized S01 for CMOS applications 11,21. The formation of PSi can be done selectively by controlling the Fermi level in areas to be etched or not etched, which is typically done by adjusting the level of doping Ill. An alternative method …
The Optical Vortex Lens, Christopher Chao
The Optical Vortex Lens, Christopher Chao
Journal of the Microelectronic Engineering Conference
The project seeks to fabricate a vortex lens (phase shift device) using optical lithography with a future goal of using it for astronomy purposes. initially the goal is to create a lens tuned to a HeNe laser (632.8 nm wavelength) with eight photoresist steps, which causes the light to undergo a phase shift. It is this shift that allows the vortex lens to suppress starlight in the vicinity of extra solar planets; it diffracts the light of the star while preserving the image of the nearby planet.
Low Less Etchless Silicon Waveguides, Duk Hwang
Low Less Etchless Silicon Waveguides, Duk Hwang
Journal of the Microelectronic Engineering Conference
Fabrication of silicon waveguides without performing any silicon etching is demonstrated. The silicon waveguides are defined by the concept of “selective oxidation”. The experiment demonstrates that the waveguides formed by selective oxidation produce ultra-smooth sidewalls since etching of silicon is avoided. The Si etching usually creates damage from ion bombardment and chemical reactions that occur during plasma etching. The final waveguide also demonstrates very low light low based on optical testing which shows that no light scattering is observed. The final waveguide has a width of 1.5 μm and a height of ~80 nm. The GCA stepper is utilized …
Mobility Comparison Of Poly (3-Hexylthiophene) Based Organic Field Effect Transistors, Harry Zhiyuan Hu
Mobility Comparison Of Poly (3-Hexylthiophene) Based Organic Field Effect Transistors, Harry Zhiyuan Hu
Journal of the Microelectronic Engineering Conference
Poly (3-hexylthiophene)(P3HT) is the widely used in configuration of polymer solar cells. In order to correlate improvement in mobility with an improvement in power conversion efficiency of solar cell, organic field effect transistor (OFET) is investigated, which can easily extract mobility basing on I-V characteristic. Experiment shows that mobility of P3HT increase 290% after annealing. Also several experiments are done to diagnose larger deviation problem among chips to chips.
Cell Size Effects On Concentrator Solar Cell Performance, Z S. Bittner, M Harris, S Polly, C Bailey, S M. Hubbard
Cell Size Effects On Concentrator Solar Cell Performance, Z S. Bittner, M Harris, S Polly, C Bailey, S M. Hubbard
Journal of the Microelectronic Engineering Conference
The sun is an abundant power source that is clean and inexhaustible. Photovoltaic devices facilitate the collection of this energy The practice of using relatively inexpensive optics to concentrate light to reduce the amount of expensive semiconductor required has been a large driver in terrestrial application of concentrator photovoltaics (CPV). Solar cell design is critical in optimizing the device for CPV conditions. The goal of this project was to design and optimize GaAs solar cells of sizes ranging from 0.0125cm2 to 0.25cm2 for operation under a light concentration of 500 suns. The parameter of cell size was investigated …
All-Optical Gate: Silicon-On-Insulator Waveguide, Ring Resonator, And All-Optical Modulation, Robert Brown, Stefan Preble
All-Optical Gate: Silicon-On-Insulator Waveguide, Ring Resonator, And All-Optical Modulation, Robert Brown, Stefan Preble
Journal of the Microelectronic Engineering Conference
The outlook on Optical Interconnects replacing Metal Interconnects on ICs is promising. However some devices must be realized before implementing schemes of photonic circuits and systems. In this project we created a near-perfect silicon nanophotonics process at RIT. A ring resonator fabricated hear was shown to have a Quality-Factor of 10,000. We then demonstrated the ability of these resonant devices to act as a highfrequency optical switch.
Solid-Phase Crystallization And Implanted Dopant Activation In Pecvd A-Si:H Thin Films, Nathaniel R. Lozier
Solid-Phase Crystallization And Implanted Dopant Activation In Pecvd A-Si:H Thin Films, Nathaniel R. Lozier
Journal of the Microelectronic Engineering Conference
These instructions give you guidelines for preparing papers for IEEE TRANSACTIONS and JOURNALS. Use this document as a template if you are using Microsoft Word 6.0 or later. Otherwise, use this document as an instruction set. The electronic file of your paper will be formatted further at IEEE. Define all symbols used in the abstract. Do not cite references in the abstract. Do not delete the blank line immediately above the abstract; it sets the footnote at the bottom of this column.
Design And Fabrication Of Mems Multi-Sensor, Michael P. Brindak
Design And Fabrication Of Mems Multi-Sensor, Michael P. Brindak
Journal of the Microelectronic Engineering Conference
A single mask-set was designed and implemented into the RIT bulk MEMS process in order to create multiple piezoresistive MEMS sensors. These sensors included a IVIEMS accelerometer, pressure sensor and flow sensor. Sizes of 9mm2, 36mm2, 81 mm2 were included in the design.Using this integration, the difference between the sensors was the utilization of the piezoresistive properties of the thin diaphragm with polysilicon resistors by different packaging and off chip electronics. In the gas flow sensor the resistor lengths and resistances induced a voltage change by flow of a liquid over the diaphragm. In the …
Deep Submicron Iii-V On Si-Based Esaki Diode, K L. Johnson, S L. Rommel, M Barth, D Pawlik, P Thomas
Deep Submicron Iii-V On Si-Based Esaki Diode, K L. Johnson, S L. Rommel, M Barth, D Pawlik, P Thomas
Journal of the Microelectronic Engineering Conference
Esaki tunneling diodes are reemerging as a viable technology option in helping to improve speed and performance of many high speed device applications. The revival of this technology may be linked to the development of new substrates available to research that allows for the fabrication of a device comparable to current silicon technology. Using a 111-V on Silicon Substrate, it was demonstrated that it is possible to create working Esaki Tunneling Diodes.
Investigating The Coefficient Of Thermal Expansion Of Pecvd Teos Sio2 On Silicon, Justin Delmonte
Investigating The Coefficient Of Thermal Expansion Of Pecvd Teos Sio2 On Silicon, Justin Delmonte
Journal of the Microelectronic Engineering Conference
The goal of the experiment was to determine the coefficient of thermal expansion for PECVD TEOS on SiO2 on silicon using surface machined MEMS. Two different devices were used to investigate the property along with an available environmental chamber and an optical interferomeler. One device yielded no results and the other device needs tuning to yield more accurate results. The investigation as a whole proved that the methodology works should devices be obtained or fabricated that could measure what is necessary to calculate the coefficients accurately.