Electro-Mechanical Systems Commons^™

Shaped Mems Contact, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane

AFIT Patents

A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation …

Stability Analysis, Modeling, Simulation And Experimental Testing Of An Ems Maglev System With Structural Flexibility, Aravind M. Hanasoge

Mechanical & Aerospace Engineering Theses & Dissertations

Vehicle-guideway interaction studies of Magnetically Levitated (Maglev) vehicles indicate that structural flexibility can adversely affect the overall stability and performance of such systems. This is one of the reasons why guideways are generally made very rigid. This in turn leads to increased cost of the overall system since guideway construction forms a significant portion of the overall cost. In this dissertation, the influence of structural flexibility on the stability of Electromagnetic Suspension (EMS) Maglev systems is studied. It is shown how inherently unstable and flexible structure EMS Maglev systems can achieve guaranteed stability by using collocated actuators and sensors, along …

A Review Of Variable Valve Timing Devices, Paul Shelton

Mechanical Engineering Undergraduate Honors Theses

Variable valve timing (VVT) has evolved from simple, manual controlled engine management to automatic, electronic works of engineering. Starting from the need for more power and extending into fuel efficiency and low emissions, VVT has evolved from the constant changing of needs. This paper summarizes various devices used to control the timing of valves from the early 1920s up until 2007.

Development And Validation Of A Dynamic Model Of The Maglev Transportation System At Old Dominion University, Ajinkya V. Deodhar

Mechanical & Aerospace Engineering Theses & Dissertations

A dynamic model for the vehicle-guideway coupled with a controller is developed using dynamic modelling software, MADYMO. The fundamental characteristics of the vehicle are obtained from detailed FE analysis in NASTRAN. The vehicle is then converted into a 21-degree-of-freedom rigid body system with 12 FE magnets. A two span concrete guideway of 54 meters in length is modelled using 3D solid Hex8 elements. The air gap is modelled as a penetration of the magnets in the guideway. The PD controller aims at achieving constant penetration (i.e. the air gap) of all magnets in the guideway, throughout the simulation. This PD …

Electrically Steerable Diffraction Gratings For Hyperspectral Imaging: A Microelectromechanical System Design And Fabrication, Saban Atinc Delican

Theses and Dissertations

The current research is focused on the design and fabrication of an electrically programmable diffraction grating using standard micro electro mechanical systems (MEMS) technology. The goal is to design a beam steering element required to build very small hyperspectral imaging (HSI) sensors. The diffraction grating will be used to perform beam-dispersion - a critical step in the imaging process. The proposed transmissive diffraction grating based approach will minimize the overall size and the number of components in the physical design of the hyperspectral imagers, thereby enabling us to exploit the traditional advantages of MEMS such as increased reliability, smaller size, …

Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey

Faculty Publications

This paper provides a quantitative comparison and explores the design space of lead zirconium titanate (PZT)–only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance (R_X) and quality factor (Q) with the resonators’ silicon layer thickness (t_Si). For identical lateral dimensions and PZT-layer thicknesses (t_PZT), the PZT-on-silicon resonator has higher resonant frequency (f_C), higher Q (5100 versus 140), lower R_X (51 Ω versus 205 Ω), and better linearity [third-order input intercept …

Electroactive Polymers (Eap): Simulation Studies Of The Actuation Mechanisms In A Cantilever Cellulose Electroactive Paper, Fatim A. Mbaye

Electrical & Computer Engineering Theses & Dissertations

Electroactive polymers (EAPs) exhibit large strain in response to an external electric field and have attracted a great deal of attention in recent years for sensor and actuator applications. Favorable properties include soft actuation, ease and simplicity in manufacturing, being light-weight, low power consumption, and the ability to withstand harsh environments. However, this is an emerging material, and several aspects, including the fundamental mechanisms for piezoelectric deflections, remain unclear. This project studies the internal electromechanical factors that contribute to the voltage induced deflections of electro-active paper (EAPap). Experimental measurements of bias dependent deflections and water absorption as a function of …

Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy

AFIT Patents

A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results …

Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard

Theses and Dissertations

AFRL/MLPJE had developed a novel thermal sensing material termed protein-impregnated-polymer (PIP). Thus far, a proof-of-concept has been demonstrated using a macro-sized pixel (0.64 mm²) as a bolometric detector. In an effort to better characterize this novel thermal sensing material, experimental data was used to determine figures of merit (FOMs) comparative to off-the-shelf thermal detectors. Microelectromechanical (MEMS) pixels were designed and used as the support structure for an inkjet-deposited droplet of the PIP. During the material characterization, two observations were made: PIP is a pyroelectric material, and the polymer (polyvinyl alcohol (PVA)) without the protein was found to be …

Output Feedback Adaptive Variable Structure Control Of A Smart Projectile Fin, Smitha Mani, Sahjendra N. Singh, Woosoon Yim

Mechanical Engineering Faculty Research

No abstract provided.

Socio-Economic Impacts Of Computer Viruses In Tanzania, M Victor

Tanzania Journal of Engineering and Technology (TJET)

This paper reports on a research project conducted with an objective of identifying and assessing various approaches used by different computer users (Management, System Administrators and end users) in Tanzania to combat computer viruses (CVs), and to assess users' awareness level on CVs. Specifically, the study aimed at assessing the awareness level on CVs to the Tanzanian business community; analyze the socio -economic impact caused by CVs in Tanzania and; assess existing methods, capacity and limitations on controlling CVs in Tanzania. Data was collected using both questionnaires and interview from financial institutions such as NBC and BOT, and telecommunications sector …

Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda

Theses and Dissertations

The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property, the PIP is a potential material for use as an uncooled bolometer, or thermal sensor. In this research, a thermally-isolated pixel design, sensor characterization methods, and sensor fabrication and processing steps were developed. To create a microbolometer, the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to …

Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko

Theses and Dissertations

While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, high isolation, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This model was verified by applying constant biases to metal-silicon nitride-silicon capacitors and tracking …

Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson

Theses and Dissertations

MEMS IMUs are readily available in quantity and have extraordinary advantages over conventional IMUs in size, weight, cost, and power consumption. However, the poor performance of MEMS IMUs limits their use in more demanding military applications. It is desired to use multiple distributed MEMS IMUs to simulate the performance of a single, more costly IMU, using the theory behind Gyro-Free IMUs. A Gyro-Free IMU (GF-IMU) uses a configuration of accelerometers only to measure the three accelerations and three angular rotations of a rigid body in 3-D space. Theoretically, almost any configuration of six distributed accelerometers yields sufficient measurements to solve …

Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion

Theses and Dissertations

Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …

Indium Growth On Si(100)-2 X 1 By Femtosecond Pulsed Laser Deposition, M. A. Hafez, M. S. Hegazy, H. E. Elsayed-Ali

Electrical & Computer Engineering Faculty Publications

Indium was grown on Si (100) -2×1 at room temperature by femtosecond pulsed laser deposition. Reflection high-energy electron diffraction (RHEED) was performed in situ to study film morphology and in-plane lattice spacing. Indium was found to grow on Si (100) -2×1 by the Stranski-Krastanov mode. The initial two-dimensional In layer formed in the In-2×1 structure with a lattice constant of 3.65 Å. The full-width at half-maximum (FWHM) of the specular peak decreased during the growth, indicating an increase of the In islands size. Further In growth on the initial In-2×1 layer showed the formation of hexagonal, elongated, and hemispherical islands …

Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.

Theses and Dissertations

RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …

A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu

Theses and Dissertations

Micro-Electro-Mechanical Systems (MEMS) technology holds great promise for future navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices. Current MEMS devices are much less accurate than standard inertial sensors, but they can still be useful. In this thesis, data was recorded from an inexpensive MEMS inertial measurement unit and integrated with GPS measurements using a tightly-coupled Kalman filter. The overall goal of this research is to investigate the usefulness of MEMS sensors for a small, real-time, low-cost INS/GPS integration. A golf cart was used to collect dynamic data, along with a commercial …

Review Of The Product Development Process And Information Flow In The Manufacturing Industry: Problems And A Possible Wav Forward, E Opiyo

Tanzania Journal of Engineering and Technology (TJET)

No abstract provided.

Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh

Theses and Dissertations

Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission …

Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo

Theses and Dissertations

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …

Derivation Of An Expression That Defines The Pulling Forces In Relays With Small Operating Gaps, D. J. Chambega

Tanzania Journal of Engineering and Technology (TJET)

This paper derives an expression that defines magnitude of the pulling force developed in relays with small operating gaps, that is, when the length of the operating gap in between the yoke and the armature is small as compared to the area of the poles at the yoke. To obtain the expression, saturation of the core material is not considered. Results from the expression are then compared with those obtained experimentally. The comparison is found to deliver acceptable accuracy.

Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley

Theses and Dissertations

This thesis studies selective etching techniques for the development of Al_xGa_1-xAs micro-opto-electro-mechanical systems (MOEMS). New MEMS technology based on materials such as Al_xGa_1-xAs enables the development of micro-systems with embedded active micro-optical devices. Tunable micro-lasers and optical switching based on MOEMS technology will improve future wavelength division multiplexing (WDM) systems. WDM vastly increases the speed of military communications and sensor data processing. From my designs, structures are prepared by molecular beam epitaxy. I design a mask set for studies of crystal plane selectivity. I perform a series of experiments on the selective …

Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey

Theses and Dissertations

Tunable micro-optical devices are expected to be vital for future military optical communication systems. In this research I seek to optimize the design of a microelectromechanical (MEM) structure integrated with a III-V semiconductor micro-optical device. The resonant frequency of an integrated optical device, consisting of a Fabry-Perot etalon or vertical cavity surface emitting laser (VCSEL), may be tuned by applying an actuation voltage to the MEM Flexure, thereby altering the device's optical cavity length. From my analysis I demonstrate tunable devices compatible with conventional silicon 5V integrated circuit technology. My design for a Fabry-Perot etalon has a theoretical tuning range …

Application Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Arton Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Art, Silas Kajuna

Tanzania Journal of Engineering and Technology (TJET)

Vibration is one of the techniques employed in the determination of dynamic properties of fruits and vegetables. It entails generation of a mechanical or acoustic vibrational signal which is propagated through the flesh of the agricultural material. A transducer is either attached or held close to the specimen to monitor the propagation of the signal through the specimen. The manner in which the signal is transmitted through the material is analyzed, and the dynamic properties of the specimen which relate to its firmness or its internal being are derived. The technique has been around for the past 30 years or …

Sliding Mode Measurement Feedback Control For Antilock Braking Systems, Cem Unsal, Pushkin Kachroo

Electrical & Computer Engineering Faculty Research

We describe a nonlinear observer-based design for control of vehicle traction that is important in providing safety and obtaining desired longitudinal vehicle motion. First, a robust sliding mode controller is designed to maintain the wheel slip at any given value. Simulations show that longitudinal traction controller is capable of controlling the vehicle with parameter deviations and disturbances. The direct state feedback is then replaced with nonlinear observers to estimate the vehicle velocity from the output of the system (i.e., wheel velocity). The nonlinear model of the system is shown locally observable. The effects and drawbacks of the extended Kalman filters …

Micro Hydro Power, Frederick J. Munster

Maine Collection

Micro Hydro Power

by Frederick J. Munster

Department of Economic and Community Development, August, Me. 1999 (?).

Contents: Introduction / History of Hydropower in Maine / Renewables / Why Micro Hydro / Determining Flow / Determining Head / Estimating Energy Potential / Hydro Turbines / Dams, Impoundments, Penstocks and Power Houses / Utility Interconnected Systems / Battery Charging Systems / Operation and Maintenance / Economics / Regulation of Hydro Development / For More Information / References

Fuel Cells, Frederick J. Munster Jr.

Maine Collection

Fuel Cells

by Frederick J. Munster Jr.

Edited by: Mr. Christopher Carroll

Maine Department of Economic Development, Augusta, Maine, 1998.

Contents: Hydrogen / Hydrogen Safety / Electrolysis / Electrolyzers / History of Fuel Cells / How Fuel Cells Operate / Fuel Cell Types / Fuel Cell Electrochemistry / Power Systems / Fuel Cells in Transportation / Hydrogen Powered Internal Combustion Engines / Home, Garden, Education and Industry / For More Information / Glossary / References

Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.

Theses and Dissertations

Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle …

Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading

Theses and Dissertations

In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …