Mechanical Engineering Commons^™

Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli

Theses and Dissertations

Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm^-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …

Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion

Theses and Dissertations

Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …

Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An

Faculty Publications

The science and technology that are fundamental to the concept of composite materials are also the foundation for the construction and function of fuel cells and fuel cell systems. The present paper outlines this relationship in the context of the physics and chemistry that are enabled by the specific selection and arrangement of constituents of the “functional composite” fuel cell. General principles of operation are described, and fundamental issues are defined that must be addressed by the composites community if the fuel cell science and engineering is to advance. Examples of several types of functional composite fuel cells are presented, …

Indium Growth On Si(100)-2 X 1 By Femtosecond Pulsed Laser Deposition, M. A. Hafez, M. S. Hegazy, H. E. Elsayed-Ali

Electrical & Computer Engineering Faculty Publications

Indium was grown on Si (100) -2×1 at room temperature by femtosecond pulsed laser deposition. Reflection high-energy electron diffraction (RHEED) was performed in situ to study film morphology and in-plane lattice spacing. Indium was found to grow on Si (100) -2×1 by the Stranski-Krastanov mode. The initial two-dimensional In layer formed in the In-2×1 structure with a lattice constant of 3.65 Å. The full-width at half-maximum (FWHM) of the specular peak decreased during the growth, indicating an increase of the In islands size. Further In growth on the initial In-2×1 layer showed the formation of hexagonal, elongated, and hemispherical islands …

A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu

Theses and Dissertations

Micro-Electro-Mechanical Systems (MEMS) technology holds great promise for future navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices. Current MEMS devices are much less accurate than standard inertial sensors, but they can still be useful. In this thesis, data was recorded from an inexpensive MEMS inertial measurement unit and integrated with GPS measurements using a tightly-coupled Kalman filter. The overall goal of this research is to investigate the usefulness of MEMS sensors for a small, real-time, low-cost INS/GPS integration. A golf cart was used to collect dynamic data, along with a commercial …

Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.

Theses and Dissertations

RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …

Review Of The Product Development Process And Information Flow In The Manufacturing Industry: Problems And A Possible Wav Forward, E Opiyo

Tanzania Journal of Engineering and Technology (TJET)

No abstract provided.

Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo

Theses and Dissertations

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …

Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh

Theses and Dissertations

Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission …

Mechanical Computing In Microelectromechanical Systems (Mems), Kenneth C. Bradley

Theses and Dissertations

Mechanical computing devices in polysilicon-based microelectromechanical systems (MEMS) were designed with the goal of developing computing devices for harsh environments, such as those with high dose radiation and high temperatures, as well as devices that may be able to interface with molecular or biological computer systems. The devices that were designed include both analog and digital computing devices. The analog devices include integrators, differentials (summers), multipliers, and those that perform trigonometric functions. The digital devices that were designed are inverters, NAND, NOR, and XOR logic gates. Analog-to-digital (A-to-D) and digital-to-analog (D-to-A) converters were also designed. The designs were submitted to …

The Effects Of Ionizing Radiation On Microelectromechanical Systems (Mems) Actuators: Electrostatic, Electrothermal, And Residual Stress, Jared R. Caffey

Theses and Dissertations

The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.

Analytical And Fea Analysis Of Silicon Micro-Machined Capacitive Pressure Sensor, Eoghan O'Donoghue

Theses

This thesis is concerned with the electro-mechanical characterisation of MEMS capacitive pressure sensors and the determination of models to describe their behaviour.

The finite element software package ANSYS is validated as a tool for the examination of the electro-mechanical behaviour of capacitive pressure sensors. It is then used to incorporate the effects of applied load, voltage and residual stress into a model of the sensor structure. The capacitive pressure sensor is modelled both in 3D and also in 2D axis-symmetric modes. The error between the 2D and 3D models is quantified.

The behaviour of structures under electrostatic actuation is investigated. …

Derivation Of An Expression That Defines The Pulling Forces In Relays With Small Operating Gaps, D. J. Chambega

Tanzania Journal of Engineering and Technology (TJET)

This paper derives an expression that defines magnitude of the pulling force developed in relays with small operating gaps, that is, when the length of the operating gap in between the yoke and the armature is small as compared to the area of the poles at the yoke. To obtain the expression, saturation of the core material is not considered. Results from the expression are then compared with those obtained experimentally. The comparison is found to deliver acceptable accuracy.

Characterization Of Residual Stress In Microelectromechanical Systems (Mems) Devices Using Raman Spectroscopy, Lavern A. Starman

Theses and Dissertations

Due to the small scale of MEMS devices, the inherent residual stresses during the deposition processes can affect the functionality and reliability of the fabricated devices. Residual stress often causes device failure due to curling, buckling, or fracture. Currently, few techniques are available to measure the residual stress in MEMS devices. In this dissertation, Raman spectroscopy is used to measure and monitor the residual and induced stresses in MUMPs polysilicon MEMS devices. Raman spectroscopy was selected since it is nondestructive, fast, and provides potential in situ stress monitoring. Raman spectroscopy scans on unreleased and released MEMS fixed-fixed beams, cantilevers, and …

Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley

Theses and Dissertations

This thesis studies selective etching techniques for the development of Al_xGa_1-xAs micro-opto-electro-mechanical systems (MOEMS). New MEMS technology based on materials such as Al_xGa_1-xAs enables the development of micro-systems with embedded active micro-optical devices. Tunable micro-lasers and optical switching based on MOEMS technology will improve future wavelength division multiplexing (WDM) systems. WDM vastly increases the speed of military communications and sensor data processing. From my designs, structures are prepared by molecular beam epitaxy. I design a mask set for studies of crystal plane selectivity. I perform a series of experiments on the selective …

Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey

Theses and Dissertations

Tunable micro-optical devices are expected to be vital for future military optical communication systems. In this research I seek to optimize the design of a microelectromechanical (MEM) structure integrated with a III-V semiconductor micro-optical device. The resonant frequency of an integrated optical device, consisting of a Fabry-Perot etalon or vertical cavity surface emitting laser (VCSEL), may be tuned by applying an actuation voltage to the MEM Flexure, thereby altering the device's optical cavity length. From my analysis I demonstrate tunable devices compatible with conventional silicon 5V integrated circuit technology. My design for a Fabry-Perot etalon has a theoretical tuning range …

Hide Glue Applicator, Chris Campo, Benjamin Carrasco, Elias Saliba

Mechanical Engineering

This study investigates the challenges inherent in applying hide glue in the crafting of violin and other stringed instruments. Hide glue, derived from animal collagen and protein, is essential for creating durable bonds that allow for necessary adjustments during fabrication. However, its meticulous heating and maintenance requirements pose logistical obstacles for luthiers lacking viable alternatives. To tackle this issue comprehensively, our project comprises several key components.

Initially, we conducted an in-depth analysis of the hide glue application process, delineating procedural steps and techniques to establish our design criteria and constraints. This foundational understanding formed the basis for further exploration. Additionally, …

Control And Characterization Of Line-Addressable Micromirror Arrays, Harris J. Hall

Theses and Dissertations

This research involved the design and implementation of a complete line-addressable control system for a 32x32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N² to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bi-stability of individual elements to bold arbitrary bi-stable phase patterns. The control system applies pulse width modulated (PWM) signals to the rows and columns of the micromirror array. Three modes of operation were conceived and built into the system. The first was the traditional signal scheme which requires …

Mechatronics Education At Kettering University: Development Of Learning- Specific Hardware And Software, Jeffrey Hargrove, Theodore J. Stokes

Mechanical Engineering Presentations And Conference Materials

A series of learning-specific electronic circuit boards and associated software has been developed to support mechatronics education in the Mechanical Engineering Department at Kettering University. The boards are designed to interface to the Toshiba TLCS-900H Microprocessor Trainer and Evaluation Board. The purpose of these boards is to provide mechanical engineering students of mechatronics with robust hardware that readily permits interfacing of sensors and actuators to microcontrollers used in mechatronic applications. Further, the boards feature signal conditioning circuits for use in conjunction with sensors, and driver circuits for operating high-current actuating devices. Supporting software has been written to permit ready use …

The Air Force Institute Of Technology (Afit) Micro Electro-Mechanical Systems (Mems) Interferometric Gyroscope (Mig), Jeremy P. Stringer

Theses and Dissertations

With the invention of Micro Electro-Mechanical Systems (MEMS) it has become possible to fabricate micro-inertial sensors. These new sensors have application in creating autonomous guided weapons systems. New technologies like Micro Unmanned Aerial Vehicles (UAVs), which cannot use conventional inertial sensors, rely on technologies like micro-inertial sensors to operate. Also, such sensors have the capability to reduce both power and space consumption on conventional aircraft. This technology is not yet mature, and current micro-inertial sensors do not have the accuracy required for highly precise navigation. To try to increase the accuracy of micro-inertial sensors, researchers are turning toward micro-optical gyroscopes. …

Electroanalysis Using Differential Pulse Methods And Stripping Techniques., Enda Howard

Masters

Application of a differential pulse waveform to a microelectrode or a rotating disk electrode results in a peaked response for amperometric redox reactions. Based on these observations models were proposed and tested for these methods. Simulations of the models were carried out by inputting the relevant equations into Microsoft Excel. The microelectrode study revealed a good correlation between one model and the numerical derivative of the current following a linear sweep potential waveform. Experimentally the derivative can be obtained numerically following a linear sweep. The alternative differential pulse waveform requires more sophisticated equipment and the response can be affected by …

Application Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Arton Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Art, Silas Kajuna

Tanzania Journal of Engineering and Technology (TJET)

Vibration is one of the techniques employed in the determination of dynamic properties of fruits and vegetables. It entails generation of a mechanical or acoustic vibrational signal which is propagated through the flesh of the agricultural material. A transducer is either attached or held close to the specimen to monitor the propagation of the signal through the specimen. The manner in which the signal is transmitted through the material is analyzed, and the dynamic properties of the specimen which relate to its firmness or its internal being are derived. The technique has been around for the past 30 years or …

Sliding Mode Measurement Feedback Control For Antilock Braking Systems, Cem Unsal, Pushkin Kachroo

Electrical & Computer Engineering Faculty Research

We describe a nonlinear observer-based design for control of vehicle traction that is important in providing safety and obtaining desired longitudinal vehicle motion. First, a robust sliding mode controller is designed to maintain the wheel slip at any given value. Simulations show that longitudinal traction controller is capable of controlling the vehicle with parameter deviations and disturbances. The direct state feedback is then replaced with nonlinear observers to estimate the vehicle velocity from the output of the system (i.e., wheel velocity). The nonlinear model of the system is shown locally observable. The effects and drawbacks of the extended Kalman filters …

Micro Hydro Power, Frederick J. Munster

Maine Collection

Micro Hydro Power

by Frederick J. Munster

Department of Economic and Community Development, August, Me. 1999 (?).

Contents: Introduction / History of Hydropower in Maine / Renewables / Why Micro Hydro / Determining Flow / Determining Head / Estimating Energy Potential / Hydro Turbines / Dams, Impoundments, Penstocks and Power Houses / Utility Interconnected Systems / Battery Charging Systems / Operation and Maintenance / Economics / Regulation of Hydro Development / For More Information / References

Electro-Mechanical Fatigue Behavior Of A Quasi-Isotropic Laminate With An Embedded Piezoelectric Actuator, Tse Lin Hsu

Theses and Dissertations

This study primarily investigated the electro-mechanical fatigue behavior of the embedded piezoelectric actuators in graphite/epoxy laminate with a lay-up of 0 | ± 45 | 90s. A secondary focus was the investigation of the mechanical fatigue effects of the 0 | 0 | ± 45 | 0 | 0 | 90s laminate with embedded PZT under tensile loading. All the fatigue tests were conducted with a triangular loading waveform which had a frequency of 10 Hz and with R=0. 1. In the electro-mechanical testing, the embedded actuator was excited by a -10 V to -100 V or a 10 V …

Kiln Design And Fuel Wood Consumption In Fish Smoking, E Mushi

Tanzania Journal of Engineering and Technology (TJET)

In this paper. a load flow solution for the Medium Voltage (MY) three-phase radial distribution in delta-delta (A — A) connected network supplying different line topologies such as three phase, phase to phase and single-wire earth return (SWER) networks is presented. The general voltage related network equations are developed using Kirchhoff's voltage and current laws. Development ofa solution to the loadflow analysis applying the developed general voltage related network equations is proposed in order to evaluate the network voltage profile. Various numbers of arrays are developed for the identification of the network under study. The proposed method is a new …

Fuel Cells, Frederick J. Munster Jr.

Maine Collection

Fuel Cells

by Frederick J. Munster Jr.

Edited by: Mr. Christopher Carroll

Maine Department of Economic Development, Augusta, Maine, 1998.

Contents: Hydrogen / Hydrogen Safety / Electrolysis / Electrolyzers / History of Fuel Cells / How Fuel Cells Operate / Fuel Cell Types / Fuel Cell Electrochemistry / Power Systems / Fuel Cells in Transportation / Hydrogen Powered Internal Combustion Engines / Home, Garden, Education and Industry / For More Information / Glossary / References

Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.

Theses and Dissertations

Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle …

Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading

Theses and Dissertations

In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …

Microelectromechanical Optical Beam Steering Systems, David M. Burns

Theses and Dissertations

The development of microelectromechanical systems (MEMS) has matured to the point where the fabrication of micron sized devices is feasible. State of the art MEMS construction processes now support the fabrication of novel optical devices that could not previously be built. This dissertation reports on the development of innovative micro optical devices such as Variable Blaze Gratings (VBGs) using state of the art MEMS construction processes. The principle application of the micro optical devices described in this dissertation is steering optical beams; however other applications such as spectral analysis are identified. Specific optical beam steering systems developed and characterized in …