Engineering Commons^™

Mgf2/Ta2o5 Anti Reflective Coating Multilayers For Amo Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

No abstract provided.

Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

No abstract provided.

Mgf2/Ta2o5 Anti Reflective Coating For 3rd Generation Solar Cells, Dylan J. Mafrici

Journal of the Microelectronic Engineering Conference

A bi-layer anti reflection coating (ARC) composed of MgF2-Ta2O5 was designed using a rigorous mathematical approach and was experimentally tested on a commercial grade solar cell as a proof of concept that the coating can be applied to multi-junction solar cells. A reactive sputter process was used to sputter tantalum oxide and a thermal evaporation process was used for depositing magnesium chloride. The thickness values of each film were measured via profilometry, elipsometry, and reflectometry techniques. Elipsometry was also used to determine the film material’s respective index of refraction. Diffuse field reflectance measurements of each film were made using an …

Giant Magneto-Impedance Effect In Multilayer Thin Film Sensors, Sean H. Heinze

Journal of the Microelectronic Engineering Conference

No abstract provided.

Giant Magneto-Impedance Effect In Multilayer Thin Film Sensors, Sean H. Heinze

Journal of the Microelectronic Engineering Conference

Over the last couple of decades, the Giant Magneto-Impedance (GMI) effect has become a well-known phenomenon, especially for its use in magnetic field sensing applications. Discussed in this paper will be a comprehensive summary of the fundamental theory behind the GMI effect, as well as the design, fabrication, and test of multilayer thin film GMI sensors. In recent research, multilayer GMI sensors have been shown to obtain GMI sensitives ranging from 10 – 100 times more than that of currently in industry Giant Magnetoresistance (GMR) sensors, comparable to that of its bulk microwire counterpart. To investigate this, a tri-layer film …

Giant Magneto-Impedance Effect In Multilayer Thin Film Sensors, Sean H. Heinze

Journal of the Microelectronic Engineering Conference

No abstract provided.

Investigation Of Ald Dielectrics In Silicon Capacitors, Enri Marini

Journal of the Microelectronic Engineering Conference

No abstract provided.

Investigation Of Ald Dielectrics In Silicon Capacitors, Enri Marini

Journal of the Microelectronic Engineering Conference

The goal of this analysis is to scale aluminum oxide films deposited by ALD for use in transistor fabrication with silicon and silicon-germanium substrates and the two metals offer varying work functions for gate control on the transistor level. MOS capacitors were fabricated on six-inch silicon substrates consisting of aluminum-oxide (Al2O3) as the dielectric and aluminum as the gate metal. The Al2O3 was deposited using atomic layer deposition (ALD) with thicknesses of 15nm and 20nm, while the aluminum gate metal was DC sputter deposited containing thickness of approximately 1200 A° . Capacitance values were measured in order to back-calculate the …

Encapsulation For Igzo Thin Film Transistors, Julia Okvath

Journal of the Microelectronic Engineering Conference

No abstract provided.

Encapsulation Of Indium-Gallium-Zinc Oxide Thin Film Transistors, Julia Okvath

Journal of the Microelectronic Engineering Conference

No abstract provided.

Capping Of Indium-Gallium-Zinc Oxide Thin-Film Transistors Using Ald Materials, Julia Okvath

Journal of the Microelectronic Engineering Conference

Indium-gallium-zinc oxide (IGZO) thin-film transis-tors (TFTs) used in LCD display technologies exhibit significant instability when exposed to thermal stress above 100◦C. Bottom-gate TFTs subjected to prolonged heat treatment at 140◦C experience a voltage shift of 2 V over 120 minutes. Double-gate TFTs experience an even more pronounced shift of 7 V over 120 minutes. This instability is believed to be associated with water molecules incorporated in the PECVD TEOS SiO2 passivation layer, with an enhanced response in the double-gate device due to the liberation of monatomic hydrogen from the reaction of water with the top-gate metal. This research investigates the …

Process Development Of Sidewall Spacer Features For Sub-300nm Dense Silicon Finfets, Salwan Omar

Journal of the Microelectronic Engineering Conference

No abstract provided.

Process Development Of Sidewall Spacer Features For Sub-300nm Dense Silicon Finfets, Salwan Omar

Journal of the Microelectronic Engineering Conference

An investigation of the ASML PAS5500 5X reduction i-line stepper and RIE systems capabilities of defining sub-300nm nitride sidewall spacers to create dense 200nm silicon FinFETs on a 400nm pitch has been experimentally undertaken in the SMFL at RIT. The work presented in this project involves photoresist over-exposure through annular illumination with NA equal to 0.6, sigma inner equal to 0.535, and sigma outer equal 0.9 to narrow down the critical dimensions of the photoresist features in the 200nm range. Diluted OiR620 photoresist with PGMEA 1:1 ratio is used to obtain a thin coating of 5.5nm film thickness. A thin …

Process Development Of Sidewall Spacer Features For Sub-300nm Dense Silicon Finfets, Salwan Omar

Journal of the Microelectronic Engineering Conference

No abstract provided.

Electrostatically Actuated Mems Resonator, Daniel J.H. Shyer

Journal of the Microelectronic Engineering Conference

No abstract provided.

Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer

Journal of the Microelectronic Engineering Conference

No abstract provided.

Mems Electrostatically Actuated Resonator, Daniel J.H. Shyer

Journal of the Microelectronic Engineering Conference

A MEMS electrostatically actuated resonator with fixed-fixed and fixed-free cantilever beams is designed, simulated, fabricated, and tested. The fabrication of the MEMS resonators uses RIT’s MEMS fabrication 2016 process flow which is a surface micromachining process. The released fixed-free devices tested showed an increasing change in capacitance with an increasing actuation voltage. Inspection of the released fixed-fixed devices has a compressive stress in the second polysilicon film that causes the cantilever beam to bend above the actuation and sensing pads. Testing for resonance has not been successful. Some new considerations for the MEMS fabrication process and design are discussed.

Investigation Of Mim Structures As Selector Devices For Crossbar Memory Arrays, Peter Vowell

Journal of the Microelectronic Engineering Conference

No abstract provided.

Investigation Of Mim Structures As Selector Devices For Crossbar Memory Arrays, Peter Vowell

Journal of the Microelectronic Engineering Conference

No abstract provided.

Investigation Of Mim Structures As Selector Devices For Crossbar Memory Arrays, Peter Vowell

Journal of the Microelectronic Engineering Conference

As memory continues to scale further and densities continue to increase, leakage current becomes a non-trivial concern. A selector device limits the leakage current from memory elements so that the current passing through a selected device significantly exceeds the residual leakage. An MIM device can be used in conjunction with a memory element to invoke non-linear I-V characteristics. A Ni/TiO2/Ni film stack was chosen for three main reasons: a large non-linearity factor, high on/off current ratio, and bipolar switching capabilities. An on/off ratio of six orders of magnitude was observed, and current densities on the order of 10kA/cm2 were realized …

Tie Layer Technology For Multilayer Coextrusion Of Single-Use Biopharma Bags, Barry A. Morris

Single-use Technologies II: Bridging Polymer Science to Biotechnology Applications

The needs of the demanding biopharma processing bag, such as barrier, toughness and heat sealability, cannot be met by any one polymer. As a result, multiple layers of different polymers, each playing its role in meeting the design requirements, are combined in coextrusion or lamination. Most of the polymers used in these layers do not naturally adhere to each other in the film making or lamination process without tie layers. Tie layers are polymer resins designed to provide adhesion between specific polymers in a given film manufacturing process. In coextrusion, the polymer layers are brought together in the melt state. …

Influence Of Γ-Irradiated Biopharmaceutical Films, Samuel Dorey, Fanny Gaston, Magali Barbaroux,, Nathalie Dupuy, Sylvain R.A. Marque

Single-use Technologies II: Bridging Polymer Science to Biotechnology Applications

Preventing cross-contamination, saving costs and increasing configuration flexibility make the adoption of single-use technologies very attractive for the biopharmaceutical industry. The integrity and the security of bags are due to appropriate flexible and barrier polymeric materials, such as polyethylene (PE) or ethylene vinyl acetate (EVA) and polyethylene-co-vinyl alcohol (EVOH), which are barrier to water vapor and oxygen, respectively. Conventional stainless steel tanks are sterilized by steam sterilization by the end-users, whereas plastic containers are sterilized by gamma-irradiation before delivery. The major advantage of radio-sterilization is the penetration power of the γ-radiation. It is known that γ -sterilization of polyolefin based …

The Journey Of A Polymer Producer To Support Customers E&L Needs, Jerome Vachon

Single-use Technologies II: Bridging Polymer Science to Biotechnology Applications

In the view of SABIC’s ambitions to grow in the Healthcare applications market, a clear understanding of customers’ challenges and problems with respect to Extractables and Leachables is crucial. In addition to ensuring high quality products and compliance with standard regulations, material suppliers must also have a deep knowledge of their product chemistries for specific healthcare applications. Responding to our customers’ needs when performing their own material toxicological assessment, SABIC has continued to develop and share deeper insights into E&L. A growing involvement of SABIC to develop a true E&L knowledge base, from Research to Marketing, has thus been taking …

Triggering The Solar Revolution, Justin Halversen, John Salmon

Journal of Undergraduate Research

The sun’s energy emissions are significantly higher than other alternative energy sources. All other energy sources combined would not provide even one percent of the potential collectible energy from the sun. The amount of potential solar power available is well over 5000 times the current world consumption. Indeed, there is a very large and renewable reservoir of untapped potential solar energy which could be made more directly available to more people.

Stem Summer Camp For K-6 Students At Uvu, Bonnie Andersen, Cyrill Slezak

Utah Space Grant Consortium

UVU offers an excellent academic summer program in the fields of Science, Engineering, Technology, and Mathematics (STEM) specifically designed to engage and further students having completed grades 1-6. Program courses have been developed in close collaboration with experienced STEM endorsed Elementary school teachers and established university research faculty aligned with state curriculum standards. Engaging students within a community of motivated students and enthusiastic faculty in hands-on projects will develop critical thinking, content knowledge, and problem-solving skills.

Bipyrimidine Signatures As A Photoprotective Genome Strategy In G+C-Rich Halophilic Archaea, Daniel L. Jones, Bonnie K. Baxter

Utah Space Grant Consortium

Halophilic Archaea

• Experience high levels of ultraviolet (UV) radiation in their environments

• Demonstrate high resistance to UV • Are protected by pigmentation and efficient DNA repair

• Have high genomic G+C content

Halophiles And Biogeography, Bex Kemp, Adam Wolford, Bonnie Baxter

Utah Space Grant Consortium

Halophilic Archaea

•Halophilic archaea dominate the Earth’s many hypersaline environments such as Great Salt Lake (GSL)

• They are multi-extremophiles, tolerating not only salinity, but also desiccation and high levels of UV irradiation

• Halorubrum is a genus of Halophilic archaea with wide distribution around the Earth

• The distribution of Halorubum across space and time begs the question of the mechanism behind the biogeography.

Analysis Of Oxygen-Conserving Delivery Methods, Jason King, Lara Brewer, Soren Hoehne, Joseph Orr

Utah Space Grant Consortium

•Oxygen therapy is needed to help treat patients with a variety of medical conditions.

•Oxygen conservation methods can be used to deliver oxygen only during beginning of inspiration.

•This can provide the same medical benefits as constant oxygen delivery while using less oxygen and reducing costs.

•These conserving methods include intermittent flow devices and reservoir cannulas.

•Our goal was to optimize a pulse flow and reservoir cannula device for use in children age 5 years and under.

Utah State University Design, Build, Fly 2016-17, Matthew Nelson, Spencer Wendell

Utah Space Grant Consortium

Competition Requirements

•Folding Design

• Entire design must fold and stow in a tube.

• Four Missions

• Ground Test –The whole system, in stowed condition, must survive a drop onto concrete.

• Demonstration Flight –Short flight to verify capabilities.

• Speed Mission –Complete 3 laps with a payload of 3 pucks as fast as possible.

• Endurance Mission –Fly as many laps as possible in 5 minutes with 3 or more pucks.

Using Heart Rate Waveform Patterns And Frequency To Detect Postoperative Airway Obstruction, Anh Pham, Lara Brewer

Utah Space Grant Consortium

Hypoventilation has a high risk of happening during the first 24 hours after the initiation of opioids (drugs used for treating pain) in postoperative patients.

Current techniques to detect airway obstruction either have high false positive rate, delay indicator or ineffective cost.

Our solution is to build a reliable respiratory depression monitoring technique integrated from pulse oximeter waveform pattern signal and its frequency.