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Articles 25951 - 25980 of 27331
Full-Text Articles in Engineering
A Study On The Electrodeposition Of Palladium And It's Nucleation, Fangzu Yang, Shukai Xu, Shibing Yao, Bingyi Chen, Xueqing Zheng, Xiaohui Zhong, Shaomin Zhou
A Study On The Electrodeposition Of Palladium And It's Nucleation, Fangzu Yang, Shukai Xu, Shibing Yao, Bingyi Chen, Xueqing Zheng, Xiaohui Zhong, Shaomin Zhou
Journal of Electrochemistry
The electrodeposition and nucleation of palladium are studied in the system of potassium citrate and ammonium oxalate. The results show that, with the additives of XP-4 and XP-7 prepared in our laboratory, a full bright palladium electrodeposits will be obtained in the wide ranges of the cathode current densities 0.5~3.5 A/dm2 and temperature 40~60 ℃; the qualities of the thick deposits will be effectively improved by means of pulse current plating. Cyclic voltammograms results show that the division of peaks between anodic and cathodic on the electrode process of palladium will be up to 1.05 V, which shows the …
The Decision To Reactivate A First-Generation Soviet Nuclear Power Plant: Conceptual And Decision-Analytic Frameworks, John M. Gleason
The Decision To Reactivate A First-Generation Soviet Nuclear Power Plant: Conceptual And Decision-Analytic Frameworks, John M. Gleason
RISK: Health, Safety & Environment (1990-2002)
Explores a variety of factors that led to reopening the Armenian Metsamor facility notwithstanding general agreement that this is unwarranted technologically.
Laser Profilometry Of Polymeric Materials, Eduard A. Kulik, Patrick Calahan
Laser Profilometry Of Polymeric Materials, Eduard A. Kulik, Patrick Calahan
Cells and Materials
Unlike the mechanical stylus profilometer, the laser profilometer does not damage the surface of soft materials. However, the accuracy of autofocusing of the laser profilometer is not always sensitive enough to discriminate the material/air interface from subsurface structures of semitransparent polymers. In the present study over ten polymeric surfaces were gold coated in order to investigate the effect of gold coating on the readings of a laser profilometer. Surface profiles of some polymeric materials became much smoother even if a very thing gold coating was applied to increase the reflection from the surface. It was concluded that a thin gold …
Image Analysis Of Primary Bone-Derived Cells On Different Polystyrene Surfaces, R. M. Shelton, G. Landini
Image Analysis Of Primary Bone-Derived Cells On Different Polystyrene Surfaces, R. M. Shelton, G. Landini
Cells and Materials
The aim of the present study was to examine whether two different cell populations could be discerned using image analysis of a variety of morphological parameters on bacteriological and tissue culture polystyrene surfaces. Rat periosteal and osteoblast cultures were established on both polystyrene petri dishes and examined using phase contrast microscopy after one and two weeks before capturing digital images which were stored on a personal computer. The digital images were processed to identify the cell margins or perimeter, from which seven different morphological parameters were calculated using a program developed (by GL) for both the cell populations on the …
Corrosion Of Metal Hip Arthroplasties And Its Possible Role In Loosening, H. K. Koerten, J. J. A. M. Van Raay, J. J. M. Onderwater, F. P. Bernoski, P. M. Rozing
Corrosion Of Metal Hip Arthroplasties And Its Possible Role In Loosening, H. K. Koerten, J. J. A. M. Van Raay, J. J. M. Onderwater, F. P. Bernoski, P. M. Rozing
Cells and Materials
Tissue removed with human hip arthroplasties during revision surgery of 45 patients was evaluated by transmission electron microscopy and X -ray microanalysis (XRMA). The results show that microscopic and submicroscopic particles are abundantly present in the tissue at the tissue/implant interface. XRMA of individual particles shows that the chemical composition of a portion of the particles was in agreement with that of the retrieved implants. Regularly, particulates with a dissimilar chemical composition were found. Sometimes, these particles could be recognized as filler particles of the cements used. Other particles could partly or completely be composed of the chemical elements that …
Macrophage Response To Polymethylmethacrylate Particles, Stephen M. Horowtiz
Macrophage Response To Polymethylmethacrylate Particles, Stephen M. Horowtiz
Cells and Materials
This paper reviews studies performed by this laboratory involving the macrophage response to implant particles. Through the development of a tissue culture model, we have studied the events which occur following macrophage phagocytosis of bone cement particles, the released mediators and cell interactions which may ultimately lead to bone resorption, and the inhibition of this process with the use of pharmaceutical agents. This is divided into the following sections: Histologic response of macrophages to cement particles I toxicity I and mediator release, the effects of particle size and composition on mediator release by macrophages, macrophage I osteoblast interactions, macrophage I …
Pinched Diodes, Quynh Nguyen
Pinched Diodes, Quynh Nguyen
Journal of the Microelectronic Engineering Conference
While applications for diodes operating under forward bias have been researched extensively, the useful application in reverse bias mode is relatively unexplored. Resistance modulation in avalanche mode offers new possibility for utilization. The purpose of this experiment is to characterize a diode utilizing a differential negative resistance (DNR) scheme showing a decrease in current with an increase in voltage.
The Iris Project: Ccd's, Image Recognition, And All That Jazz, Abram M. Detofsky
The Iris Project: Ccd's, Image Recognition, And All That Jazz, Abram M. Detofsky
Journal of the Microelectronic Engineering Conference
The Identity Recognition and Imaging System (IRIS) Project was initiated to explore the fabrication and integration of a CCD imaging array into a complete image recognition system. Such a system has now been realized in part, and consists of an surfacechannel 64-by-64 pixel CCD array, external driver circuitry, data acquisition board, and a Win95-based PC running a custom pattern recognition software package called TALONir.
Bf2 Implanted Stacked A-Silicon Gate Capacitors, David Sanchez
Bf2 Implanted Stacked A-Silicon Gate Capacitors, David Sanchez
Journal of the Microelectronic Engineering Conference
BF2 implanted stacked z-silicon (SAS) electrode capacitors were fabricated on n-type silicon substrates. The purpose of this electrode scheme was to quantify the effectiveness of stacked films in suppressing boron penetration into the dielectric and substrate. A 150A thick silicon dioxide was used as the capacitor dielectric. The top α-silicon electrode was deposited in a three step process using low pressure chemical vapor deposition (LPCVD). A controlled sample was fabricated using LPCVD polysilicon (Poly) as the top electrode. The samples were tested for dielectric degradation using voltage ramping techniques. The breakdown field was recorded for 2 different size capacitor …
Fabrication Of Twin-Well Cmos, Linh V. Phan
Fabrication Of Twin-Well Cmos, Linh V. Phan
Journal of the Microelectronic Engineering Conference
A single-mask self aligned Twin-well process has been integrated into RIT’s CMOS technology. These wells are self aligned to increase package density. The process has been simulated using TMA Suprem IV simulation tool. The simulated parameters were used in the actual fabrication. The wells are used to optimize both n- and p-channel active devices. The subthreshold leakage currents in isolated pmos and nmos devices are -1.28 pA.4/μn and 3.56 nA/μm of channel width, respectively when the devices were biased at < 5 volts. In addition, the twinwell process has produced active n- and p-channel FET’s with excellent characteristics such as low threshold voltage, low subthreshold swing, and high transconductance.
Design Of Experiments Using Tma Workbench, James Daniels
Design Of Experiments Using Tma Workbench, James Daniels
Journal of the Microelectronic Engineering Conference
TMA WorkBench software is used to interface with Suprem4 process simulator and Medici electrical test software in order to set up, run and analyze Design of Experiments for process simulation. A method for simulation tuning was found, and an example experiment was run and analyzed. Comparison to a fabricated experiment was planned in order to provide feedback for simulation tuning and to verify a simulated approach to process experimenting. Least squares analysis was used to find response function coefficients, as well as to plot factor-response contour maps.
Integrated Electronics For Micro-Electromechanical Devices, Michael J. Frachel
Integrated Electronics For Micro-Electromechanical Devices, Michael J. Frachel
Journal of the Microelectronic Engineering Conference
With the increased usage of microelectromechanical devices (MEMs) today, the use and design of systems to control and monitor such devices has become increasingly important. In interests of simplifying packaging and increasing yield, the possibility of putting such control and monitoring systems on chip with the micro-electromechanical machines is suggested as an elegant solution. Simplified scaling of the micro-electromechanical machine/circuit system as one can also be a benefit of this integrated process. This project integrates a basic n+ poly gate PMOS process with the additional steps necessary to create simple suspended polysilicon beam micromachines. These beams can be used as …
The Fabrication Of Corrugated Silicon Surfaces, Alicia N. Bineyard
The Fabrication Of Corrugated Silicon Surfaces, Alicia N. Bineyard
Journal of the Microelectronic Engineering Conference
Corrugation of silicon surfaces is desired for a variety of applications requiring availability of increased surface area and modification of optical properties of thin films. Such surfaces also prevent refractive trapping in luminescent films and can provide lambertian emissive surfaces. The objective of this research is to fabricate these corrugated silicon surfaces using a specially customized mask consisting of four different design patterns. The goal is to prove that the smallest design pattern will provide the best characteristics for enhancing the light emission of luminescent films. The surface morphology, etching process and the luminescent properties of the etched samples have …
Thin Gate Oxides Over Nitrogen Implanted Silicon, Luis J. Lopez
Thin Gate Oxides Over Nitrogen Implanted Silicon, Luis J. Lopez
Journal of the Microelectronic Engineering Conference
Here we study the effects of implanting nitrogen (N’) into the substr e prior to thermal oxidation. We found that for implant doses higher than 1x1014 /cm2 the oxidation rate is reduced between 10% and 75%. Also, the oxide thickness uniformity across the substrates was found to be degraded after the implantation, even though better uniformity was expected. Oxide characterization will be performed to compare the implanted areas to bare Si regions. The reported benefits of incorporating nitrogen into Si make this an interesting study for future generations of gate oxides.
Test Patterns For Chemical Mechanical Polish Characterization, Stanley J. Dobek
Test Patterns For Chemical Mechanical Polish Characterization, Stanley J. Dobek
Journal of the Microelectronic Engineering Conference
I studied the effect of wafer topography on the chemical mechanical polishing (CMP) process. This was done by first designing test structures. A mask set of these structures was then designed and fabricated. Wafers were patterned with the test mask and then were polished. The result was that a pattern dependency was seen on the wafers. The polishing process was effected by the surface topography.
Development Of Process Monitoring Monitoring Strategies For Contamination Control Utilizing A Surface Charge Analyzer, Raj Chakraborty
Development Of Process Monitoring Monitoring Strategies For Contamination Control Utilizing A Surface Charge Analyzer, Raj Chakraborty
Journal of the Microelectronic Engineering Conference
The study done was to develop strategies that utilize the measurement and analytical capabilities of a Semitest Surface Charge Analyzer (SCA 2000) and monitor contamination caused during certain processes and in furnaces in an IC fab. A significant drop in average minority carrier lifetime and an increase in fixed oxide charge was observed. Counterdoping was also observed in one of the furnaces.
Soi Via Wafer Bonding, Bart U. Meshelle
Soi Via Wafer Bonding, Bart U. Meshelle
Journal of the Microelectronic Engineering Conference
An attempt is made at the preparation of silicon-on-insulator (SOl) substrates suitable for device fabrication. This is done by the high temperature bonding of a pair of silicon wafers upon which oxide layers have been thermally grown. One of the pair is then ground back to a suitable thickness. Bonding strength and defects are also evaluated.
Investigation Of Buried Channel Pmos, Chuan-Hsing Chen
Investigation Of Buried Channel Pmos, Chuan-Hsing Chen
Journal of the Microelectronic Engineering Conference
The objective of this project is to investigate the electrical characteristics of Buried Channel PMOS for twin-well CMOS process. Project involves the investigation of the P-MOSFET by varying the standard boron (B11) threshold adjust implant dose. In addition, the effect of adding a phosphorus (P31) counter doping implant on the device characteristics is also investigated. The addition of counter doping implant will reduce the thickness of the buried channel created by the threshold adjust implant. Test results for the counter doped twin-well process shows stronger transistor turn-off and lower off-state leakage current without significantly affecting the on-state current drive.
Dc Reactive Sputtering Of Transparent Conducting Indium Tin Oxide, Dan Fullerton
Dc Reactive Sputtering Of Transparent Conducting Indium Tin Oxide, Dan Fullerton
Journal of the Microelectronic Engineering Conference
A DC reactive sputtering process for thin transparent conducting films of indium tin oxide was developed at RIT for a variety of uses. Thin films were sputtered in a CVC-601 batch sputterer from a 200mm indium-tin target in an argon/oxygen ambient onto 3-inch silicon wafers and 2x3-inch glass slides. An experiment utilizing a central composite design with variables of oxygen flow, argon flow, and DC power was performed. As-sputtered films exhibited characteristics of either high resistivity and high transmittance due to an abundance of oxygen in the film, or low resistivity and low transmittance due to an oxygen deficiency in …
The Design Of An Inorganic Barc, Andrew Veter
The Design Of An Inorganic Barc, Andrew Veter
Journal of the Microelectronic Engineering Conference
A methodology was arrived at for the design of an inorganic bottom antireflective coating (BARC). The design methodology consisted of four parts. First, a material compatible with IC processing was chosen. Second, simulation was performed to determine the optimum optical properties of the material, where the materials extinction coefficient, and film thickness were varied to produce zero substrate reflectivity. Third, the stochiometry of the material was varied through experimentation to produce a film with the index of refraction and extinction coefficient as close as possible to the simulation results. Fourth, the results of step three were used in simulation to …
Implementation And Electrical Characterization Of Shallow Trench Isolation, John A. Castellana
Implementation And Electrical Characterization Of Shallow Trench Isolation, John A. Castellana
Journal of the Microelectronic Engineering Conference
Shallow trench isolation (STI) planarized with chemical mechanical polishing (CMP) has replaced LOCOS as the conventional isolation technique for sub-micron devices 171. The implementation and feasibility of STI has been examined for future device fabrication at RIT. STI test structures have been fabricated to investigate leakage currents between adjacent NMOS transistors in a p-substrate. Trenches were dry etched to a target depth of 2 μm to isolate n+ regions with a junction depth of 0.89 μm. Trench Refill was done with LTO planarized by chemical mechanical polishing (CMP). By testing source/drain n+ regions isolated by two trenches, leakage …
Super Resolution Techniques For Duv Optical Lithography, Dayo Pinkney
Super Resolution Techniques For Duv Optical Lithography, Dayo Pinkney
Journal of the Microelectronic Engineering Conference
As device geometries shrink, new illumination sources will be needed to obtain practical resolution. The krypton fluoride (KrF) excimer laser (248nm) is capable of 0.30 μm resolution with conventional illumination methods. A weak quadrupole off-axis illumination technique combines the advantages of two-beam imaging (off-axis illumination), and three-beam imaging (conventional illumination). This allows for the advantage of increased Depth-of-Focus (DOF) without the degradation of isolated patterns. This method is suitable for use with an attenuated phase shift mask (APSM) which also enhances resolution and DOF.
Design And Characterization Of An Optical Proximity Correction (Opc) Mask, Sumir Varma
Design And Characterization Of An Optical Proximity Correction (Opc) Mask, Sumir Varma
Journal of the Microelectronic Engineering Conference
A normal binary chrome mask is designed with optical proximity correction features to test their effect on the lithographic image formed. A significant image improvement is seen due to the addition of the OPC features.
Resist Performance Using Spectroscopic Ellipsometry, Michael Y. Chan
Resist Performance Using Spectroscopic Ellipsometry, Michael Y. Chan
Journal of the Microelectronic Engineering Conference
The technique of spectroscopic ellipsometry was employed to study the effects of residual solvents in chemically amplified photoresists on the dissolution characteristics and optical constants of the spin-cast film. Ellipsometric measurements were made for resist films with no bake, with soft bakes, and with both soft bakes and post-exposure bakes, at various baking temperatures. Exposures of these films were performed using a KrF excimer laser (248 nm) with a beam splitter lens element to increase the exposure area. To increase the accuracy of the experimental data, measurements were made at three different angles over a sampling wavelength range of 200 …
Twin-Well Cmos Integration, Kenneth A. Gendron
Twin-Well Cmos Integration, Kenneth A. Gendron
Journal of the Microelectronic Engineering Conference
A self-aligned twin-well process has been developed for RIT’s Student CMOS Factory. These wells are self-aligned providing increased packing density; which, will allow for increased speed and reduction in defectively levels. In addition the twin-well process offers: decreased Early effect, increased punchthrough voltage and, reduced latch-up susceptibility, for those devices normally manufactured in substrate. Standard RIT Student Factory CMOS implements a p-well process. Four micron by 32 micron p-channel devices were tested to determine process performance. Early voltage was increased from 9.4V for p-well, to 38.8V for twin-well CMOS. Punchthrough voltage was increased in magnitude from 8V for p-well to …
Biological Response To Particulate Debris: In Vitro And In Vivo Studies, A. S. Shanbhag, J. E. Dowd, J. J. Jacobs, D. M. Tramaglini, T. T. Glant, J. Black, H. E. Rubash
Biological Response To Particulate Debris: In Vitro And In Vivo Studies, A. S. Shanbhag, J. E. Dowd, J. J. Jacobs, D. M. Tramaglini, T. T. Glant, J. Black, H. E. Rubash
Cells and Materials
In this study, we compared the results of a human monocyte in vitro model and a canine in vivo model, to evaluate the response to different types of particulate wear debris. Both the in vitro and in vivo studies demonstrated that titanium-6 aluminum-4 vanadium (TiAIV), ultrahigh molecular weight polyethylene (UHMWPE) and other particulate wear debris are stimulatory to macrophages and elicit release of several identifiable mediators involved in periprosthetic inflammation and bone resorption. Further, in the in vivo studies, these same particles initiated the formation of interfacial membranes which were histologically and biochemically similar to those seen in clinically failed …
Sintered Carbonate Apatites As Bone Substitutes, Yutaka Doi
Sintered Carbonate Apatites As Bone Substitutes, Yutaka Doi
Cells and Materials
Sintering of carbonate apatites was investigated and the usefulness of sintered specimens as bone substitutes was evaluated in vitro and in vivo. Osteoclasts appeared to be capable of resorbing sintered carbonate apatite, which was as soluble as deproteinated bone and much more soluble than sintered hydroxyapatite in weak acids. In skull defects of Wistar rats, sintered carbonate apatite particles resorbed to an appreciable extent, but the rate of resorption did not exceed that of new bone formation. At 4 weeks after implantation the defects were filled almost completely with new bone that compared favorably with the host bone. These …
Detachment Of Human Endothelial Cells Under Flow From Wettability Gradient Surfaces With Different Functional Groups, T. G. Ruardy, H. E. Moorlag, J. M. Schakenraad, H. C. Van Der Mei, H. J. Busscher
Detachment Of Human Endothelial Cells Under Flow From Wettability Gradient Surfaces With Different Functional Groups, T. G. Ruardy, H. E. Moorlag, J. M. Schakenraad, H. C. Van Der Mei, H. J. Busscher
Cells and Materials
In this study, the position bound adhesion, spreading and detachment under flow of human umbilical cord endothelial cells (HUVEC) was studied on a dichlorodimethylsilane (DDS), dimethylocta-decylchlorosilane (DOCS) and tridecafluor-1,1,2,2-tetrahydrooctyl-1-dimethylchlorosilane (TFCS) wettability gradient on glass. Gradient surfaces were prepared by the diffusion method and characterized by the Wilhelmy plate technique for their wettability and by X-ray photoelectron spectroscopy (XPS) for their chemical composition. Quantitative analysis of the cellular response on the wettability gradient surfaces showed that the position bound cellular response was influenced by wettability for each type of gradient in a different way. On DDS-wettability gradients, cells withstood flow best …