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Articles 24871 - 24900 of 27367

Full-Text Articles in Engineering

Capacitance-Voltage Analysis Of High-? Dielectric On Strained Silicon, Mike Latham Jan 2004

Capacitance-Voltage Analysis Of High-? Dielectric On Strained Silicon, Mike Latham

Journal of the Microelectronic Engineering Conference

Device characteristics are reported on Hf02 gate dielectrics deposited by atomic layer deposition (ALD), and jet vapor deposition (JVD) on strained-Si and bulk Si samples. Capacitance-Voltage (CV) analysis of samples shows comparable interface charge levels between strained-Si and bulk Si samples. A flat band shift of -0.5V was noted between the strained-Si and bulk Si for the JVD samples.

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Work Function Engineering With Molybdenum And Molybdenum-Nitride Gate Pmos, Valarie Welsh Jan 2004

Work Function Engineering With Molybdenum And Molybdenum-Nitride Gate Pmos, Valarie Welsh

Journal of the Microelectronic Engineering Conference

The motivation for the creation of PIT metal gate PMOS process transistors was to investigate and prove the work function of molybdenum can be changed through reactive sputtering and thermal processing. The existing PIT metal gate PMOS process was adapted to form Molybdenum and Molybdenum-Nitride PMOS transistors. Processing of the molybdenum films affected the final composition of the gate electrode and ultimately its work function. Through theoretical and real analysis, the work functions of Mo and MoN gates were extracted and compared with one another as well as to Al. Examination of the extracted work functions revealed the presence of …

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Phosphoric Acid As A High-Index Immersion Fluid, Karen R. Wolf Jan 2004

Phosphoric Acid As A High-Index Immersion Fluid, Karen R. Wolf

Journal of the Microelectronic Engineering Conference

A study has been performed to determine the viability of phosphoric acid as a high-index fluid for immersion lithography. The ability to image in the immersion fluid, and the compatibility of the fluid with photoresist were examined. Samples were soaked in the fluid before and after exposure in water to demonstrate no significant damage to the imaging capability of the resist. The refractive index of photoresist samples soaked in various immersion fluids was measured with a variable angle spectroscopic ellipsometer (VASE), and results did not show a significant variation from photoresist that was not soaked. Sixty-eight nanometer lines were imaged …

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Quadrupole Illumination Design For A 193nm Hyper-Na Exitech Immersion Stepper, Derek J. Summers Jan 2004

Quadrupole Illumination Design For A 193nm Hyper-Na Exitech Immersion Stepper, Derek J. Summers

Journal of the Microelectronic Engineering Conference

As device sizes reduce in size and processes become more complex, enhancement techniques for optical lithography are essential. Several ways to enhance the current lithographic systems include immersion lithography, phaseshifting masks, optical proximity correction and OAT (off-axis illumination). Depending on the process, these RETs (resolution enhancement techniques) may be used individually or in combination to compensate for image degradation caused by optical diffraction and resist behavior. The purpose of this project is to design and test a quadrupole off-axis illumination aperture for the 193 nm Immersion stepper at RIT. Process window simulations, using Prolith, were used to determine theoretical effectiveness …

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Development Of A Full Silicidation (Fusi) Process For Nickel Silicide, Yaser A. Alshehri Jan 2004

Development Of A Full Silicidation (Fusi) Process For Nickel Silicide, Yaser A. Alshehri

Journal of the Microelectronic Engineering Conference

Suicides have been long used to solve the problem of poly depletion effects in the CMOS circuits. The depletion layer in the poly-gates increases the total effective gate-dielectric thickness causing a poor device performance. Many advantages are promised in replacing the Polysilicon gates with metal gates, which include improved sheet resistance of the gates, decreased equivalent electrical thickness of gate dielectric by eliminating the Polysilicon gate depletion effect, and dual work functions, higher than n+ poly work function for NMOS and lower than p+ poly for PMOS in a single full Silicidation (FUSI) of Polysilicon gates. In the ever reducing …

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Implementation Of Backside Vias As An Alternative To Wafer Thinning, Michael E. Hathorn Jan 2004

Implementation Of Backside Vias As An Alternative To Wafer Thinning, Michael E. Hathorn

Journal of the Microelectronic Engineering Conference

A study has been performed to determine the viability of Potassium hydroxide (KOH) as a wet etchant to create backside vias to devices previously manufactured on thinned wafers. In order to protect frontside devices in the back end of line process, the KOH must not come in contact with the front of the wafer. A number of methods have been investigated with the advantage being in the use of a coat of black wax. This paper will present results obtained from tests with black wax as well as provide insight to the advantages and disadvantages of other protection options.

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Face-To-Face Die Bonding And Direct Interconnects, Jeffrey A. Steinfeldt Jan 2004

Face-To-Face Die Bonding And Direct Interconnects, Jeffrey A. Steinfeldt

Journal of the Microelectronic Engineering Conference

In this investigation and process development project, a novel method for directly connecting two computer chips together, both electrically and physically was developed. This process utilized several processes and materials that are already used in semiconductor manufacturing and packaging. By using these common materials and processes, it simplifies the implementation of the process, and removes several potential roadblocks. It was found that two chips could successfully be bonded together physically and connected electrically.

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Silica Waveguide Design And Fabrication Using Integrated Optics: A Link To Optical Vlsi Photonics Integration For Semiconductor Technology, Anthony G. Navarro Jan 2004

Silica Waveguide Design And Fabrication Using Integrated Optics: A Link To Optical Vlsi Photonics Integration For Semiconductor Technology, Anthony G. Navarro

Journal of the Microelectronic Engineering Conference

The hardmask NiCr, has shown to be the optimum alloy in reducing sidewall roughness (SWR) in planar waveguide geometries. Within this study, the NiCr hardmask has been demonstrated using a lift-off of NiCr. In comparison, a NiCr etchant from TranseneT~t is used to compare how well sidewall roughness is reduced, and how the RIE - CHF3/O2 gas mixture improved anisotropy. From the results obtained, NiCr is a robust material that reduces sidewall roughness, and is the best metal to use, with the least amount of transferred striations. The CHF3/CF4 gas mixture in the AME …

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Investigation And Development Of Air Bridges, Jay Cabacungan Jan 2004

Investigation And Development Of Air Bridges, Jay Cabacungan

Journal of the Microelectronic Engineering Conference

A study was done in order to develop a fabrication process for creating air bridges at RIT’s Semiconductor and Microsystems Fabrication Laboratory (SMFL). Process development looked at three key factors (i) a robust lithography process that would produce the necessary rounded profile for fabricating air bridges (ii) sputter deposition vs. evaporation as metal deposition techniques (iii) the strength of the structures by testing the maximum distance an air bridge could span, the minimum and maximum thickness the structure could support, and the dimensions of the support posts. Several samples were fabricated testing the three different factors studied and SEM micrographs …

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Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley Jan 2004

Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley

Journal of the Microelectronic Engineering Conference

A simple, MEMS base micro-chemical detector utilizing the principles of gas ionization, has been designed and fabricated. The device contains a polysilicon micro air-bridge heater structure with integrated polysilicon electrodes. The design of the devices allows it not only functions via thermionic emission, but also via chemi-ionization if a proper Pt catalyst is applied and it is operated in an environment containing hydrogen. When properly biased the device has been shown to heat to high temperatures where thermionic emission can begin to occur. Hydrocarbon chemicals in the gas phase have shown to ionize, via thermionic ionization and have been collected, …

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Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang Jan 2004

Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang

Journal of the Microelectronic Engineering Conference

A surface micromachined MEMS gas flow sensor has been fabricated and tested. The fabrication process of the device was presented. The heater glowed red hot when a voltage of 27V was applied if the underlying LTO was completely etched away. Both the upstream and downstream resistors changed when temperature changed. A proof of concept showing that output voltage changes with gas flow was shown.

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Fabrication Of Polysilicon Micro Valve Array, Jermaine White Jan 2004

Fabrication Of Polysilicon Micro Valve Array, Jermaine White

Journal of the Microelectronic Engineering Conference

Valves are an essential part of pumping systems, which are used in a wide variety of applications including medical, automotive, gas sampling, and gas analysis. The objective of this investigation is to design and fabricate microvalve arrays. The valve consists of a polysilicon flap suspended over a through hole in the silicon. It is intended to allow airflow in one direction and inhibit airflow in the reverse direction. The design requires only three mask levels, two on the front of the wafer and one on the backside. The front side masks are level: 1 Anchor and level 2: Flap. The …

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Study Of Silicon Solar Cell Array To Power Mems Cantilever Actuator, Benjamin Kolodzie Jan 2004

Study Of Silicon Solar Cell Array To Power Mems Cantilever Actuator, Benjamin Kolodzie

Journal of the Microelectronic Engineering Conference

A solar cell array to power a on board microelectromechanical polysilicon cantilever actuator was designed, fabricated and tested. The device composes of two solar cell arrays one array with 330 solar cells and another array with 300 solar cells. The device also consists of several cantilevers. The fabrication process involved over fifty process steps including nine photolithography levels. To optimize the performance of the solar cell array the entire process was simulated using SILVACO SUPREM simulation software. Electrical examination using ATLAS software allowed for parameter extraction of the computer-generated solar cells. Modeling the extracted parameters with device physics equations allowed …

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Fabrication Of A Magnetically Actuated Torsional Beam, Gary A. Fino Jan 2004

Fabrication Of A Magnetically Actuated Torsional Beam, Gary A. Fino

Journal of the Microelectronic Engineering Conference

A mesoscopic magnetic beam contained in a silicon frame attached to the bulk of a silicon wafer with pivoting hinges will be used to show the affects of magnetic fields on movable magnetic structures. The pivoting hinges will be etched out of silicon using a Deep Reactive Ion Etcher (DRIE) system and the dimensions of the hinges will determine the force required to deflect the beam. Below each end of the beam will be large copper inductor coils fabricated on a separate wafer. When a current is applied to the coil, the magnetic field generated will attract the beam towards …

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Mem's Optical Pyrometer, Edward Camacho Jan 2004

Mem's Optical Pyrometer, Edward Camacho

Journal of the Microelectronic Engineering Conference

Measuring temperature accurately has been and still is a topic of interest in various professional fields such as Astronomy, Biology, Physics and Medicine. An optical pyrometer has great potential in these fields, because it can optically capture a body’s black body radiation and determine a temperature value of the body in question. This technology is well known, yet it is still gaining grounds as new uses are found. In this project a temperature sensor using Mentor Graphics was design, second a four level mask was made into one reticle. Third fabrication of the optical sensor took place using typical process …

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Microfluidic Channels In Polymethyl-Methacrylate By Optimizing Aluminum Adhesion, George W. Woodruff Iii Jan 2004

Microfluidic Channels In Polymethyl-Methacrylate By Optimizing Aluminum Adhesion, George W. Woodruff Iii

Journal of the Microelectronic Engineering Conference

A study has been performed to determine the optimum surface treatment to adhere an aluminum hard mask to a polymethyl-methacrylate (PMMA) wafer substrate for the production of microfluidic channels. The initial process parameters of the PMMA reactive ion surface treatment included oxygen plasma, sulfur hexafluoride plasma and argon plasma designs of experiments. However, a soak in tetra methyl ammonium hydroxide (TMAH) proved to provide the most adhereable surface for an aluminum deposition. It is hypothesized that the TMAH soak allowed for the removal of the surface layer of the PMMA wafer substrate. The aluminum hard mask was deposited by evaporation …

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Parameter Extraction Software For Silicon Carbide Schottky, Merged Pin Schottky And Pin Power Diode Models, Edgar Cilio Jan 2004

Parameter Extraction Software For Silicon Carbide Schottky, Merged Pin Schottky And Pin Power Diode Models, Edgar Cilio

Inquiry: The University of Arkansas Undergraduate Research Journal

A software program for on-state parameter extraction is presented for the realization of a high quality model for SiC Schottky, Merged PiN Schottky, and PiN Power diodes based on McNutt and Mantooth's Comprehensive SiC Diode model [ 1 ].

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The Values Of Being Small And Nimble, Joshua Shuart, Peter Christian ("Chris") Murphy Jan 2004

The Values Of Being Small And Nimble, Joshua Shuart, Peter Christian ("Chris") Murphy

New England Journal of Entrepreneurship


Peter Christian (Chris) Murphy had worked his way up the “food chain” at AT&T for 19 years, culminating in his position as Sales Center Vice President for South Florida. When he and a coworker realized there was an opportunity in the marketplace for a small, nimble company to take advantage of emerging communications technology that a stodgy, lumbering corporation would have trouble integrating into its service package, Chris decided to jump into an entrepreneurial opportunity.

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Ole Miss Engineer 2004 Jan 2004

Ole Miss Engineer 2004

Ole Miss Engineer

No abstract provided.

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A Comparative Evaluation Of .Net Remoting And Java Rmi, Taneem Ibrahim Jan 2004

A Comparative Evaluation Of .Net Remoting And Java Rmi, Taneem Ibrahim

Inquiry: The University of Arkansas Undergraduate Research Journal

Distributed application technologies such as Micrososoft.NET Remoting, and Java Remote Method Invocation (RMI) have evolved over many years to keep up with the constantly increasing requirements of the enterprise. In the broadest sense, a distributed application is one in which the application processing is divided among two or more machines. Distributed middleware technologies have made significant progress over the last decade. Although Remoting and RMI are the two of most popular contemporary middleware technologies, little literature exists that compares them. In this paper, we study the issues involved in designing a distributed system using Java RMI and Microsoft.NET Remoting. In …

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Fee -Based Online Services : Exploring Consumers’ Willingness To Pay, L. Richard Ye, Yue Zhang, Dat-Dao Nguyen, James Chiu Jan 2004

Fee -Based Online Services : Exploring Consumers’ Willingness To Pay, L. Richard Ye, Yue Zhang, Dat-Dao Nguyen, James Chiu

Journal of International Technology and Information Management

Many online service businesses are beginning to charge fees for services that they used to provide for free. It is unclear whether consumers are ready to embrace this practice. This study explores consumer attitudes toward fee-based online services. The results of the study indicate that consumers’ willingness to pay for online services is likely to be influenced by their perceived value of convenience these services provide, and by the extent to which they utilize these services. While consumers appear more willing to pay for services that are qualitatively better than free services, there is also indication that the belief remains …

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Information Systems Service Quality Measurement: The Evolution Of The Servqual Instrument, Dwayne Whitten Jan 2004

Information Systems Service Quality Measurement: The Evolution Of The Servqual Instrument, Dwayne Whitten

Journal of International Technology and Information Management

Due to the increasing service component of information technology, service quality measurement has become increasingly important as IS practitioners attempt to increase service quality to customers. The measurement of service quality in IS evolved from the research done in the marketing literature. The SERVQUAL instrument has evolved to become the most commonly used measurement instrument in both IS and marketing. Although commonly used, the SERVQUAL instrument is not without criticism. This paper describes the SERVQUAL instrument, its criticisms and support, and finally the SERVPERF instrument, a variation of the SERVQUAL instrument which is an attempt at improving upon the SERVQUAL …

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Empirical Evidence Of Diminishing Payoff From Successive Generations Of Information Systems, Gerald E. Evans, Neil Morton Jan 2004

Empirical Evidence Of Diminishing Payoff From Successive Generations Of Information Systems, Gerald E. Evans, Neil Morton

Journal of International Technology and Information Management

Previous research has focused on a number of important variables that can influence the observed payoffs from information systems investments. In the current investigation conducted in the spring of 2002, personal, on-site interviews were conducted in 138 small and medium sized businesses. Vendor involvement in systems development was less related to systems cost than previously. Unfortunately, vendor involvement was unrelated to any of the four measures of systems success in the entire sample. Further analysis revealed a strong relationship between information system generation and payoffs. Specifically, there appeared to be a point of diminishing return with subsequent generations of information …

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Online Reverse Auctions: An Overview, Ching-Chung Kuo, Pamela Rogers, Richard E. White Jan 2004

Online Reverse Auctions: An Overview, Ching-Chung Kuo, Pamela Rogers, Richard E. White

Journal of International Technology and Information Management

Electronic commerce (e-commerce) is the fastest growing area in the U.S. economy with electronic procurement (e-procurement) being a major component, and online reverse auctions (ORAs) have emerged as a key e-procurement tool. Since the mid-1990s, ORAs have been gaining in popularity because of their potentially significant positive impact on the profitability of both the buyers and the sellers. Much has been written about the new purchasing paradigm and numerous stories have been reported recently. This paper is aimed at providing a critical review of ORAs by examining their historical developments, different forms, advantages, and disadvantages. In addition, 10 important factors …

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Neural Analysis Of Top Shielded Multilayered Coplanar Waveguides, Mustafa Türkmen, Celal Yildiz, Şeref Sağiroğlu Jan 2004

Neural Analysis Of Top Shielded Multilayered Coplanar Waveguides, Mustafa Türkmen, Celal Yildiz, Şeref Sağiroğlu

Turkish Journal of Electrical Engineering and Computer Sciences

Artificial neural networks (ANNs) have been promising tools for many applications. In recent years, a computer-aided design approach based on (ANNs) has been introduced to microwave modelling, simulation and optimization. In this work, the characteristic parameters of top shielded multilayered coplanar waveguides (CPWs) have been determined with the use of ANN models. These neural models were trained with Levenberg-Marquardt, resilient propagation, Bayesian regulation, quasi-Newton, and backpropagation learning algorithms. Better performance and learning speed with a simpler structure were achieved from these models. The results have shown that the estimated characteristic parameters are in very good agreement with the computed results …

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Mining Classification Rules By Using Genetic Algorithms With Non-Random Initial Population And Uniform Operator, Korkut Koray Gündoğan, Bi̇lal Alataş, Ali̇ Karci Jan 2004

Mining Classification Rules By Using Genetic Algorithms With Non-Random Initial Population And Uniform Operator, Korkut Koray Gündoğan, Bi̇lal Alataş, Ali̇ Karci

Turkish Journal of Electrical Engineering and Computer Sciences

Classification is a supervised learning method that induces a classification model from a database and is one of the most commonly applied data mining task. The frequently employed techniques are decision tree or neural network-based classification algorithms. This work presents an efficient genetic algorithm (GA) for classification rule mining technique that discovers comprehensible IF-THEN rules using a generalized uniform population method and a uniform operator inspired from the uniform population method. Initial population is generated by methodically eliminating the randomness by generalized uniform population method. In the subsequence generations, genetic diversity is ensured and premature convergence is prevented by the …

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A Simple And Global Optimization Algorithm For Engineering Problems: Differential Evolution Algorithm, Dervi̇ş Karaboğa, Selçuk Ökdem Jan 2004

A Simple And Global Optimization Algorithm For Engineering Problems: Differential Evolution Algorithm, Dervi̇ş Karaboğa, Selçuk Ökdem

Turkish Journal of Electrical Engineering and Computer Sciences

Differential Evolution (DE) algorithm is a new heuristic approach mainly having three advantages; finding the true global minimum regardless of the initial parameter values, fast convergence, and using few control parameters. DE algorithm is a population based algorithm like genetic algorithms using similar operators; crossover, mutation and selection. In this work, we have compared the performance of DE algorithm to that of some other well known versions of genetic algorithms: PGA, Grefensstette, Eshelman. In simulation studies, De Jong's test functions have been used. From the simulation results, it was observed that the convergence speed of DE is significantly better than …

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The 7 C'S For Creating Living Software: A Research Perspective For Quality-Oriented Software Engineering, Mehmet Akşi̇t Jan 2004

The 7 C'S For Creating Living Software: A Research Perspective For Quality-Oriented Software Engineering, Mehmet Akşi̇t

Turkish Journal of Electrical Engineering and Computer Sciences

This article proposes the 7 C's for realizing quality-oriented software engineering practices. All the desired qualities of this approach are expressed in short by the term living software. The 7 C's are: Concern-oriented processes, Canonical models, Composable models, Certifiable models, Constructible models, Closure property of models and Controllable models. Each C is explained by the help of a set of definitions, a short overview of the background work and the problems that software engineers may experience in realizing the corresponding C. Further, throughout the article, a software development example is presented for illustrating the realization of the 7 C's. Finally, …

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A Platform For Software Engineering Course Projects, Bi̇rol Aygün Jan 2004

A Platform For Software Engineering Course Projects, Bi̇rol Aygün

Turkish Journal of Electrical Engineering and Computer Sciences

The importance of projects in software engineering courses is well known. Both synthetic and real-life projects have various advantages and disadvantages. Our aim was to create a framework where students can develop projects which reflect some of the complexities of real-life, involving many concurrent, interacting, asynchronous processes, each in a different stage of development, with wide temporal differences among them - some occurring within millisconds of each other and others executing sporadically over much longer periods. In this project, which was carried out in different arrangements in several software engineering courses in three universities, the students developed both the sub- …

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A Pattern Based Approach To Web Design Formalization, Ahmet Sikici, Yasemi̇n Topaloğlu Jan 2004

A Pattern Based Approach To Web Design Formalization, Ahmet Sikici, Yasemi̇n Topaloğlu

Turkish Journal of Electrical Engineering and Computer Sciences

World Wide Web is a global information network that affects many fields of our lives. The distributed, interlinked, visual and heterogeneous structure of the web makes it an irregular development environment. In this paper we propose a pattern based approach for increasing the effectiveness of development for the Web environment. This approach is based on the representation of the core meaning of each design as a set of patterns and requires the formulation of abstract solutions in a mathematical precision. This way not only reusable design experience will be codified unambiguously, but a smooth transition between the design and implementation …

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