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Electro-Mechanical Systems

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Full-Text Articles in Semiconductor and Optical Materials

Research On 3d Printing Resin Exposure Properties And Its Application On Centrifugal Microfluidic Platform Based On Fluorescence Detection, Zheng Qiao Apr 2024

Research On 3d Printing Resin Exposure Properties And Its Application On Centrifugal Microfluidic Platform Based On Fluorescence Detection, Zheng Qiao

LSU Doctoral Dissertations

This dissertation encapsulates significant advancements in the field of SLA 3D printing and centrifugal microfluidics. Central to the research is the development of a novel mathematical model for predicting trapped resin thickness in SLA 3D printing, a groundbreaking contribution that addresses a critical aspect of printing intricate structures. This model, the first to establish a mathematical relationship for resin thickness, is rooted in a comprehensive study of the resin curing process. The research leverages the concept of 'critical dosage' for resin curing, leading to a more refined and theoretically grounded approach for calculating curing thickness. Experimentation further validates the model, …


Design, Fabrication And Characterization Of Zero Power Sensor/Harvester For Smart Grid Applications, Zeynel Guler Dec 2023

Design, Fabrication And Characterization Of Zero Power Sensor/Harvester For Smart Grid Applications, Zeynel Guler

Mechanical Engineering ETDs

This study presents a flexible sensor/harvester device to be used in both electromagnetic sensing and energy harvesting applications for smart grids. When a current passes through a wire, the sensor detects the magnetic field created by that current. The sensor magnet interacts with the wire magnetic field resulting in a transfer of energy through the piezoelectric cantilever. Piezoelectric, conductive, magnetic, and magnetostrictive composite thin films were prepared to fabricate this device.

Initially, the magnet of the cantilever was optimized considering its shape, thickness, length, taper angle etc. via both simulations and experiments. Peak to peak voltage versus cantilever position graph …


Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim Nov 2023

Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim

Faculty Publications

Microelectromechanical systems (MEMS) resonators use is widespread, from electronic filters and oscillators to physical sensors such as accelerometers and gyroscopes. These devices' ubiquity, small size, and low power consumption make them ideal for use in systems such as CubeSats, micro aerial vehicles, autonomous underwater vehicles, and micro-robots operating in radiation environments. Radiation's interaction with materials manifests as atomic displacement and ionization, resulting in mechanical and electronic property changes, photocurrents, and charge buildup. This study examines silicon (Si) ion irradiation's interaction with piezoelectrically transduced MEMS resonators. Furthermore, the effect of adding a dielectric silicon oxide (SiO2) thin film is …


Optical Fiber Tip Micro Anemometer, Jeremiah C. Williams, Hengky Chandrahalim Apr 2023

Optical Fiber Tip Micro Anemometer, Jeremiah C. Williams, Hengky Chandrahalim

AFIT Patents

A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to …


Sculpting Charge In Graphene Through Patterned Strain, Dylan J. Balter, Jenna Smith Nov 2022

Sculpting Charge In Graphene Through Patterned Strain, Dylan J. Balter, Jenna Smith

The Journal of Purdue Undergraduate Research

No abstract provided.


Model-Based Design Of An Optimal Lqg Regulator For A Piezoelectric Actuated Smart Structure Using A High-Precision Laser Interferometry Measurement System, Grant P. Gallagher Jun 2022

Model-Based Design Of An Optimal Lqg Regulator For A Piezoelectric Actuated Smart Structure Using A High-Precision Laser Interferometry Measurement System, Grant P. Gallagher

Master's Theses

Smart structure control systems commonly use piezoceramic sensors or accelerometers as vibration measurement devices. These measurement devices often produce noisy and/or low-precision signals, which makes it difficult to measure small-amplitude vibrations. Laser interferometry devices pose as an alternative high-precision position measurement method, capable of nanometer-scale resolution. The aim of this research is to utilize a model-based design approach to develop and implement a real-time Linear Quadratic Gaussian (LQG) regulator for a piezoelectric actuated smart structure using a high-precision laser interferometry measurement system to suppress the excitation of vibratory modes.

The analytical model of the smart structure is derived using the …


Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith Dec 2021

Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith

AFIT Patents

A passive microscopic Fabry-Pérot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.


Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith Mar 2021

Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith

AFIT Patents

A passive microscopic Fabry-Pérot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.


Effect Of The Nonlinear Material Viscosity On The Performance Of Dielectric Elastomer Transducers, Yuanping Li Jun 2019

Effect Of The Nonlinear Material Viscosity On The Performance Of Dielectric Elastomer Transducers, Yuanping Li

Electronic Thesis and Dissertation Repository

As a typical type of soft electroactive materials, dielectric elastomers (DEs) are capable of producing large voltage-induced deformation, which makes them desirable materials for a variety of applications in transduction technology, including tunable oscillators, resonators, biomimetics and energy harvesters. The dynamic and energy harvesting performance of such DE-based devices is strongly affected not only by multiple failure modes such as electrical breakdown, electromechanical instability, loss-of-tension and fatigue, but also by their material viscoelasticity. Moreover, as suggested by experiments and theoretical studies, DEs possess nonlinear relaxation processes, which makes modeling of the performance of DE-based devices more challenging.

In this thesis, …


Structural Health Monitoring Of Composite Parts: A Review, Jacob Pessin Jun 2019

Structural Health Monitoring Of Composite Parts: A Review, Jacob Pessin

Honors Theses

Structural health monitoring has the potential to allow composite structures to be more reliable and safer, then by using more traditional damage assessment techniques. Structural health monitoring (SHM) utilizes individual sensor units that are placed throughout the load bearing sections of a structure and gather data that is used for stress analysis and damage detection. Statistical time based algorithms are used to analyze collected data and determine both damage size and probable location from within the structure. While traditional calculations and life span analysis can be done for structures made of isotropic materials such as steel or other metals, composites …


Comparative Study Of Power Semiconductor Devices In A Multilevel Cascaded H-Bridge Inverter, Kenneth Mordi Dec 2018

Comparative Study Of Power Semiconductor Devices In A Multilevel Cascaded H-Bridge Inverter, Kenneth Mordi

Graduate Theses and Dissertations

This thesis compares the performance of a nine-level transformerless cascaded H-bridge (CHB) inverter with integrated battery energy storage system (BESS) using SiC power MOSFETs and Si IGBTs. Two crucial performance drivers for inverter applications are power loss and efficiency. Both of these are investigated in this thesis. Power devices with similar voltage and current ratings are used in the same inverter topology, and the performance of each device is analyzed with respect to switching frequency and operating temperature. The loss measurements and characteristics within the inverter are discussed. The Saber® simulation software was used for the comparisons. The power MOSFET …


Creating A Computational Tool To Simulate Vibration Control For Piezoelectric Devices, Ahmet Ozkan Ozer, Emma J. Moore Nov 2018

Creating A Computational Tool To Simulate Vibration Control For Piezoelectric Devices, Ahmet Ozkan Ozer, Emma J. Moore

Posters-at-the-Capitol

Piezoelectric materials have the unique ability to convert electrical energy to mechanical vibrations and vice versa. This project takes a stab to develop a reliable computational tool to simulate the vibration control of a novel “partial differential equation” model for a piezoelectric device, which is designed by integrating electric conducting piezoelectric layers constraining a viscoelastic layer to provide an active and lightweight intelligent structure. Controlling unwanted vibrations on piezoelectric devices (or harvesting energy from ambient vibrations) through piezoelectric layers has been the major focus in cutting-edge engineering applications such as ultrasonic welders and inchworms. The corresponding mathematical models for piezoelectric …


Turning An Organic Semiconductor Into A Low-Resistance Material By Ion Implantation, Beatrice Fraboni, Alessandra Scidà, Piero Cosseddu, Yongqiang Wang, Michael Nastasi, Silvia Milita, Annalisa Bonfiglio Dec 2015

Turning An Organic Semiconductor Into A Low-Resistance Material By Ion Implantation, Beatrice Fraboni, Alessandra Scidà, Piero Cosseddu, Yongqiang Wang, Michael Nastasi, Silvia Milita, Annalisa Bonfiglio

Nebraska Center for Energy Sciences Research: Publications

We report on the effects of low energy ion implantation on thin films of pentacene, carried out to investigate the efficacy of this process in the fabrication of organic electronic devices. Two different ions, Ne and N, have been implanted and compared, to assess the effects of different reactivity within the hydrocarbon matrix. Strong modification of the electrical conductivity, stable in time, is observed following ion implantation. This effect is significantly larger for N implants (up to six orders of magnitude), which are shown to introduce stable charged species within the hydrocarbon matrix, not only damage as is the case …


Acoustic Manipulation And Alignment Of Particles For Applications In Separation, Micro-Templating, And Device Fabrication, Kamran Moradi Mar 2015

Acoustic Manipulation And Alignment Of Particles For Applications In Separation, Micro-Templating, And Device Fabrication, Kamran Moradi

FIU Electronic Theses and Dissertations

This dissertation studies the manipulation of particles using acoustic stimulation for applications in microfluidics and templating of devices. The term particle is used here to denote any solid, liquid or gaseous material that has properties, which are distinct from the fluid in which it is suspended. Manipulation means to take over the movements of the particles and to position them in specified locations.

Using devices, microfabricated out of silicon, the behavior of particles under the acoustic stimulation was studied with the main purpose of aligning the particles at either low-pressure zones, known as the nodes or high-pressure zones, known as …


Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan Sep 2013

Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan

Student Publications & Research

Ordered arrays of high-aspect-ratio micro/nanostructures in semiconductors stirred a huge scientific interest due to their unique one-dimensional physical morphology and the associated electrical, mechanical, chemical, optoelectronic, and thermal properties. Metal-assisted chemical etching enables fabrication of such high aspect ratio Si nanostructures with controlled diameter, shape, length, and packing density, but suffers from structure deformation and shape inconsistency due to uncontrolled migration of noble metal structures during etching. Hereby the authors prove that a Ti adhesion layer helps in stabilizing gold structures, preventing their migration on the wafer surface while not impeding the etching. Based on this finding, the authors demonstrate …


Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo Jun 2012

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …


Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace Mar 2012

Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace

Gursel Alici

The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …


Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace Oct 2011

Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace

Gordon Wallace

The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …


Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor Aug 2009

Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor

Master's Theses

This thesis describes the design, fabrication, and testing process for a microfluidic phosphate colorimeter utilized for water quality analysis. The device can be powered by, and interfaced for data collection with, a common cell phone or laptop to dramatically reduce costs. Unlike commercially available colorimeters, this device does not require the user to measure or mix sample and reagent. A disposable poly(dimethylsiloxane) (PDMS) microfluid chip, powered by an absorption pumping mechanism, was used to draw water samples, mix the sample at a specific ratio with a molybdovanadate reagent, and load both fluids into an onboard cuvette for colorimetric analysis. A …


Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace Jan 2008

Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace

Faculty of Engineering - Papers (Archive)

The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …


Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada Mar 2006

Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada

Theses and Dissertations

Micro-Raman (µRaman) spectroscopy is an efficient, non-destructive technique widely used to determine the quality of semiconductor materials and microelectromechanical systems. This work characterizes the stress distribution in wurtzite gallium nitride grown on c-plane sapphire substrates by molecular beam epitaxy. This wide bandgap semiconductor material is being considered by the Air Force Research Laboratory for the fabrication of shock-hardened MEMS accelerometers. µRaman spectroscopy is particularly useful for stress characterization because of its ability to measure the spectral shifts in Raman peaks in a material, and correlate those shifts to stress and strain. The spectral peak shift as a function of stress, …


Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli Mar 2005

Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli

Theses and Dissertations

Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …