Optics Commons^™

Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu

Optical Science and Engineering ETDs

Metrology technologies are an essential adjunct to Integrated Circuit (I.C.) Semiconductor manufacturing. Scatterometry, an optical metrology, was chosen to measure 50 nm half pitch feature structures. A bread-board scatterometry system has been assembled to provide a non-contact, non-destructive, accurate and flexible measurement. A real-time, on-line scatterometry system has also been demonstrated and proven to provide a high throughput measurement.

Three different types of samples have been measured using the scatterometry setup. The wire-grid polarizer (WGP) sample has been made by Jet and Flash Nanoimprint Lithography with ~100 nm pitch and ~50 nm wide ~200 nm tall Al gratings on fused …

Quantitative Data Extraction Using Spatial Fourier Transform In Inversion Shear Interferometer, Yanzeng Li

Graduate Theses - Physics and Optical Engineering

Currently there are many interferometers used for testing wavefront, measuring the quality of optical elements, and detecting refractive index changes in a certain medium. Each interferometer has been constructed for a specific objective. Inversion shear interferometer is one of them. Compared to other interferometers, it has its own advantages, such as only being sensitive to coma aberration, but it has some limitations as well. It does not allow use of phase shifting technique. A novel inversion shear interferometer was invented using holographic lenses. By using the spatial carrier method, phase information of the wavefront was extracted. The breakthrough of the …

Assessing Laser Lifetime Test Performance, Joe Weichman, Hamid Hemmati, Malcolm Wright

STAR Program Research Presentations

Assessing expected component lifetime is necessary in developing instruments for future space-flight projects to ensure long term operation in the challenging environment. Although semiconductor diode lasers have widespread use in terrestrial applications, their use in space is still an emerging technology that requires on-going testing to demonstrate their capability. The project called for re-establishing the test setup for assessing lifetime performance of 20 continuously running 200mW 830 nm diode lasers. These lasers underwent previous testing based on parameters for NuSTAR’s laser metrology system, and met the six month lifetime project requirements under nominal operating conditions. Laser testing is currently underway …

Anomaly Detection In Hyperspectral Imagery: Comparison Of Methods Using Diurnal And Seasonal Data, Patrick C. Hytla, Russell C. Hardie, Michael T. Eismann, Joseph Meola

Electrical and Computer Engineering Faculty Publications

The use of hyperspectral imaging is a fast growing field with many applications in the civilian, commercial and military sectors. Hyperspectral images are typically composed of many spectral bands in the visible and infrared regions of the electromagnetic spectrum and have the potential to deliver a great deal of information about a remotely sensed scene. One area of interest regarding hyperspectral images is anomaly detection, or the ability to find spectral outliers within a complex background in a scene with no a priori information about the scene or its specific contents. Anomaly detectors typically operate by creating a statistical background …

Aliasing Reduction In Staring Infrared Imagers Utilizing Subpixel Techniques, Joseph C. Gillette, Thomas M. Stadtmiller, Russell C. Hardie

Electrical and Computer Engineering Faculty Publications

We introduce and analyze techniques for the reduction of aliased signal energy in a staring infrared imaging system. A standard staring system uses a fixed two-dimensional detector array that corresponds to a fixed spatial sampling frequency determined by the detector pitch or spacing. Aliasing will occur when sampling a scene containing spatial frequencies exceeding half the sampling frequency. This aliasing can significantly degrade the image quality. The aliasing reduction schemes presented here, referred to as microscanning, exploit subpixel shifts between time frames of an image sequence. These multiple images are used to reconstruct a single frame with reduced aliasing. If …