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Full-Text Articles in Engineering Physics

High Dynamic Range Optical Devices And Applications., Elijah Robert Jensen Aug 2018

High Dynamic Range Optical Devices And Applications., Elijah Robert Jensen

Electronic Theses and Dissertations

Much of what we know about fundamental physical law and the universe derives from observations and measurements using optical methods. The passive use of the electromagnetic spectrum can be the best way of studying physical phenomenon in general with minimal disturbance of the system in the process. While for many applications ambient visible light is sufficient, light outside of the visible range may convey more information. The signals of interest are also often a small fraction of the background, and their changes occur on time scales so quickly that they are visually imperceptible. This thesis reports techniques and technologies developed …


Investigation Of The Skin Effect In Alternating Currents, Matthew Liang Jun 2018

Investigation Of The Skin Effect In Alternating Currents, Matthew Liang

The International Student Science Fair 2018

My research is on the investigation of the skin effect in alternating currents. The skin effect is when an alternating current tends to flow on the surface of the conductor, such that the current density is highest near the surface, and decreases with greater depths in the conductor. This is due to the alternating current inducing changing magnetic fields, which in turn induces currents that oppose the original flow of current, resisting the current flowing through the centre the most. This reduces the effective cross-sectional area of the conductor and increases the resistance, causing increased power losses. This effect becomes …


Energy Conversion System For Travelers (Ecost), Thipok Bovornratanaraks Jun 2018

Energy Conversion System For Travelers (Ecost), Thipok Bovornratanaraks

The International Student Science Fair 2018

We have innovated “The Energy Conversion System for Travelers” or the ECoST. With the fact that most travelers have wheeled cabin-bags, whilst walking, the wheels will rotate so why don’t we harvest electricity from this kinetic energy? We thus install our innovation, the ECoST, to the bag to generate electricity from the spinning wheels. The electricity is then kept in the storage unit and ready to charge your empty battery devices in an emergency case via a USB port. To make life easy, our ECoST was designed to replicate the power bank charging method; therefore, we can charge …


Investigation Of The Skin Effect In Alternating Currents, Matthew Liang Jun 2018

Investigation Of The Skin Effect In Alternating Currents, Matthew Liang

The International Student Science Fair 2018

My research is on the investigation of the skin effect in alternating currents. My project is broken down into 4 sub-aims. The first aim would be, to be able to mathematically model the distribution of current in the radius of the wire, which consists of the applications of the Maxwell equation and solving zeroth order differential Bessel equations of the first kind. The next aim would be to computationally plot out the desired current readings as the depth of the wire increases from the surface, using the Matlab software. The third aim that I have would be conducting an experiment, …


Energy Conversion System For Travelers (Ecost), Thipok Bovornratanaraks Jun 2018

Energy Conversion System For Travelers (Ecost), Thipok Bovornratanaraks

The International Student Science Fair 2018

We have innovated “The Energy Conversion System for Travelers” or the ECoST. With the fact that most travelers have wheeled cabin-bags, whilst walking, the wheels will rotate so why don’t we harvest electricity from this kinetic energy? We thus install our innovation, the ECoST, to the bag to generate electricity from the spinning wheels. The electricity is then kept in the storage unit and ready to charge your empty battery devices in an emergency case via a USB port. To make life easy, our ECoST was designed to replicate the power bank charging method; therefore, we can charge …


Increasing The Longevity Of Tungsten Filaments In A Zone Refiner, Byron D. Greenlee May 2018

Increasing The Longevity Of Tungsten Filaments In A Zone Refiner, Byron D. Greenlee

Senior Theses

Zone refining is used for its ability to purify material and grow single crystals. To produce these single crystals, a suspended molten zone, generated by electron bombardment, passes along the polycrystalline stock. During a zone refining run, the filaments that produce the electron bombardment can fail. In this project, the longevity of tungsten filaments in a zone refiner was investigated. A new bombardment geometry was constructed to attempt to increase the longevity of the filaments. The new geometry had a shield machined into it to prevent line-of-sight impurities originating in the molten zone from striking the filaments. It was found …


Measuring The Double Layer Capacitance Of Electrolyte Solutions Using A Graphene Field Effect Transistor, Agatha Ulibarri May 2018

Measuring The Double Layer Capacitance Of Electrolyte Solutions Using A Graphene Field Effect Transistor, Agatha Ulibarri

Senior Theses

When operating graphene field effect transistors (GFETs) in fluid, a double layer capacitance (Cdl) is formed at the surface. In the literature, the Cdl is estimated using values obtained using metal electrode experiments. Due to the distinctive electronic and surface properties of graphene, there is reason to believe these estimates are inadequate. This work seeks to directly characterize the double layer capacitance of a GFET. A unique method for determining the Cdl has been implemented, and data has been obtained for three electrolytes and one ionic fluid. The results yield dramatically lower Cdl values than …


Measuring The Double Layer Capacitance Of Electrolytes With Varied Concentrations, Geoffrey Rath May 2018

Measuring The Double Layer Capacitance Of Electrolytes With Varied Concentrations, Geoffrey Rath

Senior Theses

When electric potentials are applied from an electrolytic fluid to a metal, a double layer capacitor, Cdl, develops at the interface. The layer directly at the interface is called the Stern layer and has a thickness equal to roughly the size of the ions in the fluid. The next layer, the diffuse layer, arises from the gathering of like charges in the Stern layer. This layer is the distance needed for ionic charges to return to equilibrium. This distance, called the Debye length, λ, depends on the square root of the electrolyte concentration. To study the properties of …


Bandgap Profiling In Cigs Solar Cells Via Valence Electron Energy-Loss Spectroscopy, Julia I. Deitz, Shankar Karki, Sylvain X. Marsillac, Tyler J. Grassman Mar 2018

Bandgap Profiling In Cigs Solar Cells Via Valence Electron Energy-Loss Spectroscopy, Julia I. Deitz, Shankar Karki, Sylvain X. Marsillac, Tyler J. Grassman

Electrical & Computer Engineering Faculty Publications

A robust, reproducible method for the extraction of relative bandgap trends from scanning transmission electron microscopy (STEM) based electron energy-loss spectroscopy (EELS) is described. The effectiveness of the approach is demonstrated by profiling the bandgap through a CuIn1-xGaxSe2 solar cell that possesses intentional Ga/(In + Ga) composition variation. The EELS-determined bandgap profile is compared to the nominal profile calculated from compositional data collected via STEM-based energy dispersive X-ray spectroscopy. The EELS based profile is found to closely track the calculated bandgap trends, with only a small, fixed offset difference. This method, which is particularly advantageous …


Generalizable Modeling Of Charge Transport In Single Electron Transistor Devices: Application To Thermal Sensitivity In Semiconducting Island Systems, Paniz Khanmohammadi Hazaveh Jan 2018

Generalizable Modeling Of Charge Transport In Single Electron Transistor Devices: Application To Thermal Sensitivity In Semiconducting Island Systems, Paniz Khanmohammadi Hazaveh

Dissertations, Master's Theses and Master's Reports

Electronic devices, especially MOSFETs, have been dimensionally scaled down to enhance operation of integrated circuits, addressing challenges such as current leakage, fluctuation of intrinsic semiconductor properties, and power dissipation. Reaching dimensions below 20 nm, there are fundamental limitations that are difficult to overcome, driving alternative device paradigms to be sought utilizing the quantum mechanical behavior of electrons. Single electron transistor (SET) devices are examples of a new generation of low-power transistors designed to transport information via single electron tunneling through one or more islands separated by tunnel junctions. Experimentally explored SET devices have shown that there are advantages to using …


Cryogenic Probe Station At Old Dominion University Center For Accelerator Science, Junki Makita, Jean R. Delayen, Alex Gurevich, Gianluigi Ciovati Jan 2018

Cryogenic Probe Station At Old Dominion University Center For Accelerator Science, Junki Makita, Jean R. Delayen, Alex Gurevich, Gianluigi Ciovati

Physics Faculty Publications

With a growing effort in research and development of an alternative material to bulk Nb for a superconducting radiofrequency (SRF) cavity, it is important to have a cost effective method to benchmark new materials of choice. At Old Dominion University's Center for Accelerator Science, a cryogenic probe station (CPS) will be used to measure the response of superconductor samples under RF fields. The setup consists of a closed-cycle refrigerator for cooling a sample wafer to a cryogenic temperature, a superconducting magnet providing a field parallel to the sample, and DC probes in addition to RF probes. The RF probes will …


Real Time Spectroscopic Ellipsometry Analysis Of First Stage Cuin1-Xgaxse2 Growth: Indium-Gallium Selenide Co-Evaporation, Puja Pradhan, Puruswottam Aryal, Dinesh Attygalle, Abdel-Rahman Ibdah, Prakash Koirala, Jian Li, Khagendra P. Bhandari, Geethika K. Liyanage, Randy J. Ellingson, Michael J. Heben, Sylvain Marsillac, Robert W. Collins, Nikolas J. Podraza Jan 2018

Real Time Spectroscopic Ellipsometry Analysis Of First Stage Cuin1-Xgaxse2 Growth: Indium-Gallium Selenide Co-Evaporation, Puja Pradhan, Puruswottam Aryal, Dinesh Attygalle, Abdel-Rahman Ibdah, Prakash Koirala, Jian Li, Khagendra P. Bhandari, Geethika K. Liyanage, Randy J. Ellingson, Michael J. Heben, Sylvain Marsillac, Robert W. Collins, Nikolas J. Podraza

Electrical & Computer Engineering Faculty Publications

Real time spectroscopic ellipsometry (RTSE) has been applied for in-situ monitoring of the first stage of copper indium-gallium diselenide (CIGS) thin film deposition by the three-stage co-evaporation process used for fabrication of high efficiency thin film photovoltaic (PV) devices. The first stage entails the growth of indium-gallium selenide (In1-xGax)₂Se₃ (IGS) on a substrate of Mo-coated soda lime glass maintained at a temperature of 400 °C. This is a critical stage of CIGS deposition because a large fraction of the final film thickness is deposited, and as a result precise compositional control is desired in order to …


Measurement Of Speed Of Sound Profile Using Laaces Balloon, Zhuang Li, Brett Schaefer, Brian Schaefer, William Dever, Tyler Morgan, Matthew Foltz Oct 2017

Measurement Of Speed Of Sound Profile Using Laaces Balloon, Zhuang Li, Brett Schaefer, Brian Schaefer, William Dever, Tyler Morgan, Matthew Foltz

2017 Academic High Altitude Conference

The goal of this mission is to test the speed of sound at different altitudes and ultimately at a maximum height of 100,000 feet (30 km). In conjunction with this testing, environmental parameters including temperature, pressure, and humidity are measured and used to calculate the speed of sound to compare to the measured results. The team constructed the payload “Dorothy” using polystyrene foam due to its lightweight and thermal isolation property. An ultrasonic sensor with a reflection mirror were installed outside payload box to measure speed of sound. All the sensors were calibrated. Software for the project was developed in …


Spin-Imbalance In A 2d Fermi-Hubbard System, Peter Brown, Debayan Mitra, Elmer Guardado-Sanchez, Peter Schauß, Stanimir Kondov, Ehsan Khatami, Thereza Paiva, Nandini Trivedi, David Huse, Waseem Bakr Sep 2017

Spin-Imbalance In A 2d Fermi-Hubbard System, Peter Brown, Debayan Mitra, Elmer Guardado-Sanchez, Peter Schauß, Stanimir Kondov, Ehsan Khatami, Thereza Paiva, Nandini Trivedi, David Huse, Waseem Bakr

Faculty Publications

The interplay of strong interactions and magnetic fields gives rise to unusual forms of superconductivity and magnetism in quantum many-body systems. Here, we present an experimental study of the two-dimensional Fermi-Hubbard model—a paradigm for strongly correlated fermions on a lattice—in the presence of a Zeeman field and varying doping. Using site-resolved measurements, we revealed anisotropic antiferromagnetic correlations, a precursor to long-range canted order. We observed nonmonotonic behavior of the local polarization with doping for strong interactions, which we attribute to the evolution from an antiferromagnetic insulator to a metallic phase. Our results pave the way to experimentally mapping the low-temperature …


Solar Powered Single-Axis Heliostat Active Solar Tracking Device, Mason Kyle Roberts Sep 2017

Solar Powered Single-Axis Heliostat Active Solar Tracking Device, Mason Kyle Roberts

Physics

As a means of cooking food, the burning of biomass accounts for over 4 million premature deaths in third world countries (“Household Air Pollution and Health”). The focus of this project was to explore an alternative that could utilize focused sunlight to cook food. A solar tracker was designed to be affixed to a parabolic, reflective, tilted single axis heliostat to follow the sun throughout the day and focus the reflected light to the bottom of a cooking surface. This surface became hot enough to for the preparation of food or boiling/sterilization of water.

A goal for each project was …


Nanostructure Evolution Of Magnetron Sputtered Hydrogenated Silicon Thin Films, Dipendra Adhikari, Maxwell M. Junda, Sylvain X. Marsillac, Robert W. Collins, Nikolas J. Podraza Aug 2017

Nanostructure Evolution Of Magnetron Sputtered Hydrogenated Silicon Thin Films, Dipendra Adhikari, Maxwell M. Junda, Sylvain X. Marsillac, Robert W. Collins, Nikolas J. Podraza

Electrical & Computer Engineering Faculty Publications

Hydrogenated silicon (Si:H) thin films have been prepared by radio frequency (RF) magnetron sputtering. The effect of hydrogen gas concentration during sputtering on the resultant film structural and optical properties has been investigated by real time spectroscopic ellipsometry (RTSE) and grazing incidence x-ray diffraction (GIXRD). The analysis of in-situ RTSE data collected during sputter deposition tracks the evolution of surface roughness and film bulk layer thickness with time. Growth evolution diagrams depicting amorphous, nanocrystalline and mixed-phase regions for low and high deposition rate Si:H are constructed and the effects of process parameter (hydrogen gas concentration, total pressure and RF power) …


Electrical Characterization Of Irradiated Semiconducting Amorphous Hydrogenated Boron Carbide, George Glen Peterson Aug 2017

Electrical Characterization Of Irradiated Semiconducting Amorphous Hydrogenated Boron Carbide, George Glen Peterson

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Semiconducting amorphous partially dehydrogenated boron carbide has been explored as a neutron voltaic for operation in radiation harsh environments, such as on deep space satellites/probes. A neutron voltaic device could also be used as a solid state neutron radiation detector to provide immediate alerts for radiation workers/students, as opposed to the passive dosimetry badges utilized today. Understanding how the irradiation environment effects the electrical properties of semiconducting amorphous partially dehydrogenated boron carbide is important to predicting the stability of these devices in operation. p-n heterojunction diodes were formed from the synthesis of semiconducting amorphous partially dehydrogenated boron carbide on silicon …


Perspective: The Physics, Diagnostics, And Applications Of Atmospheric Pressure Low Temperature Plasma Sources Used In Plasma Medicine, M. Laroussi Jul 2017

Perspective: The Physics, Diagnostics, And Applications Of Atmospheric Pressure Low Temperature Plasma Sources Used In Plasma Medicine, M. Laroussi

Electrical & Computer Engineering Faculty Publications

Low temperature plasmas have been used in various plasma processing applications for several decades. But it is only in the last thirty years or so that sources generating such plasmas at atmospheric pressure in reliable and stable ways have become more prevalent. First, in the late 1980s, the dielectric barrier discharge was used to generate relatively large volume diffuse plasmas at atmospheric pressure. Then, in the early 2000s, plasma jets that can launch cold plasma plumes in ambient air were developed. Extensive experimental and modeling work was carried out on both methods and much of the physics governing such sources …


Operating Temperature Of A Solar Thermal Stirling Engine, Spencer Beck May 2017

Operating Temperature Of A Solar Thermal Stirling Engine, Spencer Beck

Senior Theses

This paper explores the relationship between the operating temperature and electricity production of a simple heat engine. A Stirling engine was designed and constructed which runs on solar thermal energy collected by a Fresnel lens. The surface area of the solar collector was varied. This manipulated the operating temperature of the Stirling engine in order to measure power output. The mechanical energy from the engine was converted to electricity using a DC motor running in reverse, acting like a generator, in conjunction with an Arduino for data collection. Although adjustments must be made in order to improve the efficiency of …


Are Solar Panels A Viable Power Source For A Green Energy Vehicle?, Mason C. Adams May 2017

Are Solar Panels A Viable Power Source For A Green Energy Vehicle?, Mason C. Adams

Senior Theses

A solar cell powered go-kart has been built and tested. The result shows using solar energy alone cannot meet the requirement of running a regular passenger car. This is due to the limited surface area of the passenger car. This thesis also discusses the operating principles of solar panels, the physics of P type and N type semiconductors, and the formation of the PN junction, as well as the solar current. Modifications of an existing go-kart are described in detail in this thesis. Suggestions for making green vehicles are discussed as well.


Novel Methods For The Time-Dependent Maxwell’S Equations And Their Applications, Sidney Shields May 2017

Novel Methods For The Time-Dependent Maxwell’S Equations And Their Applications, Sidney Shields

UNLV Theses, Dissertations, Professional Papers, and Capstones

This dissertation investigates three different mathematical models based on the time domain Maxwell's equations using three different numerical methods: a Yee scheme using a non-uniform grid, a nodal discontinuous Galerkin (nDG) method, and a newly developed discontinuous Galerkin method named the weak Galerkin (WG) method. The non-uniform Yee scheme is first applied to an electromagnetic metamaterial model. Stability and superconvergence error results are proved for the method, which are then confirmed through numerical results. Additionally, a numerical simulation of backwards wave propagation through a negative-index metamaterial is given using the presented method. Next, the nDG method is used to simulate …


Aluminum Multicharged Ion Generation From Femtosecond Laser Plasma, Md. Haider A. Shaim, Frederick Guy Wilson, Hani E. Elsayed-Ali May 2017

Aluminum Multicharged Ion Generation From Femtosecond Laser Plasma, Md. Haider A. Shaim, Frederick Guy Wilson, Hani E. Elsayed-Ali

Electrical & Computer Engineering Faculty Publications

Aluminum multicharged ion generation from femtosecond laser ablation is studied. A Ti:sapphire laser (wavelength 800 nm, pulse width ∼100 fs, and maximum laser fluence of 7.6 J/cm2) is used. Ion yield and energy distribution of each charge state are measured. A linear relationship between the ion charge state and the equivalent acceleration energy of the individual ion species is observed and is attributed to the presence of an electric field within the plasma-vacuum boundary that accelerates the ions. The ion energy distribution follows a shifted Coulomb-Boltzmann distribution. For Al1+ and Al2+, the ion energy distributions …


Direct Bandgap Cross-Over Point Of Ge1-YSnY Grown On Si Estimated Through Temperature-Dependent Photoluminescence Studies, Thomas R. Harris, Mee-Yi Ryu, Yung Kee Yeo, Buguo Wang, C. L. Senaratne Aug 2016

Direct Bandgap Cross-Over Point Of Ge1-YSnY Grown On Si Estimated Through Temperature-Dependent Photoluminescence Studies, Thomas R. Harris, Mee-Yi Ryu, Yung Kee Yeo, Buguo Wang, C. L. Senaratne

Faculty Publications

Epitaxial Ge1-ySny (y = 0%–7.5%) alloys grown on either Si or Ge-buffered Si substrates by chemical vapor deposition were studied as a function of Sn content using temperature-dependent photoluminescence (PL). PL emission peaks from both the direct bandgap (Γ-valley) and the indirect bandgap (L-valley) to the valence band (denoted by ED and EID, respectively) were clearly observed at 125 and 175 K for most Ge1-ySny samples studied. At 300 K, however, all of the samples exhibited dominant ED emission with either very weak or no measureable EID emission. At 10 K, …


Reflective Efficiencies Of Materials For Applications Of Bifacial Solar Cells, Michael Metter May 2016

Reflective Efficiencies Of Materials For Applications Of Bifacial Solar Cells, Michael Metter

Senior Theses

The bifacial solar cell is superior to its monofacial predecessor due to its ability to convert both incident light on top and reflected light from below into energy. The scattering of the reflected light is affected by the property of the material on which it is interacting. To date, little work has been contributed to studying the properties of these materials to determine optimal quantities for bifacial solar cells. In the first experiment, reflective efficiencies compared to the angle of reflection were explored for different grit of sandpaper in order to develop an understanding of how surface texture impacts reflectivity. …


Experimental And Computational Studies Of Cortical Neural Network Properties Through Signal Processing, Wesley Patrick Clawson May 2016

Experimental And Computational Studies Of Cortical Neural Network Properties Through Signal Processing, Wesley Patrick Clawson

Graduate Theses and Dissertations

Previous studies, both theoretical and experimental, of network level dynamics in the cerebral cortex show evidence for a statistical phenomenon called criticality; a phenomenon originally studied in the context of phase transitions in physical systems and that is associated with favorable information processing in the context of the brain. The focus of this thesis is to expand upon past results with new experimentation and modeling to show a relationship between criticality and the ability to detect and discriminate sensory input. A line of theoretical work predicts maximal sensory discrimination as a functional benefit of criticality, which can then be characterized …


Rapid And Accurate C-V Measurements, Ji-Hong Kim, Pragya R. Shrestha, Jason P. Campbell, Jason T. Ryan, David Nminibapiel, Joseph J. Kopanski Jan 2016

Rapid And Accurate C-V Measurements, Ji-Hong Kim, Pragya R. Shrestha, Jason P. Campbell, Jason T. Ryan, David Nminibapiel, Joseph J. Kopanski

Electrical & Computer Engineering Faculty Publications

We report a new technique for the rapid measurement of full capacitance-voltage (C-V) characteristic curves. The displacement current from a 100-MHz applied sine wave, which swings from accumulation to strong inversion, is digitized directly using an oscilloscope from the MOS capacitor under test. A C-V curve can be constructed directly from this data but is severely distorted due to nonideal behavior of real measurement systems. The key advance of this paper is to extract the system response function using the same measurement setup and a known MOS capacitor. The system response correction to the measured C-V curve of the unknown …


Beyond Conventional C-Plane Gan-Based Light Emitting Diodes: A Systematic Exploration Of Leds On Semi-Polar Orientations, Morteza Monavarian Jan 2016

Beyond Conventional C-Plane Gan-Based Light Emitting Diodes: A Systematic Exploration Of Leds On Semi-Polar Orientations, Morteza Monavarian

Theses and Dissertations

Despite enormous efforts and investments, the efficiency of InGaN-based green and yellow-green light emitters remains relatively low, and that limits progress in developing full color display, laser diodes, and bright light sources for general lighting. The low efficiency of light emitting devices in the green-to-yellow spectral range, also known as the “Green Gap”, is considered a global concern in the LED industry. The polar c-plane orientation of GaN, which is the mainstay in the LED industry, suffers from polarization-induced separation of electrons and hole wavefunctions (also known as the “quantum confined Stark effect”) and low indium incorporation efficiency that …


Developing And Testing An Anguilliform Robot Swimming With Theoretically High Hydrodynamic Efficiency, John B. Potts Iii Dec 2015

Developing And Testing An Anguilliform Robot Swimming With Theoretically High Hydrodynamic Efficiency, John B. Potts Iii

LSU New Orleans Theses and Dissertations

An anguilliform swimming robot replicating an idealized motion is a complex marine vehicle necessitating both a theoretical and experimental analysis to completely understand its propulsion characteristics. The ideal anguilliform motion within is theorized to produce ``wakeless'' swimming (Vorus, 2011), a reactive swimming technique that produces thrust by accelerations of the added mass in the vicinity of the body. The net circulation for the unsteady motion is theorized to be eliminated.

The robot was designed to replicate the desired, theoretical motion by applying control theory methods. Independent joint control was used due to hardware limitations. The fluid velocity vectors in the …


Generation Of Multi-Charged Aluminum Ions From Femtosecond Laser Induced Plasma, Frederick Guy Wilson Apr 2015

Generation Of Multi-Charged Aluminum Ions From Femtosecond Laser Induced Plasma, Frederick Guy Wilson

Electrical & Computer Engineering Theses & Dissertations

Laser-induced plasma multi-charged ion (MCI) sources have gained in popularity over the last thirty years with the advent of reliable, high peak power, short temporal pulse laser systems. Utilization of laser-induced plasma MCI sources allows for production of a wide array of ion species from a variety of source target materials. In this thesis an investigation of the generation of MCis from an aluminum (Al) target source through laser-induced plasma from a femtosecond (fs) pulsed laser system is outlined and the results presented and analyzed. In order to characterize the production of the Al MCis resulting from the fs laser …


Temporary Bonding With Polydimethylglutarimide Based Lift Off Resist As A Layer Transfer Platform, T. Matsumae, A. D. Koehler, J. D. Greenlee, T. J. Anderson, H. Baumgart, G. G. Jernigan, K. D. Hobart, F. J. Kub Jan 2015

Temporary Bonding With Polydimethylglutarimide Based Lift Off Resist As A Layer Transfer Platform, T. Matsumae, A. D. Koehler, J. D. Greenlee, T. J. Anderson, H. Baumgart, G. G. Jernigan, K. D. Hobart, F. J. Kub

Electrical & Computer Engineering Faculty Publications

Bonding of lift off resist (LOR) was performed to realize temporary wafer bonding without residue. Bonding process conditions such as spin speed, pre-bake temperature, and bonding temperature were optimized to obtain a large bonded area with high bond strength. Under optimized process conditions, a bonded area covering over 98% of the wafer surface, with a room temperature bond strength of nearly 5 J/m2 is achieved. During razor blade testing, fracture often occurs at the Si wafer. Moreover, debonding using an N-Methyl-2-pyrrolidone (NMP)-based solvent left the wafer surface extremely small amount of residue. Thus, the optimized bonding processed developed in …