Electro-Mechanical Systems Commons^™

Design And Parametric Study Of A Mems-Based Reservoir Computer For Reinforcement Learning, Andrew P. Carr

Master's Theses

Single-node reservoir computing (RC) is a hardware-efficient approach to machine learning, leveraging the dynamics of physical systems. In this work, two reinforcement learning algorithms, Q-learning and Proximal Policy Optimization (PPO), are applied to a simulated micro-electro-mechanical system (MEMS)-based reservoir computer to solve both discrete and continuous control tasks. MEMS-based reservoirs are low-power, compact, and their natural frequencies (kHz to MHz) pair well with real-time control loops. To explore the relationship between reservoir dynamics and learning performance, a parametric study is conducted on two reservoir hyperparameters, reservoir size and neuron separation, using CartPole-v1 and MountainCar-v0. The RC successfully learns multiple tasks …

Fused-Silica Microelectromechanical Systems For Relative Gravimetry, Ethan Doerstling

Theses and Dissertations

Gravimeters are devices that measure gravitational acceleration which can be used by the United States Air Force (USAF) in the areas of navigation and remote sensing. Fused-silica microelectromechanical systems (MEMS) devices offer capabilities to make inexpensive relative gravimeters with higher thermal stability than common silicon devices while maintaining good gravitational sensitivity. The fused-silica devices in this research were designed, simulated, fabricated, and tested to observe their performance as gravimeters. The devices exhibit properties of highly sensitive accelerometers but the current designs do not qualify as gravimeters. This study provides information to improve the sensitivity and stability of these fused-silica MEMS …

Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam

Electronic Theses and Dissertations

Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …

Modeling The Effects Of Radiation On Microelectromechanical Resonators, David D. Lynes

Theses and Dissertations

As the use of MEMS becomes more prolific in air, space, defense, and power applications, they will be exposed to more extreme radiation environments. This dissertation explores the effects of ionizing and nonionizing radiation on MEMS. AlN-on-Si based piezoelectric bulk acoustic wave resonators were irradiated by gamma-rays and silicon ions while measuring S-parameters in situ. Changes to the resonator and equivalent circuit parameters are extracted. The resonators demonstrated resilience against the effects of radiation-induced charge trapping. However, radiation-induced atomic displacements caused shifts to resonant frequency. From these data, an atomistic model is derived to describe the relationship between radiation type …

Planar Element Alignment System, Benjamin E. Lavigna, Benny F. Cruz, Samuel Gierhan, Jacob Q. Henriksen

Mechanical Engineering

Precise alignment to the micron level is a necessity for microfluidic/micromechanical devices to function as designed. Because of this, a micro-alignment device was commissioned by Professor Hans Mayer on behalf of the Cal Poly Microfluidics Laboratory. Prototype creation was bounded by a set of requirements including, ability to align PDMS & Silicon wafer halves to ± 10 microns, total process speed of three minutes, and total budget of $3000. Some major design hurdles included an ability to verify alignment, possible non-planar alignment pieces, and an inability to contact any point on the face of the alignment pieces after bonding treatment. …

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh

Theses and Dissertations

Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …

Machine Learning Augmentation Micro-Sensors For Smart Device Applications, Mohammad H. Hasan

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Novel smart technologies such as wearable devices and unconventional robotics have been enabled by advancements in semiconductor technologies, which have miniaturized the sizes of transistors and sensors. These technologies promise great improvements to public health. However, current computational paradigms are ill-suited for use in novel smart technologies as they fail to meet their strict power and size requirements. In this dissertation, we present two bio-inspired colocalized sensing-and-computing schemes performed at the sensor level: continuous-time recurrent neural networks (CTRNNs) and reservoir computers (RCs). These schemes arise from the nonlinear dynamics of micro-electro-mechanical systems (MEMS), which facilitates computing, and the inherent ability …

Mems Biosensor For Water-Immersed Application, Kun-Lin Lee

Dissertations and Theses

Although many air-based sensing mechanisms exist, not all of them can be applied in the water-based environment. In order to obtain a cell-based biosensor, the sensing method needs to be reliable and repeatable in a liquid environment. Therefore, this study is focused on transforming existing air-based sensors to water-immersed applications. This study includes two types of sensors.

First, commercial quartz resonators are used to investigate live-cell activity in water-based toxic solutions. I perform toxicity tests using quartz crystal microbalance (QCM). The QCM used in the study has a resonant frequency of 10 MHz and consists of an AT-cut quartz crystal …

Development Of A Sensing System For Underground Optic Fiber Cable Conduit Mapping, Sherif Bakr

All Graduate Theses, Dissertations, and Other Capstone Projects

The motivation of this research is to obtain an accurate three-dimensional (3D) layout of an underground conduit, which may be beneficial to optic fiber cable installers and engineers. A newly designed algorithm for 3D position tracking with the help of an inertial sensor and an encoder has been developed. Two types of representations (Euler angle and Quaternion) for orientation and rotation are also introduced, followed by several data pre-processing procedures. A sensing fusion method is utilized to overcome the accumulated errors introduced by the sensor drifting. Considering the application of 3D underground duct mapping in this research, a sensing system …

Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier

Electronic Theses and Dissertations

A novel energy harvesting device design is presented to be created via microfabrication techniques. Such devices have countless applications for powering low-current electrical devices, especially wireless sensors or transmitters. This micro-electromechanical system (MEMS) design utilizes the piezoelectric response of a bistable buckled beam to gather electrical energy via ambient vibrations. While many traditional piezoelectric energy harvesters (PEH) consist of simple cantilever beam geometries, this nonlinear design utilizes inertial effects of torsional lever arms to actuate a central buckled beam to snap between its two stable states; such an abrupt strain on the piezoelectric beam potentially produces a significantly increased electrical …

Mechanical Reliability Of Implantable Polyimide-Based Magnetic Microactuators For Biofouling Removal, Christian G. Figueroa-Espada, Qi Yang, Hyowon Lee

The Summer Undergraduate Research Fellowship (SURF) Symposium

Hydrocephalus is a neurological disorder that typically requires a long-term implantation of a shunt system to manage its symptoms. These shunt systems are notorious for their extremely high failure rate. More than 40% of all implanted shunt systems fail within the first year of implantation. On average, 85% of all hydrocephalus patients with shunt systems undergo at least two shunt-revision surgeries within 10 years of implantation. A large portion of this high failure rate can be attributed to biofouling-related obstructions and infections. Previously, we developed flexible polyimide-based magnetic microactuators to remove obstructions formed on hydrocephalus shunts. To test the long-term …

Improved Sensitivity Mems Cantilever Sensor For Terahertz Photoacoustic Spectroscopy, Ronald A. Coutu Jr., Ivan R. Medvedev, Douglas T. Petkie

Faculty Publications

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam damping. In addition, fabrication yield was improved by approximately 50% by filleting the cantilever’s anchor and free end to help reduce high stress areas that occurred during device fabrication and processing. All of the cantilever sensors were fabricated using silicon-on-insulator (SOI) wafers and tested in a custom …

Novel Applications Of A Thermally Tunable Bistable Buckling Silicon-On-Insulator (Soi) Microfabricated Membrane, Robert A. Lake

Theses and Dissertations

Buckled membranes are commonly used microelectromechanical systems (MEMS) structures. Recent work has demonstrated that the deflection and stiffness of these membranes can be tuned through localized joule heating. These devices were implemented into the design and fabrication of two novel device applications, a tunable pressure sensor and a steerable micromirror. A differential pressure across the membrane causes de reflection, up or down, which can be measured and related to a specific pressure. By tuning the stiffness of the membrane, its pressure response is varied providing a wider range of application for the pressure sensor. A 2.0mm by 2.0mm square membrane …

Fabrication Of Magnetic Two-Dimensional And Three-Dimensional Microstructures For Microfluidics And Microrobotics Applications, Hui Li

Theses and Dissertations--Mechanical and Aerospace Engineering

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods …

Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.

AFIT Patents

A novel fabrication process uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. This technique allows the use of positive photomasks with negative resists, opening the door to an ability to create complementary mechanical structures without the fabrication delays and costs associated with having to obtain a negative photomask. In addition, whereas an SU-8 mask would normally be left in place after processing, a technique utilizing a positive photoresist as a release layer has been developed so that the SU-8 masking material can …

Development Of Mems-Based Corrosion Sensor, Feng Pan

Graduate Theses and Dissertations

This research is to develop a MEMS-based corrosion sensor, which is used for monitoring uniform, galvanic corrosion occurring in infrastructures such as buildings, bridges. The corrosion sensor is made up of the composite of micro/nano metal particles with elastomers. The mechanism of corrosion sensor is based on the mass transport of corrosive species through the sensor matrix. When the metal particles in the matrix corrode, the electrical resistivity of the material increases due to increasing particle resistances or reduction of conducting pathways. The corrosion rate can be monitored by detecting the resistivity change in sensing elements. The life span of …

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …

Electrically Steerable Diffraction Gratings For Hyperspectral Imaging: A Microelectromechanical System Design And Fabrication, Saban Atinc Delican

Theses and Dissertations

The current research is focused on the design and fabrication of an electrically programmable diffraction grating using standard micro electro mechanical systems (MEMS) technology. The goal is to design a beam steering element required to build very small hyperspectral imaging (HSI) sensors. The diffraction grating will be used to perform beam-dispersion - a critical step in the imaging process. The proposed transmissive diffraction grating based approach will minimize the overall size and the number of components in the physical design of the hyperspectral imagers, thereby enabling us to exploit the traditional advantages of MEMS such as increased reliability, smaller size, …

Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey

Faculty Publications

This paper provides a quantitative comparison and explores the design space of lead zirconium titanate (PZT)–only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance (R_X) and quality factor (Q) with the resonators’ silicon layer thickness (t_Si). For identical lateral dimensions and PZT-layer thicknesses (t_PZT), the PZT-on-silicon resonator has higher resonant frequency (f_C), higher Q (5100 versus 140), lower R_X (51 Ω versus 205 Ω), and better linearity [third-order input intercept …

Toward A Flying Mems Robot, Nathan E. Glauvitz

Theses and Dissertations

The work in this thesis includes the design, modeling, and testing of motors and rotor blades to be used on a millimeter-scale helicopter style flying micro air vehicle (MAV). Three different types of motor designs were developed and tested, which included circular scratch drives, electrostatic motors, and comb drive resonators. Six different rotor designs were tested; five used residual stress while one design used photoresist to act as a hinge to achieve rotor blade deflection. Two key parameters of performance were used to evaluate the motor and rotor blade designs: the frequency of motor rotation and the angle of deflection …