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Electro-Mechanical Systems Commons™

Open Access. Powered by Scholars. Published by Universities.®

2005

Articles 1 - 8 of 8

Full-Text Articles in Electro-Mechanical Systems

Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda Sep 2005

Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda

Theses and Dissertations

The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property, the PIP is a potential material for use as an uncooled bolometer, or thermal sensor. In this research, a thermally-isolated pixel design, sensor characterization methods, and sensor fabrication and processing steps were developed. To create a microbolometer, the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to …

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Mechanics Of Hydrogenated Amorphous Carbon Deposits From Electron-Beam-Induced Deposition Of Paraffin Precursor, W. Ding, D. A. Dikin, X. Chen, R. D. Piner, R. S. Ruoff, E. Zussman, X. Wang, Xiaodong Li Jul 2005

Mechanics Of Hydrogenated Amorphous Carbon Deposits From Electron-Beam-Induced Deposition Of Paraffin Precursor, W. Ding, D. A. Dikin, X. Chen, R. D. Piner, R. S. Ruoff, E. Zussman, X. Wang, Xiaodong Li

Faculty Publications

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition(EBID) has been used to depositcarbonfilms that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBIDdeposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBIDdeposit was found to be hydrogenated amorphous carbon (a-C:H) having …

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Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko Jun 2005

Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko

Theses and Dissertations

While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, high isolation, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This model was verified by applying constant biases to metal-silicon nitride-silicon capacitors and tracking …

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Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson Mar 2005

Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson

Theses and Dissertations

MEMS IMUs are readily available in quantity and have extraordinary advantages over conventional IMUs in size, weight, cost, and power consumption. However, the poor performance of MEMS IMUs limits their use in more demanding military applications. It is desired to use multiple distributed MEMS IMUs to simulate the performance of a single, more costly IMU, using the theory behind Gyro-Free IMUs. A Gyro-Free IMU (GF-IMU) uses a configuration of accelerometers only to measure the three accelerations and three angular rotations of a rigid body in 3-D space. Theoretically, almost any configuration of six distributed accelerometers yields sufficient measurements to solve …

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Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion Mar 2005

Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion

Theses and Dissertations

Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …

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Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli Mar 2005

Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli

Theses and Dissertations

Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …

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Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An Jan 2005

Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An

Faculty Publications

The science and technology that are fundamental to the concept of composite materials are also the foundation for the construction and function of fuel cells and fuel cell systems. The present paper outlines this relationship in the context of the physics and chemistry that are enabled by the specific selection and arrangement of constituents of the “functional composite” fuel cell. General principles of operation are described, and fundamental issues are defined that must be addressed by the composites community if the fuel cell science and engineering is to advance. Examples of several types of functional composite fuel cells are presented, …

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Indium Growth On Si(100)-2 X 1 By Femtosecond Pulsed Laser Deposition, M. A. Hafez, M. S. Hegazy, H. E. Elsayed-Ali Jan 2005

Indium Growth On Si(100)-2 X 1 By Femtosecond Pulsed Laser Deposition, M. A. Hafez, M. S. Hegazy, H. E. Elsayed-Ali

Electrical & Computer Engineering Faculty Publications

Indium was grown on Si (100) -2×1 at room temperature by femtosecond pulsed laser deposition. Reflection high-energy electron diffraction (RHEED) was performed in situ to study film morphology and in-plane lattice spacing. Indium was found to grow on Si (100) -2×1 by the Stranski-Krastanov mode. The initial two-dimensional In layer formed in the In-2×1 structure with a lattice constant of 3.65 Å. The full-width at half-maximum (FWHM) of the specular peak decreased during the growth, indicating an increase of the In islands size. Further In growth on the initial In-2×1 layer showed the formation of hexagonal, elongated, and hemispherical islands …

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