Electro-Mechanical Systems Commons^™

Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts

Theses and Dissertations

MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront, and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the …

Demonstrating Optical Aberration Correction With A Mems Micro-Mirror Device, Shaun R. Hick

Theses and Dissertations

This research conducted the first demonstrated use of a micro-electro-mechanical structure (MEMS) mirror array to correct a static optical aberration. A well-developed technique in adaptive optics imaging systems uses a deformable mirror to reflect the incident wave front to the imaging stage of the system. By matching the surface of the deformable mirror to the shape of the wave front phase distortion, the reflected wave front will be less aberrated before it is imaged. Typical adaptive optics systems use piezo-electric actuated deformable mirrors. This research used an electrostatically actuated, segmented mirror array, constructed by standard MEMS fabrication techniques, to investigate …

Microelectromechanical Isolation Of Acoustic Wave Resonators, James R. Reid Jr.

Theses and Dissertations

Microelectromechainical systems (MEMS) is a rapidly expanding field of research into the design and fabrication of actuated mechanical systems on the order of a few micrometers to a few millimeters. MEMS potentially offers new methods to solve a variety of engineering problems. A large variety of MEMS systems including flip-up platforms, scanning micromirrors, and rotating micromirrors are developed to demonstrate the types of MEMS that can be fabricated. The potential of MEMS for reducing the vibration sensitivity of surface acoustic wave and surface transverse wave resonators is then evaluated. A micromachined vibration isolation system is designed and modeled. A fabrication …

Artificial Cochlea Design Using Micro-Electro-Mechanical Systems, George C. Dalton Ii

Theses and Dissertations

The use of Micro-Electro-Mechanical Systems (MEMS) in the design of an artificial cochlea is investigated in depth. Interdigitated finger (comb), cantilever, bridge, and mirror resonators are presented as possible devices used to implement the artificial cochlea. These resonators are demonstrated to be extremely high Q devices, capable of being tuned with a simple DC bias. This suggests a possible change to existing cochlea models that claim highly complex AC feedback as being responsible for changes in the damping of the basilar membrane. The new cochlea model presented here, using MEMS to approximate the tuning of the basilar membrane, may be …

Structures And Techniques For Implementing And Packaging Complex, Large Scale Microelectromechanical Systems Using Foundry Fabrication Processes, John H. Comtois

Theses and Dissertations

Microelectromechanical Systems, or 'MEMS' is a broad new field of research into devices that range in size from a few microns to a few millimeters. Much of the technology supporting MEMS research is borrowed from the microelectronics industry; so MEMS holds out the promise of batch fabrication of microminiaturized machines that can be easily integrated with electronics. This dissertation research investigated structures and methods for implementing and packaging complex, large scale microelectromechanical devices and systems using commercially available foundry fabrication processes. It specifies methods for creating and packaging large, complex MEM systems, allowing the exploration of new MEMS architectures at …

Investigation Of Electrotribological And Arc Erosion Behavior Of Cu-15vol.%Cr In Situ Composite, Zhongyu Chen

Masters Theses

Electrotribological and arc erosion behavior of Cu-15vol.%Cr in situ composite was investigated in terms of coefficient of friction, interfacial resistance, bulk temperature, and wear rate as a function of normal pressure, sliding speed, and electrical current. Microstructural change due to electrical sliding was studied to understand wear mechanisms. Cu-15vol.%Cr in situ composite was selected in this research because it exhibits an excellent combination of mechanical strength and electrical/thermal conductivity.

It was found that the average coefficient of friction decreased with increasing electrical current under dry electrical sliding. The average coefficient of friction was lower under lubricated electrical sliding than that …