Electro-Mechanical Systems Commons^™

Fused-Silica Microelectromechanical Systems For Relative Gravimetry, Ethan Doerstling

Theses and Dissertations

Gravimeters are devices that measure gravitational acceleration which can be used by the United States Air Force (USAF) in the areas of navigation and remote sensing. Fused-silica microelectromechanical systems (MEMS) devices offer capabilities to make inexpensive relative gravimeters with higher thermal stability than common silicon devices while maintaining good gravitational sensitivity. The fused-silica devices in this research were designed, simulated, fabricated, and tested to observe their performance as gravimeters. The devices exhibit properties of highly sensitive accelerometers but the current designs do not qualify as gravimeters. This study provides information to improve the sensitivity and stability of these fused-silica MEMS …

Development Of A 3-Dof Contactless Magnetic Joint Actuator, Elle Whitney

Theses and Dissertations

The magnetic joint actuator is a relatively recent research technology that expands on the brushless DC motor to encompass rotation in three degrees-of-freedom. These actuators involve a stator with a series of electromagnetic coils oriented normal to a spherical permanent magnet rotor which can be controlled by modulating the current of the stator coils. The development of a magnetic joint actuator that operates without a physical connection between the stator and the rotor has wide applications for robotics in dust-sensitive environments, where a device with bearings would otherwise falter. This work details the design, sensing, and control of such a …

The Prototype Of A Fully Automated Pressuremeter For Various Geotechnical Applications, Anuar Akchurin

Theses and Dissertations

The geotechnical engineering field requires high-quality in-situ testing equipment that ensures consistency in the test execution. This research focuses on developing and testing a prototype of a fully automated pressuremeter control unit to allow the industry to obtain reliable and controlled stress-strain data, thereby improving efficiency and reducing testing time.

The objectives of this work are to design and develop a system with the necessary components to perform the pressuremeter test, integrate the testing procedure into the state machine design, enable automated testing, and validate the results by comparing the stress-strain data with that obtained from the existing hand-operated pressuremeter …

Online Parameter Adaptation Of Lqr Controllers Via Rls For Prosthetic Joint Control: Experimental Validation On A Quanser Qube-Servo 2 Platform, Cynthia Lopez-Jordan

Theses and Dissertations

This thesis develops and experimentally validates an online adaptive Linear Quadratic Regulator (LQR) control method for prosthetic joint systems using Recursive Least Squares (RLS)-based real-time parameter estimation on the Quanser QUBE-Servo 2 platform. Traditional LQR controllers assume a fxed system model, which limits adaptability and results in reduced tracking accuracy, poor robustness, and loss of optimal performance when applied to dynamically changing prosthetic joints, infuenced by load variations, user gait changes, and mechanical wear. Limited experimental validation exists for combining RLS with online LQR adaptation in prosthetic-like systems.

To address these limitations, an RLS-driven Adaptive LQR framework was implemented to …

System Identification For Motion Control Of Unmanned Aerial Vehicles Platform, Raj Ramesh Agarwal

Theses and Dissertations

Comprehensive research on Unmanned Aerial Vehicles (UAV) system identification for motion control parameters is presented in this thesis, with a focus on the necessity of precise control and improved performance. Using Pseudorandom Binary Sequence (PRBS) and Normally Distributed Random Numbers, it presents a unique technique for excitation of UAV dynamic systems. It also shows how effective random signals are in time-domain identification for precise control in a range of flying circumstances. The piece of research includes a thorough analysis and implementation of various approaches and its further improvements, highlighting the benefits and drawbacks of each. These approaches include the free …

Towards The Automation Of Post-Processing Of Additive Manufacturing Using Collaborative Robots, Logan Schorr

Theses and Dissertations

Despite the incredible potential that collaborative robots have, they are underutilized in several industries that could benefit greatly. These specialized fields, such as additive manufacturing, face challenges that can be solved with the use of robotics, including advanced computer vision, end-effector tooling, and process refinement. My research aims to utilize collaborative robots in an effort to solve the above stated problems, for the specific fields of additive manufacturing. Specifically within this field is the automation of post-processing; this is normally completely manual, as the tools for automation are not sufficiently developed to handle the flexibility required for additive manufacturing. This …

Gpu Based Monte Carlo Estimation Of Eddy Current Losses In Electromagnetic Coil-Core System, Adwaith Ravichandran

Theses and Dissertations

A novel parallelizable probabilistic approach to model eddy currents in AC electromagnets is presented in this research. Consequently, power loss associated with the formation of these eddy currents is estimated and validated using experimental data. Furthermore, predicting the effect of ferromagnetic alternating field enhancement on power loss in the source excitation winding has been an active area of research. Unlike a stationary field, an alternating sinusoidal field diffuses partially into the ferromagnetic material leading to a predictably sub-optimal field enhancement. To model these physics, finite element techniques employ nonlinear iterative solvers which are time consuming. A novel method is developed …

Modeling The Effects Of Radiation On Microelectromechanical Resonators, David D. Lynes

Theses and Dissertations

As the use of MEMS becomes more prolific in air, space, defense, and power applications, they will be exposed to more extreme radiation environments. This dissertation explores the effects of ionizing and nonionizing radiation on MEMS. AlN-on-Si based piezoelectric bulk acoustic wave resonators were irradiated by gamma-rays and silicon ions while measuring S-parameters in situ. Changes to the resonator and equivalent circuit parameters are extracted. The resonators demonstrated resilience against the effects of radiation-induced charge trapping. However, radiation-induced atomic displacements caused shifts to resonant frequency. From these data, an atomistic model is derived to describe the relationship between radiation type …

Challenges And Signal Processing Of High Strain Rate Mechanical Testing, Barae Lamdini

Theses and Dissertations

Dynamic testing provides valuable insight into the behavior of materials undergoing fast deformation. During Split-Hopkinson Pressure Bar testing, stress waves are measured using strain gauges as voltage variations that are usually very small. Therefore, an amplifier is required to amplify the data and analyze it. One of the few available amplifiers designed for this purpose is provided by Vishay Micro-Measurements which limits the user’s options when it comes to research or industry. Among the challenges of implementing the Hopkinson technology in the industry are the size and cost of the amplifier. In this work, we propose a novel design of …

Electromechanical Fatigue Properties Of Dielectric Elastomer Stretch Sensors Under Orthopaedic Loading Conditions, Andrea Karen Persons

Theses and Dissertations

Fatigue testing of stretch sensors often focuses on high amplitude, low-cycle fatigue (LCF) behavior; however, when used for orthopaedic, athletic, or ergonomic assessments, stretch sensors are subjected to low amplitude, high-cycle fatigue (HCF) conditions. As an added layer of complexity, the fatigue testing of stretch sensors is not only focused on the life of the material comprising the sensor, but also on the reliability of the signal produced during the extension and relaxation of the sensor. Research into the development of a smart sock that can be used to measure the range of motion (ROM) of the ankle joint during …

Simultaneous Actuation And Sensing Of Electrostatic Mems, Jacob E. Song

Theses and Dissertations

Micro-Electro-Mechanical Systems (MEMS) are devices that play important roles of sensing and actuation in many different industries including automation, electronics, medical, communications, and defense. In order to make full use of these devices, it is important to understand the peripherals that enable these devices. Simultaneous actuation and control of MEMS devices is an important area of research as it enables feedback control of these device and allows devices to maintain performance as devices depreciate over their lifetime. The aim of this thesis is to perform a design space analysis on an electrostatic MEMS simultaneous actuation and sensing circuit that is …

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh

Theses and Dissertations

Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …

Robust Scandium Aluminum Nitride Mems Resonators For L Band Operation In Orbital Environments, Israel W. Dunk

Theses and Dissertations

This thesis investigates AlN alloyed with scandium in a variety of resonator architectures including WEM, overtone WEM, LEM, and SAW that have the potential to achieve high levels of electrical performance and environmental robustness. SAW resonators operating near 370 MHz are fabricated on polycrystalline Sc_.37Al_.63N, and AlN with the resulting devices compared and conclusions drawn as to the merits of each material. The design and fabrication of SAW devices is discussed in detail, with the operating characteristics of these resonators then tested both electrically and mechanically. Mechanical characterisation includes analysis of vibration and shock effects on …

Nebulizer-Based Systems To Improve Pharmaceutical Aerosol Delivery To The Lungs, Benjamin M. Spence

Theses and Dissertations

Combining vibrating mesh nebulizers with additional new technologies leads to substantial improvements in pharmaceutical aerosol delivery to the lungs across therapeutic administration methods. In this dissertation, streamlined components, aerosol administration synchronization, and/or Excipient Enhanced Growth (EEG) technologies were utilized to develop and test several novel devices and aerosol delivery systems. The first focus of this work was to improve the poor delivery efficiency, e.g., 3.6% of nominal dose (Dugernier et al. 2017), of aerosolized medication administration to adult human subjects concurrent with high flow nasal cannula (HFNC) therapy, a form of continuous-flow non-invasive ventilation (NIV). The developed Low-Volume Mixer-Heater (LVMH) …

Polyimide/Silicon Dioxide Nanocomposites As Dielectrics For Helium-Cooled High-Temperature Superconducting Cables, Harrison Michael Hones

Theses and Dissertations

In this thesis, polyimide (PI) and silicon dioxide (SiO2) were combined in the form of a nanocomposite for use as a dielectric on helium-cooled high-temperature superconducting (HTS) cables. Further, a cryogenic chamber was designed with the intent of cooling samples to 40 K for dielectric and thermal contraction testing. Composites were created through an in situ process which resulted in nanoparticle formation within the host matrix. Samples were tested for dielectric strength at room temperature (300 K) as well as cryogenic temperature (92 K) using liquid nitrogen as the coolant. Composite samples tested at 300 K averaged a dielectric strength …

Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood

Theses and Dissertations

The DoD requires a variety of COTS and number of custom microelectronics to provide important functionality to critical military systems. Photolithography and DRIE are two techniques commonly used in the development of deep anisotropic features for the fabrication and modification of microelectronics and MEMS. However, standard photolithography techniques are ineffective for unique substrate geometries and DRIE processes require a chemical passivation step only applicable to Si substrates. This work confirmed the capability of RIE using DWL to perform deep, highly selective, anisotropic etching on elevated, non-circular substrates.

Event-Based Visual-Inertial Odometry On A Fixed-Wing Unmanned Aerial Vehicle, Kaleb J. Nelson

Theses and Dissertations

Event-based cameras are a new type of visual sensor that operate under a unique paradigm. These cameras provide asynchronous data on the log-level changes in light intensity for individual pixels, independent of other pixels' measurements. Through the hardware-level approach to change detection, these cameras can achieve microsecond fidelity, millisecond latency, ultra-wide dynamic range, and all with very low power requirements. The advantages provided by event-based cameras make them excellent candidates for visual odometry (VO) for unmanned aerial vehicle (UAV) navigation. This document presents the research and implementation of an event-based visual inertial odometry (EVIO) pipeline, which estimates a vehicle's 6-degrees-of-freedom …

Micro-Contacts With 3-D Surfaces Made With Grayscale Lithography, Paul L.J. Michaud

Theses and Dissertations

MEMS switches show advantages over FET transistors and PIN diodes for switching applications due to low contact resistance, high linearity, low power use, better isolation and lower insertion loss. The switches have not replaced FETs or PIN diodes due to perceived limitations in their reliability and the need for stable contact resistance. In order to create switches acceptable for industry applications, research on micro-contact physics and failure mechanisms of micro-contacts is necessary to develop durable contact surfaces. The aim of this research was to design and fabricate micro-contacts with three-dimensional surfaces using grayscale lithography. The goal was to create devices …

A Mems Dual Vertical Electrometer And Electric Field-Mill, George C. Underwood

Theses and Dissertations

Presented is the first iteration of a Microelectromechanical System (MEMS) dual vertical electrometer and electric field-mill (EFM). The device uses a resonating structure as a variable capacitor that converts the presence of a charge or field into an electric signal. Previous MEMS electrometers are lateral electrometers with laterally spaced electrodes that resonate tangentially with respect to each other. Vertical electrometers, as the name suggests, have vertically spaced electrodes that resonate transversely with respect to each other. The non-tangential movement reduces damping in the system. Both types demonstrate comparable performance, but the vertical electrometer does so at a fraction of the …

Power Maximization For Pyroelectric, Piezoelectric, And Hybrid Energy Harvesting, Murtadha A. Shaheen

Theses and Dissertations

The goal of this dissertation consists of improving the efficiency of energy harvesting using pyroelectric and piezoelectric materials in a system by the proper characterization of electrical parameters, widening frequency, and coupling of both effects with the appropriate parameters.

A new simple stand-alone method of characterizing the impedance of a pyroelectric cell has been demonstrated. This method utilizes a Pyroelectric single pole low pass filter technique, PSLPF. Utilizing the properties of a PSLPF, where a known input voltage is applied and capacitance C_p and resistance R_p can be calculated at a frequency of 1 mHz to 1 Hz. …

Novel Applications Of A Thermally Tunable Bistable Buckling Silicon-On-Insulator (Soi) Microfabricated Membrane, Robert A. Lake

Theses and Dissertations

Buckled membranes are commonly used microelectromechanical systems (MEMS) structures. Recent work has demonstrated that the deflection and stiffness of these membranes can be tuned through localized joule heating. These devices were implemented into the design and fabrication of two novel device applications, a tunable pressure sensor and a steerable micromirror. A differential pressure across the membrane causes de reflection, up or down, which can be measured and related to a specific pressure. By tuning the stiffness of the membrane, its pressure response is varied providing a wider range of application for the pressure sensor. A 2.0mm by 2.0mm square membrane …

Mems Cantilever Sensor For Thz Photoacoustic Chemical Sensing And Spectroscopy, Nathan E. Glauvitz

Theses and Dissertations

Sensitive Microelectromechanical System (MEMS) cantilever designs were modeled, fabricated, and tested to measure the photoacoustic (PA) response of gasses to terahertz (THz) radiation. Surface and bulk micromachining technologies were employed to create the extremely sensitive devices that could detect very small changes in pressure. Fabricated devices were then tested in a custom made THz PA vacuum test chamber where the cantilever deflections caused by the photoacoustic effect were measured with a laser interferometer and iris beam clipped methods. The sensitive cantilever designs achieved a normalized noise equivalent absorption coefficient of 2.83x10^-10 cm^-1 W Hz^-1/2 using a 25 …

Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume

Theses and Dissertations

This document addresses two major obstacles facing metamaterial development: uncertainty in the characterization of electromagnetic field behavior in metamaterial structures and the relatively small operational bandwidth of metamaterial structures. To address the first obstacle, a method of prediction aided measurement is developed and exploited to examine the field interactions within metamaterial devices. The fusion of simulation and measurement techniques enhances the understanding of the physical interactions of fields in the presence of metamaterials. To address the second obstacle, this document characterizes the effectiveness of an adaptive metamaterial design that incorporates a microelectromechanical systems (MEMS) variable capacitor. Applying voltages to the …

Increasing The Sensitivity Of Surface Acoustic Wave (Saw) Chemical Sensors And Other Chemical Sensing Investigations, Nina R. Smith

Theses and Dissertations

The work involves the fabrication and testing of three different surface acoustic wave (SAW) device designs, an investigation of nanowires sensitive to chemicals and preconcentrator prototypes to include with chemical sensors. The SAW chemical sensor designs include modifications to a basic SAW device to see if the sensitivity of the SAW device is increased. The modifications consist of etched trenches along the propagation field, coating the device with carbon nanotubes (CNTs) under the chemically sensitive layer and coating CNTs on top of the chemically sensitive layer. SAW devices are coated with Nafion®, a polymer sensitive to ethanol. The tests indicate …

Investigation Of Thermal Management And Metamaterials, Calvin T. Roman

Theses and Dissertations

Thermal metamaterials are materials composed of engineered, microscopic structures that exhibit unique thermal performance characteristics based primarily on their physical structures and patterning, rather than just their chemical composition or bulk material properties. The heat transfer performance attributes of a thermal metamaterial are such that similar performance cannot be obtained using conventional materials or compounds. Thermal metamaterials are an emerging technology, and are just now beginning to be acknowledged and developed by the microelectronics and material sciences community. This thesis effort analyzed the current state of thermal metamaterial research, examined the physics and theory of heat transfer and electrical conductivity …

Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert

Theses and Dissertations

This research examines the physical and electrical processes involved in lifecycle failure of Microelectromechanical (MEMS) Radio-Frequency (RF) cantilever beam ohmic contact switches. Failures of these switches generally occur at the contact, but complete details of performance of microcontacts are difficult to measure and have not been previously reported. This study investigated the mechanics of microcontact behavior by designing and constructing a novel experimental setup. Three representative contact materials of varying microstructure (Au, Au5%Ru, Au4%V₂O₅) were tested and parameters of contact during cycling were measured. The Au4%V₂O₅, a dispersion strengthened material developed at …

The Design And Verification Of A Mems Combustor Chamber, Constance Yvonne Meadors

Theses and Dissertations

A pre-combustion micro-mixing chamber has been designed as a component of the University of Arkansas at Little Rock's (UALR) proposed complete microelectromechanical (MEMS) hybrid rocket on a silicon chip. A MEMS pre-combustion mixer allows identification of pressures and flow rates for stochiometric mixing of combustion gases. The pre-combustion mixer has been designed to interface with a mass spectrometer for detection and characterization of combustion reactants and products as the first stage of a UALR hybrid micro-thruster. This research focuses on the design, fabrication, and validation of a pre-combustion micro-mixer that satisfies the requirements of MEMS micro-spacecraft and operates in space …

Electrically Steerable Diffraction Gratings For Hyperspectral Imaging: A Microelectromechanical System Design And Fabrication, Saban Atinc Delican

Theses and Dissertations

The current research is focused on the design and fabrication of an electrically programmable diffraction grating using standard micro electro mechanical systems (MEMS) technology. The goal is to design a beam steering element required to build very small hyperspectral imaging (HSI) sensors. The diffraction grating will be used to perform beam-dispersion - a critical step in the imaging process. The proposed transmissive diffraction grating based approach will minimize the overall size and the number of components in the physical design of the hyperspectral imagers, thereby enabling us to exploit the traditional advantages of MEMS such as increased reliability, smaller size, …

Conceptual Mems Devices For A Redeployable Antenna, Virginia Miller

Theses and Dissertations

Micro-Electro-Mechanical Systems (MEMS) are becoming an integral part of our lives through a wide range of applications, including MEMS accelerators for air bag deployment in vehicles, micromirrors in projection devices, and various sensors for chemical/biological applications. MEMS are a key aspect of ever-increasing significance in a myriad of commercial and military applications. Because of this importance, this thesis utilizes MEMS devices that can deploy and retract an antenna suitably sized for placement on an insect or microrobot for communication purposes. A target monopole antenna with a length of 1 mm was used as a test metric. From this requirement, several …

Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard

Theses and Dissertations

AFRL/MLPJE had developed a novel thermal sensing material termed protein-impregnated-polymer (PIP). Thus far, a proof-of-concept has been demonstrated using a macro-sized pixel (0.64 mm²) as a bolometric detector. In an effort to better characterize this novel thermal sensing material, experimental data was used to determine figures of merit (FOMs) comparative to off-the-shelf thermal detectors. Microelectromechanical (MEMS) pixels were designed and used as the support structure for an inkjet-deposited droplet of the PIP. During the material characterization, two observations were made: PIP is a pyroelectric material, and the polymer (polyvinyl alcohol (PVA)) without the protein was found to be …