Electro-Mechanical Systems Commons^™

Design, Fabrication, Testing Of Cnt Based Isfet And Characterization Of Nano/Bio Materials Using Afm, Zhuxin Dong

Graduate Theses and Dissertations

A combination of Carbon Nanotubes (CNTs) and Ion Selective Field Effect Transistor (ISFET) is designed and experimentally verified in order to develop the next generation ion concentration sensing system. Micro Electro-Mechanical System (MEMS) fabrication techniques, such as photolithography, diffusion, evaporation, lift-off, packaging, etc., are required in the fabrication of the CNT-ISFET structure on p-type silicon wafers. In addition, Atomic Force Microscopy (AFM) based surface nanomachining is investigated and used for creating nanochannels on silicon surfaces. Since AFM based nanomanipulation and nanomachining is highly controllable, nanochannels are precisely scratched in the area between the source and drain of the FET where …

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …

Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume

Theses and Dissertations

This document addresses two major obstacles facing metamaterial development: uncertainty in the characterization of electromagnetic field behavior in metamaterial structures and the relatively small operational bandwidth of metamaterial structures. To address the first obstacle, a method of prediction aided measurement is developed and exploited to examine the field interactions within metamaterial devices. The fusion of simulation and measurement techniques enhances the understanding of the physical interactions of fields in the presence of metamaterials. To address the second obstacle, this document characterizes the effectiveness of an adaptive metamaterial design that incorporates a microelectromechanical systems (MEMS) variable capacitor. Applying voltages to the …

High Conductivity Solid Oxide Electrolyte Composite-Laminates Utilizing Scandia/Ceria Co-Doped Zirconia Core With Yttria Stabilized Zirconia Outer Skins, Jay Neutzler, Xinyu Huang, Joshua Sightler, Yan Chen, Nina Orlovskaya

Faculty Publications

Increasing the conductivity of electrolytes in lower temperature Solid Oxide Fuel Cells (SOFC) is of great importance. However, there are several challenges that are to be addressed, which include phase stability of electrolyte’s crystal structure, chemical stability in both oxidizing and reducing environments, and maintaining mechanical integrity and high ionic conductivity over time.

Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor

Master's Theses

This thesis describes the design, fabrication, and testing process for a microfluidic phosphate colorimeter utilized for water quality analysis. The device can be powered by, and interfaced for data collection with, a common cell phone or laptop to dramatically reduce costs. Unlike commercially available colorimeters, this device does not require the user to measure or mix sample and reagent. A disposable poly(dimethylsiloxane) (PDMS) microfluid chip, powered by an absorption pumping mechanism, was used to draw water samples, mix the sample at a specific ratio with a molybdovanadate reagent, and load both fluids into an onboard cuvette for colorimetric analysis. A …

Electroactive Polymers (Eap): Simulation Studies Of The Actuation Mechanisms In A Cantilever Cellulose Electroactive Paper, Fatim A. Mbaye

Electrical & Computer Engineering Theses & Dissertations

Electroactive polymers (EAPs) exhibit large strain in response to an external electric field and have attracted a great deal of attention in recent years for sensor and actuator applications. Favorable properties include soft actuation, ease and simplicity in manufacturing, being light-weight, low power consumption, and the ability to withstand harsh environments. However, this is an emerging material, and several aspects, including the fundamental mechanisms for piezoelectric deflections, remain unclear. This project studies the internal electromechanical factors that contribute to the voltage induced deflections of electro-active paper (EAPap). Experimental measurements of bias dependent deflections and water absorption as a function of …

Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy

AFIT Patents

A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results …

Characterization Of Intercalated Graphite Fibers For Microelectromechanical Systems (Mems) Applications, Bryan W. Winningham

Theses and Dissertations

Research was accomplished to characterize the electrical and physical characteristic changes of the Thornel® P-100 carbon fiber and five variants when intercalated with 96% sulfuric acid and incorporated the use of Microelectromechanical Systems (MEMS) structures for testing purposes. The five fiber variants were oxidized in 1 M nitric acid at 0.5 A for 30 seconds, 1 and 2 minutes, the last two samples were detreated at 1150 °C for one hour prior to the nitric acid treatment. The fibers were mounted onto a MEMS die, placed into a chip carrier, sulfuric acid added, the chip carrier sealed and testing accomplished. …

Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada

Theses and Dissertations

Micro-Raman (µRaman) spectroscopy is an efficient, non-destructive technique widely used to determine the quality of semiconductor materials and microelectromechanical systems. This work characterizes the stress distribution in wurtzite gallium nitride grown on c-plane sapphire substrates by molecular beam epitaxy. This wide bandgap semiconductor material is being considered by the Air Force Research Laboratory for the fabrication of shock-hardened MEMS accelerometers. µRaman spectroscopy is particularly useful for stress characterization because of its ability to measure the spectral shifts in Raman peaks in a material, and correlate those shifts to stress and strain. The spectral peak shift as a function of stress, …

Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli

Theses and Dissertations

Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm^-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …

Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An

Faculty Publications

The science and technology that are fundamental to the concept of composite materials are also the foundation for the construction and function of fuel cells and fuel cell systems. The present paper outlines this relationship in the context of the physics and chemistry that are enabled by the specific selection and arrangement of constituents of the “functional composite” fuel cell. General principles of operation are described, and fundamental issues are defined that must be addressed by the composites community if the fuel cell science and engineering is to advance. Examples of several types of functional composite fuel cells are presented, …

Application Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Arton Of Vibrational Techniques In Determination Of Dynamic Properties Of Agricultural Products-State Of The Art, Silas Kajuna

Tanzania Journal of Engineering and Technology (TJET)

Vibration is one of the techniques employed in the determination of dynamic properties of fruits and vegetables. It entails generation of a mechanical or acoustic vibrational signal which is propagated through the flesh of the agricultural material. A transducer is either attached or held close to the specimen to monitor the propagation of the signal through the specimen. The manner in which the signal is transmitted through the material is analyzed, and the dynamic properties of the specimen which relate to its firmness or its internal being are derived. The technique has been around for the past 30 years or …