Semiconductor and Optical Materials Commons^™

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …

The Effect Of Polarization And Ingan Quantum Well Shape In Multiple Quantum Well Light Emitting Diode Heterostructures, Patrick M. Mcbride

Master's Theses

Previous research in InGaN/GaN light emitting diodes (LEDs) employing semi-classical drift-diffusion models has used reduced polarization constants without much physical explanantion. This paper investigates possible physical explanations for this effective polarization reduction in InGaN LEDs through the use of the simulation software SiLENSe. One major problem of current LED simulations is the assumption of perfectly discrete transitions between the quantum well (QW) and blocking layers when experiments have shown this to not be the case. The In concentration profile within InGaN multiple quantum well (MQW) devices shows much smoother and delayed transitions indicative of indium diffusion and drift during …

Deposition, Characterization, And Fabrication Of A Zinc Oxide Piezoelectric Thin Film Microspeaker Using Dc Reactive Sputtering, Adam Olzick

Master's Theses

A piezoelectric microspeaker device that could be used in a variety of acoustic applications was designed and fabricated using a thin film ZnO layer that was reactively DC sputtered onto a single crystalline n-type silicon substrate. When tested the microspeaker did not produce sound due to complications in the etching process, the thickness of the diaphragms, and clamping effects. Instead, a characterization approach was taken and the structural, optical, electrical, and piezoelectric properties of the ZnO were investigated. Scanning electron microscopy, x-ray diffraction, and atomic force microscopy were utilized to discover the ZnO’s structural properties. Using the XRD and SEM, …

The Design And Fabrication Of A Silicon Membrane For Electrostatic Actuation, Elizabeth L. Brooks

Materials Engineering

An electrostatically actuated silicon membrane was designed and fabricated utilizing a siliconon- insulator wafer. The SOI wafer contains three layers- a 400μm thick “handle” layer of silicon followed by a 2μm thick oxide layer topped with a 20μm thick “device” layer of silicon. The embedded oxide layer acts as an etch-stop during silicon etching, leaving a thin membrane of consistent thickness on the device side. The device dimensions were chosen to provide acceptable membrane deflection predicted by calculations and Finite Element Analysis. A microfabrication process plan was designed to produce thin membranes appropriate for electrostatic actuation. A 700nm layer of …

Bond Strength Characterization Of Su-8 To Su-8 For Fabricating Microchannels Of An Electrokinetic Microfluidic Pump, Nash Anderson

Materials Engineering

Photosensitive negative resist polymer layers of SU-8 2050 were adhered to 100 mm n-type silicon and Pyrex wafers via spin coating. These wafers were then bonded together at various temperatures of 100 ͦC, 120 ͦC, 140 ͦC, 150 ͦC, 160 ͦC, and 180 ͦC. The target thickness of each SU-8 layer was 100 µm. Photolithography was used to create microfluidic channels within the SU-8. An n-type silicon wafer and a Pyrex wafer, each with an SU-8 layer, were brought together on the “hard bake” or final step of SU-8 polymerization. A pressure of ~300 KPa was applied during the hard …

Design And Fabrication Of Serpentine-Hinged Silicon Micro-Mirror Devices, Nicholas Wiswell

Materials Engineering

Seven different actuating micro-mirror designs were created and verified via finite element analysis. Two were straight torsion beam hinge designs representative of previous work at Cal Poly; the remaining five were new designs incorporating serpentine hinges. The surface area of these mirror devices ranged from 0.5 square millimeters to 12.5 square millimeters. Geometric patterns representing the device profiles were created and used to obtain photolithographic masks. Beginning with a 400μm thick, 100mm diameter silicon on insulator wafer, a silicon dioxide layer was thermally grown on the surface at 1050 degrees Celsius. Positive photoresist was then spun onto the wafer at …

Improving Solar Cell Performance Using Cdse/Zns Core/Shell Quantum Dots In A Spectral Conversion System, Buddy Bump

Materials Engineering

Solar cells have been found to absorb light more efficiently and effectively when the energy of incoming photons matches the electronic band gap of the solar cell. Spectral conversion of light from UV to lower energy wavelengths can improve solar cell efficiency an estimated 14.5%. Cadmium Selenium/Zinc Sulfide Core/Shell quantum dots have been successfully embedded in PDMS silicone elastomer. Using a Keithley 2400 Electrometer with Labview software, voltage and current characteristics have been recorded in steps of 10 mV with a wait time of 250 ms on a commercially available solar cell using an artificial solar spectrum created by a …

Creating A Solar Cell Array From A Single Silicon Wafer, Samyukta Gade, Roderick Marstell

Materials Engineering

Two different processes to create multi-celled solar panels from single wafers were made and implemented. To do this, the cells must not have a common ground, and both designs use different approaches to solve this problem. One utilizes a 2.9 µm deep n-type well within a 10.74 µm deep p-type well in an n-type wafer. There are two cells in series, which has a theoretical voltage of 1 V. The cells are connected in series with 1.9 µm thick gold traces. Any area that the gold is not in contact with the silicon has a .5 µm layer silicon dioxide …

The Effects Of Concentration, Stir Rate, And Processing Temperature On The Iridescence Of Polymethyl Methacrylate Nanoparticles, David Baruela

Materials Engineering

Synthetic opals were synthesized by creating polymethyl methacrylate (PMMA) nanospheres in order to determine which conditions would create the best iridescent samples. The factors affecting the iridescence were nanosphere concentration, stir rate, and processing temperature. PMMA solutions were made by adding 17 mg of granular azobis to a solution of 16 mL of distilled water with 3 mL of methyl methacrylate (MMA). The solution was stirred at different rates, slow and fast, and different temperatures, 70 °C and 90 °C, under a constant flow of nitrogen gas for 40 minutes until the polymerization reaction was complete. Glass substrates were prepared …

Fabricating Replacement Glass Prisms For The Piedras Blancas Lighthouse, Daniel Garcken

Materials Engineering

The objective of this project was to design and create a process for manufacturing replacement glass prisms for the Piedras Blancas lighthouse and several other lighthouses nationwide. The prisms were designed to be in multiple metal arrays spread across the floor of the beacon room (the topmost room of the lighthouses). The prisms functioned to transmit extra, radiant light from the beacon light through the floor of the beacon room and disperse it into the maintenance room below. Using computer aided drafting (CAD) software, an original prism was measured and modeled; the corresponding mold was also modeled. G-codes for controlling …

Synthesis Of White Cadmium-Selenium Quantum Dots, Kyle Reilly

Materials Engineering

A process was developed for the synthesis of cadmium-selenium quantum dots that fluoresce at multiple wavelengths, giving a white color to the solution. The process involved making a selenium pre-cursor, then a cadmium precursor, then injecting the selenium precursor into the cadmium precursor and extracting a sample. Once the a repeatable process for synthesizing white quantum dots was developed, the absorption and fluorescence was measured and recorded over a period of two weeks. In the development of the process, the key variables were the temperature of the cadmium precursor and the time between injecting the selenium precursor and extracting the …

Lunalight Project: Solar-Rechargeable Led Lantern And Cell Phone Charger, Sean C. Dawson, Michael E. Deagen, Francisco N. Dye, Brian S. Mircheff, Ryan O. Ramelb

Materials Engineering

Today, 1.6 billion people in the world do not have access to grid electricity. Villagers living off the grid in developing nations resort to kerosene lanterns to light their homes. The fumes from burning kerosene are toxic and lead to respiratory illnesses over time. Our sponsor, OneMillionLights, plans to help people to escape poverty by providing them with a clean source of light at night. Children that must work in the fields during the day can use a solar-rechargeable lantern at night to read or study, and street vendors can use the lanterns at night to improve their businesses.

The …

The Design And Fabrication Of A Microfluidic Reactor For Synthesis Of Cadmium Selenide Quantum Dots Using Silicon And Glass Substrates, Peter Robert Gonsalves

Master's Theses

A microfluidic reactor for synthesizing cadmium selenide (CdSe) quantum dots (QDs) was synthesized out of a silicon wafer and Pyrex glass. Microfabrication techniques were used to etch channels into the silicon wafer. Holes were wet-drilled into the Pyrex glass using a diamond-tip drill bit. The Pyrex wafer was anodically bonded to the etched silicon wafer to enclose the microfluidic reactor. Conditions for anodic bonding were created by exposing the stacked substrates to 300V at ~350oC under 5.46N of force. A syringe containing a room temperature CdSe solution was interfaced to the microfluidic reactor by using Poly (dimethylsiloxane) (PDMS) as an …

Design, Fabrication, And Characterization Of A Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm For Use In Micro-Electro-Mechanical Systems, Brian Joel Alvarez

Master's Theses

Previous work done at Cal Poly has shown that thin-film nickel-titanium (NiTi) can be easily sputtered onto silicon wafers and annealed to create a crystallized shape memory alloy (SMA) film. Initial work on creating devices yielded cantilevers that were highly warped due to thin-film stress created during the sputtering process. The objective of this work was to create a thin-film NiTi SMA device that could be better characterized. A membrane was selected due to the simplicity of fabrication and testing which would also oppose the thin-film stress due to the increase in attachment points to the substrate.

Silicon wafers were …

Synthesis And Characterization Of Cdse-Zns Core-Shell Quantum Dots For Increased Quantum Yield, Joshua James Angell

Master's Theses

Quantum dots are semiconductor nanocrystals that have tunable emission through changes in their size. Producing bright, efficient quantum dots with stable fluorescence is important for using them in applications in lighting, photovoltaics, and biological imaging. This study aimed to optimize the process for coating CdSe quantum dots (which are colloidally suspended in octadecene) with a ZnS shell through the pyrolysis of organometallic precursors to increase their fluorescence and stability. This process was optimized by determining the ZnS shell thickness between 0.53 and 5.47 monolayers and the Zn:S ratio in the precursor solution between 0.23:1 and 1.6:1 that maximized the relative …

Final Design Review: Design Of An Integrated Solar Cell Array To Power A Solar Ear Hearing Aid Battery Recharger, Christina (Chrissa) Blattner, Scott Carey, Jared Myren, Faye Siao

Materials Engineering

As the energy of fossil fuel supplies are fast depleting due to high consumptions of energy by human beings, the need for other sources of energy, such as solar energy, has become a viable option. By creating solar cell arrays the desired voltage can be generated. The overall goal of the Solar Ear project is to create an array of photovoltaic cells connected with aluminum tracings to recharge batteries that are specifically used for hearing aids. The goal embodies two main areas: the design of a processing method to connect the cells during a micro-fabrication process and the creation of …

Determining A Method For Rendering Low Cost Cdse(Zns) Core(Shell) Quantum Dots Aqueous Soluble Via Amphiphilic Polymer Wrapping, Patrick Mcbride

Materials Engineering

Herein is described the procedure of two amphiphilic polymer wrapping techniques that may be employed for obtaining aqueous soluble quantum dots (QDs) for use in biological fluorescent imaging applications. The advent of QDs has led to new nanoscale fluorescent materials that exhibit unparalleled quantum yields (QYs), high resistance to photobleaching, tunable emissions, and
absorption over a large optical range. However, the QD synthesis employed here at Cal Poly to obtain bright, photostable CdSe(ZnS) core(shell) QDs involves the use of organic solvents and surfactants, leading to hydrophobic QDs. Since all of biology relies on aqueous solubility, this hydrophobicity creates a major …

Design And Characterization Of A Process For Bulk Synthesis Of Cadmium Selenide Quantum Dots, Susan Harada

Materials Engineering

The objective of the process is to synthesize quantum dots that will fluoresce over the visible spectrum of 450 to 650nm; then to mix the quantum dots together in a polymer matrix so that when illuminated with a blue LED the mixture yields “white” light. The current quantum dot synthesis is a chemical process that involves adding a room temperature Se-TOP precursor to a 225°C Cd precursor solution to cause nucleation and growth of nanoparticles. This method, however, only yields quantum dots that fluoresce in the 520 to 600nm range. In order to create the “white” light phosphor replacement, red …

The Design And Manufacture Of A Microfluidic Reactor For Synthesis Of Cadmium Selenide Quantum Dots Using Silicon And Glass Substrates, Peter Gonsalves

Materials Engineering

A microfluidic reactor for synthesizing cadmium selenide (CdSe) quantum dots (QDs) was synthesized out of silicon and Pyrex glass. Microfabrication techniques were used to etch the channels into the silicon wafer. Holes were wet-drilled into Pyrex glass using a diamond-tip drill bit. The Pyrex wafer was aligned to the etched silicon wafer and both were anodically bonded to complete the microfluidic reactor. Conditions for anodic bonding were created by exposing the stacked substrates to 300V at ~350^oC under 5.46N of force.  Bulk CdSe solution was mixed at room temperature and treated as a single injection. The syringe containing …

Feasibility Of Manipulating Correlated Color Temperatures With A Phosphor Converted High-Powered Light Emitting Diode White Light Source, Matthew Michael Little

Master's Theses

In this thesis we examine the feasibility of developing a white light source capable of producing colors between 2500 and 7500 Kelvin on the black-body radiator spectrum by simply adjusting amperage to a blue and ultraviolet (UV) light emitting diode (LED). The purpose of a lighting source of this nature is to better replicate daylight inside a building at a given time of day. This study analyzes the proposed light source using a 385 nm UV LED, a 457 nm blue LED, a 479 nm blue LED, a 562 nm peak cerium doped yttrium aluminum garnet (YAG:Ce) phosphor, and a …

Enhanced Light Extraction Efficiency From Gan Light Emitting Diodes Using Photonic Crystal Grating Structures, Simeon S. Trieu

Master's Theses

Gallium nitride (GaN) light emitting diodes (LED) embody a large field of research that aims to replace inefficient, conventional light sources with LEDs that have lower power, higher luminosity, and longer lifetime. This thesis presents an international collaboration effort between the State Key Laboratory for Mesoscopic Physics in Peking University (PKU) of Beijing, China and the Electrical Engineering Department of California Polytechnic State University, San Luis Obispo. Over the course of 2 years, Cal Poly’s side has simulated GaN LEDs within the pure blue wavelength spectrum (460nm), focusing specifically on the effects of reflection gratings, transmission gratings, top and bottom …

Optimization Of P3ht-Pcbm Polymer Solar Cells Through Device Simulation And Manufacturing, James Boom

Computer Engineering

Given a good model and implementation of that model, computer simulation can be used to reduce the time and material costs of research. To this end I worked with other students to manufacture, test and simulate the single layer P3HT-PCBM solar cell. Using the data collected from this project, future work can then be done with the project's simulator to further optimize these types of solar cell devices.

Feasibility Of Ellipsometric Sensor Development For Use During Pecvd Siox Coated Polymer Product Manufacturing, Daniel Lynn Helms

Master's Theses

Polymeric materials have provided pathways to products that could not be manufactured otherwise. A new technology which merges the benefits of ceramics into these polymer products has created materials ideally suited to many different industries, like food packaging. Nano Scale Surface Systems, Inc. (NS3), a company which coats polymers with ceramic oxides like SiO2 through a process known as plasma enhanced chemical vapor deposition (PECVD), was interested in the feasibility of an in line measurement system for monitoring the deposited films on various polymer products. This project examined two different coated polymer products, polyethylene terephthalate (PET) beverage containers and biaxially …

Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor

Master's Theses

This thesis describes the design, fabrication, and testing process for a microfluidic phosphate colorimeter utilized for water quality analysis. The device can be powered by, and interfaced for data collection with, a common cell phone or laptop to dramatically reduce costs. Unlike commercially available colorimeters, this device does not require the user to measure or mix sample and reagent. A disposable poly(dimethylsiloxane) (PDMS) microfluid chip, powered by an absorption pumping mechanism, was used to draw water samples, mix the sample at a specific ratio with a molybdovanadate reagent, and load both fluids into an onboard cuvette for colorimetric analysis. A …

Optimization Of Gan Laser Diodes Using 1d And 2d Optical Simulations, Sean Richard Keali'i Jobe

Master's Theses

This paper studies the optical properties of a GaN Laser Diode (LD). Through simulation, the GaN LD is optimized for the best optical confinement factor. It is found that there are optimal thicknesses of each layer in the diode that yield the highest optical confinement factor. There is a strong relationship between the optical confinement factor and lasing threshold—a higher optical confinement factor results in a lower lasing threshold. Increasing optical confinement improves lasing efficiency. Blue LDs are important to the future of lighting sources as they represent the final color in the RGB spectrum that does not have a …

Characterization Of A Viscoelastic Response From Thin Metal Films Deposited On Silicon For Microsystem Applications, Steven L. Meredith

Master's Theses

Understanding the mechanisms that control the mechanical behavior of microscale actuators is necessary to design an actuator that responds to an applied actuation force with the desired behavior. Micro actuators which employ a diaphragm supported by torsional hinges which deform during actuation are used in many applications where device stability and reliability are critical. The material response to the stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. A fully recoverable non-linear viscoelastic response has been observed in electrostatically driven micro actuators employing torsional hinges of silicon covered with thin metal films. …

Design, Fabrication, Modeling And Characterization Of Electrostatically-Actuated Silicon Membranes, Brian C. Stahl

Master's Theses

This thesis covers the design, fabrication, modeling and characterization of electrostatically actuated silicon membranes, with applications to microelectromechanical systems (MEMS). A microfabrication process was designed to realize thin membranes etched into a silicon wafer using a wet anisotropic etching process. These flexible membranes were bonded to a rigid counterelectrode using a photo-patterned gap layer. The membranes were actuated electrostatically by applying a voltage bias across the electrode gap formed by the membrane and the counterelectrode, causing the membrane to deflect towards the counterelectrode. This deflection was characterized for a range of actuating voltages and these results were compared to the …

Design, Fabrication, And Characterization Of An Electrostatically Actuated Microfluidic Valve, Ryan Dale Rivers

Master's Theses

Microfluidic device construction uses certain critical structures throughout many different applications. The valve structure remains one of the primary structures that present a barrier to miniaturization and portability. The extensive support devices required to power common microfluidic valves remove a significant amount of freedom from microfluidic device design. Moving to electrostatic methods of actuation could reduce the overall footprint of the microfluidic valve. This thesis covers three concept prototypes. Concept I presents an attempt at inlaying gold electrodes into polydimethylsiloxane substrates. Concept II attempts to use liquid silver injected into channels as electrode materials. Concept III uses aluminum sputtering to …