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Articles 31 - 60 of 64

Full-Text Articles in Semiconductor and Optical Materials

Direct Solar Absorption Nanoparticle Doped Membranes For A Hybrid Membrane Distillation And Photovoltaic Cell, Alejandro Espejo Sanchez Dec 2020

Direct Solar Absorption Nanoparticle Doped Membranes For A Hybrid Membrane Distillation And Photovoltaic Cell, Alejandro Espejo Sanchez

Boise State University Theses and Dissertations

The growing demand for clean water supplies is driving the need for an innovative approach of water desalination. Developing a method for treating water with high salinities is possible with membrane distillation (MD). Additionally, MD is very attractive for pairing with solar energy due to the low temperature requirements. The integration of a membrane distillation system with a photovoltaic (PV) system will result in the co-production of electricity and clean water, thereby improving the economics of MD. Such a hybrid system will directly absorb thermal energy in the membrane for desalination while taking advantage of the spectrally selective nature of …


The Development Of All Solid-State Optical Cryo-Cooler, Junwei Meng May 2020

The Development Of All Solid-State Optical Cryo-Cooler, Junwei Meng

Optical Science and Engineering ETDs

This dissertation describes the development of an all solid-state optical cryo-cooler. Crystals of 10% wt. ytterbium-doped yttrium lithium fluoride (Yb3+:YLF) are used to cool an infrared HgCdTe sensor payload to an absolute temperature below 135 K, equivalent to delta T equal 138 K below ambient. This record level of cooling is accomplished with a single stage, in a completely vibration-free environment, with a corresponding cooling power of 190 mW. This milestone is made possible by the design and fabrication of an undoped YLF thermal link that efficiently shields the payload with a non-right angle kink from intense anti-Stokes …


Bgaas Alloy Semiconductors For Lasers On Silicon, Joshua Mcarthur May 2019

Bgaas Alloy Semiconductors For Lasers On Silicon, Joshua Mcarthur

Mechanical Engineering Undergraduate Honors Theses

In the world of semiconductors today, there is a large dissonance between optical devices and electrical application. Due to the limitations of electron transport, photonic integrated circuits are soon-to-be vital in fields like telecommunications and sensing. Right now, these PIC’s are mostly made from indium phosphide. Due to its ubiquitous nature, however, there is a huge push to integrate efficient optics with silicon. It’s cheap, abundant, dope-able, and our electronic infrastructure is based on it. The reason why silicon photonics aren’t already commercialized is because of silicon’s indirect bandgap—it is inefficient with optical applications. The problem with combining direct gap …


Comparative Study Of Power Semiconductor Devices In A Multilevel Cascaded H-Bridge Inverter, Kenneth Mordi Dec 2018

Comparative Study Of Power Semiconductor Devices In A Multilevel Cascaded H-Bridge Inverter, Kenneth Mordi

Graduate Theses and Dissertations

This thesis compares the performance of a nine-level transformerless cascaded H-bridge (CHB) inverter with integrated battery energy storage system (BESS) using SiC power MOSFETs and Si IGBTs. Two crucial performance drivers for inverter applications are power loss and efficiency. Both of these are investigated in this thesis. Power devices with similar voltage and current ratings are used in the same inverter topology, and the performance of each device is analyzed with respect to switching frequency and operating temperature. The loss measurements and characteristics within the inverter are discussed. The Saber® simulation software was used for the comparisons. The power MOSFET …


Creating A Computational Tool To Simulate Vibration Control For Piezoelectric Devices, Ahmet Ozkan Ozer, Emma J. Moore Nov 2018

Creating A Computational Tool To Simulate Vibration Control For Piezoelectric Devices, Ahmet Ozkan Ozer, Emma J. Moore

Posters-at-the-Capitol

Piezoelectric materials have the unique ability to convert electrical energy to mechanical vibrations and vice versa. This project takes a stab to develop a reliable computational tool to simulate the vibration control of a novel “partial differential equation” model for a piezoelectric device, which is designed by integrating electric conducting piezoelectric layers constraining a viscoelastic layer to provide an active and lightweight intelligent structure. Controlling unwanted vibrations on piezoelectric devices (or harvesting energy from ambient vibrations) through piezoelectric layers has been the major focus in cutting-edge engineering applications such as ultrasonic welders and inchworms. The corresponding mathematical models for piezoelectric …


Three Speed 3d Printed Magnetic Gear, Robert J. Rutherford May 2018

Three Speed 3d Printed Magnetic Gear, Robert J. Rutherford

Maseeh Summer Undergraduate Research Experience

Power transmission is traditionally achieved with a mechanical gear. Mechanical gears require maintenance, cause vibration, and have no overload protection. Magnetic gears offer an innovative solution to these drawbacks as they do not require regular maintenance, have no need for lubrication, create very little acoustic noise, have built in overload protection and as a result of these advantages, have a longer lifetime of operation. This research focused upon the design, assembly and demonstration of the magnetic gear concept. The research used a solid works design, 3D printed ABS plastic housing, and use of neodymium magnets and ferromagnetic iron segments.

This …


Phase Transitions In Monochalcogenide Monolayers, Mehrshad Mehboudi May 2018

Phase Transitions In Monochalcogenide Monolayers, Mehrshad Mehboudi

Graduate Theses and Dissertations

Since discovery of graphene in 2004 as a truly one-atom-thick material with extraordinary mechanical and electronic properties, researchers successfully predicted and synthesized many other two-dimensional materials such as transition metal dichalcogenides (TMDCs) and monochalcogenide monolayers (MMs). Graphene has a non-degenerate structural ground state that is key to its stability at room temperature. However, group IV monochalcogenides such as monolayers of SnSe, and GeSe have a fourfold degenerate ground state. This degeneracy in ground state can lead to structural instability, disorder, and phase transition in finite temperature. The energy that is required to overcome from one degenerate ground state to another …


Scalable Patterning Using Laser-Induced Shock Waves, Saidjafarzoda Ilhom, Khomidkhodza Kholikov, Peizhen Li, Claire Ottman, Dylan Sanford, Zachary Thomas, Omer San, Haluk E. Karaca, Ali O. Er Apr 2018

Scalable Patterning Using Laser-Induced Shock Waves, Saidjafarzoda Ilhom, Khomidkhodza Kholikov, Peizhen Li, Claire Ottman, Dylan Sanford, Zachary Thomas, Omer San, Haluk E. Karaca, Ali O. Er

Mechanical Engineering Faculty Publications

An advanced direct imprinting method with low cost, quick, and minimal environmental impact to create a thermally controllable surface pattern using the laser pulses is reported. Patterned microindents were generated on Ni50Ti50 shape memory alloys and aluminum using an Nd: YAG laser operating at 1064 nm combined with a suitable transparent overlay, a sacrificial layer of graphite, and copper grid. Laser pulses at different energy densities, which generate pressure pulses up to a few GPa on the surface, were focused through the confinement medium, ablating the copper grid to create plasma and transferring the grid pattern onto …


Are Solar Panels A Viable Power Source For A Green Energy Vehicle?, Mason C. Adams May 2017

Are Solar Panels A Viable Power Source For A Green Energy Vehicle?, Mason C. Adams

Senior Theses

A solar cell powered go-kart has been built and tested. The result shows using solar energy alone cannot meet the requirement of running a regular passenger car. This is due to the limited surface area of the passenger car. This thesis also discusses the operating principles of solar panels, the physics of P type and N type semiconductors, and the formation of the PN junction, as well as the solar current. Modifications of an existing go-kart are described in detail in this thesis. Suggestions for making green vehicles are discussed as well.


Investigating The Classical And Non-Classical Mechanical Properties Of Gan Nanowires, Mohammad Reza Zamani Kouhpanji May 2017

Investigating The Classical And Non-Classical Mechanical Properties Of Gan Nanowires, Mohammad Reza Zamani Kouhpanji

Electrical and Computer Engineering ETDs

Study and prediction of classical and non-classical mechanical properties of GaN is crucial due to the potential application of GaN nanowires (NWs) in piezoelectric, probe-based nanometrology, and nanolithography areas. GaN is mainly grown on sapphire substrates whose lattice constant and thermal expansion coefficient are significantly different from GaN. These discrepancies cause mechanical defects and high residual stresses and strains in GaN, which reduce its quantum efficiency.

Specifically, for nanoscale applications, the mechanical properties of materials differ significantly compared to the bulk properties due to size-effects. Therefore, it is essential to investigate the mechanical properties of GaN NWs using the non-classical …


Fabrication And Study Of The Structure And Magnetism Of Rare-Earth Free Nanoclusters, Bhaskar Das Apr 2017

Fabrication And Study Of The Structure And Magnetism Of Rare-Earth Free Nanoclusters, Bhaskar Das

Department of Physics and Astronomy: Dissertations, Theses, and Student Research

No abstract provided.


Semiconductor Film Grown On A Circular Substrate: Predictive Modeling Of Lattice-Misfit Stresses, Ephraim Suhir, Johann Nicolics, G. Khatibi, M. Lederer Mar 2016

Semiconductor Film Grown On A Circular Substrate: Predictive Modeling Of Lattice-Misfit Stresses, Ephraim Suhir, Johann Nicolics, G. Khatibi, M. Lederer

Mechanical and Materials Engineering Faculty Publications and Presentations

effective and physically meaningful analytical predictive model is developed for the evaluation the lattice-misfit stresses (LMS) in a semiconductor film grown on a circular substrate (wafer). The two-dimensional (plane-stress) theory-of-elasticity approximation (TEA) is employed in the analysis. The addressed stresses include the interfacial shearing stress, responsible for the occurrence and growth of dislocations, as well as for possible delaminations and the cohesive strength of a buffering material, if any. Normal radial and circumferential (tangential) stresses acting in the film cross-sections and responsible for its short- and long-term strength (fracture toughness) are also addressed. The analysis is geared to the GaN …


System And Method For Identifying Electrical Properties Of Integrate Circuits, Mary Y. Lanzerotti Jan 2016

System And Method For Identifying Electrical Properties Of Integrate Circuits, Mary Y. Lanzerotti

AFIT Patents

A new method for displaying electrical properties for integrated circuit (IC) layout designs provides for improved human visualization of those properties and comparison of as designed layout design parameters to as specified layout design parameters and to as manufactured layout parameters. The method starts with a circuitry as designed layout in a first digital format, extracts values for electrical properties from that circuitry as designed layout then annotates those values back into the first digital format. The annotated circuitry as designed layout is then converted from the first digital format to a second digital format that can be converted to …


Turning An Organic Semiconductor Into A Low-Resistance Material By Ion Implantation, Beatrice Fraboni, Alessandra Scidà, Piero Cosseddu, Yongqiang Wang, Michael Nastasi, Silvia Milita, Annalisa Bonfiglio Dec 2015

Turning An Organic Semiconductor Into A Low-Resistance Material By Ion Implantation, Beatrice Fraboni, Alessandra Scidà, Piero Cosseddu, Yongqiang Wang, Michael Nastasi, Silvia Milita, Annalisa Bonfiglio

Nebraska Center for Energy Sciences Research: Publications

We report on the effects of low energy ion implantation on thin films of pentacene, carried out to investigate the efficacy of this process in the fabrication of organic electronic devices. Two different ions, Ne and N, have been implanted and compared, to assess the effects of different reactivity within the hydrocarbon matrix. Strong modification of the electrical conductivity, stable in time, is observed following ion implantation. This effect is significantly larger for N implants (up to six orders of magnitude), which are shown to introduce stable charged species within the hydrocarbon matrix, not only damage as is the case …


Highly Transparent, Self-Cleaning, And Antireflective Nanoparticle Coatings, Corey Seth Thompson Dec 2014

Highly Transparent, Self-Cleaning, And Antireflective Nanoparticle Coatings, Corey Seth Thompson

Graduate Theses and Dissertations

Current solar panel technologies require a sheet of glass to serve as both mechanical support and to protect the cells from the environment. The reflection from the glass sheet can reflect up to 8% of the incident light, reducing the power output of the panel. Antireflective coatings can be used to allow more light to enter the panel to be converted into usable electricity. However, no solid thin film materials exhibit a low enough index of refraction to serve as antireflective coatings for common solar glass. The main goal of this research was to investigate the self-cleaning, antifogging, and antireflective …


Effects Of Thermal Boundary Conditions During Finite Element Modeling Of Physical Vapor Transport, Wade Luhman Aug 2014

Effects Of Thermal Boundary Conditions During Finite Element Modeling Of Physical Vapor Transport, Wade Luhman

Journal of Undergraduate Research at Minnesota State University, Mankato

Physical vapor transport (PVT) is a material processing method commonly used to produce different types of semiconductor materials. Computer modeling of PVT is important to understand the fundamentals of the processing method. Due to the large amount of computer processing power and storage needed to solve the computer models many of the previously solved simulations have been simplified to efficiently utilize computer usage. Previous PVT computer simulations of mercurous chloride (Hg2Cl2) have assumed constant temperature profiles on the source and crystal substrate for simplicity. These simulations were performed using the FIDAP computational fluid dynamics software package. In this research the …


Three Dimensional Transient Asymmetric Flowfields In Physical Vapor Transport, Joseph Dobmeier Aug 2014

Three Dimensional Transient Asymmetric Flowfields In Physical Vapor Transport, Joseph Dobmeier

Journal of Undergraduate Research at Minnesota State University, Mankato

Physical Vapor Transport is a manufacturing process used to produce single crystals of semiconductor materials such as mercurous chloride (Hg2Cl2). In the past this time-varying process has been studied with numerical simulation by considering three dimensional flow using an axi-symmetric two dimensional model or by restricting the simulation to asymmetric two dimensional flow and dropping the assumption of axi-symmetry from the model. It is generally agreed that neither of these methods accurately represent the true behavior of the process. The purpose of this research was to extend the asymmetric two dimensional model to three dimensions thereby obtaining a solution which …


Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan Sep 2013

Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan

Student Publications & Research

Ordered arrays of high-aspect-ratio micro/nanostructures in semiconductors stirred a huge scientific interest due to their unique one-dimensional physical morphology and the associated electrical, mechanical, chemical, optoelectronic, and thermal properties. Metal-assisted chemical etching enables fabrication of such high aspect ratio Si nanostructures with controlled diameter, shape, length, and packing density, but suffers from structure deformation and shape inconsistency due to uncontrolled migration of noble metal structures during etching. Hereby the authors prove that a Ti adhesion layer helps in stabilizing gold structures, preventing their migration on the wafer surface while not impeding the etching. Based on this finding, the authors demonstrate …


Low Volume Dispensing With High Speed Dispensers, Sunny Agarwal Aug 2013

Low Volume Dispensing With High Speed Dispensers, Sunny Agarwal

Graduate Dissertations and Theses

With the high pace of innovation in the semiconductor manufacturing industry, there has been an increasing demand for more energy efficient and environmental friendly products. This research relates to a complex process of fluid dispensing at low volumes on a printed circuit board. Currently, a more refined non-contact dispensing terminology named “Streaming” is widely used to stream out material at low volumes for various applications. The key solution is to frame a dispensing method that lends itself most closely to the requirements of a specific production process.

This study represents a detailed approach of dispensing low volumes of materials in …


Numerical Analysis And Design Optimization Of Organic Bulk Hetero-Junction Solar Cells Using The Mixed Finite Element And Arc-Length Methods, James L. Dean Jul 2012

Numerical Analysis And Design Optimization Of Organic Bulk Hetero-Junction Solar Cells Using The Mixed Finite Element And Arc-Length Methods, James L. Dean

Mechanical & Aerospace Engineering Theses & Dissertations

Due to the high coupling and non-linear nature of the semiconductor equations, numerical stability becomes a major problem when using a purely Newtonian numerical method in solving these equations. Presented is a robust mixed finite element formulation with application for organic solar cell devices that incorporates the arc-length predictor-corrector method to bypass such stability issues. The simulated device represents a multilayered solar cell using organic bulk hetero-junction materials including donor materials Poly[2,1,3-benzothiadiazole-4,7-diyl[4,4-bis(2-ethylhexyl)-4H-cyclopenta[2,1-b:3,4- b']dithiophene-2,6-diyl]] (PCPDTBT) and poly 3-hexylthiophene (P3HT) with acceptor fullerene materials [6,6]-phenyl C61 butyric acid methyl ester (PC61BM) or [6,6]-phenyl C71 butyric acid methyl ester (PC71BM) as the photoactive …


Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo Jun 2012

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …


Synthesis And Characterization Of Aluminum Doped Zinc Oxide Nanowires For Photovoltaic Devices And Semiconductors, Travis J. Wilson^, Md. Ashiqur R. Khan, Mohammad A. I. Shuvo, Miguel Mendoza, Matthew Garcia, Yirong Lin*, Chintalapalle V. Ramana* Apr 2012

Synthesis And Characterization Of Aluminum Doped Zinc Oxide Nanowires For Photovoltaic Devices And Semiconductors, Travis J. Wilson^, Md. Ashiqur R. Khan, Mohammad A. I. Shuvo, Miguel Mendoza, Matthew Garcia, Yirong Lin*, Chintalapalle V. Ramana*

COURI Symposium Abstracts, Spring 2012

No abstract provided.


Lunalight Project: Solar-Rechargeable Led Lantern And Cell Phone Charger, Sean C. Dawson, Michael E. Deagen, Francisco N. Dye, Brian S. Mircheff, Ryan O. Ramelb Mar 2012

Lunalight Project: Solar-Rechargeable Led Lantern And Cell Phone Charger, Sean C. Dawson, Michael E. Deagen, Francisco N. Dye, Brian S. Mircheff, Ryan O. Ramelb

Materials Engineering

Today, 1.6 billion people in the world do not have access to grid electricity. Villagers living off the grid in developing nations resort to kerosene lanterns to light their homes. The fumes from burning kerosene are toxic and lead to respiratory illnesses over time. Our sponsor, OneMillionLights, plans to help people to escape poverty by providing them with a clean source of light at night. Children that must work in the fields during the day can use a solar-rechargeable lantern at night to read or study, and street vendors can use the lanterns at night to improve their businesses.

The …


The Design And Fabrication Of A Microfluidic Reactor For Synthesis Of Cadmium Selenide Quantum Dots Using Silicon And Glass Substrates, Peter Robert Gonsalves Feb 2012

The Design And Fabrication Of A Microfluidic Reactor For Synthesis Of Cadmium Selenide Quantum Dots Using Silicon And Glass Substrates, Peter Robert Gonsalves

Master's Theses

A microfluidic reactor for synthesizing cadmium selenide (CdSe) quantum dots (QDs) was synthesized out of a silicon wafer and Pyrex glass. Microfabrication techniques were used to etch channels into the silicon wafer. Holes were wet-drilled into the Pyrex glass using a diamond-tip drill bit. The Pyrex wafer was anodically bonded to the etched silicon wafer to enclose the microfluidic reactor. Conditions for anodic bonding were created by exposing the stacked substrates to 300V at ~350oC under 5.46N of force. A syringe containing a room temperature CdSe solution was interfaced to the microfluidic reactor by using Poly (dimethylsiloxane) (PDMS) as an …


Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume Mar 2011

Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume

Theses and Dissertations

This document addresses two major obstacles facing metamaterial development: uncertainty in the characterization of electromagnetic field behavior in metamaterial structures and the relatively small operational bandwidth of metamaterial structures. To address the first obstacle, a method of prediction aided measurement is developed and exploited to examine the field interactions within metamaterial devices. The fusion of simulation and measurement techniques enhances the understanding of the physical interactions of fields in the presence of metamaterials. To address the second obstacle, this document characterizes the effectiveness of an adaptive metamaterial design that incorporates a microelectromechanical systems (MEMS) variable capacitor. Applying voltages to the …


Optical Properties Of Semiconducting Boron Carbide For Neutron Detection Applications, Ravi B. Billa Dec 2009

Optical Properties Of Semiconducting Boron Carbide For Neutron Detection Applications, Ravi B. Billa

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Solid state neutron detection devices based on semiconducting boron carbide have the potential for nearly ideal neutron detection effciency for thermal neutrons. The present work is focused on characterizing optical properties of this semiconducting boron carbide material as a step in further development of the material for neutron detection and other applications.

Semiconducting boron carbide films were grown on silicon substrates using plasma enhanced chemical vapor deposition and their optical properties were characterized using variable angle spectroscopic ellipsometry over a wide spectral range, from mid-infrared to vacuum-ultraviolet wavelengths. The effects of deposition substrate temperature and of post-deposition heat treatments on …


Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor Aug 2009

Development Of A Low Cost Handheld Microfluidic Phosphate Colorimeter For Water Quality Analysis, Sean C. Kaylor

Master's Theses

This thesis describes the design, fabrication, and testing process for a microfluidic phosphate colorimeter utilized for water quality analysis. The device can be powered by, and interfaced for data collection with, a common cell phone or laptop to dramatically reduce costs. Unlike commercially available colorimeters, this device does not require the user to measure or mix sample and reagent. A disposable poly(dimethylsiloxane) (PDMS) microfluid chip, powered by an absorption pumping mechanism, was used to draw water samples, mix the sample at a specific ratio with a molybdovanadate reagent, and load both fluids into an onboard cuvette for colorimetric analysis. A …


The Effect Of Vibratory Milling On The Powder Properties Of Zinc Oxide Varistors, Maura Kelleher, M.S.J. Hashmi May 2008

The Effect Of Vibratory Milling On The Powder Properties Of Zinc Oxide Varistors, Maura Kelleher, M.S.J. Hashmi

Articles

The formation of powders from multi-elemental oxides for the subsequent formation of a green and sintered compact body is a major processing operation in the manufacture of ZnO varistors. The physical and chemical properties of the metal oxides are crucial not only for the formation of a varistor component with optimum microstructure and thus electrical characteristics but also for avoiding the introduction of flaws and reduced yield during subsequent manufacturing stages. The effect of vibratory milling using cylindrical zirconia media on the physical and chemical properties of the mixed multi-elemental oxide additives of a commercial ZnO varistor formulation was studied. …


Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada Mar 2006

Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada

Theses and Dissertations

Micro-Raman (µRaman) spectroscopy is an efficient, non-destructive technique widely used to determine the quality of semiconductor materials and microelectromechanical systems. This work characterizes the stress distribution in wurtzite gallium nitride grown on c-plane sapphire substrates by molecular beam epitaxy. This wide bandgap semiconductor material is being considered by the Air Force Research Laboratory for the fabrication of shock-hardened MEMS accelerometers. µRaman spectroscopy is particularly useful for stress characterization because of its ability to measure the spectral shifts in Raman peaks in a material, and correlate those shifts to stress and strain. The spectral peak shift as a function of stress, …


Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli Mar 2005

Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli

Theses and Dissertations

Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …