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Full-Text Articles in Other Materials Science and Engineering
Modified Reactive Sputter Deposition Of Titanium Nitride Thin Films Via Hipims With Kick-Pulse And Improvement Of The Structure-Zone Model, Andrew Miceli
UNF Graduate Theses and Dissertations
Direct current (DC) and radio frequency (RF) sputtering methods have been commonplace in industry for several decades and widely studied in literature. Hard films of nitrides, such as titanium nitride (TiN), have been deposited using reactive DC sputtering onto cutting tools and medical devices extensively as well. For these applications, the films require excellent adhesion, high density, and high hardness. High-Power Impulse Magnetron Sputtering (HIPIMS) has emerged over the last several years as a method to produce films with increased density and mechanical properties. Process-structure-property relationships for reactive HIPIMS are not yet well developed. Additionally, conventional HIPIMS suffers from relatively …
Development Of High Kinetic Inductance Superconducting Nanowire Devices On High Permittivity Strontium Titanate Substrates, Jamie Timmons
Development Of High Kinetic Inductance Superconducting Nanowire Devices On High Permittivity Strontium Titanate Substrates, Jamie Timmons
UNF Graduate Theses and Dissertations
This thesis involves the fabrication and characterization of devices made from two different superconducting materials: yttrium barium copper oxide (YBCO), a high-TC complex oxide, and niobium nitride (NbN), a low-TC transition metal nitride. Both types of devices are fabricated on strontium titanate substrates, which provides a good lattice match to YBCO and also an extremely large permittivity at low temperature. We demonstrate that wet etching of YBCO thin films via bromine can be a viable microfrabriation technique for the material. Using approximately 35 nm thick epitaxially grown YBCO on an STO substrate, we were able to fabricate YBCO “microwires” with …