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Articles 361 - 390 of 473
Full-Text Articles in Materials Science and Engineering
Diffuse-Interface Field Approach To Modeling Self-Assembly Of Heterogeneous Colloidal Systems And Related Dipole-Dipole Interaction Phenomena, Tianle Cheng
Dissertations, Master's Theses and Master's Reports - Open
Colloid self-assembly under external control is a new route to fabrication of advanced materials with novel microstructures and appealing functionalities. The kinetic processes of colloidal self-assembly have attracted great interests also because they are similar to many atomic level kinetic processes of materials. In the past decades, rapid technological progresses have been achieved on producing shape-anisotropic, patchy, core-shell structured particles and particles with electric/magnetic charges/dipoles, which greatly enriched the self-assembled structures. Multi-phase carrier liquids offer new route to controlling colloidal self-assembly. Therefore, heterogeneity is the essential characteristics of colloid system, while so far there still lacks a model that is …
Measurement Of Semiconductor Surface Potential Using The Scanning Electron Microscope, Jennifer T. Heath, Chun-Sheng Jiang, Mowafak M. Al-Jassim
Measurement Of Semiconductor Surface Potential Using The Scanning Electron Microscope, Jennifer T. Heath, Chun-Sheng Jiang, Mowafak M. Al-Jassim
Faculty Publications
We calibrate the secondary electron signal from a standard scanning electron microscope to voltage, yielding an image of the surface or near-surface potential. Data on both atomically abrupt heterojunction GaInP/GaAs and diffused homojunction Si solar cell devices clearly show the expected variation in potential with position and applied bias, giving depletion widths and locating metallurgical junctions to an accuracy better than 10 nm. In some images, distortion near the p-n junction is observed, seemingly consistent with the effects of lateral electric fields (patch fields). Reducing the tube bias removes this distortion. This approach results in rapid and straightforward collection of …
Photoelectrochemical Activity Of Titanium Dioxide Thin Films, Aida Mehdinezhad Roshan
Photoelectrochemical Activity Of Titanium Dioxide Thin Films, Aida Mehdinezhad Roshan
Material Science and Engineering Theses - Archive
Titanium dioxide (TiO2) is considered as an oxide semiconductor with several unique properties, including environmental sensing capabilities, biocompatibility and photocurrent generation, long-term stability, cost efficiency, and chemical inertness. TiO2 thin films have a wide range of applications in dye-sensitized solar cells. TiO2 films have been deposited on two different substrates, aluminum and titanium. Two different methods used for deposition of the thin films namely: Plasma Electrolytic Oxidation (PEO) and Physical Vapor Deposition (PVD). In order to study the effect of roughness of the substrate on photocurrent generation of the deposited films, one group of substrates were “patterned” by Electrolytic Plasma …
Computer Simulation, Fabrication And Characterization Of Inverse Frustum Nanosphere Metal Arrays For Fiber-Based Plasmonic Sensors, Jiaqi Wu
Material Science and Engineering Theses - Archive
In recent years, a number of metal nanostructures have attracted huge attention from scientists and researchers for its plasmonic property and surface enhanced Raman scattering effect. They have been utilized to monitor molecule adsorption, antibody-antigen reorganization event, and to enhance scattering for identification of molecules even in very low concentration. They both have also been exploited for real time biosensing.In this thesis, we are investigating a new plasmonic structure, inverse frustum nanosphere gold arrays, and exploring its optical fiber-based sensing application. The nanostructure was fabricated by electro-deposition of gold into pre-assembled templates, which are made of monodispered colloidal polystyrene nanospheres …
Cuinse2: Electronic Activities Of Grain Boundaries And Solar Cell Fabrication Studies, Mehmet Eray Erkan
Cuinse2: Electronic Activities Of Grain Boundaries And Solar Cell Fabrication Studies, Mehmet Eray Erkan
Material Science and Engineering Dissertations - Archive
This dissertation is composed of three studies related to chalcopyrite solar cells. The first study is on electronic activities of grain boundaries (GBs) in CuInSe2 (CIS). Despite being polycrystalline, chalcopyrite thin film solar cells have reached record power conversion efficiencies. This is against the classical understanding on the effect of GBs in semiconductor materials. Because GBs are expected to be recombination centers and barriers against the carrier flow, reducing the device efficiency. Therefore, a complete understanding on the electronic behavior of chalcopyrite GBs is missing. Moreover, the high efficiency chalcopyrite solar cells are grown with Na impurities which positively …
Wear And Tribofilm Formation With Zinc-Free Antiwear Additives, Pradip Sairam Pichumani
Wear And Tribofilm Formation With Zinc-Free Antiwear Additives, Pradip Sairam Pichumani
Material Science and Engineering Theses - Archive
Engine oil is used in all internal combustion engines to lubricate the moving parts & mitigate the wear due to friction. Along with the mentioned two functions, engine oil also serves to protect the engine from corrosion, clean debris, improves sealing and serves in thermal conductivity. Engine oil is either derived from petroleum derivatives or made synthetically. A number of additives are added to the engine oil (Base oil) to improve its performance and longevity. Antioxidants, pour point depressants, viscosity index improvers, antifoaming agents, corrosion inhibitors, etc are some of the additives that are added to improve the engine oil‘s …
Direct Measurement Of Thicknesses, Volumes Or Compositions Of Nanomaterials By Quantitative Atomic Number Contrast In High-Angle Annular Dark-Field Scanning Transmission Electron Microscopy, Biao Yuan
Electronic Theses and Dissertations
The sizes, shapes, volumes and compositions of nanoparticles are very important parameters determining many of their properties. Efforts to measure these parameters for individual nanoparticles and to obtain reliable statistics for a large number of nanoparticles require a fast and reliable method for 3-D characterization. In this dissertation, a direct measurement method for thicknesses, volumes or compositions of nanomaterials by quantitative atomic number contrast in High-Angle Annular Dark-Field (HAADF) Scanning Transmission Electron Microscopy (STEM) is presented. A HAADF detector collects electrons scattered incoherently to high angles. The HAADF signal intensity is in first-order approximation proportional to the sample thickness and …
Multiscale Simulation Of Laser Ablation And Processing Of Semiconductor Materials, Lalit Shokeen
Multiscale Simulation Of Laser Ablation And Processing Of Semiconductor Materials, Lalit Shokeen
Electronic Theses and Dissertations
We present a model of laser-solid interactions in silicon based on an empirical potential developed under conditions of strong electronic excitations. The parameters of the interatomic potential depends on the temperature of the electronic subsystem Te, which is directly related to the density of the electron-hole pairs and hence the number of broken bonds. We analyze the dynamics of this potential as a function of electronic temperature Te and lattice temperature Tion. The potential predicts phonon spectra in good agreement with finite-temperature densityfunctional theory, including the lattice instability induced by the high electronic excitations. For 25fs pulse, a wide range …
Dechlorination Of Environmental Contaminants Using A Hybrid Nanocatalyst: Palladium Nanoparticles Supported On Hierarchical Carbon Nanostructures, Hema Vijwani, Abinash Agrawal, Sharmila M. Mukhopadhyay
Dechlorination Of Environmental Contaminants Using A Hybrid Nanocatalyst: Palladium Nanoparticles Supported On Hierarchical Carbon Nanostructures, Hema Vijwani, Abinash Agrawal, Sharmila M. Mukhopadhyay
Mechanical and Materials Engineering Faculty Publications
This paper demonstrates the effectiveness of a new type of hybrid nanocatalyst material that combines the high surface area of nanoparticles and nanotubes with the structural robustness and ease of handling larger supports. The hybrid material is made by fabricating palladium nanoparticles on two types of carbon supports: as-received microcellular foam (Foam) and foam with carbon nanotubes anchored on the pore walls (CNT/Foam). Catalytic reductive dechlorination of carbon tetrachloride with these materials has been investigated using gas chromatography. It is seen that while both palladium-functionalized carbon supports are highly effective in the degradation of carbon tetrachloride, the rate of degradation …
Microstructual Characteristics Of Magnesium Metal Matrix Composites, Dongho Shin
Microstructual Characteristics Of Magnesium Metal Matrix Composites, Dongho Shin
Electronic Theses and Dissertations
Magnesium (Mg) Metal matrix composites (MMCs) reinforced by ceramic reinforcements are being developed for a variety of applications in automotive and aerospace because of their strength-to-weight ratio. Reinforcement being considered includes SiC, Al2O3, Carbon fiber and B4C in order to improve the mechanical properties of MMCs. Microstructural and interfacial characteristics of MMCs can play a critical role in controlling the MMCs’ mechanical properties. This study was carried out to understand the microstructural and interfacial development between Mg-9wt.Al-1wt.Zn (AZ91) alloy matrix and several reinforcements including SiC, Al2O3, Carbon fibers and B4C. X-ray diffraction, scanning electron microscopy and transmission electron microscopy was …
Phase Field Modeling Of Thermotransport In Multicomponent Systems, Joshua Bush
Phase Field Modeling Of Thermotransport In Multicomponent Systems, Joshua Bush
Electronic Theses and Dissertations
Nuclear and gas turbine power plants, computer chips, and other devices and industries are running hotter than ever for longer than ever. With no apparent end to the trend, the potential arises for a phenomenon known as thermotransport to cause undesirable changes in these high temperature materials. The diffuse-interface method known as the phase-field model is a useful tool in the simulation and prediction of thermotransport driven microstructure evolution in materials. The objective of this work is to develop a phase-field model using practical and empirical properties of thermodynamics and kinetics for simulating the interdiffusion behavior and microstructural evolution of …
Diffusion And Reaction In Selected Uranium Alloy System, Ke Huang
Diffusion And Reaction In Selected Uranium Alloy System, Ke Huang
Electronic Theses and Dissertations
U-Mo metallic fuels with Al alloys as the matrix/cladding are being developed as low enriched uranium fuels under the Reduced Enrichment for Research and Test Reactor (RERTR) program. Significant interactions have been observed to occur between the U-Mo fuel and the Al alloy during fuel processing and irradiation. U-Zr metallic fuels with stainless steel claddings have been developed for the generation IV sodium fast reactor (SFR). The fuel cladding chemical interaction (FCCI) induced by the interdiffusion of components was also observed. These interactions induce deleterious effects on the fuel system, such as thinning of the cladding layer, formation of phases …
Synthesis And Properties Of Self-Assembled C/Sicn Nanocomposite Derived From Polymer Precursors, Cheng Li
Synthesis And Properties Of Self-Assembled C/Sicn Nanocomposite Derived From Polymer Precursors, Cheng Li
Electronic Theses and Dissertations
The properties of C/SiCN nanocomposites synthesized by thermal decomposition of polymer precursors were studied in this work. The novel polymer-to-ceramic process enables us to tailor the ceramic structure in atomic level by designing the starting chemicals and pyrolysis procedures. It is of both fundamental and practical significance to investigate the properties and structures relationship of the nanocomposites. In this work, we explored their application potential in using as anode of lithium-ion secondary batteries. The structure and structural evolution of C/SiCN nanocomposite were investigated by using XRD, FTIR, SEM, TEM, Solid state NMR and Raman spectroscopy. The results revealed the nanocomposites …
Rare Earth Oxide Coating With Controlled Chemistry Using Thermal Spray, Virendra Singh
Rare Earth Oxide Coating With Controlled Chemistry Using Thermal Spray, Virendra Singh
Electronic Theses and Dissertations
Cerium oxide (Ceria) at nano scale has gained significant attention due to its numerous technological applications. Ceria in both doped and undoped forms are being explored as oxygen sensor, catalysis, protective coating against UV and corrosion, solid oxide fuel cell (SOFC) electrolyte and newly discovered antioxidant for biomedical applications. Therefore, there is an imminent need of a technology which can provide a cost effective, large scale manufacturing of nanoceria and its subsequent consolidation, specially using thermal spray. This dissertation aims to develop a scientific understanding towards the development of pure and doped ceria- based coating for a variety of technological …
Fabrication Of Swnts For Water Desalination And Multilayer Structure For Dna Sequencing, Jingyuan Yao
Fabrication Of Swnts For Water Desalination And Multilayer Structure For Dna Sequencing, Jingyuan Yao
Theses and Dissertations--Chemical and Materials Engineering
0.7nm single wall carbon nanotubes have been synthesized within VPI-5 zeolite channels with sucrose as carbon precursor. VPI-5 molecular sieves are synthesized hydrothermally under conventional heating. X-ray powder diffraction, micro raman, scanning electron microscope (SEM), transmission electron microscope (TEM), Thermogravimetric analysis have been used to investigate the structure of zeolite and thermal decoposition process of carbon precursors. 0.4nm single wall carbon nanotubes have also been fabricated within AlPO4-5 nanopores. A key challenge is to produce high yield single wall carbon nanotubes with uniform diameter. In order to improve the carbon nanotube yield, different organic precursors are employed. Although …
Processing, Characterization And Performance Of Carbon Nanopaper Based Multifunctional Nanocomposites, Fei Liang
Electronic Theses and Dissertations
Carbon nanofibers (CNFs) used as nano-scale reinforcement have been extensively studied since they are capable of improving the physical and mechanical properties of conventional fiber reinforced polymer composites. However, the properties of CNFs are far away from being fully utilized in the composites due to processing challenges including the dispersion of CNFs and the viscosity increase of polymer matrix. To overcome these issues, a unique approach was developed by making carbon nanopaper sheet through the filtration of well-dispersed carbon nanofibers under controlled processing conditions, and integrating carbon nanopaper sheets into composite laminates using autoclave process and resin transfer molding (RTM). …
Nonlinear Properties Of Nanoscale Barium Strontium Titanate Microwave Varactors, Tony S. Price
Nonlinear Properties Of Nanoscale Barium Strontium Titanate Microwave Varactors, Tony S. Price
USF Tampa Graduate Theses and Dissertations
Barium strontium titanate thin film varactors have been widely investigated for the purpose of creating tunable front-ends for RF and microwave systems. There is an abundance of literature observing the capacitance-voltage behavior and methods on improving tunability. However, there is a lack of thorough investigations on the nonlinear behavior, specifically the third order intermodulation distortion, and the parameters that impact it. There is also a research void that needs to be filled for nanoscale barium strontium titanate varactors as nanotechnology becomes increasingly prevalent in the design of RF and microwave components.
This work aims to advance the understanding of nonlinear …
Applications Of Density Functional Theory In Materials Science And Engineering, Manuel Alvarado
Applications Of Density Functional Theory In Materials Science And Engineering, Manuel Alvarado
Open Access Theses & Dissertations
Density Functional Theory (DFT) is a powerful tool that can be used to model various systems in materials science. Our research applies DFT to two problems of interest. First, an organic/inorganic complex dye system known as a Mayan pigment is modeled to determine chemical binding sites, verifying each model with physical data such as UV/Vis spectra. Preliminary studies on palygorskite-based mayan pigments (mayacrom blue, mayacrom purple) show excellent agreement with experimental studies when using a dimer dye geometry binding with tetrahedrally-coordinated aluminum impurity sites in palygorksite. This approach is applied to a sepiolite-based organic/inorganic dye system using thioindigo attached to …
Fundamental Properties Of Functional Zinc Oxide Nanowires Obtained By Electrochemical Method And Their Device Applications, Athavan Nadarajah
Fundamental Properties Of Functional Zinc Oxide Nanowires Obtained By Electrochemical Method And Their Device Applications, Athavan Nadarajah
Dissertations and Theses
We report on the fundamental properties and device applications of semiconductor nanoparticles. ZnO nanowires and CdSe quantum dots were used, prepared, characterized, and assembled into novel light-emitting diodes and solar cells. ZnO nanowire films were grown electrochemically using aqueous soluble chloride-based electrolytes as precursors at temperatures below 90° C. Dopants were added to the electrolyte in the form of chloride compounds, which are AlCl3, CoCl2, CuCl2, and MnCl2. The optical, magnetic, and structural properties of undoped and transition-metal-ion doped ZnO nanowires were explored. Our results indicate that the as-grown nanowire structures have …
High Pressure Synchrotron X-Ray Diffraction Studies Of Superprotonic Transitions In Phosphate Based Solid Acids, Juan Daniel Hermosillo
High Pressure Synchrotron X-Ray Diffraction Studies Of Superprotonic Transitions In Phosphate Based Solid Acids, Juan Daniel Hermosillo
Open Access Theses & Dissertations
Certain phosphate based solid acids, such as CsH2PO4 and RbH2PO4, have been shown to exhibit an abrupt, several-order-of-magnitude increase in their proton conductivity when heated above a temperature threshold. This so called superprotonic behavior allows the above-mentioned materials to function as fuel cell electrolytes at temperatures between 150C and 300C, a remarkable application that attracted significant interest especially from the automobile industry. Yet, the microscopic structures and dynamic mechanisms responsible for this behavior are not fully understood. In fact, until very recently, the very nature of the superprotonic behavior has been debate, with some groups attributing the steep proton enhancement …
Understanding The Role Of Defects In The Radiation Response Of Nanoceria, Amit Kumar
Understanding The Role Of Defects In The Radiation Response Of Nanoceria, Amit Kumar
Electronic Theses and Dissertations
Nanoscale cerium oxide (nanoceria) have shown to possess redox active property , and has been widely studied for potential use in catalysis, chemical-mechanical planarization, biomedical and solid oxide fuel cell (SOFC), etc. The redox state of nanoceria can be tuned by controlling the defects within the lattice and thus its physical and chemical properties. Perfect ceria lattice has fluorite structure and the research in last decade has shown that oxide and mixed oxide systems with pyrochlore and fluorite have better structural stability under high energy radiation. However, the current literature shows a limited number of studies on the effect of …
Technical Feasibility Of Storage On Large Dish Stirling Systems, Charles E. Andraka, K Scott Rawlinson, Nathan P. Siegel
Technical Feasibility Of Storage On Large Dish Stirling Systems, Charles E. Andraka, K Scott Rawlinson, Nathan P. Siegel
Faculty Journal Articles
Dish-Stirling systems have been demonstrated to provide high-efficiency solar-only electrical generation, holding the world record at 31.25%. This high efficiency results in a system with a high possibility of meeting the DOE SunShot goal of $0.06/kWh. Current dish-Stirling systems do not incorporate thermal storage. For the next generation of non-intermittent and cost-competitive solar power plants, we propose a thermal energy storage system that combines latent (phase-change) energy transport and latent energy storage in order to match the isothermal input requirements of Stirling engines while also maximizing the exergetic efficiency of the entire system. This report takes an initial look at …
Effects Of Transition Metal Doping On Multiferroic Ordering In Ni3v2o8 And Fevo4, Akila Deeghayu Kumarasiri
Effects Of Transition Metal Doping On Multiferroic Ordering In Ni3v2o8 And Fevo4, Akila Deeghayu Kumarasiri
Wayne State University Dissertations
We have studied the effects of doping both non-magnetic and magnetic ions on the phase transitions and multiferroic ordering in two multiferroic oxides; Ni3V2O8 and FeVO4. Magnetic, dielectric, specific heat, polarization and AC susceptibility measurements were used to track changes in phase transition temperatures. We found that the two higher temperature magnetic transitions in Ni3V2O8; TH = 9.1 K and TL = 6.3 K are suppressed to lower temperatures with all transition metal dopants. For Zn doping, the rates of the suppression of both TH and TL with dopant fraction are consistent with simple site dilution for two-dimensional spin systems, …
Applications Of Extenics To 2d-Space And 3d-Space, Florentin Smarandache, Victor Vladareanu
Applications Of Extenics To 2d-Space And 3d-Space, Florentin Smarandache, Victor Vladareanu
Branch Mathematics and Statistics Faculty and Staff Publications
In this article one proposes several numerical examples for applying the extension set to 2D- and 3D-spaces. While rectangular and prism geometrical figures can easily be decomposed from 2D and 3D into 1D linear problems, similarly for the circle and the sphere, it is not possible in general to do the same for other geometrical figures.
A Front Tracking Model Of The Maxus-8 Microgravity Solidification Experiment On A Ti-45.5at.% Al-8at.%Nb Alloy, Robin Mooney, Shaun Mcfadden, Marek Rebow, David J. Browne
A Front Tracking Model Of The Maxus-8 Microgravity Solidification Experiment On A Ti-45.5at.% Al-8at.%Nb Alloy, Robin Mooney, Shaun Mcfadden, Marek Rebow, David J. Browne
Articles
On 26th March 2010 the MAXUS-8 sounding rocket was launched from the Esrange Space Center in Sweden. As part of the Intermetallic Materials Processing in Relation to Earth and Space Solidification (IMPRESS) project, a solidification experiment was conducted on a Ti-45.5at.%Al-8at.%Nb intermetallic alloy in a module on this rocket. The experiment was designed to investigate columnar and equiaxed microstructures in the alloy. A furnace model of the MAXUS 8 experiment with a Front Tracking Model of solidification has been developed to determine the macrostructure and thermal history of the samples in the experiment. This paper gives details of results of …
Introducing Fly Ash Into Lsi's Recipe, Andrew Mathias Beckrich
Introducing Fly Ash Into Lsi's Recipe, Andrew Mathias Beckrich
All Graduate Theses, Dissertations, and Other Capstone Projects
There has been published data that states that concrete producers can use Fly Ash as an alternative to Portland cement and still generate similar or better strength properties. By applying these principles to our industry and products, what new processes will need to be put in place and followed? What is the correct combination/portion of Fly Ash that will produce similar and better results as well as the adjusted new recipes? What type of cost is associated with the introduction of this new ingredient? Lastly, how does this affect the quality and reputation of the product?
Modified Statistical Dynamical Diffraction Theory : A Novel Metrological Analysis Method For Partially Relaxed And Defective C Doped Si And Sige Heterostructures, Paul Kenneth Shreeman
Modified Statistical Dynamical Diffraction Theory : A Novel Metrological Analysis Method For Partially Relaxed And Defective C Doped Si And Sige Heterostructures, Paul Kenneth Shreeman
Legacy Theses & Dissertations (2009 - 2024)
The statistical dynamical diffraction theory, which has been initially developed by late Kato remained in obscurity for many years due to intense and difficult mathematical treatment that proved to be quite challenging to implement and apply. With assistance of many authors in past (including Bushuev, Pavlov, Pungeov, and among the others), it became possible to implement this unique x-ray diffraction theory that combines the kinematical (ideally imperfect) and dynamical (the characteristically perfect diffraction) into a single system of equations controlled by two factors determined by long range order and correlation function within the structure. The first stage is completed by …
Development Of Iii-V P-Mosfets With High-Kappa Gate Stack For Future Cmos Applications, Padmaja Nagaiah
Development Of Iii-V P-Mosfets With High-Kappa Gate Stack For Future Cmos Applications, Padmaja Nagaiah
Legacy Theses & Dissertations (2009 - 2024)
As the semiconductor industry approaches the limits of traditional silicon CMOS scaling, non-silicon materials and new device architectures are gradually being introduced to improve Si integrated circuit performance and continue transistor scaling. Recently, the replacement of SiO2 with a high-k material (HfO2) as gate dielectric has essentially removed one of the biggest advantages of Si as channel material. As a result, alternate high mobility materials are being considered to replace Si in the channel to achieve higher drive currents and switching speeds. III-V materials in particular have become of great interest as channel materials, owing to their superior electron transport …
Experimental And Theoretical Analysis Of Strain Engineered Aluminium Nitride On Silicon For High Quality Aluminium(X)Indium(Y)Gallium(1-X-Y)Nitride Epitaxy, Mihir Hemant Tungare
Experimental And Theoretical Analysis Of Strain Engineered Aluminium Nitride On Silicon For High Quality Aluminium(X)Indium(Y)Gallium(1-X-Y)Nitride Epitaxy, Mihir Hemant Tungare
Legacy Theses & Dissertations (2009 - 2024)
III-Nitrides on Si are of great technological importance due to the availability of large area, epi ready Si substrates and the ability to heterointegrate with mature silicon micro and nanoelectronics. The major roadblock with realizing this is the large difference in thermal expansion coefficients and lattice constants between the two material systems. A novel technique developed in our research lab shows the potential of simultaneous and substantial reduction in dislocation and crack density in GaN on Si (111). Research undertaken in the current doctoral dissertation, validates the superior GaN quality on Si obtained using our technique and determines the factors …
Plasma Enhanced Atomic Layer Deposition Of Cu Seed Layers At Low Process Temperatures, Jiajun Mao
Plasma Enhanced Atomic Layer Deposition Of Cu Seed Layers At Low Process Temperatures, Jiajun Mao
Legacy Theses & Dissertations (2009 - 2024)
In conventional Cu interconnect fabrication, a sputtered copper seed layer is deposited before the electrochemically deposited (ECD) copper plating step. However, as interconnect dimensions scale down, non-conformal seed layer growth and subsequent voiding of metallized structures is becoming a critical issue. With its established excellent thickness controllability and film conformality, atomic layer deposition (ALD) is becoming an attractive deposition approach for the sub-24nm fabrication regime. However, in order to achieve a smooth and continuous seed layer deposition, a low process temperature (below 100oC) is needed, given the tendency of Cu agglomeration at elevated temperature. In this research, plasma enhanced ALD …