Materials Science and Engineering Commons^™

The Feasibility Of Micromachined Dynamic Resonant Beam Coriolis True Mass Flow Meter, Sang Hwui Lee

Dissertations

The technological advances of micro-electro-mechanical systems (MEMS) in the past two decades have been remarkable for innovations in microfluidic systems as well as automotive applications such as pressure sensors and accelerometers. MEMS flow sensing has emerged as a field of interest in microfluidics, with a variety of sensing methods being miniaturized, such as thermal anemometry, ultrasonic sensing and flow measurement based on the Coriolis effect. Coriolis sensing is particularly attractive since, unlike most other methods which provide volumetric flow information, Coriolis sensing is capable of providing a direct, true mass flow measurement. Because of this advantage, Coriolis flow sensing has …

In Vitro Drug Delivery Based On A Porous Membrane-Based Aqueous-Organic Partitioning System And Its Enhancements Through Mouse Skin, Qiuxi Fan

Dissertations

Novel approaches for transdermal drug delivery (TDD) based on a porous membrane-based aqueous-organic partitioning system have been investigated and successful deliveries were observed. Doxycycline hydrochloride (HCl), a polar antibiotic drug with a relatively large molecule weight (MW: 480.1) was studied as a basic model agent. Its controlled release using this technique was studied first. Satisfactory release profiles demonstrate the practical potential of such a system to achieve useful controlled release rates. The enhancer linoleic acid was essential to successful release using a mouse skin beneath a porous polymeric membrane. The transport rates of smaller molecules e.g., caffeine and nicotine from …

Optimization Studies Of Thermal Bimorph Cantilevers, Electrostatic Torsion Actuators And Variable Capacitors, Wuyong Peng

Dissertations

In this dissertation, theoretical analyses and optimization studies are given for three kinds of MEMS devices: thermal bimorph cantilevers, electrostatic torsion actuators, and variable capacitors. Calculation, simulation, and experimental data are used to confirm the device behavior and demonstrate the application of the design approaches.

For thermal bimorph cantilevers, an analytical model is presented which allows theoretical analysis and quantitative optimization of the performance based on material properties and device dimensions. Bimorph cantilevers are divided into two categories for deflection optimization: either the total thickness is constant, or the cantilever has one constant and one variable layer thickness. The optimum …

Mechanisms Of Layer-Transfer Related To Silicon-On-Insulator Structures, Bo Chen

Dissertations

The objective of this dissertation was to study the mechanisms that affect an efficient hydrogenation process in silicon and to validate a hypothesis concerning the hydrogenation mechanism of pre-implanted silicon wafers under hydrogen-plasma processing. These studies are related to a general process. A trapping layer for hydrogen was introduced by ion beam implantation into the silicon wafer. Next, this wafer was hydrogenated using a hydrogen plasma. It was hypothesized that the trapping layer acts as a getterer for the hydrogen diffusing into the silicon wafer. It was found that a large amount of hydrogen could be absorbed in the trapping …

Boron And Phosphorous Implantation Into (100) Germanium : Modeling And Investigation Of Dopant Annealing Behavior, Yong Seok Suh

Dissertations

Germanium is increasingly being considered at this time for future silicon compatible optoelectronic and complementary metal oxide semiconductor (CMOS) device application. Germanium implantation will be a critical process for future device fabrication. However, critical properties like Pearson parameters and dopant activation temperatures are not well established. In this study, boron and phosphorus were implanted into (100) germanium with energies ranging from 20 to 320 keV and doses of 5 x 10¹³ to 5 x 10¹⁶ cm^-2. The behavior of the boron and phosphorus before and after annealing for 3 hours at 400, 600 or 800°C in …

A Micromachined Thermo-Optical Light Modulator Based On Semiconductor-To-Metal Phase Transition, Lijun Jiang

Dissertations

In this research, a micromachined thermo-optical light modulator was realized based on the semiconductor-to-metal phase transition of vanadium dioxide (VO₂) thin film. VO₂ undergoes a reversible phase transition at approximately 68 0C, which is accompanied with drastic changes in its electrical and optical properties. The sharp electrical resistivity change can be as great as five orders. Optically, VO₂ film will switch from a transparent semiconductor phase to a reflective metal phase upon the phase transition. The light modulator in this research exploits this phase transition related optical switching by using surface micromachined low-thermal-mass pixels to achieve …

Reactive Modification Of Polyesters And Their Blends, Chen Wan

Dissertations

As part of a broader research effort to investigate the chemical modification of polyesters by reactive processing a low molecular weight (MW) unsaturated polyester (UP) and a higher MW saturated polyester, polyethylene terephthalate (PET), alone or blended with polypropylene (PP) were melt processed in a batch mixer and continuous twin screw extruders. Modification was monitored by on-line rheology and the products were characterized primarily by off-line rheology, morphology and thermal analysis. Efforts were made to establish processing/property relationships and provide an insight of the accompanying structural changes. The overall response of the reactively modified systems was found to be strongly …

Fabrication And Characterization Of Microcrystalline Silicon Solar Cells, Liwei Li

Dissertations

In this study, single junction p-i-n μc-Si:H solar cells were prepared using plasma of silane diluted by hydrogen in a low-cost, single chamber, non-load-locked RF-PECVD system. Direct structural characterization of μc-Si:H solar cells, rather than stand-alone films, was conducted using Raman Spectroscopy, XRD, and AFM. Strong correlations among device deposition, i-layer structural properties, and device performance have been established. With such correlations, critical issues in fabricating low-cost, large-scale, high performance μc-Si:H solar cells were identified.

The critical importance of seeding processes in determining the microstructure of μc-Si:H i-layers and performance of μc-Si:H solar cells has been demonstrated. Using …

Effects Of Implementation Of Decaborane Ions In Silicon, Cheng Li

Dissertations

The next generations of Si microelectronic devices will require ultra shallow p-type junctions formed by implantation of B ions with energies below 1 keV, at which available beam currents are severely limited by space charge effects. To solve this problem, decaborane (B₁₀H₁₄) cluster ion implantation has been suggested as an attractive alternative to conventional B implants, because one decaborane ion implants ten B atoms simultaneously and each of the B atoms only carries approximately 1/11 of the total ion energy. Thus the same implantation depth and dose as with monomer B ions can be obtained using …

Development Of An Integrated Photonic Sensor For Monitoring Hazardous Organics, Dianhong Luo

Dissertations

In this study, an integrated photonic sensor has been designed and fabricated for the purpose of monitoring hazardous organics in the environment. The operation of the sensor is based on the principles of the Mach-Zehnder interferometry. The sensor consists of a patterned waveguide structure made of phosphosilicate core and silica cladding. LPCVD processes were developed to produce undoped cladding and doped core silicon dioxide films. Diethylsilane (DES), Trimethylphosphite (TMP) and oxygen were used as the precursors for the deposition process. The effects of the O₂/DES ratio and deposition temperature on the properties Of SiO₂ films were investigated. …

High Solid Loading Aqueous Base Metal/Ceramic Feedstock For Injection Molding, Mohammad Behi

Dissertations

Increasing volume fraction of metal powder in feedstock provided lower shrinkage. Reduction of the shrinkage results in better dimensional precision. The rheology of the feedstock material plays an important role to allowing larger volume fractions of the metal powder to be incorporated in the feedstock forinulations. The viscosity of the feedstock inainly depends on the binder viscosity, powder volume fraction and characteristics of metal powder.

Aqueous polysaccharide agar was used as a baseline binder system for this study.The effect of several gel-strengthening additives on 1.5wt% and 2wt% agar gel was evaluated. A new gel-strengthening additive was found to be the …

Low Energy Implantation Of Boron With Decaborane Ions, Maria Angela Albano

Dissertations

The goal of this dissertation was to determine the feasibility of a novel approach to forming ultra shallow p-type junctions (tens of nm.) needed for future generations of Si MOS devices. In the new approach, B dopant atoms are implanted by cluster ions obtained by ionization of decaborane (B₁₀H₁₄)vapor. Each B atom carries only ~9% of the cluster kinetic energy and the B dose per unit charge is 10 times larger than in the case of monomer ion beams. Thus, the problems of spacecharge, limiting the extraction and transport of low energy (< = 1 keV) beams of B⁺ ions, can …

Synthesis And Characterization Of Low Pressure Chemically Vapor Deposited Boron Nitride And Titanium Nitride Films, Narahari Ramanuja

Dissertations

This study has investigated the interrelationships governing the growth kinetics, resulting compositions, and properties of boron nitride (B-C-N-H) and titanium nitride (Ti-N-Cl) films synthesized by low pressure chemical vapor deposition (LPCVD) using ammonia (NH₃)/triethylamine-borane and NH₃/titanium tetrachloride as reactants, respectively.Several analytical methods such as the FTIR, UVNisible spectroscopy, XPS, AES, RBS, SEM, and XRD were used to study the stoichiometry and structure of the deposited films.

The B-N-C-H films were synthesized over a temperature range of 300 to 8500C at various flow rate ratios of the reactants and total pressure range of 50 to 150 mTorr. …