Engineering Science and Materials Commons^™

Low Pressure Chemical Vapor Deposition Of Copper Films From Cu(I)(Hfac)(Tmvs), Wei-Shang King

Theses

Recently, copper has been found as a possible substitute for Al alloys because of its low resistivity (1.67 μΩ • cm) and potentially improved resistance to electromigration. Conventional physical vapor deposition (PVD) method do not provide the conformal deposition profile for the high density integrated circuit, therefore, chemical vapor deposition (CVD) has become the most promising method for the resulting conformal profile.

In this work, a cold wall, single wafer, CVD tungsten reactor was used for the deposition of copper with Cu(I)(hfac)(tmvs). Film growth rates were between 100 to 800 A/min depending on processing conditions, and an Arrhenius type activation …

The Photolithographic Patterning Of Porous Silicon Using Silicon Nitride And Silicon Carbide Films As Masks, Hong Wang

Theses

In this study, a simple photolithographic pattern process for porous silicon is described. The process utilizes silicon nitride or silicon carbide coated on the top of silicon wafer as a masks. Then a test pattern was projected on the sample by illumination during anodic etching in HF:ethanol solution which produced microcracks in regions illuminated during anodization. Creation of these microcracks resulted in formation of porous silicon in the underlying regions. The cracking is related to the stress in the thin film. The films with tensile stress exhibit cracking while compressive stress samples do not. Compared to silicon carbide films, silicon …

Synthesis Of Silicon Oxide/Vycor Composite Membrane Structures By An Optimized Lpcvd Process, Abhijit Datta

Theses

This study is focused on development of highly selective ceramic membrane structures consisting of silicon dioxide films synthesized by low pressure chemical vapor deposition (LPCVD) on mesoporous Vycor substrates. The ability of easily altering the composition of such films by varying the LPCVD processing parameters affords the opportunity of microengineering the pore structure by reducing the diameters of pre-existing pores in the support. The process parameters investigated include, deposition temperature, total pressure, and flow rate of oxygen. Both the kinetics and select properties of the deposits were examined. The growth rate as a function of temperature was seen to follow …

Artificial Dielectric Materials : Synthesis And Optical Characterization Of Small Metal Clusters Embedded In Polymeric Matrix, Nazneen Karim Shilpee

Theses

This study is concerned with the fabrication of films made of gold, nickel, and silicon clusters dispersed in a polymeric matrix. The films were fabricated by use of metal or semiconductor sputtering and plasma polymerization of Methyl Methacrylate monomer in a capacitively coupled RF (13.56 MHz) sputtering system. Optical transmittance and optical reflectance were measured as a function of wavelength. The optical absorption of metal or silicon clusters was studied as a function of cluster size. Cluster size and content were determined from Transmission Electron Micrographs (TEM). The absorption band resulting from a plasma resonance in the clusters was found …

Low Temperature Synthesis And Characterization Of Lpcvd Silicon Dioxide Films Using Diethylsilane, Chakravarthy Srinivasa Gorthy

Theses

Diethylsilane (DES) has been used as a precursor to produce silicon dioxide films by low pressure chemical vapor deposition. These films were synthesized in the temperature range of 350 to 475°C thus allowing the use of the material as an intermetal dielectric or as a top layer passivation coating in microelectronic devices. In that process, the growth rate was observed to follow an Arrhenius behavior yielding an activation energy of 10 kcal/mol. The growth rate was also observed to increase with higher pressure and to vary as a function of the square root of the DES flow rate and O …

Expert System For Preventive Maintenance The Aluminum Extrusion Press And Related Equipment, E-Ping Lin

Theses

ESPM is an Expert System for Preventive Maintenance that provides the framework for application-specific equipment maintenance tools. The expert system for preventive maintenance and diagnosis was developed for the Aluminum Extrusion Press and Related Equipment. The system is built in VP-Expert and is implemented on a personal computer.

The expert system includes many characteristics of an expert system cell because it can be expanded easily by adding new information to its knowledge base or by changing the existing information. The expert system can be connected directly with a PC system through a VP-Expert software package and can interact with C …

Molecular Modeling Studies Of Anatoxin Agonist Analogues, Qizhan Yao

Theses

Thirty two anatoxin agonist analogues were investigated by means of computerassisted molecular modeling studies to delinate factors that may contribute to potency. The structures were generated from the fragment libraries from the SYBYL program, and minimized by the MM2 program. Then a systematic conformational search was done based on the global minimized structures to get bioactive conformations.

Ten agonists were further studied after the conformation optimization. The most potent agonists among these analogues, (+)-anatoxin-a (11), about 300 times as potent as carbamylcholine, severed as a template for the rest to examine the superimposability of the hydrogen bonding acceptor site and …

The Application Of Microwave Technology To The Remediation Of Non- Volatile Organic-Contaminated Soil, Huiping Gu

Theses

The application of microwave technology to the remediation of soils contaminated with non-volatile organic chemicals is the subject of this thesis. It had been previously shown in this laboratory that volatile and semi-volatile organics could be steam distilled from soil. This study has been focussed on the applicability of microwave treatment of soil contaminated with non-volatile organics at relatively low temperatures achievable by in situ microwave treatment. Non-volatile toxics, like dioxin, pose their greatest danger when excavated and transported, according to the EPA, therefore, there is an urgent need for an in situ remediation process. Microwave treatment is one of …

Synthesis And Study Of Polymers Containing Inorganic Ions, Lateef Aderoju Ibikunle-Sofoluwe

Theses

Cupric and ferrous polyacrylates have been prepared and studied. It was thought that partial reduction of Cu²⁺ or Fe³⁺ or oxidation of Cu⁺ or Fe²⁺ might result in semiconducting behavior but no such effect has been observed. Nevertheless, the results obtained are of considerable interest. Quantitative gravimetric and volumetric studies of cupric polyacrylate precipitation from varying molar ratios of cupric chloride and sodium polyacrylate in aqueous solution have shown that the only product formed is Cu(PA)₂ (Where PA represents an acrylate mer in polyacrylate). The insolubility of the product indicates that much of the Cu …

Scanning Electron Microscopy And X-Ray Energy Dispersive Spectroscopic Analysis Of Selected Sorbent Materials, Elhamy Amin Sedhom

Theses

A previous study⁽¹⁾ showed that a combination of acidic and basic sorbents in a layered system is required to reduce to safe levels the contaminants present in the leachates emanating from industrial landfills. The sorbents used were fly ash, vermiculite, kaolinite, illite, zeolite, apautagite, bentonite, activated carbon and bauxite.

The purpose of this investigation is to study the physical properties, elemental composition and the distribution of the aforementioned solid sorbents. Properties of interest are particle size, shape and distribution and also the chemical composition and the distribution of the elements within the sample particles.

Scanning Electron Microscopy (SEM) and …

High Temperature Resistant Crosslinked Phenol, O-Chlorophenol And Formaldehyde Copolymer Fiber, Suh Joon Han

Theses

Phenolic copolymer fibers which possess clearly distinguishable physical and chemical properties from other synthetic and natural fibers were prepared. Acid catalyzed condensation polymerization of phenol, formaldehyde and o-chiorophenol was carried out by a two-stage polymerization. Initially, phenol-formaldehyde and o-chlorophenol-formaldehyde oligomers were separately prepared by refluxing the corresponding monomers at 100°C under strong agitation. At the second stage, these two oligomers were combined and vacuum-distilled to form a block copolymer which was then melt spinned into fibers and subsequently cured by succinyl chloride in a mineral spirit. Using a flame test and thermogravimetric analysis, it was found that these cured fibers …

Molecular Modeling In Anatoxin And Other Semirigid Agonists, Wen-Chung Shang

Theses

Conformational search and molecular mechanics calculations were combined to investigate the structural flexibility of isoquinolone, the anatoxin series, and the ferruginine series. Ring searching allow all rational conformations to be generated.

Isoquinolone shows conformational similarity to isoarecolone but is much less potent which suggests that the proximity of the methyl group beta to the carbonyl groups affects the bioactivity of isoquinolone. The very active agonist-anatoxin, without a similar conformation as isoarecolone, shared a similar electrostatic potential contour in the vicinity between the two atoms connected to the electro-positive nitrogen and hydrogen bonding site. These phenomena were not found in ferruginine …

Determination Of Aromatic Amines By Diazonium Salt, Hong-Hue Hsu

Theses

There are many analytical methods used in the identification of aniline by the production of various colors upon treatment with certain reagents. In this work a new inexpensive, easy and sensitive methods to quantitate aniline is developed. The change of absorbance is large enough to measure with a difference of only 1 ppm in the aniline concentration.

In this method, the reagent (2,4-dinitrodiazonium sulphate) which reacts with aniline produces a yellow color. Formation of this color (which absorbs at 486 nm) indicates the presence of aniline. The amount of aniline can be determined by measuring the absorbance at 486 nm. …

Agitation Requirements For Complete Dispersion Of Emulsions, Dun-Huang Tsai

Theses

An investigation on the minimum agitation speed required to achieve complete dispersion in liquid-liquid systems has been carried out. A model based on the momentum balance for a droplet and on Kolmogoroff's theory of isotropic turbulence was used for the prediction of the role of the most important variables on the minimum agitation speed. The equation so derived can be expressed in terms of a number of non- dimensional groups (such as Re, Ar, and Su). For geometrically similar systems the equation contains only one adjustable parameter ( to be determined experimentally) in the form of the proportionality constant correlating …

The Design, Manufacture And Mechanical Analysis Of An L4-5 Spinal Disc Prosthesis, Bohdan A. Siryi

Theses

The purpose of this research was to develop an intervertebral disc prosthesis which can provide the biomechanical properties of the natural disc. The prosthesis will be used to replace the symptomatic degenerated disc and thereby limit backpain and subsequent spinal disease.

Four cadaveric L4-5 motion segments were mechanically tested under axial compression and combined compression/torsion, generating compressive moduli and torsional stiffness values. Following, prosthetic discs were fabricated and mechanically tested, with the fabrication technique directed towards the optimization of mechanical properties in compression, torsion and bending.

Thirty silicon rubber and forty five polyurethane disc prostheses were fabricated. Silicon rubber, dacron …

Approaches To The Synthesis Of Dentin Bonding Agents Containing Vinyl And Carbamate Functional Groups, Steven W. Amato

Theses

The synthesis of four new monomers containing vinyl and carbamate functional groups was attempted. The desired products were N-m-methacryloxyphenyl-O-phenyl carbamate, N-p-methacryloxy-O-phenyl carbamate, m-N-phenylcarbamato-2-methacryloxyethoxy benzoate, and p-N-phenylcarbamato-2-methacryloxyethoxy benzoate. The carbamate functional group was derived by the Lewis Acid catalyzed reaction of meta-aminophenol, para-aminophenol, meta-aminobenzoic acid, and para-aminobenzoic acid with diphenyl carbonate. The vinyl function was derived, in the case of the aminophenols, by reaction with methacrylyl chloride, and in the case of the aminobenzoic acids, with 2-hydroxyethyl methacrylate.

Partial products only were prepared, these being the two carbamate functional phenols, the two carbamate functional benzoic acids, the two methacryloxy functional derivatives …

Geometric And Enthalpic Calculational Study Of Monosubstituted Cyclobutanes ; Attempted Synthesis Of 1,3-Diphenyl-2,2,4,4-Tetrafluorobicyclo [1.1.0] Butane, Jose Luis Reyesgavilan

Theses

The work undertaken in this thesis is in two parts. In the first, the structure and heat of formation of substituted cyclobutanes were studied via the computer program MMII using an IBM PCXT personal computer with a math co-processor chip. Structurally, a trend was seen to be followed in which bulkier substituents were pushed away from any steric interaction with the ring. This was accomplished by having the latter alter its puckering angle, C2C1C4 angle, HCX angle, and to a smaller extent, the bond lengths immediately adjacent to the substituted carbon atom. This results demonstrated that the ring was very …

Trends In Metal (Pb, Zn, Ni, As And Se) Concentrations In The New Jersey Air Environment, Geoffrey Ike Ejiofor

Theses

The trend and atmospheric concentrations of five trace elements (Pb, Zn, Ni, As and Se) were studied at Newark (urban site) and Ringwood (rural site), New Jersey, during January - September 1985, whilst the Hackensack Meadowlands, New Jersey were monitored during October 1985-March 1986. The analytical procedure involved collection of the airborne particulates on a glass fiber filter using a non-dichotomous high volume sampler. The samples were digested and analyzed using the atomic absorption spectrophotometer. It was ascertained that Newark and Meadowlands exhibited higher average concentrations of Zinc and Lead than Ringwood. It was concluded all the metals originated mostly …

Physical And Mechanical Properties Of A New Type Of Polymer Concrete, Kyan Bin Khoo

Theses

A new type of Polymer concrete is an admixture of a special Latex, Portland cement and Sand. It has high bond strength, quick curing, durability and adequate strength. The Mechanical and Physical properties were investigated in this paper. Reinforcement with Glassfiber was done and its properties compared to those of control specimens. The heat generation in Polymer Concrete (PC) and its relationship with the properties of PC was also investigated.

A new type of Polymer concrete is an admixture of a special Latex, Portland cement and Sand. It has high bond strength, quick curing, durability and adequate strength. The Mechanical …

The Quantitative Analysis Of Airborne Particulates By X-Ray Flourescence, George C. Asteriou

Theses

Airborne particulate matter from the New Jersey State area collected on Quartz Microfiber filters was analyzed by X-Ray Fluorescence spectroscopy. The quantitative analysis of the samples against N. B. S. standards produced results which were compared with Atomic Absorption analysis

The results from the two methods were correlated by the introduction of empirical factors for each element.

However, a larger number of analyzed standards of varied composition, along with the creation of a spectral library, can minimize the need for empirical factors and yield accu¬rate results.

Synthesis Of Trimethylpropane-Tolylene-2,4-Diisocyanate Adduct And Its Blocked Monomers, Farhad Forohar

Theses

A trimethylolpropane adduct of tolylene-2,4-diisocyanate (TMP-TDI) was prepared by reaction in a heterogeneous solvent system. The isocyanate functional groups of the TMP-TDI adduct were blocked with the following blocking agents: p-cresol, eugenol, o-chlorophenol, and one to one mole ratio of mixtures of 2-hydroxyethyl methacrylate (HEMA) and each of the three preceding blocking agents. A sample of TMP-TDI adduct blocked with only HEMA was also prepared. The products were characterized by melting point, infrared spectroscopy, and elemental analysis. Monomers of TMP-TDI blocked with 50% HEMA and 50% blocking agents may be very useful as dental restorative materials.

Characterization Of Tdi-Hema Homopolymer Prepared Via An Immiscible Solvent System. Synthesis And Investigation Of Oligodichloroketene, Manuel Montero

Theses

The objective of this thesis has been divided in two parts.

The first part is subdivided into two areas. First a "Universal" calibration curve for gel permeation chromatography (GPC) was construc-ted using different molecular weight standards of PMMA and MMA-HEMA co-polymers. By measuring the viscosity of the different molecular weight solutions and calculating the Vr, (retention volume), from GPC data, plots of In [ η ] Mw against Vr and In Mw against Vr are obtained. These curves can be used to obtain the molecular weight of any linear (not crosslinked) copolymer by simple measurements of viscosity and GPC data. …

Three Studies On Airborne Polycyclic Aromatic Hydrocarbons, Carol Sophia Eveleens

Theses

Three studies have been conducted on polycyclic aromatic hydrocarbons found on airborne particulate matter. The first investigation involves the determination of fly ash "activity" in the reaction of two PAHs adsorbed on its surface. Mass spectrometry is used to monitor the exchange of hydrogen and deuterium atoms between anthracene and anthracene-d10. The results indicate that some fly ashes exhibit "activity" in the reactions of PAHs adsorbed on its surface. The second investigation involves the determination of cyclopenta[cd]pyrene (CcdP) and benzo[ghi]flouranthene (BghiF) on samples of airborne particulate material collected from two automobile traffic tunnels. Glass capillary gas chromatography with a precolumn …

Calibration Of Flame Ionization Detector For Chlorinated Hydrocarbons, Nahid Jabalameli

Theses

Relative Responses and Calibration Factors were developed for several volatile organic (mostly chlorinated) priority pollutant species in order to use one single stable compound (e.g.Benzene) for daily instrument calibration. This would replace the procedure of using a standard mixture of target compounds (25-35). This is of particular advantage because the standard mixture may not have all species stable or may show loss of some components relative to others due to wall adsorption in the standard (compressed gas) stainless steel cylinder.

The use of a single standard species was made possible by developing "accurate" relative response and calibration factors of all …

Preparation And Characterization Of Blocked Diisocyanate Monomers For Dental Applications, Stephen Richard Angeli

Theses

Six new monomers were prepared and characterized. The six monomers are blocked diisocyanate compounds. In the preparation 2,4-tolylene diisocyanate was first blocked with 2=hydroxyethyl methacrylate in the para NCO position. Six different blocking agents were then used to block the ortho NCO in the preparation of the monomers: (1) p-methoxyphenol, (2) m-methoxyphenol, (3) o-methoxyphenol, (4) p-chlorophenol, (5) m-chlorophenol, and (6) o-chlorophenol. The six monomers were characterized by mp, liquid chromatography, IR, NMR, and elemental analysis. All the characterizations show that the monomers are indeed the desired products.

Preparation And Characterization Of Blocked Isocyanate Monomer Polymer And Equilibrium Constant Of Deblocking, Kirti P. Kamdar

Theses

A 2-Hydroxyethyl methacrylate (HEMA) adduct of toluene 2-4 diisocyanate (TDI) was prepared in petroleum ether at 35-40°C under nitrogen. In order to prepare the monomer, equimolar amounts of TDI and HEMA were reacted with P-cresol which functions as a blocking agent.,Di-butyltin dilaurate was used as a catalyst and chloranil was used as an inhibitor. The solid monomer which was obtained was recrystallized, and polymerized in chloroform using azobis isobutyronitrile as initiator.

Monomer and polymer were characterized using infrared spectroscopy, melting point, liquid chromatography gel permeation chromatography. A vapor pressure osmometric study of the polymer in three different solvents at three …

The Quantitative Determination Of The Elemental Composition Of Coal Fly Ash Samples Using X-Ray Fluorescence, Joseph R. Cervassi

Theses

Bulk constituent elements contained in coal fly ash were measured by X-ray fluorescence spectroscopy in eight samples. Four samples were used as calibration standards for the spectrometer since their compositions were previously determined by atomic absorption spectrometry. Calibration coefficients of the standards were calculated with computer assisted regression analysis of the fluorescence spectra, and used to determine the composition of the remaining four samples. The compositions of the latter four samples, as predicted by X-ray fluorescence, were then compared to atomic absorption results. X-ray fluorescence and atomic absorption results agree best when the concentrations of elements in the standards are …

Preparation Of Aniline-Formaldehyde Ion-Exchanger Fiber : Part I : Polymer Synthesis And Fiber Curing, Ching-Hsin Chen

Theses

Aniline-Formaldehyde polymer was synthesized by a new procedure ( as opposed to the conventional approach ). With an equal molar ratio of aniline and formaldehyde and a small amount of oxalic acid, the resulted polymer is free from gels and is suitable for fiber transformation.

The polymer is a transparent yellowish resin, having a melting range between 100-115C, and an average molecular weight 1200. The polymer was intended to be the precursor material for ion-exchange fibers. However, due to the time limit, this thesis only covers the work of polymer synthesis, fiber spinning and the identification of an crosslinker.

Among …

A Purely Chemical Nitrogen Dioxide Laser, Conrado Mendoza Malalis

Theses

Purely chemical lasers promise to provide future high-power lasers for remote installations, airplanes, ships and in space without the necessity of external electric power, sources.

This study is about the design and construction of a new, gas phase purely chemical NO₂ laser, based on the reaction of NO + O₃ + NO≠₂ + O₂. The vibrationally excited NO≠₂ species at 1-40 mm Hg total pressure is the source of energy (photons) for the laser. A series of computer program calculations on the reaction kinetics and relaxational processes involved have also been made, …

Analysis Of Combustion Products Of Kynol And Nomex, Abdul Halim Hassan Housny

Theses

The gaseous products generated by flaming combustion of Kynol and Nomex fibers under the same conditions (temperature 300-700°C, natural air) were quantitatively analyzed by infrared spectrophotometry, gas chromatography, mass spectrometry and a colorimetric tube method. The four techniques were chosen to examine the wide range of volatile and condensable products expected due to their different capabilities and sensitivities.

The main gases generated were carbon monoxide, carbon dioxide, methane and benzene.

The mass spectrometer was used to identify the condensed vapors. These were mainly phenol, methyl phenol and dimethyl phenol from the Kynol fiber and benzene, aniline, diaminobenzene, benzoic acid, benzonitrile, …