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Articles 271 - 300 of 334
Full-Text Articles in Nanotechnology Fabrication
Multiscale Study Of Batio3 Nanostructures And Nanocomposites, Lydie Louis Louis
Multiscale Study Of Batio3 Nanostructures And Nanocomposites, Lydie Louis Louis
Graduate Theses and Dissertations
Advancements in integrated nanoelectronics will continue to require the use of unique materials or systems of materials with diverse functionalities in increasingly confined spaces.
Hence, research on finite-dimensional systems strive to unearth and expand the knowledge of fundamental physical properties in certain key materials which exhibit numerous concurrent and exploitable functions.
Correspondingly, ferroelectric nanostructures, which particularly display a plethora of complex phenomena, prevalent in countless fields of research, are noteworthy candidates. Presently, however, the assimilation of zero-(0D) and one-dimensional (1D) ferroelectric into micro- or nano-electronics has been lagging, in part due to a lack of applied and fundamental studies but …
Ferroelectric Batio3/Srtio3 Multilayered Thin Films For Room-Temperature Tunable Microwave Elements, Ming Liu, Chunrui Ma, Gregory Collins, Jian Liu, Chonglin Chen, Andy D. Alemayehu, Guru Subramanyam, Ying Ding, Jianghua Chen, Chao Dai, Yuan Lin, Melanie W. Cole
Ferroelectric Batio3/Srtio3 Multilayered Thin Films For Room-Temperature Tunable Microwave Elements, Ming Liu, Chunrui Ma, Gregory Collins, Jian Liu, Chonglin Chen, Andy D. Alemayehu, Guru Subramanyam, Ying Ding, Jianghua Chen, Chao Dai, Yuan Lin, Melanie W. Cole
Electrical and Computer Engineering Faculty Publications
Ferroelectric BaTiO3/SrTiO3 with optimized c-axis-oriented multilayered thin films were epitaxially fabricated on (001) MgO substrates. The microstructural studies indicate that the in-plane interface relationships between the films as well as the substrate are determined to be (001)SrTiO3//(001)BaTiO3//(001)MgO and [100]SrTiO3//[100]BaTiO3//[100]MgO. The microwave (5 to 18 GHz) dielectric measurements reveal that the multilayered thin films have excellent dielectric properties with large dielectric constant, low dielectric loss, and high dielectric tunability, which suggests that the as-grown ferroelectric multilayered thin films can be developed for room-temperature tunable microwave elements and related device applications.
Intermediate Band Solar Cells Based On Inas Quantum Dots Embedded In Ingaas Quantum Well, Ramesh Vasan
Intermediate Band Solar Cells Based On Inas Quantum Dots Embedded In Ingaas Quantum Well, Ramesh Vasan
Graduate Theses and Dissertations
Intermediate band solar cells based on quantum dots and quantum wells with anti-reflection coating are investigated in this thesis. The demand for high efficient solar cells as an alternate source of energy is the main motivation for this research project. Intermediate band solar cells based on quantum dots were the subject of intensive research in recent years. High power conversion efficiency was predicted from InAs/GaAs intermediate band solar cells as the presence of InAs quantum dots increased the absorption below the band gap of the host material.
In this thesis, an attempt has been made to further increase the absorption …
New Effects Of Aging And Lattice Intercalation On Surface Properties Of Titanate Nanobelts, Roger Williams
New Effects Of Aging And Lattice Intercalation On Surface Properties Of Titanate Nanobelts, Roger Williams
Graduate Theses and Dissertations
Titanate nanobelts (NBs) have structural characteristics beyond that of clays. Due to a negatively charged lattice matrix of edge-shared TiO6-octahedra, the location of intercalated cations within the interlayer space may dictate the charge-conductions. This environment may in turn govern the lattice-framework's stability and surface properties, based upon our preliminary
data.
On that basis, these nanomaterials have been found in our lab to possess superb biological compatibility that is closely related to the types of the intercalated cations. In addition, a prolonged agitation was proven to enable us to manipulate the titanate NBs' length. In a parallel study, a ripening was …
Iii-V Bismide Optoelectronic Devices, Dongsheng Fan
Iii-V Bismide Optoelectronic Devices, Dongsheng Fan
Graduate Theses and Dissertations
This dissertation explores modeling, molecular beam epitaxy growth, and fabrication of III-V bismide optoelectronic devices, which are of great importance in modern applications of telecommunication, gas sensing, environment monitoring, etc. In the current room-temperature continuous-wave operational GaSb-based type-I InGaAsSb/AlGaInAsSb quantum well laser diodes in 3-4 um mid-wavelength range, the lasing wavelength and performance of the devices are limited due to the lack of hole confinement in the active regions. In this dissertation, a novel GaSb-based GaInAsSbBi material is proposed to replace the conventional InGaAsSb material in the quantum well region, which enables the laser diodes achieve up to 4 µm …
Synthesis Of Optimized Inp/Zns Core/Shell Nanocrystals And Tio2 Nanotubes For Quantum Dot Sensitized Solar Cells, Seungyong Lee
Synthesis Of Optimized Inp/Zns Core/Shell Nanocrystals And Tio2 Nanotubes For Quantum Dot Sensitized Solar Cells, Seungyong Lee
Graduate Theses and Dissertations
Synthesis of InP/ZnS core/shell nanocrystals and TiO2 nanotubes and the optimization study to couple them together were explored for quantum dot sensitized solar cells. Its intrinsic nontoxicity makes the direct band gap InP/ZnS core/shell be one of the most promising semiconductor nanocrystals for optoelectric applications, with the advantage of tuning the optical absorption range in the desired solar spectrum region. Highly luminescent and monodisperse InP/ZnS nanocrystals were synthesized in a non-coordinating solvent. By varying the synthesis scheme, different size InP/ZnS nanocrystals with emission peaks ranging from 520 nm to 620 nm were grown. For the purpose of ensuring air …
Brust-Schiffrin Synthesis Of Catalytic Bipodal Pdpt Nanoparticles With Some Mechanistic Insights, Sangbum Han, Vara P. Sheela, Wei Cao, Balasubramanian Ramjee
Brust-Schiffrin Synthesis Of Catalytic Bipodal Pdpt Nanoparticles With Some Mechanistic Insights, Sangbum Han, Vara P. Sheela, Wei Cao, Balasubramanian Ramjee
Applied Research Center Publications
Brust–Schiffrin reduction of Pd and Pt precursors in the presence of resorcinarene amine surfactant led to the formation of substantially Pt rich, PdPt bimetallic nanoparticles of a V-shape or variants on the V-shape. New insights into this reaction are provided on the basis of reversed Brust–Schiffrin syntheses, DLS, UV-vis, and NMR analysis. Based on our experiments we conclude that the resorcinarene amine surfactant is part of the inverse micelle formed from TOABr and it also selectively complexes with the Pd salts prior to their reduction. Remarkably, the composition of the bipodal nanoparticles could be varied substantially by varying the reaction …
Investigation Of Cds Nanowires And Planar Films For Enhanced Performance As Window Layers In Cds-Cdte Solar Cell Devices, Jianhao Chen
Investigation Of Cds Nanowires And Planar Films For Enhanced Performance As Window Layers In Cds-Cdte Solar Cell Devices, Jianhao Chen
Theses and Dissertations--Electrical and Computer Engineering
Cadmium sulfide (CdS) and cadmium telluride (CdTe) are two leading semiconductor materials used in the fabrication of thin film solar cells of relatively high power conversion efficiency and low manufacturing cost. In this work, CdS/CdTe solar cells with a varying set of processing parameters and device designs were fabricated and characterized for comparative evaluation. Studies were undertaken to elucidate the effects of (i) each step in fabrication and (ii) parameters like thickness, sheet resistance, light absorptivity solution concentration, inert gas pressure etc. Best results were obtained when the thickness of CdS planar film for the window layer was in the …
Copper Indium Diselenide Nanowire Arrays In Alumina Membranes Deposited On Molybdenum And Other Back Contact Substrates, Bhavananda R. Nadimpally
Copper Indium Diselenide Nanowire Arrays In Alumina Membranes Deposited On Molybdenum And Other Back Contact Substrates, Bhavananda R. Nadimpally
Theses and Dissertations--Electrical and Computer Engineering
Heterojunctions of CuInSe2 (CIS) nanowires with cadmium sulfide (CdS) were fabricated demonstrating for the first time, vertically aligned nanowires of CIS in the conventional Mo/CIS/CdS stack. These devices were studied for their material and electrical characteristics to provide a better understanding of the transport phenomena governing the operation of heterojunctions involving CIS nanowires. Removal of several key bottlenecks was crucial in achieving this. For example, it was found that to fabricate alumina membranes on molybdenum substrates, a thin interlayer of tungsten had to be inserted. A qualitative model was proposed to explain the difficulty in fabricating anodized aluminum oxide …
Growth Of Silver Nanoparticles On Transparent Substrates From Liquid Precursors: Improvements And Applications, Carlos Andrés Jarro Sanabria
Growth Of Silver Nanoparticles On Transparent Substrates From Liquid Precursors: Improvements And Applications, Carlos Andrés Jarro Sanabria
Theses and Dissertations--Electrical and Computer Engineering
Interest in controlling the synthesis of silver nanoparticles in colloidal solutions has increased during the last two decades. There is also growing interest in forming layers of silver nanoparticles on substrates, particularly for surface-enhanced Raman spectroscopy applications. However, methods to grow silver nanoparticles directly on substrates have not been studied extensively, and there are few techniques for controlling the size, shape, density, and location of the particles. This work presents a simple and reliable method to photodeposit silver nanoparticles onto transparent substrates. The size, shape and deposition density of the nanoparticles are influenced by the precursor solution, light intensity, and …
Multi-Mode Self-Referencing Surface Plasmon Resonance Sensors, Jing Guo
Multi-Mode Self-Referencing Surface Plasmon Resonance Sensors, Jing Guo
Theses and Dissertations--Electrical and Computer Engineering
Surface-plasmon-resonance (SPR) sensors are widely used in biological, chemical, medical, and environmental sensing. This dissertation describes the design and development of dual-mode, self-referencing SPR sensors supporting two surface-plasmon modes (long- and short-range) which can differentiate surface binding interactions from bulk index changes at a single sensing location. Dual-mode SPR sensors have been optimized for surface limit of detection (LOD). In a wavelength interrogated optical setup, both surface plasmons are simultaneously excited at the same location and incident angle but at different wavelengths. To improve the sensor performance, a new approach to dual-mode SPR sensing is presented that offers improved differentiation …
Silver (Ag) Nanoparticle Based Masks For The Development Of Antireflection Subwavelength Structures In Gaas And Si Solar Cells, Nazme A. Moushumy
Silver (Ag) Nanoparticle Based Masks For The Development Of Antireflection Subwavelength Structures In Gaas And Si Solar Cells, Nazme A. Moushumy
Theses: Doctorates and Masters
This thesis focuses on the design and development of silver nanoparticles that can be used as masks for the development of antireflection subwavelength grating (SWG) structures. We particularly investigate the impact of silver thin film thickness and the effect of annealing temperature on the fabrication of silver nanoparticles of controlled size and spacing distributions. We also use these measured distributions to predict the performance of subwavelength grating structures developed using dry and isotropic etching of semiconductor substrates.
Silver (Ag) thin films of different thicknesses are deposited on Silicon (Si) and Gallium Arsenide (GaAs) semiconductor substrates and annealed at different temperatures. …
Hybrid Plasmonic Nanoantennas: Fabrication, Characterization, And Application, Shengjie Zhai
Hybrid Plasmonic Nanoantennas: Fabrication, Characterization, And Application, Shengjie Zhai
UNLV Theses, Dissertations, Professional Papers, and Capstones
As optical counterpart of microwave antennas, plasmonic nanoantennas are important nanoscale devices for converting propagating optical radiation into confined/enhanced electromagnetic fields. Presently, nanoantennas, with a typical size of 200-500 nm, have found their applications in bio-sensing, bio-imaging, energy harvesting, and disease cure and prevention. With the device feature size of next generation IC goes down to 22 nm or smaller, and biological/chemical sensing reaches the Gene’s level, the sizes of the corresponding nanoantennas have to be scaled down to sub-100nm level. In the literature, these sub-100nm nanoantennas are referred as deep subwavelength nanoantennas as size of such miniaturized nanoantennas is …
Fabrication Of A Large, Ordered, Three-Dimensional Nanocup Array, Joanne C. Lo, Soongweon Hong, Richard J. Anderson, Luke P. Lee, David A. Horsley, Jack L. Skinner
Fabrication Of A Large, Ordered, Three-Dimensional Nanocup Array, Joanne C. Lo, Soongweon Hong, Richard J. Anderson, Luke P. Lee, David A. Horsley, Jack L. Skinner
Mechanical Engineering
Metallic nanocups provide a unique method for redirecting scattered light by creating magnetic plasmon responses at optical frequencies. Despite considerable development of nanocup fabrication processes, simultaneously achieving accurate control over the placement, orientation, and geometry of nanocups has remained a significant challenge. Here we present a technique for fabricating large, periodically ordered arrays of uniformly oriented three-dimensional gold nanocups for manipulating light at subwavelength scales. Nanoimprint lithography, soft lithography, and shadow evaporation were used to fabricate nanocups onto the tips of polydimethylsiloxane nanopillars with precise control over the shapes and optical properties of asymmetric nanocups.
Thermally Actuated Resonant Silicon Crystal Nanobalances, Arash Hajjam
Thermally Actuated Resonant Silicon Crystal Nanobalances, Arash Hajjam
Electronic Theses and Dissertations
As the potential emerging technology for next generation integrated resonant sensors and frequency references as well as electronic filters, micro-electro-mechanical resonators have attracted a lot of attention over the past decade. As a result, a wide variety of high frequency micro/nanoscale electromechanical resonators have recently been presented. MEMS resonators, as low-cost highly integrated and ultra-sensitive mass sensors, can potentially provide new opportunities and unprecedented capabilities in the area of mass sensing. Such devices can provide orders of magnitude higher mass sensitivity and resolution compared to Film Bulk Acoustic resonators (FBAR) or the conventional quartz and Surface Acoustic Wave (SAW) resonators …
Nanoscale Contacts Between Semiconducting Nanowires And Metallic Graphenes, Seongmin Kim, David B. Janes, Sung-Yool Choi, Sanghyun Ju
Nanoscale Contacts Between Semiconducting Nanowires And Metallic Graphenes, Seongmin Kim, David B. Janes, Sung-Yool Choi, Sanghyun Ju
Birck and NCN Publications
Metal–semiconductor (M–S) junctions are important components in many semiconductor devices, and there is growing interest in realizing high quality M–S contacts that are optically transparent. In this paper, we present our investigations into the characteristics of M–S junction in a semiconducting ZnO nanowire that was directly grown on a multilayer graphene film (MGF). The synthesized nanowires were fabricated into two-terminal devices with MGF as one contact and Al as the other contact. By comparison with devices employing Al contacts at both ends, the nanowire resistivity and specific contact resistivity of the MGF–nanowire contact can be extracted. The extracted specific contact …
Molecular Dynamics Study Of Diffusion Of O2 Penetrates In Uncrosslinked Polydimethysiloxane (Pdms), Crosslinked Pdms, And Pdms-Based Nanocomposites, Varun Ullal
Graduate Theses and Dissertations
Molecular dynamics simulations are used to study diffusion of O2 molecules in pure polydimethysiloxane (PDMS), crosslinked PDMS, and PDMS-based nanocomposites. The PDMS chains and penetrates are modeled using a hybrid interatomic potential which treats the Si-O atoms along the chain backbone explicitly while coarse-graining the methyl side groups and penetrates. By tracking the diffusion of penetrates in the system and subsequently computing their mean-squared displacement, diffusion coefficients are obtained. In pure PDMS models of varying molecular weight, diffusivity of the O22 penetrates is found to have an inverse relationship with chain length. Simulation models with longer chains …
Plasma-Assisted Molecular Beam Epitaxial Growth Of Indium Nitride For Future Device Fabrication, Steven Paul Minor
Plasma-Assisted Molecular Beam Epitaxial Growth Of Indium Nitride For Future Device Fabrication, Steven Paul Minor
Graduate Theses and Dissertations
The need for energy conservation has heightened the search for new materials that can reduce energy consumption or produce energy by the means of photovoltaic cells. III-nitride alloys show promise for these applications due to their generally good transport properties and ability to withstand high power applications. Along with these, this family of semiconductor alloys has a direct bandgap energy range (0.7-6.2 eV) which spans the entire visible spectrum and encompasses a large portion of the available solar spectrum. Of the three root III-nitride semiconductors, AlN, GaN, and InN, InN has only recently become attainable epitaxially with qualities good enough …
Use Of Ultra High Vacuum Plasma Enhanced Chemical Vapor Deposition For Graphene Fabrication, Shannen Adcock
Use Of Ultra High Vacuum Plasma Enhanced Chemical Vapor Deposition For Graphene Fabrication, Shannen Adcock
Graduate Theses and Dissertations
Graphene, what some are terming the "new silicon", has the possibility of revolutionizing technology through nanoscale design processes. Fabrication of graphene for device processing is limited largely by the temperatures used in conventional deposition. High temperatures are detrimental to device design where many different materials may be present. For this reason, graphene synthesis at low temperatures using plasma-enhanced chemical vapor deposition is the subject of much research. In this thesis, a tool for ultra-high vacuum plasma-enhanced chemical vapor deposition (UHV-PECVD) and accompanying subsystems, such as control systems and alarms, are designed and implemented to be used in future graphene growths. …
Fabrication Of Vertical Silicon Nanowires Through Metal Assisted Deposition, Matthew Garett Young
Fabrication Of Vertical Silicon Nanowires Through Metal Assisted Deposition, Matthew Garett Young
Graduate Theses and Dissertations
Controlled and ordered growth of Si nanowires through a low temperature fabrication method compatible with CMOS processing lines is a highly desirable replacement to future electronic fabrication technologies as well as a candidate for a low cost route to inexpensive photovoltaics. This stems from the fact that traditional CMOS based electronics are hitting physical barriers that are slowing the Moore's Law trend as well as the demand for an inexpensive solar cell technology that can obtain grid parity. A fractional factorial growth study is presented that compares the growth of Au and Al catalyzed Si nanowires at temperatures ranging from …
High Frequency Characterization Of Carbon Nanotube Networks For Device Applications, Emmanuel Decrossas
High Frequency Characterization Of Carbon Nanotube Networks For Device Applications, Emmanuel Decrossas
Graduate Theses and Dissertations
This work includes the microwave characterization of carbon nanotubes (CNTs) to design new CNTs-based high frequency components. A novel developed method to extract the electrical properties over a broad microwave frequency band from 10 MHz to 50 GHz of carbon nanotubes (CNTs) in a powder form is performed. The measured scattering parameters (S-parameters) with a performance network analyzer are compared to the simulated one obtained from an in-house computed mode matching technique (MMT). An optimized first order gradient method iteratively changes the unknown complex permittivity parameters to map the simulated S-parameters with the measured one until convergence criteria are satisfied. …
Thermal Conductivity Measurement With 3Ω Method Background And Synopsis Of Its Implementation, Fiifi Blankson
Thermal Conductivity Measurement With 3Ω Method Background And Synopsis Of Its Implementation, Fiifi Blankson
College of Engineering: Graduate Celebration Programs
ABSTRACT
Continued advances in nanostructured materials have made it necessary to develop materials with specific thermoelectric properties. The 3ω Method provides an accurate measurement of one such property, thermal conductivity. It will be used in this research to find high electrical conductivity alloys with low thermal conductivity.
Characterization And Manipulation Of Nanorods Via An Applied Magnetic Field, Summer Wu '13
Characterization And Manipulation Of Nanorods Via An Applied Magnetic Field, Summer Wu '13
Student Publications & Research
A remote system capable of controlling the motion of magnetic nanorods was created. Two different systems, electromagnets and magnetic stirrers, were used to create continuously changing magnetic fields thus applying a constant torque to make nanorods rotate as “nano stirbars”. The system was tested on three different types of synthesized nanorods: multi-segmented Ni/Au, pure Ni, and pure Au nanorods. Ni and Au were chosen due to the combination of the magnetic properties of Ni and the biocompatible properties of Au. Variables such as length, shape, and geometries of the nanorods were characterized by a scanning electron microscope and an atomic …
Stabilizing Acetylcholinesterase On Carbon Electrodes Using Peptide Nanotubes To Produce Effective Biosensors, Todd J. Stevens
Stabilizing Acetylcholinesterase On Carbon Electrodes Using Peptide Nanotubes To Produce Effective Biosensors, Todd J. Stevens
Theses and Dissertations
A biosensor for the detection of organophosphates in water was created by immobilizing acetylcholinesterase (AChE) on a carbon screen printed electrode using peptide nanotubes (PNT) and Nafion®. This sensor was used with acetylthiocholine (ASCh) substrate to detect the inhibitory effects of malathion. The stability of the encapsulated enzyme was measured over 50 days of storage at 4°C in a phosphate buffer solution. The oxidation of thiocholine, a product of the enzymatic reaction of ASCh and AChE, was used to measure the activity of the encapsulated enzyme. Cyclic voltammograms were taken in an ASCh and phosphate buffer solution, and the peak …
Theory Of Charging And Charge Transport In “Intermediate” Thickness Dielectrics And Its Implications For Characterization And Reliability, Sambit Palit, Muhammad A. Alam
Theory Of Charging And Charge Transport In “Intermediate” Thickness Dielectrics And Its Implications For Characterization And Reliability, Sambit Palit, Muhammad A. Alam
Birck and NCN Publications
Thin film dielectrics have broad applications, and the performance degradation due to charge trapping in these thin films is an important and pervasive reliability concern. It has been presumed since the 1960s that current transport in intermediate-thickness (IT) oxides (∼10–100 nm) can be described by Frenkel-Poole (FP) conduction (originally developed for ∼mm-thick films) and algorithms based on the FP theory can be used to extract defect energy levels and charging-limited lifetime. In this paper, we review the published results to show that the presumption of FP-dominated current in IT oxides is incorrect, and therefore, the methods to extract trap-depths to …
Matter Under Unusual Conditions, Bernard Zygelman
Matter Under Unusual Conditions, Bernard Zygelman
NSTec UNLV Symposium
What is curiosity – driven research and why do we support it?
Vannevar Bush Science The Endless Frontier (1945)
“Science is the pacemaker of technological progress … New productsand new processes do not appear full-grown. They are founded on newprinciples and new conceptions, which in turn are painstakingly developedby research in the purest realms of science“
•Magnetic Resonance Imaging
•Positron Emission Tomography
•Laser applications
•GPS
•Nano Technology
A Reconfigurable Cpw Bow-Tie Antenna Using An Integrated Ferroelectric Thin Film Varactor, K. C. Pan, Dustin Brown, Guru Subramanyam, R. Penno, H. Jiang, C. H. Zhang, M. Patterson, David Kuhl, Kevin Leedy, Charles Cerny
A Reconfigurable Cpw Bow-Tie Antenna Using An Integrated Ferroelectric Thin Film Varactor, K. C. Pan, Dustin Brown, Guru Subramanyam, R. Penno, H. Jiang, C. H. Zhang, M. Patterson, David Kuhl, Kevin Leedy, Charles Cerny
Electrical and Computer Engineering Faculty Publications
A novel printed antenna with a frequency reconfigurable feed network is presented. The antenna consists of a bowtie structure patch radiating element in the inner space of an annulus that is on a nongrounded substrate with a ferroelectric (FE) Barium Strontium Titanate (BST) thin film. The bowtie patch is fed by a coplanar waveguide (CPW) transmission line that also includes a CPW-based BST shunt varactor. Reconfiguration of the compact 8 mm × 8 mm system has been demonstrated by shifting the antenna system’s operating frequency 500 MHz in the 7–9 GHz band by applying a DC voltage bias.
New Class Of Garnet Nanocomposites For Use In Magnetic Photonic Crystals Prepared By Rf Magnetron Co-Sputtering, Mohammad Nur-E-Alam, Mikhail Vasiliev, Kamal Alameh
New Class Of Garnet Nanocomposites For Use In Magnetic Photonic Crystals Prepared By Rf Magnetron Co-Sputtering, Mohammad Nur-E-Alam, Mikhail Vasiliev, Kamal Alameh
ECU Presentations
No abstract provided.
Tunable Gold Nanostructures With Nanocapsules As Template Reaction Vessels, Balasubramanian Ramjee, Srujana Prayakarao, Sangbum Han, Wei Cao
Tunable Gold Nanostructures With Nanocapsules As Template Reaction Vessels, Balasubramanian Ramjee, Srujana Prayakarao, Sangbum Han, Wei Cao
Chemistry & Biochemistry Faculty Publications
Hollow, polymeric, thiol-ene resorcinarene nanocapsules can act as template reaction vessels for the synthesis of gold nanoshells or spherical aggregates of gold nanoparticles depending on the reaction conditions. The spherical nanoparticle aggregates were evaluated as catalysts in the biphasic reduction of 4-nitrophenol.
Feedback Control For Electron Beam Lithography, Yugu Yang
Feedback Control For Electron Beam Lithography, Yugu Yang
Theses and Dissertations--Electrical and Computer Engineering
Scanning-electron-beam lithography (SEBL) is the primary technology to generate arbitrary features at the nano-scale. However, pattern placement accuracy still remains poor compared to its resolution due to the open-loop nature of SEBL systems. Vibration, stray electromagnetic fields, deflection distortion and hysteresis, substrate charging, and other factors prevent the electron-beam from reaching its target position and one has no way to determine the actual beam position during patterning with conventional systems. To improve the pattern placement accuracy, spatial-phase-locked electron-beam lithography (SPLEBL) provides feedback control of electron-beam position by monitoring the secondary electron signal from electron-transparent fiducial grids on the substrate. While …