Nanotechnology Fabrication Commons^™

Mems Optical Cavities For Low Power Communication., Jacob Schopp

Electronic Theses and Dissertations

This thesis discusses the use of MEMS (microelectromechanical systems) optical cavities for use in low power communication. MEMS optical cavities are thin air gaps between an actuated MEMS mirror and a fixed glass encapsulation. By moving the MEMS mirror the reflectivity of the MEMS optical cavity can be changed. This change in reflectivity can be used to transmit information passively by modulating reflected light intensity instead of generating new light using a light source. These MEMS optical cavities are demonstrated using optical fibers for illumination delivery and reflected light collection. In addition to being reflected for communication, the illuminating light …

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …

Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang

Electronic Theses and Dissertations

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling …

Mems Biosensor For Water-Immersed Application, Kun-Lin Lee

Dissertations and Theses

Although many air-based sensing mechanisms exist, not all of them can be applied in the water-based environment. In order to obtain a cell-based biosensor, the sensing method needs to be reliable and repeatable in a liquid environment. Therefore, this study is focused on transforming existing air-based sensors to water-immersed applications. This study includes two types of sensors.

First, commercial quartz resonators are used to investigate live-cell activity in water-based toxic solutions. I perform toxicity tests using quartz crystal microbalance (QCM). The QCM used in the study has a resonant frequency of 10 MHz and consists of an AT-cut quartz crystal …

Solarpede: An Untethered Micro Robot Powered By Light., Jordan Fredrick Klotz

Electronic Theses and Dissertations

Micro-Robotics looks to implement robotics principles at a small scale and has gained popularity in recent decades as a gateway to new research areas such as micro-factory applications. The SolarPede is a second-generation, cm-scale micro-crawler designed for such micro factory applications which is equipped with a legged locomotion system and an electronic backpack. The SolarPede is an evolution of its predecessors and features power and signal conditioning capabilities, gait pattern generation, and Bluetooth connectivity. The components which make up SolarPede have been full validated and tested, and its systems have been realized in the form of a body made from …

Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra

Electronic Theses and Dissertations

We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers at …

Strategies And Techniques For Fabricating Mems Bistable Thermal Actuators., Dilan Ratnayake

Electronic Theses and Dissertations

Bistable elements are beginning to appear in the field of MEMS as they allow engineers to design sensors and actuators which require no electrical power and possess mechanical memory. This research focuses on the development of novel strategies and techniques for fabricating MEMS bistable structures to serve as no electrical power thermal actuators. Two parallel strategies were explored for the design and fabrication of the critical bistable element. Both strategies involved an extensive material study on candidate thin film materials to determine their temperature coefficient of expansion and as-deposited internal stress properties. Materials investigated included titanium tungsten, Invar, silicon nitride …

Mechanical Reliability Of Implantable Polyimide-Based Magnetic Microactuators For Biofouling Removal, Christian G. Figueroa-Espada, Qi Yang, Hyowon Lee

The Summer Undergraduate Research Fellowship (SURF) Symposium

Hydrocephalus is a neurological disorder that typically requires a long-term implantation of a shunt system to manage its symptoms. These shunt systems are notorious for their extremely high failure rate. More than 40% of all implanted shunt systems fail within the first year of implantation. On average, 85% of all hydrocephalus patients with shunt systems undergo at least two shunt-revision surgeries within 10 years of implantation. A large portion of this high failure rate can be attributed to biofouling-related obstructions and infections. Previously, we developed flexible polyimide-based magnetic microactuators to remove obstructions formed on hydrocephalus shunts. To test the long-term …