Open Access. Powered by Scholars. Published by Universities.®

Nanotechnology Fabrication Commons™

Open Access. Powered by Scholars. Published by Universities.®

Electronic Devices and Semiconductor Manufacturing

Institution
Keyword
Publication Year
Publication
Publication Type
File Type

Articles 61 - 90 of 137

Full-Text Articles in Nanotechnology Fabrication

Fabrication And Simulation Of Perovskite Solar Cells, Maniell Workman Jan 2021

Fabrication And Simulation Of Perovskite Solar Cells, Maniell Workman

Theses and Dissertations--Electrical and Computer Engineering

Since the dawning of the industrial revolution, the world has had a need for mass energy production. In the 1950s silicon solar panels were invented. Silicon solar panels have been the main source of solar energy production. They have set the standard for power conversion efficiency for subsequent generations of photovoltaic technology. Solar panels utilize light’s ability to generate an electron hole pair. By creating a PN Junction in the photovoltaic semiconductor, the electron and hole are directed in opposing layers of the solar panel generating the electric current. Second generation solar panels utilized different thin film materials to fabricate …


Development Of Light Actuated Chemical Delivery Platform On A 2-D Array Of Micropore Structure, Hojjat Rostami Azmand, Hojjat Rostami Azmand Jan 2021

Development Of Light Actuated Chemical Delivery Platform On A 2-D Array Of Micropore Structure, Hojjat Rostami Azmand, Hojjat Rostami Azmand

Dissertations and Theses

Localized chemical delivery plays an essential role in the fundamental information transfers within biological systems. Thus, the ability to mimic the natural chemical signal modulation would provide significant contributions to understand the functional signaling pathway of biological cells and develop new prosthetic devices for neurological disorders. In this paper, we demonstrate a light-controlled hydrogel platform that can be used for localized chemical delivery in a high spatial resolution. By utilizing the photothermal behavior of graphene-hydrogel composites confined within micron-sized fluidic channels, patterned light illumination creates the parallel and independent actuation of chemical release in a group of fluidic ports. The …


Perovskite Thin Films Annealed In Supercritical Fluids For Efficient Solar Cells, Gilbert Annohene Jan 2021

Perovskite Thin Films Annealed In Supercritical Fluids For Efficient Solar Cells, Gilbert Annohene

Theses and Dissertations

In the field of photovoltaics, scientists and researchers are working fervently to produce a combination of efficient, stable, low cost and scalable devices. Methylammonium lead trihalide perovskite has attracted intense interest due to its high photovoltaic performance, low cost, and ease of manufacture. Their high absorption coefficient, tunable bandgap, low-temperature processing, and abundant elemental constituent provide innumerable advantages over other thin film absorber materials. Since the perovskite film is the most important in the device, morphology, crystallization, compositional and interface engineering have been explored to boost its performance and stability. High temperatures necessary for crystallization of organic-inorganic hybrid perovskite films …


Treated Hfo2 Based Rram Devices With Ru, Tan, Tin As Top Electrode For In-Memory Computing Hardware, Yuvraj Dineshkumar Patel Dec 2020

Treated Hfo2 Based Rram Devices With Ru, Tan, Tin As Top Electrode For In-Memory Computing Hardware, Yuvraj Dineshkumar Patel

Theses

The scalability and power efficiency of the conventional CMOS technology is steadily coming to a halt due to increasing problems and challenges in fabrication technology. Many non-volatile memory devices have emerged recently to meet the scaling challenges. Memory devices such as RRAMs or ReRAM (Resistive Random-Access Memory) have proved to be a promising candidate for analog in memory computing applications related to inference and learning in artificial intelligence. A RRAM cell has a MIM (Metal insulator metal) structure that exhibits reversible resistive switching on application of positive or negative voltage. But detailed studies on the power consumption, repeatability and retention …


Technique Design Of Filter On Surface-Acoustic Waves, Dilmurod Abdujalilovich Davronbekov, Zafar Tulyaganovich Khakimov Dec 2020

Technique Design Of Filter On Surface-Acoustic Waves, Dilmurod Abdujalilovich Davronbekov, Zafar Tulyaganovich Khakimov

Acta of Turin Polytechnic University in Tashkent

The article describes the design of filters on surface acoustic waves (SAWs), which are selective elements and are widely used in blocks, devices and signal processing systems in telecommunications, including wireless communication systems such as cellular, trunking and others. Designs of filters for surfactants are considered, which are divided into two large groups - by functional purpose and by a systematic approach to the synthesis of performance characteristics of filters for surfactants. Optimization algorithms and methods for synthesizing surfactant filters have been developed and improved. An improved technique for the synthesis of a filter based on surface acoustic waves is …


Development And Characterization Of Metal Contacts For Graded Composition Ingan Solar Cells, Reem E. Alhelais Dec 2020

Development And Characterization Of Metal Contacts For Graded Composition Ingan Solar Cells, Reem E. Alhelais

Graduate Theses and Dissertations

There is an increasing demand for high-power electronic components and optoelectronic devices with low-loss and high efficiency. III-nitride semiconductor materials have demonstrated great potential for high-power, high-frequency, and high-temperature applications because of their remarkable and wide-ranging electronic and physical properties. These material systems, including alloys of AlN, GaN, and InN, are currently being explored for their potential to develop efficient photovoltaic cells. They can potentially achieve higher efficiency because of their very high direct wide band edge, absorption coefficients, and resistance to defects. The compositionally graded Group III-nitride alloy allows access to a large range of energies by varying the …


Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang May 2020

Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang

Electronic Theses and Dissertations

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling …


Design Of Submicron Structured Guided-Mode-Resonance Near-Infrared Polarizer, Marzia Zaman May 2020

Design Of Submicron Structured Guided-Mode-Resonance Near-Infrared Polarizer, Marzia Zaman

Graduate Theses and Dissertations

The objective of this research is to design a larger submicron linear polarizer in the near-infrared wavelength range with a wide bandwidth which can be fabricated using the conventional thin-film microfabrication technology to reduce cost. For this purpose, a gold (Au) wire-grid transmission-type transverse-magnetic (TM) polarizer and a silicon (Si) wire-grid reflection-type TM polarizer, were designed using the guided-mode-resonance filter. The Au wire-grid TM polarizer of 700nm grating width and 1200nm grating period has 95% transmittance at 2400nm, more than 1000nm resonance peak bandwidth, and an extinction ratio (ER) of around 300 with a moderated level of sidebands. The 700nm …


Electric Field Control Of Fixed Magnetic Skyrmions For Energy Efficient Nanomagnetic Memory, Dhritiman Bhattacharya Jan 2020

Electric Field Control Of Fixed Magnetic Skyrmions For Energy Efficient Nanomagnetic Memory, Dhritiman Bhattacharya

Theses and Dissertations

To meet the ever-growing demand of faster and smaller computers, increasing number of transistors are needed in the same chip area. Unfortunately, Silicon based transistors have almost reached their miniaturization limits mainly due to excessive heat generation. Nanomagnetic devices are one of the most promising alternatives of CMOS. In nanomagnetic devices, electron spin, instead of charge, is the information carrier. Hence, these devices are non-volatile: information can be stored in these devices without needing any external power which could enable computing architectures beyond traditional von-Neumann computing. Additionally, these devices are also expected to be more energy efficient than CMOS devices …


Investigation Of Host Nanotube Parameters For Enhancing The Performance Of Nanostructured Cds-Cdte Solar Cells, Deepak Kumar Jan 2020

Investigation Of Host Nanotube Parameters For Enhancing The Performance Of Nanostructured Cds-Cdte Solar Cells, Deepak Kumar

Theses and Dissertations--Electrical and Computer Engineering

Numerical simulations are performed to investigate the effects of host nanotube parameters (pore diameter and pitch for different CdS coverages) and CdTe doping density on device performance in nanowire CdS/ CdTe solar cells using SCAPS-1D. This research finds the optimum values for these parameters in order to achieve the highest efficiency. Experimentally the effect of anodization voltage and fluoride ion concentration on the pore diameter and the pitch are studied for the Titania nanotubes host. It is observed that in the range of 0.3 mL to 2 mL of ammonium fluoride content, pore diameter and the pitch of the Titania …


Rapid Prototyping Of Nanostructures With Electron Beam Induced Processing, Samaneh Esfandiarpour Jan 2020

Rapid Prototyping Of Nanostructures With Electron Beam Induced Processing, Samaneh Esfandiarpour

Theses and Dissertations--Electrical and Computer Engineering

Focused electron beam induced processing (FEBIP) is a nano-scale fabrication technique that allows the direct deposition of functional materials. However, it suffers from significant drawbacks, such as high cost, low speed, unavailable precursors for many materials and low purity of deposits. Liquid-phase focused electron beam induced processes (LP-FEBIP) are being investigated due to the potential benefits over the gas phase technique. In this method, deposition or etching occurs at the interface between a substrate and a bulk liquid. In this work, electron beam induced deposition of copper nanostructures from aqueous solutions of copper sulfate is demonstrated. The addition of sulfuric …


Synthesis Of Graphene Using Plasma Etching And Atmospheric Pressure Annealing: Process And Sensor Development, Andrew Robert Graves Jan 2020

Synthesis Of Graphene Using Plasma Etching And Atmospheric Pressure Annealing: Process And Sensor Development, Andrew Robert Graves

Graduate Theses, Dissertations, and Problem Reports (ETD)

Having been theorized in 1947, it was not until 2004 that graphene was first isolated. In the years since its isolation, graphene has been the subject of intense, world-wide study due to its incredibly diverse array of useful properties. Even though many billions of dollars have been spent on its development, graphene has yet to break out of the laboratory and penetrate mainstream industrial applications markets. This is because graphene faces a ‘grand challenge.’ Simply put, there is currently no method of manufacturing high-quality graphene on the industrial scale. This grand challenge looms particularly large for electronic applications where the …


Interfacial Contact With Noble Metal - Noble Metal And Noble Metal - 2d Semiconductor Nanostructures Enhance Optical Activity, Ricardo Raphael Lopez Romo Dec 2019

Interfacial Contact With Noble Metal - Noble Metal And Noble Metal - 2d Semiconductor Nanostructures Enhance Optical Activity, Ricardo Raphael Lopez Romo

Graduate Theses and Dissertations

Noble metal nanoparticles and two-dimensional (2D) transition metal dichalcogenide (TMD) crystals offer unique optical and electronic properties that include strong exciton binding, spin-orbital coupling, and localized surface plasmon resonance. Controlling these properties at high spatiotemporal resolution can support emerging optoelectronic coupling and enhanced optical features. Excitation dynamics of these optical properties on physicochemically bonded mono- and few-layer TMD crystals with metal nanocrystals and two overlapping spherical metal nanocrystals were examined by concurrently (i) DDA simulations and (ii) far-field optical transmission UV-vis spectroscopic measurements. Initially, a novel and scalable method to unsettle van der Waals bonds in bulk TMDs to prepare …


Optical Angular Scatterometry: In-Line Approach For Roll-2-Roll And Nano-Imprint Fabrication Systems, Juan Jose Faria-Briceno Nov 2019

Optical Angular Scatterometry: In-Line Approach For Roll-2-Roll And Nano-Imprint Fabrication Systems, Juan Jose Faria-Briceno

Electrical and Computer Engineering ETDs

As critical dimensions continue to shrink and structures become more complex, metrology processes are challenging to implement during in-line nanomanufacturing. Non-destructive, non-contact, and high-speed conditions are required to achieve proper metrology processes during in-line manufacturing. Optical scatterometry is a nanoscale metrology tool widely used in integrated circuit manufacturing for characterization and quality control. However, most applications of optical scatterometry operate off-line. A high-speed, in-line, non-contact, non-destructive scatterometry angular system has been demonstrated in this work to scan pattern surfaces during real-time nano-fabrication.

Our system has demonstrated scanning capabilities using flat, 1D and 2D complex structures. The flat surface samples consist …


Smart Charging Of Future Electric Vehicles Using Roadway Infrastructure, Sara Ahmed, Ethan Ahn, Mahmoud Reda Taha, Samer Dessouky, Moneeb Genedy, Daniel Fernandez, Ann Sebestian, Patience Raby Aug 2019

Smart Charging Of Future Electric Vehicles Using Roadway Infrastructure, Sara Ahmed, Ethan Ahn, Mahmoud Reda Taha, Samer Dessouky, Moneeb Genedy, Daniel Fernandez, Ann Sebestian, Patience Raby

Data

Corresponding data set for Tran-SET Project No. 18ITSTSA03. Abstract of the final report is stated below for reference:

"Inspired by the fact that there is an immense amount of renewable energy sources available on the roadways such as mechanical pressure and frictional heat, this study presented the development and implementation of an innovative charging technique for future electric vehicles (EVs) by fully utilizing the existing roadways and the state-of-the-art nanotechnology and power electronics. The project introduced a novel wireless charging system, SIC (Smart Illuminative Charging), that uses LEDs powered by piezoelectric nanomaterials as the energy transmitter source and thin film …


Pixelated Gasb Membranes For Photovoltaics: Fabrication And Structure-Property Relationships, Vijay Saradhi Mangu Jul 2019

Pixelated Gasb Membranes For Photovoltaics: Fabrication And Structure-Property Relationships, Vijay Saradhi Mangu

Electrical and Computer Engineering ETDs

In this thesis, I present a reliable and efficient approach to heterogeneous integration of single-crystalline GaSb semiconductors with highly mismatched materials. The mismatch may refer to the crystalline structure and the thermal expansion coefficient of single-crystalline GaSb and the other materials of interest. The strategy of hetero-integration relies on epitaxial lift-off. This approach prevents the formation of extended structural defects that are detrimental to the performance of optoelectronic devices and preserves GaSb growth substrates for potential reuse.

Within my research work, I have overcome some outstanding challenges of epitaxial lift-off of GaSb, and I have demonstrated the operation of single-crystalline …


Symmetry And Dopant Diffusion In Inverted Nanopyramid Arrays For Thin Crystalline Silicon Solar Cells, Seok Jun Han May 2019

Symmetry And Dopant Diffusion In Inverted Nanopyramid Arrays For Thin Crystalline Silicon Solar Cells, Seok Jun Han

Chemical and Biological Engineering ETDs

In this dissertation, we enhance the efficiency of thin flexible monocrystalline silicon solar cells by breaking symmetry in light trapping nanostructures and improving homogeneity in dopant concentration profile. These thin cells are potentially less expensive than conventional thick silicon cells by using less silicon material and making the cells more convenient to be handled when supported on polymer films. Moreover, these cells are widely applicable due to their flexibility and lightweight. However, for high efficiencies, these cells require effective light trapping and charge collection. We achieve these in cells based on 14-mm-thick free-standing silicon films with light-trapping arrays of nanopyramidal …


Fabrication And Characterization Of Planar-Structure Perovskite Solar Cells, Guoduan Liu Jan 2019

Fabrication And Characterization Of Planar-Structure Perovskite Solar Cells, Guoduan Liu

Theses and Dissertations--Electrical and Computer Engineering

Currently organic-inorganic hybrid perovskite solar cells (PSCs) is one kind of promising photovoltaic technology due to low production cost, easy fabrication method and high power conversion efficiency.

Charge transport layers are found to be critical for device performance and stability. A traditional electron transport layer (ETL), such as TiO2 (Titanium dioxide), is not very efficient for charge extraction at the interface. Compared with TiO2, SnO2 (Tin (IV) Oxide) possesses several advantages such as higher mobility and better energy level alignment. In addition, PSCs with planar structure can be processed at lower temperature compared to PSCs with …


Straintronic Nanomagnetic Devices For Non-Boolean Computing, Md Ahsanul Abeed Jan 2019

Straintronic Nanomagnetic Devices For Non-Boolean Computing, Md Ahsanul Abeed

Theses and Dissertations

Nanomagnetic devices have been projected as an alternative to transistor-based switching devices due to their non-volatility and potentially superior energy-efficiency. The energy efficiency is enhanced by the use of straintronics which involves the application of a voltage to a piezoelectric layer to generate a strain which is ultimately transferred to an elastically coupled magnetostrictive nanomaget, causing magnetization rotation. The low energy dissipation and non-volatility characteristics make straintronic nanomagnets very attractive for both Boolean and non-Boolean computing applications. There was relatively little research on straintronic switching in devices built with real nanomagnets that invariably have defects and imperfections, or their adaptation …


Fabrication And Characterization Of Nanofiber Nylon-6-Mwcnt As An Electrochemical Sensor For Sodium Ions Concentration Detection In Sweat, Kelsey Mills Jan 2019

Fabrication And Characterization Of Nanofiber Nylon-6-Mwcnt As An Electrochemical Sensor For Sodium Ions Concentration Detection In Sweat, Kelsey Mills

Williams Honors College, Honors Research Projects

Fabrication and characterization nylon-6-MWCNT nanofiber as an electrochemical sensor to detect sodium ion concentrations specifically in sweat. Using contact angle to determine surface morphology and chronoamperometry testing to identify ideal sensor conditions, tests optimized parameters like weight percent of nylon or other polymers, carbon nanotube (CNT) isomer, and solution concentration to determine reproducibility of functional sensors. Utilizing the electric qualities of carbon nanotubes partnered with the sodium ion selectivity of calixarene treatment and polymers unique properties like flexibility and scalability create open an arena for optimizing sodium ion sensors for further development for functional prototypes. Morphology tests showed that the …


Energy Efficient Spintronic Device For Neuromorphic Computation, Md Ali Azam Jan 2019

Energy Efficient Spintronic Device For Neuromorphic Computation, Md Ali Azam

Theses and Dissertations

Future computing will require significant development in new computing device paradigms. This is motivated by CMOS devices reaching their technological limits, the need for non-Von Neumann architectures as well as the energy constraints of wearable technologies and embedded processors. The first device proposal, an energy-efficient voltage-controlled domain wall device for implementing an artificial neuron and synapse is analyzed using micromagnetic modeling. By controlling the domain wall motion utilizing spin transfer or spin orbit torques in association with voltage generated strain control of perpendicular magnetic anisotropy in the presence of Dzyaloshinskii-Moriya interaction (DMI), different positions of the domain wall are realized …


Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra Dec 2018

Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra

Electronic Theses and Dissertations

We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers at …


Genetic Algorithm Design Of Photonic Crystals For Energy-Efficient Ultrafast Laser Transmitters, Troy A. Hutchins-Delgado Nov 2018

Genetic Algorithm Design Of Photonic Crystals For Energy-Efficient Ultrafast Laser Transmitters, Troy A. Hutchins-Delgado

Shared Knowledge Conference

Photonic crystals allow light to be controlled and manipulated such that novel photonic devices can be created. We are interested in using photonic crystals to increase the energy efficiency of our semiconductor whistle-geometry ring lasers. A photonic crystal will enable us to reduce the ring size, while maintaining confinement, thereby reducing its operating power. Photonic crystals can also exhibit slow light that will increase the interaction with the material. This will increase the gain, and therefore, lower the threshold for lasing to occur. Designing a photonic crystal for a particular application can be a challenge due to its number of …


Hybrid Perovskite Characterization And Device Applications., Kasun Fernando Aug 2018

Hybrid Perovskite Characterization And Device Applications., Kasun Fernando

Electronic Theses and Dissertations

Hybrid perovskites are a group of materials that has shown a great impact in the field of scientific research in the past decade due to the efficiency gain within a short period of time. Hot casting is one technique that has been producing high efficient and stable solar cells. Electrical transportation of lateral device structure by such film is explored to understand basic properties and predict possible device applications using it. Under dark, memristive ability of the film was explored using various experiments. Unique uni-polar memristor ability was observed. Using the experimental results, a model is hypothesized using the concepts …


Tunneling In Si Mos Nanostructures, Amir Shirkhorshidian Jul 2018

Tunneling In Si Mos Nanostructures, Amir Shirkhorshidian

Electrical and Computer Engineering ETDs

In this dissertation, split-gate tunnel barriers in enhancement-mode silicon metal- oxide-semiconductor (MOS) device structures are characterized electrically at liquid helium temperatures (T = 4.2 K) using transport spectroscopy. Tunnel barriers with different gate geometries and barriers implanted with a small number of antimony donor atoms are characterized. Low disorder MOS tunnel barriers are demonstrated and compared to the implanted cases. The ”clean” MOS tunnel barriers are an important proof of principle that disorder free tunnel barriers can be achieved in MOS. The implanted cases provide an important reference for the effects of donors and shallow traps on a MOS tunnel …


Selected Applications Of Silicon Nanopillar Arrays., Behnam Kheyraddini Mousavi Jul 2018

Selected Applications Of Silicon Nanopillar Arrays., Behnam Kheyraddini Mousavi

Electrical and Computer Engineering ETDs

Interaction of optical waves with nanostructures made of various material systems has been the subject of intensive research for many years. These researches have been mainly driven by the need to make smaller optical devices and exploiting the functionalities offered by light-matter interaction in nanoscale. Majority of the nanostructures are fabricated using electron beam (e-beam) lithography that is slow and expensive. As such alternative methods have been developed to enable nanoscale fabrication faster and less expensive. Among these interferometric lithography (IL) is a relatively simple method for quick fabrication of nanostructures. As IL method generates periodic patterns, exploring the potential …


The Fabrication Of High-Aspect Ratio Gratings For Talbot Interferometer With Medical Imaging Application., Vikaram Singh May 2018

The Fabrication Of High-Aspect Ratio Gratings For Talbot Interferometer With Medical Imaging Application., Vikaram Singh

LSU Master's Theses

X-ray Phase contrast-based Talbot interferometer creates high contrast between weak and strong absorbing materials, which makes it effective in imaging soft tissues. However, its performance is bounded by the aspect-ratio, features and symmetry of its gratings. For 40 KeV energy X-rays, the analyzer grating thickness should be 100 µm or more to achieve > 90% absorption in order to obtain high contrast images. Moreover, the smaller period in grating is desired for higher resolution. Therefore, researchers are exploring various fabrication techniques to achieve greater aspect-ratio gratings. Utilizing modern LIGA techniques, the aspect-ratio of gratings can be improved with a simplified …


Voltage-Controlled Deposition Of Nanoparticles For Next Generation Electronic Materials, Subhodip Maulik May 2018

Voltage-Controlled Deposition Of Nanoparticles For Next Generation Electronic Materials, Subhodip Maulik

LSU Doctoral Dissertations

This work presents both a feasibility study and an investigation into the voltage-controlled spray deposition of different nanoparticles, namely, carbon nanotubes (CNTs), as well as molybdenum disulfide (MoS2) and tungsten disulfide (WS2) from the transition metal dichalcogenides (TMDCs) family of materials. The study considers five different types of substrates as per their potential application to next-generation device electronics. The substrates selected for this research were: 1) aluminum as a conducting substrate, 2) silicon as a semiconducting substrate, 3) glass, silicon dioxide (SiO2), and syndiotactic poly methyl methacrylate (syndiotactic PMMA) as insulating substrates.

Since the …


Glucose Level Estimation Based On Invasive Electrochemical, And Non-Invasive Optical Sensing Methods, Sanghamitra Mandal May 2018

Glucose Level Estimation Based On Invasive Electrochemical, And Non-Invasive Optical Sensing Methods, Sanghamitra Mandal

Graduate Theses and Dissertations

The purpose of this research is to design and fabricate sensors for glucose detection using inexpensive approaches. My first research approach is the fabrication of an amperometric electrochemical glucose sensor, by exploiting the optical properties of semiconductors and structural properties of nanostructures, to enhance the sensor sensitivity and response time. Enzymatic electrochemical sensors are fabricated using two different mechanisms: (1) the low-temperature hydrothermal synthesis of zinc oxide nanorods, and (2) the rapid metal-assisted chemical etching of silicon (Si) to synthesize Si nanowires. The concept of gold nano-electrode ensembles is then employed to the sensors in order to boost the current …


Challenges In Flexible Microsystem Manufacturing : Fabrication, Robotic Assembly, Control, And Packaging., Danming Wei May 2018

Challenges In Flexible Microsystem Manufacturing : Fabrication, Robotic Assembly, Control, And Packaging., Danming Wei

Electronic Theses and Dissertations

Microsystems have been investigated with renewed interest for the last three decades because of the emerging development of microelectromechanical system (MEMS) technology and the advancement of nanotechnology. The applications of microrobots and distributed sensors have the potential to revolutionize micro and nano manufacturing and have other important health applications for drug delivery and minimal invasive surgery. A class of microrobots studied in this thesis, such as the Solid Articulated Four Axis Microrobot (sAFAM) are driven by MEMS actuators, transmissions, and end-effectors realized by 3-Dimensional MEMS assembly. Another class of microrobots studied here, like those competing in the annual IEEE Mobile …