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Synthesis And Characterization Of Vo2 Thin Films On Piezoelectric Substrates, Samee Azad

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Polycrystalline VO₂ thin films synthesized on two piezoelectric substrates (AT-cut quartz and GaN/AlGaN/GaN/Si) using low pressure direct oxidation technique have been characterized and compared to VO₂ grown on traditional non-piezoelectric substrates sapphire and SiO₂/Si. X-ray diffraction and atomic force microscopy characterization performed on the as grown films confirmed high quality of the VO₂ films grown on both the piezoelectric and non-piezoelectric substrates. Changes in material properties associated with the semiconductor metal transition (SMT) of the VO₂ films were investigated through resistivity and transmitted optical power changes measured across the SMT. It was observed that …