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Electronic Theses and Dissertations

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Articles 241 - 270 of 292

Full-Text Articles in Electromagnetics and Photonics

Molecular Structure-Nonlinear Optical Property Relationships For A Series Of Polymethine And Squaraine Molecules, Jie Fu Jan 2006

Molecular Structure-Nonlinear Optical Property Relationships For A Series Of Polymethine And Squaraine Molecules, Jie Fu

Electronic Theses and Dissertations

This dissertation reports on the investigation of the relationships between molecular structure and two-photon absorption (2PA) properties for a series of polymethine and squaraine molecules. Current and emerging applications exploiting the quadratic dependence upon laser intensity, such as two-photon fluorescence imaging, three-dimensional microfabrication, optical data storage and optical limiting, have motivated researchers to find novel materials exhibiting strong 2PA. Organic materials are promising candidates because their linear and nonlinear optical properties can be optimized for applications by changing their structures through molecular engineering. Polymethine and squaraine dyes are particularly interesting because they are fluorescent and showing large 2PA. We used …

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Radiation Studies Of The Tin-Doped Microscopic Droplet Laser Plasma Light Source Specific To Euv Lithography, Chiew-Seng Koay Jan 2006

Radiation Studies Of The Tin-Doped Microscopic Droplet Laser Plasma Light Source Specific To Euv Lithography, Chiew-Seng Koay

Electronic Theses and Dissertations

Extreme ultraviolet lithography(EUVL) is being developed worldwide as the next generation technology to be inserted in ~ 2009 for the mass production of IC chips with feature sizes <35 nm. One major challenge to its implementation is the development of a 13.5 nm EUV source of radiation that meets the requirements of current roadmap designs of the source of illumination in commercial EUVL scanners. The light source must be debris-free, in a free-space environment with the imaging EUV optics that must provide sufficient, narrow spectral band EUV power to print 100 wafers/hr. To meet this need, extensive studies on emission from a laser plasma source utilizing tin-doped droplet target was conducted. Presented in this work, are the many optical techniques such as spectroscopy, radiometry, and imaging, that were employed to characterize and optimize emission from the laser plasma source State of the art EUV spectrographs were employed to observe the source's spectrum under various laser irradiation conditions. Comparing the experimental spectra to those from theory, has allowed the determination of the Sn ion stages responsible for emitting into the useful EUV bandwidth. Experimental results were compared to spectral simulations obtained using Collisional-Radiative Equilibrium (CRE) model, as well. Moreover, extensive measurements surveying source emission from 2 nm to 30 nm, which is the region of the electromagnetic spectrum defined as EUV, was accomplished. Absolutely calibrated metrology was employed with the Flying Circus instrument from which the source's conversion efficiency (CE)--from laser to the useful EUV energy--was characterized under various laser irradiation conditions. Hydrodynamic simulations of the plasma expansion together with the CRE model predicted the condition at which optimum conversion could be attained. The condition was demonstrated experimentally, with the highest CE to be slightly above 2%, which is the highest value among all EUV source contenders. In addition to laser intensity, the CE was found to depend on the laser wavelength. For better understanding, this observation is compared to results from simulations. Through a novel approach in imaging, the size of the plasma was characterized by recording images of the plasma within a narrow band, around 13.5 nm. The size, approximately 100 ìm, is safely within the etendue limit set by the optical elements in the EUV scanner. Finally, the notion of irradiating the target with multiple laser beams was explored for the possibility of improving the source's conversion efficiency.

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Fast Response Liquid Crystal Devices, Yung-Hsun Wu Jan 2006

Fast Response Liquid Crystal Devices, Yung-Hsun Wu

Electronic Theses and Dissertations

Liquid crystal (LC) has been widely used for displays, spatial light modulators, variable optical attenuators (VOAs) and other tunable photonic devices. The response time of these devices is mainly determined by the employed liquid crystal material. How to obtain fast response for the LC devices is a fundamentally important and technically challenging task. In this dissertation, we investigate several methods to improve liquid crystal response time, for examples, using dual-frequency liquid crystals, polymer stabilized liquid crystals, and sheared polymer network liquid crystals. We discover a new class of material, denoted as sheared polymer network liquid crystal (SPNLC) which exhibits a …

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Integrated Wavelength Stabilization Of Broad Area Semiconductor Lasers Using A Dual Grating Reflector, Jason O'Daniel Jan 2006

Integrated Wavelength Stabilization Of Broad Area Semiconductor Lasers Using A Dual Grating Reflector, Jason O'Daniel

Electronic Theses and Dissertations

A new fully integrated wavelength stabilization scheme based on grating-coupled surface-emitting lasers is explored. This wavelength stabilization scheme relies on two gratings. The first grating is fabricated on the p-side of the semiconductor laser in close proximity to the laser waveguide such that it couples light out of the guided mode of the waveguide into a propagating mode in the substrate; this grating is known as the grating coupler. The second grating is fabricated on the n-side of the substrate such that for the stabilization wavelength, this second grating operates in the Littrow condition and is known as the feedback …

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Polarization-Independent Liquid Crystal Devices, Yi-Hsin Lin Jan 2006

Polarization-Independent Liquid Crystal Devices, Yi-Hsin Lin

Electronic Theses and Dissertations

Liquid crystal (LC) devices can be operated as amplitude modulators and phase modulators. LC amplitude modulation is commonly used in liquid crystal display (LCD) while phase-only modulation is useful for laser beam steering, tunable grating, prism, lens, and other photonic devices. Most LC devices are polarization dependent and require at least one polarizer. As a result, the optical efficiency is low. To enhance display brightness, a power hungry backlight has to be used leading to a high power consumption and short battery life. In a LC phase modulator, the polarization dependent property complicates the laser beam steering system. It is …

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Propagation Effect In Inhomogeneous Media, Including Media With Light-Induced And Fixed Gratings, Chang-Ching Tsai Jan 2006

Propagation Effect In Inhomogeneous Media, Including Media With Light-Induced And Fixed Gratings, Chang-Ching Tsai

Electronic Theses and Dissertations

Optical waves propagation in various types of volume gratings, materials with constant impendence and optical fibers are studied. Instability of cross–phase modulation and of Energy transfer via GRON-type (Grating-type Orientational Nonlinearity in Liquid Crystal) Stimulated Scattering is numerically observed. Two diffractive optical elements made of volume gratings are suggested and analyzed. A transmission hologram based on the analogy with Stimulated Raman Adiabatic Passage (STIRAP) in nonlinear optics is proposed. This transmission hologram demonstrates high diffraction efficiency and low sensitivity to polarization and hologram strength. The other is a reflection hologram with two crossed-gratings. It features good angular selectivity in comparison …

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All-Semiconductor High Power Mode-Locked Laser System, Kyungbum Kim Jan 2006

All-Semiconductor High Power Mode-Locked Laser System, Kyungbum Kim

Electronic Theses and Dissertations

All-optical synchronization and its application in advanced optical communications have been investigated in this dissertation. Dynamics of all-optical timing synchronization (clock recovery) using multi-section gain-coupled distributed-feedback (MS-GC DFB) lasers are discussed. A record speed of 180-GHz timing synchronization has been demonstrated using this device. An all-optical carrier synchronization (phase and polarization recovery) scheme from PSK (phase shift keying) data is proposed and demonstrated for the first time. As an application of all-optical synchronization, the characterization of advanced modulation formats using a linear optical sampling technique was studied. The full characterization of 10-Gb/s RZ-BPSK (return-to-zero binary PSK) data has been demonstrated. …

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On The Use Of Variable Coherence In Inverse Scattering Problems, Erwan Baleine Jan 2006

On The Use Of Variable Coherence In Inverse Scattering Problems, Erwan Baleine

Electronic Theses and Dissertations

Even though most of the properties of optical fields, such as wavelength, polarization, wavefront curvature or angular spectrum, have been commonly manipulated in a variety of remote sensing procedures, controlling the degree of coherence of light did not find wide applications until recently. Since the emergence of optical coherence tomography, a growing number of scattering techniques have relied on temporal coherence gating which provides efficient target selectivity in a way achieved only by bulky short pulse measurements. The spatial counterpart of temporal coherence, however, has barely been exploited in sensing applications. This dissertation examines, in different scattering regimes, a variety …

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Applications Of Linear And Nonlinear Optical Effects In Liquid Crystals, Hakob Sarkissian Jan 2006

Applications Of Linear And Nonlinear Optical Effects In Liquid Crystals, Hakob Sarkissian

Electronic Theses and Dissertations

Liquid crystals have been a major subject of research for the past decades. Aside from the variety of structures they can form, they exhibit a vast range of optical phenomena. Many of these phenomena found applications in technology and became an essential part of it. In this dissertation thesis we continue the line to propose a number of new applications of optical effects in liquid crystals and develop their theoretical framework. One such application is the possibility of beam combining using Orientational Stimulated Scattering in a nematic liquid crystal cell. Our numerical study of the OSS process shows that normally …

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Experimental Techniques For Nonlinear Material Characterization: A Nonlinear Spectrometer Using A White-Light Continuum Z-Scan, Mihaela Balu Jan 2006

Experimental Techniques For Nonlinear Material Characterization: A Nonlinear Spectrometer Using A White-Light Continuum Z-Scan, Mihaela Balu

Electronic Theses and Dissertations

The main goal of this dissertation is to introduce and demonstrate a new method for the rapid determination of the nonlinear absorption spectra and the dispersion of the nonlinear refraction of optical materials in the visible and near IR spectral regions. However, conventional methods like, white-light continuum pump-probe and Z-scan techniques were used to measure the peak 2PA cross-sections for a number of commercially available photoinitiators. In the new method mentioned above, a high energy, broadband femtosecond white-light continuum is used to replace the single wavelength source conventionally used in a Z-scan experiment. In a Z-scan experiment, the transmittance of …

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Additive Lithography Fabrication And Integration Of Micro Optics, Mahesh Pitchumani Jan 2006

Additive Lithography Fabrication And Integration Of Micro Optics, Mahesh Pitchumani

Electronic Theses and Dissertations

Optical elements are the fundamental components in photonic systems and are used to transform an input optical beam into a desired beam profile or to couple the input beam into waveguides, fibers, or other optical systems or devices. Macroscopic optical elements are easily fabricated using grinding and polishing techniques, but few methods exist for inexpensive fabrication of micro optical elements. In this work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt photoresist into the desired optical surface relief profile. We explore various masking schemes for fabricating a variety …

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Up-Conversion In Rare-Earth Doped Micro-Particles Applied To New Emissive 2d Dislays, Anne Milliez Jan 2006

Up-Conversion In Rare-Earth Doped Micro-Particles Applied To New Emissive 2d Dislays, Anne Milliez

Electronic Theses and Dissertations

Up-conversion (UC) in rare-earth co-doped fluorides to convert diode laser light in the near infrared to red, green and blue visible light is applied to make possible high performance emissive displays. The infrared-to-visible UC in the materials we study is a sequential form of non-linear two photon absorption in which a strong absorbing constituent absorbs two low energy photons and transfers this energy to another constituent which emits visible light. Some of the UC emitters' most appealing characteristics for displays are: a wide color gamut with very saturated colors, very high brightness operation without damage to the emitters, long lifetimes …

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Synchronization In Advanced Optical Communications, Inwoong Kim Jan 2006

Synchronization In Advanced Optical Communications, Inwoong Kim

Electronic Theses and Dissertations

The objective of this dissertation is to generate high power ultrashort optical pulses from an all-semiconductor mode-locked laser system. The limitations of semiconductor optical amplifier in high energy, ultrashort pulse amplification are reviewed. A method to overcome the fundamental limit of small stored energy inside semiconductor optical amplifier called "eXtreme Chirped Pulse Amplification (X-CPA)" is proposed and studied theoretically and experimentally. The key benefits of the concept of X-CPA are addressed. Based on theoretical and experimental study, an all-semiconductor mode-locked X-CPA system consisting of a mode-locked master oscillator, an optical pulse pre-stretcher, a semiconductor optical amplifier (SOA) pulse picker, an …

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Direct Nonlinear Optics Measurements Of Raman Gain In Bulk Glasses And Estimates Of Fiber Performance, Robert Stegeman Jan 2006

Direct Nonlinear Optics Measurements Of Raman Gain In Bulk Glasses And Estimates Of Fiber Performance, Robert Stegeman

Electronic Theses and Dissertations

The need for more bandwidth in communications has stimulated the search for new fiberizable materials with properties superior to fused silica which is the current state-of-the-art. One of the key properties is Raman gain by which a pump beam amplifies a signal beam of longer wavelength. An apparatus capable of directly measuring the spectral dependence and absolute magnitude of the material Raman gain coefficient using nonlinear optics techniques has been built. Using radiation from a 1064 nm Nd:YAG laser as the pump and from a tunable Optical Parametric Generator and Amplifier as the signal, the Raman gain spectrum was measured …

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Antenna-Coupled Infrared And Millimeter-Wave Detectors: Fabrication, Measurement And Optimization, Charles Middleton Jan 2006

Antenna-Coupled Infrared And Millimeter-Wave Detectors: Fabrication, Measurement And Optimization, Charles Middleton

Electronic Theses and Dissertations

Antenna-coupled detectors provide uncooled, cost-effective solutions for infrared and millimeter-wave imaging. This work describes the design, fabrication, measurement, and optimization of several types of antenna-coupled detectors for LWIR (8 - 12 µm) and 94 GHz radiation. Two types of millimeter-wave antenna-coupled detectors were fabricated and tested: a slot antenna coupled to a bolometer, and a patch antenna coupled to a SiC Schottky diode. Electromagnetic modeling of the antennas helped guide the design of antennas with better impedance matching to the detectors. Schottky diodes are discussed as detectors for millimeter-wave and infrared radiation, with the goal of increasing the cutoff frequency …

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Integrated Inp Photonic Switches, Daniel May-Arrioja Jan 2006

Integrated Inp Photonic Switches, Daniel May-Arrioja

Electronic Theses and Dissertations

Photonic switches are becoming key components in advanced optical networks because of the large variety of applications that they can perform. One of the key advantages of photonic switches is that they redirect or convert light without having to make any optical to electronic conversions and vice versa, thus allowing networking functions to be lowered into the optical layer. InP-based switches are particularly attractive because of their small size, low electrical power consumption, and compatibility with integration of laser sources, photo-detectors, and electronic components. In this dissertation the development of integrated InP photonic switches using an area-selective zinc diffusion process …

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Effect Of Germanium Doping On Erbium Sensitization In The Erbium Doped Silicon Rich Silica Material System, Forrest Ruhge Jan 2006

Effect Of Germanium Doping On Erbium Sensitization In The Erbium Doped Silicon Rich Silica Material System, Forrest Ruhge

Electronic Theses and Dissertations

The continued size reduction in electronic integrated circuits has lead to a demand for on-chip high-bandwidth and low loss communication channels. Optical interconnects are considered an essential addition to the silicon electronics platform. A major challenge in the field of integrated Si photonics is the development of cost effective silicon compatible light sources. This thesis investigates the sensitization of group IV doped silica films emitting at 1.535μm for applications as silicon compatible light sources. Thin erbium-doped silica films containing excess silicon and germanium were deposited using a multi-gun sputter system. The composition of the deposited materials was verified by Rutherford …

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External Cavity Multiwavelength Semiconductor Mode-Locked Laser Gain Dynamics, Luis Archundia-Berra Jan 2006

External Cavity Multiwavelength Semiconductor Mode-Locked Laser Gain Dynamics, Luis Archundia-Berra

Electronic Theses and Dissertations

External cavity semiconductor mode-locked lasers can produce pulses of a few picoseconds. The pulses from these lasers are inherently chirped with a predominant linear chirp component that can be compensated resulting in sub-picosecond pulses. External cavity semiconductor mode-locked lasers can be configured as multiwavelength pulse sources and are good candidates for time and wavelength division multiplexing applications. The gain medium in external cavity semiconductor mode-locked lasers is a semiconductor optical amplifier (SOA), and passive and hybrid mode-locked operation are achieved by the introduction of a saturable absorber (SA) in the laser cavity. Pump-probe techniques were used to measure the intracavity …

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Three-Photon Absorption Process In Organic Dyes Enhanced By Surface Plasmon Resonance, Ion Cohanoschi Jan 2006

Three-Photon Absorption Process In Organic Dyes Enhanced By Surface Plasmon Resonance, Ion Cohanoschi

Electronic Theses and Dissertations

Multi-photon absorption processes have received significant attention from the scientific community during the last decade, mainly because of their potential applications in optical limiting, data storage and biomedical fields. Perhaps, one of the most investigated processes studied so far has been two-photon absorption (2PA). These investigations have resulted in successful applications in all the fields mentioned above. However, 2PA present some limitations in the biomedical field when pumping at typical 2PA wavelengths. In order to overcome these limitations, three-photon absorption (3PA) process has been proposed. However, 3PA in organic molecules has a disadvantage, typical values of σ3' are small (10-81 …

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High Birefringence And Low Viscosity Liquid Crystals, Chien-Hui Wen Jan 2006

High Birefringence And Low Viscosity Liquid Crystals, Chien-Hui Wen

Electronic Theses and Dissertations

In this dissertation, liquid crystal (LC) materials and devices are investigated in order to meet the challenges for photonics and displays applications. We have studied three kinds of liquid crystal materials: positive dielectric anisotropic LCs, negative dielectric anisotropic LCs, and dual- frequency LCs. For the positive dielectric anisotropic LCs, we have developed some high birefringence isothiocyanato tolane LC compounds with birefringence ~0.4, and super high birefringence isothiocyanato biphenyl-bistolane LC compounds with birefringence as high as ~0.7. Moreover, we have studied the photostability of several high birefringence LC compounds, mixtures, and LC alignment layers in order to determine the failure mechanism …

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Ultrashort, High Power, And Ultralow Noise Mode-Locked Optical Pulse Generation Using Quantum-Dot Semiconductor Lasers, Myoung-Taek Choi Jan 2006

Ultrashort, High Power, And Ultralow Noise Mode-Locked Optical Pulse Generation Using Quantum-Dot Semiconductor Lasers, Myoung-Taek Choi

Electronic Theses and Dissertations

This dissertation explores various aspects and potential of optical pulse generation based on active, passive, and hybrid mode-locked quantum dot semiconductor lasers with target applications such as optical interconnect and high speed signal processing. Design guidelines are developed for the single mode operation with suppressed reflection from waveguide discontinuities. The device fabrication procedure is explained, followed by characteristics of FP laser, SOA, and monolithic two-section devices. Short pulse generation from an external cavity mode-locked QD two-section diode laser is studied. High quality, sub-picosecond (960 fs), high peak power (1.2 W) pulse trains are obtained. The sign and magnitude of pulse …

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Design And Optimization Of Nano-Optical Elements By Coupling Fabrication To Optical Behavior, Raymond Rumpf Jan 2006

Design And Optimization Of Nano-Optical Elements By Coupling Fabrication To Optical Behavior, Raymond Rumpf

Electronic Theses and Dissertations

Photonic crystals and nanophotonics have received a great deal of attention over the last decade, largely due to improved numerical modeling and advances in fabrication technologies. To this day, fabrication and optical behavior remain decoupled during the design phase and numerous assumptions are made about "perfect" geometry. As research moves from theory to real devices, predicting device behavior based on realistic geometry becomes critical. In this dissertation, a set of numerical tools was developed to model micro and nano fabrication processes. They were combined with equally capable tools to model optical performance of the simulated structures. Using these tools, it …

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Predicting Surface Scatter Using A Linear Systems Formulation Of Non-Paraxial Scalar Diffraction, Andrey Krywonos Jan 2006

Predicting Surface Scatter Using A Linear Systems Formulation Of Non-Paraxial Scalar Diffraction, Andrey Krywonos

Electronic Theses and Dissertations

Scattering effects from rough surfaces are non-paraxial diffraction phenomena resulting from random phase variations in the reflected wavefront. The ability to predict these effects is important in a variety of applications including x-ray and EUV imaging, the design of stray light rejection systems, and reflection modeling for rendering realistic scenes and animations of physical objects in computer graphics. Rayleigh-Rice (small perturbation method) and Beckmann-Kirchoff (Kirchhoff approximation) theories are commonly used to predict surface scatter effects. In addition, Harvey and Shack developed a linear systems formulation of surface scatter phenomena in which the scattering behavior is characterized by a surface transfer …

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Probing Random Media With Singular Waves, Chaim Schwartz Jan 2006

Probing Random Media With Singular Waves, Chaim Schwartz

Electronic Theses and Dissertations

In recent years a resurgence of interest in wave singularities (of which optical vortices are a prominent example), light angular momentum and the relations between them has occurred. Many applications in various areas of linear and non-linear optics have been based on studying effects related to angular momentum and optical vortices. This dissertation examines the use of such wave singularities for studying the light propagation in highly inhomogeneous media and the relationship to angular momentum transfer. Angular momentum carried by light can be, in many cases, divided in two terms. The first one relates to the polarization of light and …

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Optimizing The Performance Of As-Manufactured Grazing Incidence X-Ray Telescopes Using Mosaic Detector Arrays, Martina Atanassova Jan 2005

Optimizing The Performance Of As-Manufactured Grazing Incidence X-Ray Telescopes Using Mosaic Detector Arrays, Martina Atanassova

Electronic Theses and Dissertations

The field of X-ray astronomy is only forty (43) years old, and grazing incidence X-ray telescopes have only been conceived and designed for a little over fifty (50) years. The Wolter Type I design is particularly well suited for stellar astronomical telescopes (very small field-of-view). The first orbiting X-ray observatory, HEAO-1 was launched in 1977, a mere twenty-eight (28) years ago. Since that time large nested Wolter Type I X-ray telescopes have been designed, build, and launched by the European Space Agency (ROSAT) and NASA (the Chandra Observatory). Several smaller grazing incidence telescopes have been launched for making solar observations …

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Refractive Indices Of Liquid Crystals And Their Applications In Display And Photonic Devices, Jun Li Jan 2005

Refractive Indices Of Liquid Crystals And Their Applications In Display And Photonic Devices, Jun Li

Electronic Theses and Dissertations

Liquid crystals (LCs) are important materials for flat panel display and photonic devices. Most LC devices use electrical field-, magnetic field-, or temperature-induced refractive index change to modulate the incident light. Molecular constituents, wavelength, and temperature are the three primary factors determining the liquid crystal refractive indices: ne and no for the extraordinary and ordinary rays, respectively. In this dissertation, we derive several physical models for describing the wavelength and temperature effects on liquid crystal refractive indices, average refractive index, and birefringence. Based on these models, we develop some high temperature gradient refractive index LC mixtures for photonic applications, such …

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Discrete Wave Propagation In Quadratically Nonlinear Media, Robert Iwanow Jan 2005

Discrete Wave Propagation In Quadratically Nonlinear Media, Robert Iwanow

Electronic Theses and Dissertations

Discrete models are used in describing various microscopic phenomena in many branches of science, ranging from biology through chemistry to physics. Arrays of evanescently coupled, equally spaced, identical waveguides are prime examples of optical structures in which discrete dynamics can be easily observed and investigated. As a result of discretization, these structures exhibit unique diffraction properties with no analogy in continuous systems. Recently nonlinear discrete optics has attracted a growing interest, triggered by the observation of discrete solitons in AlGaAs waveguide arrays reported by Eisenberg et al. in 1998. So far, the following experiments involved systems with third order nonlinearities. …

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Design Of A Dynamic Focusing Microscope Objective For Oct Imaging, Supraja Murali Jan 2005

Design Of A Dynamic Focusing Microscope Objective For Oct Imaging, Supraja Murali

Electronic Theses and Dissertations

Optical Coherence Tomography (OCT) is a novel optical imaging technique that has assumed significant importance in bio-medical imaging in the last two decades because it is non-invasive and provides accurate, high resolution images of three dimensional cross-sections of body tissue, exceeding the capabilities of the current predominant imaging technique –ultrasound. In this thesis, high resolution OCT is investigated for in vivo detection of abnormal skin pathology for the early diagnosis of cancer. The technology presented is based on a dynamic focusing microscopic imaging probe conceived for skin imaging and the detection of abnormalities in the epithelium. A novel method for …

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The Effects Of Electrode Geometry On Current Pulse Caused By Electrical Discharge Over An Ultra-Fast Laser Filament, Matthew Bubelnik Jan 2005

The Effects Of Electrode Geometry On Current Pulse Caused By Electrical Discharge Over An Ultra-Fast Laser Filament, Matthew Bubelnik

Electronic Theses and Dissertations

The time-resolved electrical conductivity of a short-pulse generated plasma filament in air was studied. Close-coupled metal electrodes were used to discharge the stored energy of a high-voltage capacitor and the resulting microsecond-scale electrical discharge was measured using fast current sensors. Significant differences in the time dependence of the current were seen with the two electrode geometries used. Using sharp-tipped electrodes additional peaks in the time-resolved conductivity were seen, relative to the single peak seen with spherical electrodes. We attribute these additional features to secondary electron collisional ionization brought about by field enhancement at the tips. Additional discrepancies in the currents …

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A New Hybrid Diffractive Photo-Mask Technology, Jin Won Sung Jan 2005

A New Hybrid Diffractive Photo-Mask Technology, Jin Won Sung

Electronic Theses and Dissertations

In the field of photolithography for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase element and binary amplitude is presented in this dissertation paper from both numerical modeling and experimental research. The first important application is the characterization of aberration in the stepper system using hybrid diffractive photo-mask. By utilizing multiple diffractive illumination conditions, it is possible to characterize Zernike wave front aberration coefficients up …

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