Engineering Commons^™

Electromigration Testing At Rit: Thermal Test Development, Lance W. Barron

Journal of the Microelectronic Engineering Conference

An electromigration (EM) test mask was designed to utilize both standard ASTM and Standard Wafer-level Electromigration Accelerated Test Structures (SWEAT) fourterminal EM test structures of varying line-widths. The mask was used to pattern 4” test wafers consisting of 300 nm of sputtered aluminum-1% silicon on a thermal SiO2 layer. A custom thermal setup was developed for a Micromanipulator 6000 manual probe station. A new 4” brass chuck was machined to include cooling channels, wafer vacuum, and a thermocouple monitoring system. A resistive ring heater was bonded to the chuck and was controlled via a process temperature controller. Extensive electrical test …

Characterization Of Low Temperature Gate Dielectrics For Thin Film Transistors, G Robert Mulfinger

Journal of the Microelectronic Engineering Conference

The goal of this investigation was to ascertain a viable low temperature gate dielectric for an emerging TFT fabrication process at RIT. Various candidates were investigated to find the best solution for a low temperature gate dielectric. Materials studied include low temperature oxide (LTO) using low pressure chemical vapor deposition (LPCVD), plasma enhanced chemical vapor deposition (PECVD) silicon nitride, and PECVD Tetra Ethyl Ortho Silicate (TEOS). Capacitors were fabricated with these materials, as well as a standard thermal oxide as a control. Wafers were examined both with and without anneals at 600°C in order to study bulk oxide and interface …

Low Temperature Dopant Activation, Eric Woodard

Journal of the Microelectronic Engineering Conference

A major area of research for integrated electronic systems is the development of systems on glass or plastic to optimize the performance/cost tradeoff. These new substrate materials impose significant constraints on electronic device fabrication, including limitations on chemical and thermal processes. Processes that do not use high temperatures have the increased flexibility needed to be used on new substrate materials. Amorphous silicon thin-film transistors (TFTs) have been fabricated at temperatures below 300°C, where in-situ doped layers are deposited to form the electrode regions. Unfortunately, the electrical activation and carrier mobility in these devices is exceedingly low. The conventional method of …

Integration Of Nickel Monosilicide (Nisi) Into An Rit Smfl Nmos Device, Phu Do

Journal of the Microelectronic Engineering Conference

A nickel silicidation process has been developed for the Semiconductor & Microsystems Fabrication Laboratory (SM FL) at Rochester Institute of Technology (RIT). NISI and Ni₂Si were obtained in doped source/drain and polysilicon gate regions respectively at rapid thermal annealing (RTA) condition of 500°C for 60 seconds. The sheet resistance of nickel silicide in both regions was measured to be 0.45Ω/o — 0.5Ω/o. Nickel silicide was also integrated into an RIT NMOSFET process where silicide was formed over the S/D and polysilicon gate regions. Rutherford Backscatter and x-ray diffraction data showed the formation of NiSi phase in the S/D …

Characterization Of Tisi2 Process And Electrical Properties, Laurel E. Haydock

Journal of the Microelectronic Engineering Conference

The goal of this experimentation consists of the formation of TiSi₂ and demonstration of its electrical properties. The successful formation of a TiSiproduct was be confirmed by scanning electron micrograph (SEM) images, Rutherford Backscatter Spectroscopy (RBS) data, and electrical characterization. Following an annealing heat treatment, the RBS data indicated the presence of a Si substrate, a film that compositionally appears to be TiSi₂, and a surface layer of TiO₂. The electrical testing indicates the presence of ohmic behavior, and the resistance is strongly dependant on the furnace annealing and rapid thermal processing (RTP) treatments.

Design And Manufacturing Of Silicon Pin Diodes Utilizing Silicon On Insulator Technology, Patrick Warner

Journal of the Microelectronic Engineering Conference

The goal of this project was to design a process to form a PIN structure on silicon on insulator (SOl) wafers, IBIS donated the wafers for this project. Using a combination of standard and novel wafer processing techniques allowed for successful completion of the device. These techniques involved a four-layer mask process that utilized both state of the art and older tool sets. A methodology for lithographic processing of wafer pieces has been expanded upon and documented for future use.

Testing demonstrated resistor like behavior opposed to the expected diode behavior. This result is indicative of a short through the …

Implementation Of A J-Ramp Test Process To Examine The Reliability Of Dielectric Films, William Simpson

Journal of the Microelectronic Engineering Conference

As film thicknesses get smaller and smaller it is important to maintain high quality dielectric films. A J-ramp test is a method for extracting the characteristics of dielectric films breakdown. Two important parameters that can be extracted using a i-ramp test are the maximum electric field and the charge to breakdown (QBD) of the dielectric. The charge to breakdown the dielectric is a very important parameter because it will be significantly affected by moderate changes within a dielectric. Historically, this parameter would be obtained through stress tests, using a single current level measurement that may take hours or even days. …

Development Of A Polysilicon Check Microvalve, William C. Hart

Journal of the Microelectronic Engineering Conference

Check valves are used frequently within the field of microfluidic MEMS, particularly in micropump applications. Check valves serve to limit the flow of a fluid to one direction through a channel. This project was an attempt to manufacture an efficient check microvalve using polysilicon as the valve cover material. Previous work on a microvalve at RIT has been unsuccessful, as the final KOH etch has attacked the polysilicon, thus removing the valves from the openings in the silicon. It was determined that pinholes in the LPCVD nitride were allowing KOH to penetrate the etch mask and attack the substrate surface …

Development Of Macroporous Silicon For Bio-Chemical Sensing Applications, Tiffany M. Hoover

Journal of the Microelectronic Engineering Conference

Macroporous silicon bio-chemical sensing devices have been developed, fabricated and tested. The porous silicon walls were lined with oxide and aluminum electrodes were placed on either side of the porous silicon membrane. These electrodes were used to measure capacitive changes resulting from vapor/fluidic interactions with the oxide-coated porous silicon membrane.

For thick flow-through membrane formation, the maximum etch time investigated during the porous silicon-forming anodization process, using an electrolyte consisting of hydrofluoric acid and dimethylformamide was an 8 hour period with an electrolyte refresh halfway through the process. The pore dimensions measured after this process were approximately 67 μm …

Mems Based Light Modulator, Shushil Shakya

Journal of the Microelectronic Engineering Conference

This paper presents a simple way to build a MEMS based light modulator. Here Aluminum ribbons are suspended in an air gap. An array of these Al ribbons can be used to act as a light modulator. Alternate Al ribbons are connected to a DC bias of 50V which will curve downwards due to the stress applied and electrostatic attraction. Thus, the light intensity can be modulated to any shade of gray needed or even turn it off completely. Different sizes of light modulators were built using Mentor Graphics and were fabricated in the RIT, SMFL. Final results did not …

Spring 2005, 90.9 Wmpg Fm

WMPG Program Guides

Newspaper format.

Fall/Winter 2005, 90.9 Wmpg Fm

WMPG Program Guides

Newspaper format

Model Predictive Control Of A Parafoil And Payload System, Nathan Slegers, Mark Costello

Faculty Publications - Biomedical, Mechanical, and Civil Engineering

No abstract provided.

An Existing Global Heptane Mechanism Augmented With Diffusive Transport, Michael R. Foster, Howard Pearlman

Faculty Publications - Biomedical, Mechanical, and Civil Engineering

The couplings between diffusive transport and the temperature and species concentration distributions associated with low and intermediate temperature heptane oxidation are explored using an existing four-step heptane mechanism, tuned for elevated pressures. The energy and species concentration equations are augmented with diffusive fluxes for heat and species and solved numerically in a one-dimensional domain. The ignition delay times are also tabulated and compared with the zero-dimensional data reported in the literature.

Quantifying Savings From Improved Boiler Operation, Kevin Carpenter, J. Kelly Kissock

Mechanical and Aerospace Engineering Faculty Publications

On/off operation and excess combustion air reduce boiler energy efficiency. This paper presents methods to quantify energy savings from switching to modulation control mode and reducing excess air in natural gas fired boilers.

The methods include calculation of combustion temperature, calculation of the relationship between internal convection coefficient and gas flow rate, and calculation of overall heat transfer assuming a parallel-flow heat exchanger model. The method for estimating savings from changing from on/off to modulation control accounts for purge and drift losses through the boiler and the improved heat transfer within the boiler due to the reduced combustion gas flow …

Study Of Transmission Response Of Edge Filters Employed In Wavelength Measurements, Qian Wang, Gerald Farrell, Thomas Freir

Articles

The ratiometric wavelength-measurement system is modeled and an optimal design of transmission response of the employed edge filter is demonstrated in the context of a limited signal-to-noise ratio of the signal source. The corresponding experimental investigation is presented. The impact of the limited signal-to-noise ratio of the signal source on determining the optimal transmission response of edge filters for a wavelength-measurement application is shown theoretically and experimentally.

Analyst-Focused Arabic Information Retrieval, Robert N. Oddy, Ann R. Diekema, Jean Hannouche, Elizabeth Liddy, Grant Ingersoll

School of Information Studies - Faculty Scholarship

An English-Arabic Cross-Language Information Retrieval Environment was created in which the analyst can query an Arabic database in English and retrieve a set of relevant Arabic documents. The retrieved Arabic documents are automatically translated into English to facilitate readability by the English-only analyst. Proper names of people, places, and organizations are extracted from the retrieved documents and transliterated from Arabic into English. They are presented to the analyst and serve to provide a brief summarization of the retrieved document search query in English. Cross-Language Information Retrieval (CLIR), itself a desideratum in the ARDA workshop, is a special case of Information …

Integrating Functional Synthesis, William H. Wood, Hui Dong, Clive L. Dym

All HMC Faculty Publications and Research

Design couples synthesis and analysis in iterative cycles, alternatively generating solutions, and evaluating their validity. The accuracy and depth of evaluation has increased markedly because of the availability of powerful simulation tools and the development of domain-specific knowledge bases. Efforts to extend the state of the art in evaluation have unfortunately been carried out in stovepipe fashion, depending on domain-specific views both of function and of what constitutes “good” design. Although synthesis as practiced by humans is an intentional process that centers on the notion of function, computational synthesis often eschews such intention for sheer permutation. Rather than combining synthesis …

Me-Em 2005 Annual Report, Department Of Mechanical Engineering-Engineering Mechanics, Michigan Technological University

Department of Mechanical and Aerospace Engineering Annual Reports

Table of Contents

• Overview, Mission, and Vision
• Comments on the Strategic Plan
• Enrollment and Expenditure Data
• Professional Advisory Committee
• Faculty & Staff
• Students
• Alumni
• Entrepreneurs
• Resources
• Graduates
• Publications

Laboratory Evaluation Of Colored Light As An Attractant For Female Aedes Aegypti, Aedes Albopictus, Anopheles Quadrimaculatus, And Culex Nigripalpus, Douglas A. Burkett, Jerry F. Butler

United States Air Force: Publications

Mosquito feeding activity was monitored in an electronic apparatus (visualometer), having ten ports, illuminated from below with narrow bandwidths of light (700, 650, 600, 550, 500, 450, 400, or 350 nm). Responses of adult female Aedes albopictus Skuse, Ae. aegypti (L.), Anopheles quadrimaculatus, Say and Culex nigripalpus Theobald to feeding stations (blood containers) over each light port. No-light and broad spectrum white light were used as controls. Color preferences were based on electronic detection of feeding times. Aedes aegypti showed no significant feeding preferences over any of the colors. Conversely, Ae. albopictus, An. quadrimaculatus, and Cx. nigripalpus showed …

C2iedm For The Gig: A Tutorial, Andreas Tolk, Charles Turnitsa, Curtis Blais

Computational Modeling & Simulation Engineering Faculty Publications

No abstract provided.

Simulated Annealing Heuristics For Managing Resources During Planned Outages At Electric Power Plants, Alan Mckendall, James Noble, Cerry Klein

Faculty & Staff Scholarship

This paper presents a mathematical model and simulated annealing heuristics for assigning activities to workspaces and resources (e.g., equipment, parts, and toolboxes) to work/storage spaces during planned outages at electric power plants. These assignments are made such that the distance resources (toolboxes) travel throughout the duration of the outage is minimized. This problem is de2ned as the dynamic space allocation problem. To test the performance of the proposed techniques, a data set is generated and used in the analysis. The results show that the simulated annealing heuristics perform well with respect to solution quality and computational time.

The Effects Of Humidity On The Dielectric Response In Ferroelectric Polymer Films Made By Langmuir-Blodgett Deposition, Kristin L. Kraemer, Alexander V. Sorokin, Christina M. Othon, Stephen Ducharme, Vladimir M. Fridkin

Stephen Ducharme Publications

No abstract provided.

Test 1852: Massey Ferguson 596 And 492 Diesel 12-Speed, Nebraska Tractor Test Lab

Nebraska Tractor Tests

ABOUT THE TEST REPORT AND USE OF THE DATA

The test data contained in this report are a tabulation of the results of a series of tests. Due to the restricted format of these pages, only a limited amount of data and not all of the tractor specifications are included. The full OECD report contains usually about 30 pages of data and specifications. The test data were obtained for each tractor under similar conditions and therefore, provide a means of comparison of performance based on a limited set of reported data.

EXPLANATION OF THE TEST PROCEDURES

Purpose

The purpose of …

A Universal Sensor Model, Valery Mazin, Vladik Kreinovich

Departmental Technical Reports (CS)

No abstract provided.

Non-Verbal Communication With Autistic Children Using Digital Libraries, Gondy A. Leroy, John Huang '05, Serena Chuang '05, Marjorie H. Charlop

CGU Faculty Publications and Research

Autism spectrum disorder (ASD) has become one of the most prevalent mental disorders over the last few years and its prevalence is still growing. The disorder is characterized by a wide variety of symptoms such as lack of social behavior, extreme withdrawal, and problems communicating. Because of the diversity in symptoms and the wide variety in severity for those, each autistic child has different needs and requires individualized therapy. This leads to long waiting lists for therapy.

Websat: Web-Based Systems Administration Tool, Juyong Jeong

Theses Digitization Project

Discusses the development of WebSAT (Web-based systems administration tool), a computer network tool that allows systems administrators to create and delete accounts, disable and enable existing accounts, manage disk space conveniently, monitor the status of all network printers, and monitor network security. The WebSAT application was implemented using PHP, a server-side embedded scripting language, with a MySQL database.

Digital Image Processing, Jonathan Blackledge

Books/Book chapters

Newspapers and the popular scientific press today publish many examples of highly impressive images. These images range, for example, from those showing regions of star birth in the distant Universe to the extent of the stratospheric ozone depletion over Antarctica in springtime, and to those regions of the human brain affected by Alzheimer’s disease. Processed digitally to generate spectacular images, often in false colour, they all make an immediate and deep impact on the viewer’s imagination and understanding.

Professor Jonathan Blackledge’s erudite but very useful new treatise Digital Image Processing: Mathematical and Computational Methods explains both the underlying theory and …

A Beacon-Less Location Discovery Scheme For Wireless Sensor Networks, Lei Feng, Wenliang Du, Peng Ning

Electrical Engineering and Computer Science - All Scholarship

In wireless sensor networks (WSNs), sensor location plays a critical role in many applications. Having a GPS receiver on every sensor node is costly. In the past, a number of location discovery schemes have been proposed. Most of these schemes share a common feature: they use some special nodes, called beacon nodes, which are assumed to know their own locations (e.g., through GPS receivers or manual configuration). Other sensors discover their locations based on the information provided by these beacon nodes. In this paper, we show that efficient location discovery can be achieved in sensor networks without using beacons. We …

Test 1855: John Deere 4720 Ehydro Diesel Hydrostatic, Nebraska Tractor Test Lab

Nebraska Tractor Tests

ABOUT THE TEST REPORT AND USE OF THE DATA

The test data contained in this report are a tabulation of the results of a series of tests. Due to the restricted format of these pages, only a limited amount of data and not all of the tractor specifications are included. The full OECD report contains usually about 30 pages of data and specifications. The test data were obtained for each tractor under similar conditions and therefore, provide a means of comparison of performance based on a limited set of reported data.

EXPLANATION OF THE TEST PROCEDURES

Purpose

The purpose of …