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Articles 24451 - 24480 of 27369

Full-Text Articles in Engineering

Conductivity Of Comb Polyether Pure Solid Polymer Electrolyte, Lin Ye, Peng Gao, Zeng-Guo Feng, Feng Wu, Shi Chen, Guo-Qing Wang Feb 2006

Conductivity Of Comb Polyether Pure Solid Polymer Electrolyte, Lin Ye, Peng Gao, Zeng-Guo Feng, Feng Wu, Shi Chen, Guo-Qing Wang

Journal of Electrochemistry

A comb polymer was synthesized through cationic ring-opening polymerization starting from a monomer 3-hydroxymethyl-3-methyl-oxetane.The ion conductivity was measured by CHI660A electrochemical station under various lithium salt concentrations and various temperatures.The highest ion conductivity was recorded to be 10-4.43 S/cm at room temperature and 10-3.44 S/cm at 80 ℃.DSC results showed that the segment moves more difficultly with the increasing of lithium salts concentration.XPS found the existence of aggregating lithium ions in POE5 and POE10,and it suggested that POE20 had a suitable lithium concentration for polymer electrolyte.

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Studies On Pva-Cmc-Koh-H2O Alkaline Polymer Electrolytes, An-Bao Yuan, Jun Zhao Feb 2006

Studies On Pva-Cmc-Koh-H2O Alkaline Polymer Electrolytes, An-Bao Yuan, Jun Zhao

Journal of Electrochemistry

A given amount of sodium carboxymethyl cellulose(CMC)was added to PVA complex and thus the PVA-CMC-KOH-H2O alkaline polymer electrolyte with this modification was prepared.The properties of the polymer electrolyte films were characterized by AC impedance,cyclic voltammetry,differential thermal analysis and infrared spectroscopic analysis methods.The polymer electrolyte exhibited a high ionic conductivity,typically 10-2S·cm-1 with an electrochemical stability window of about 1.6 V on stainless steel blocking electrodes.The influence of the film composition such as KOH,H2O and CMC on ion conductivity was investigated.In addition,a preliminary study was carried out on the polymer electrolyte for Ni/MH battery.It was …

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Anodic Behaviors Of Pb-Ca-Sn-Re Alloy And Tradditional Pb-Ca-Sn Alloy In Sulfuric Acid Solutions, Dang-Guo Li, Gen-Shu Zhou, Liang Yao, Guan-Fa Lin, Mao-Sheng Zheng Feb 2006

Anodic Behaviors Of Pb-Ca-Sn-Re Alloy And Tradditional Pb-Ca-Sn Alloy In Sulfuric Acid Solutions, Dang-Guo Li, Gen-Shu Zhou, Liang Yao, Guan-Fa Lin, Mao-Sheng Zheng

Journal of Electrochemistry

The anodic behaviors of Pb-Ca-Sn-Re and Pb-Ca-Sn alloys were investigated at 1.28 V(vsHg/(H2SO4)) in 4.5 mol/L sulfuric acid solution by means of ac voltammetry,ac impedance and cyclic voltammetry.The results showed that the corrosion-resistance property of Pb-Ca-Sn-Re alloy is better than that of tradditional Pb-Ca-Sn alloy,the growth of Pb(Ⅱ) compounds was inhibited in the film of Pb-Ca-Sn-Re alloy,and the film impedance of Pb-Ca-Sn-Re alloy was decreased,indicating that the conductivity of the film was(increased),which is helpful to enhance the deep recycling property for lead acid battery.

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Mechanism Of Self Discharge Performance Improvement In The Ni-Mh Batteries With Naoh Electrolyte, Xiao-Feng Li, Tong-Chi Xia, Hui-Chao Dong, Yan-Wei Wei Feb 2006

Mechanism Of Self Discharge Performance Improvement In The Ni-Mh Batteries With Naoh Electrolyte, Xiao-Feng Li, Tong-Chi Xia, Hui-Chao Dong, Yan-Wei Wei

Journal of Electrochemistry

The self-discharge performance and charge efficiency at 60 ℃ for Ni-MH battery can be markedly enhanced by using NaOH electrolyte instead of KOH electrolyte.Both the results of electrochemical impedance spectroscopy and cyclic voltammetry tests indicate that the separation of H2 from the negative electrode may be partly blocked in the former because of the change of the adsorption/desorption behavior of H on the surface of the negative electrode,thus results in an improvement of self-discharge performance of the battery.

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2006 National Conference On Corrosion Electrochemistry And Measuring Methods, Editorial Office Of J.Electrochem. Feb 2006

2006 National Conference On Corrosion Electrochemistry And Measuring Methods, Editorial Office Of J.Electrochem.

Journal of Electrochemistry

No abstract provided.

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Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang Feb 2006

Electrochemistry And Structures Of Silicon Surface, Gregory X.Zhang

Journal of Electrochemistry

Accurate control and fabrication of silicon surface structures from atomic scale to micrometer scale,which may be randomly associated with surface roughness or have well defined patterns,is critical for the per-formance and reliability of electronic devices.Electrochemical reactions of silicon in solutions involved in wetcleaning and etching of silicon wafer play an importantrole in determining the structures of silicon surface.Atre-mendous amount of researches have been done in the last several decades to understand and control a range ofcomplex electrochemical reactions at silicon/solution interface and their relations to the resulted surface struc-tures.The findings generated from these research efforts have been compiled and integrated …

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Development On Hydriding/Dehydriding Kinetics Of Mg Nano-Materials For Hydrogen Storage, Wei Mo, Hong-Liang Sun, Hai-Chang Zhang, Hua-Bin Yang, Zuo-Xiang Zhou Feb 2006

Development On Hydriding/Dehydriding Kinetics Of Mg Nano-Materials For Hydrogen Storage, Wei Mo, Hong-Liang Sun, Hai-Chang Zhang, Hua-Bin Yang, Zuo-Xiang Zhou

Journal of Electrochemistry

The development of Mg nano-materials for hydrogen storage in the recent decade has been reviewed in this paper.It was shown the Mg nano-powders prepared by high-energy ball milling showed promising hydriding and dehydriding performance with the transition metal oxides and other types of hydrogen storage alloys(ABx)as the catalysts.

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Electrocatalytic Oxidation Of Glucose On Nano Pt/C Electrode, Cui-Lian Chen, Xiao-Lan Wei, Pei Kang Shen Feb 2006

Electrocatalytic Oxidation Of Glucose On Nano Pt/C Electrode, Cui-Lian Chen, Xiao-Lan Wei, Pei Kang Shen

Journal of Electrochemistry

Nano Pt/C electrocatalysts were prepared by intermittent microwave heating method.The electrooxidation of glucose on smooth Pt and～Pt/C electrodes has been studied and compared.The results showed that the electrochemical properties on nano Pt/C were improved due to the reduction of the overpotential and the increase in the kinetic rate.The surface area would be significantly increased when the particle size of the catalyst was reduced to nano-scale,resulting in the increase in the activity.The enhancement in the resistance to poisoning could be explained that the oxygen-containing species are easier to react with poisoning species on nano Pt/C and re-active the electrode.

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Effects Of Sulfide Ions On The Inhibiting Efficiency Of Eda As A Copper Corrosion Inhibitor In Dilute Hcl Solution, Wen-Juan Qu, Rong-Gui Du, Chang-Jian Lin Feb 2006

Effects Of Sulfide Ions On The Inhibiting Efficiency Of Eda As A Copper Corrosion Inhibitor In Dilute Hcl Solution, Wen-Juan Qu, Rong-Gui Du, Chang-Jian Lin

Journal of Electrochemistry

The anticorrosion action of EDA on copper in dilute HCl solution and the effect of sulfide ions on the inhibiting efficiency were studied by the Tafel plot method.The corrosion potential of Cu shifted to more positive value and the corrosion current density decreased after the addition of Na2S to the solution.The results indicated that sulphide ions could increase the inhibiting efficiency of EDA because of the synergistic inhibition effect between EDA and Na2S,resulting from the adsorption of HS- on the surface of Cu,facilitated the adsorption of EDA to form a highly protective adsorbed layer which …

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The Complex Of Pasp And Tungstate As Inhibitors Of Cupronickel B10′S Corrosion In 3% Nacl Solution, Qun-Jie Xu, Guo-Ding Zhou, Hui-Feng Wang, Wen-Bin Cai Feb 2006

The Complex Of Pasp And Tungstate As Inhibitors Of Cupronickel B10′S Corrosion In 3% Nacl Solution, Qun-Jie Xu, Guo-Ding Zhou, Hui-Feng Wang, Wen-Bin Cai

Journal of Electrochemistry

AC impedance and polarization curve measurements were conducted to study the effects of environ-ment-friendly inhibitors PASP,Na2WO4 and their complexes on the corrosion of cupronickel B10 in 3%NaCl solution.The results indicate that PASP or Na2WO4 alone does inhibit the corrosion of B10,and most effectiveconcentrations are 40 mg/L and 60 mg/L for PASP and Na2WO4,respectively.With the total concentration of 40mg/L for the complex inhibitors,the optimum complex ratio of PASP to Na2WO4 was 3:1.The complex of such a combination showed a significantly synergetic inhibition effect on the corrosion of B10.

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The Effect Of Solution Concentration On Properties Of Ru-Ti-Ir Oxide Anode Coatings, Ke Wang, Yan Han, Jun-Tao Wang, Xiao-Ling Zhang, Yu-Pu Sun Feb 2006

The Effect Of Solution Concentration On Properties Of Ru-Ti-Ir Oxide Anode Coatings, Ke Wang, Yan Han, Jun-Tao Wang, Xiao-Ling Zhang, Yu-Pu Sun

Journal of Electrochemistry

The anode coatings of Ru-Ti-Ir oxide with various solution concentrations were prepared by thermal decomposition.The scanning electron microscope(SEM),energy dispersive X-ray detector(EDX),X-ray diffraction(XRD),accelerated life,polarization curve,cyclic voltammetry and electrochemical impedance.spectroscopy(EIS)tests were carried out.The results showed that there was an obvious effect of solution concentrations on the morphology of the coatings,but little effect on polarization of chlorine evolution.Voltammetric charges and double layer capacitances of anode coatings had a tendency to fall down firstly then increase afterwards as the solution concentration increased.

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Electrochemical Reduction Behavior Of Benzaldehyde In The Ionic Liquids, Ning Zhao, Wen-Ju Dong, Qi-Zeng Shi Feb 2006

Electrochemical Reduction Behavior Of Benzaldehyde In The Ionic Liquids, Ning Zhao, Wen-Ju Dong, Qi-Zeng Shi

Journal of Electrochemistry

In this paper, the electrochemical reduction of benzaldehyde was investigated in C4MIMBF4, C6MIMBF4  and C8MIMBF4 ionic liquids by cyclic linear sweep voltammetry,cyclic square-wave voltammetry and chronocoulometry.Benzaldehyde exhibits two successive one-electron irreversible reduction(EP1=-1.39 V, EP2=1.69 V) with GC electrode in C4MIMBF4, the voltammetric data for benzaldehyde give diffusion coefficients of 1.5*10-8cm2/s and 1.3*108cm2/s. There is one current peak in C6MIMBF4  and C8MIMBF4 ionic liquids due to their stronger alkalinity …

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Oxygen Enrichment Effect Of Ceo2 To The Cathode Performance Of Proton Exchange Membrane Fuel Cell, Xiang-Li Hou, Hong-Feng Xu, Jian-Hua Dong, Xin Sun Feb 2006

Oxygen Enrichment Effect Of Ceo2 To The Cathode Performance Of Proton Exchange Membrane Fuel Cell, Xiang-Li Hou, Hong-Feng Xu, Jian-Hua Dong, Xin Sun

Journal of Electrochemistry

CeO2 was added to Pt/C catalyst in the cathode of PEMFC by both sol and impregnation methods.The samples were evaluated by TEM,cyclic voltammogram techniques and proton exchange membrane fuel cell performance test.The addition of CeO2 obviously improved the performance of PEMFC and represented a notable function of oxygen enrichment in the cathode side.But with the addition of CeO2,part of the catalyst surface was covered and led to the performance drop of the PEMFC.The best content of CeO2 is 1% when it is added by impregnation method and 3% when it is added by sol method.

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Effects Of Srb Biofilm And Corrosion Product Films On Corrosion Behavior Of Carbon Steel, Jing Lin, Yong-Gui Yan, Guang-Zhang Chen, Guang-Zhou Liu, Qing-Fen Li Feb 2006

Effects Of Srb Biofilm And Corrosion Product Films On Corrosion Behavior Of Carbon Steel, Jing Lin, Yong-Gui Yan, Guang-Zhang Chen, Guang-Zhou Liu, Qing-Fen Li

Journal of Electrochemistry

Electrochemical techniques and surface analysis techniques were applied to study corrosion characteristic of A3 steel.The effects on corrosion behavior of A3 steel by sulfate-reducing bacteria(SRB)(biotic media)and corrosion product(abiotic media)were studied.The results showed that biofilms and corrosion product films play different role during different stages.Biofilms were easier flaky with increasing of its thickness.Non-uniform biofilms reduced pitting corrosion of the specimens.The corrosion product films formed under abiotic conditions were more adherently to the surface of the metal than those formed in biogenic media.

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In-Situ Detection Of The Effect Of Brighter In The Solution For Nickel And Phosphor Alloy, Jian Zheng, Ning Li, De-Yu Li, Guo-Feng Cui Feb 2006

In-Situ Detection Of The Effect Of Brighter In The Solution For Nickel And Phosphor Alloy, Jian Zheng, Ning Li, De-Yu Li, Guo-Feng Cui

Journal of Electrochemistry

In this work,the gold-plated mica was used for the substrate,the concentration of 5% of normal plating solution for the nickel was used as the mother solution,and the effect for the deposition by the brighter with ECSTM was in-situ detected.The solution for deposition without the brighter has no brightness,though the values of the roughness and the H_(A-V) have reduced in evidence after deposition;the solution for deposition with the complete brighter although has great brightness,the values of the roughness and the H_(A-V) have increased(after) deposition;the solution for deposition with the half brighter has a moderate effect on the H_(A-V) and (brightness).Hence,the brighter …

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Preparation Of Spinel Limn2O4 Cathode Materials For Li-Ion Batteries Based On Sol-Gel Process, Xiang-Ming He, Li Wang, Guo-Yun Zhang, Chang-Yin Jiang, Chun-Rong Wan Feb 2006

Preparation Of Spinel Limn2O4 Cathode Materials For Li-Ion Batteries Based On Sol-Gel Process, Xiang-Ming He, Li Wang, Guo-Yun Zhang, Chang-Yin Jiang, Chun-Rong Wan

Journal of Electrochemistry

Spinel LiMn2O4 was prepared from CH3COOLi·2H2O,Mn(CH3COO)2 and adipic acid based on sol-gel process.XRD analysis showed that when the sintering temperature increased,the crystallinity increased,and the capacity also increased.However,its cycleability reached a maximum value at 750 ℃.The sintering duration also influenced on the capacity.The optimized performance was obtained when the sintering was carried out at 750 ℃ for 20 h.Under these conditions,as-prepared spinel LiMn2O4  presented the initial discharge capacity of 130 mAh·g-1 and 125 mAh·g-1 at 15th cycle.

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Special Photoelectrochemical Response Of Nano-Crystalline Tio2 Electrode, Bi-Bo Lan, Jian-Zhang Zhou, Yan-Yan Xi, Hong-Xiang Chen, Guang-Hua Yao, Zhong-Hua Lin Feb 2006

Special Photoelectrochemical Response Of Nano-Crystalline Tio2 Electrode, Bi-Bo Lan, Jian-Zhang Zhou, Yan-Yan Xi, Hong-Xiang Chen, Guang-Hua Yao, Zhong-Hua Lin

Journal of Electrochemistry

The nano-crystalline TiO2 electrodes were prepared by spread method,electrodeposition and sol-gel method.The experimental results show that the nano-crystalline TiO2 electrodes have special photoelectrochemical response-the photocrrent-potential curves appear peaks.The special photoelectrochemical behaviors of nano-(crystalline) TiO2  electrodes are ascribed to nano-structure as well as special light induced redox reaction mechanism of nano-crystalline semiconductor electrodes.

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Degradation Of Aniline Wastewater By Electro-Heterogeneous Catalysis Reactor, Wei-Li Liu, Ai-Li Zhang, Ji-Ti Zhou, Bao-Jun Jia, Qun-Li Zhu Feb 2006

Degradation Of Aniline Wastewater By Electro-Heterogeneous Catalysis Reactor, Wei-Li Liu, Ai-Li Zhang, Ji-Ti Zhou, Bao-Jun Jia, Qun-Li Zhu

Journal of Electrochemistry

The treatment of aniline wastewater was investigated using novel electro-heterogeneous catalysis reactor.The effects of applied cell voltage,electrolysis lime,pH value and the electrolyte on electrolysis were investigated.The experimental results show that the reactor with a cell voltage of 30 V,an electrolysis time of 1 h,pH value of 7 and a salinity of 800 mg/L can achieve the best removal efficiency on aniline,which is more efficient than the sole electrochemical reactor.

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Bs News Feb 2006

Bs News

Building Services Engineering

No abstract provided.

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Development Of A Bilayer Metallization For Rit's Existing Cmos Process, Anthony Nguyen Jan 2006

Development Of A Bilayer Metallization For Rit's Existing Cmos Process, Anthony Nguyen

Journal of the Microelectronic Engineering Conference

The design and fabrication of a two-level subtractive aluminum metal backend was completed at the Rochester Institute of Technology. Metall-Metal2 (M1-M2) via chains were used as electrical test structures and tested operational. The optimal process uses 4000A of LTO for an ILD, a non-heated metal2 aluminum sputter deposition, and a chlorine-based plasma for metal etch. Resistance measurements taken through via chains produced values of —400Ω. While an ideal aluminum bar of the via chain’s dimensions should have a resistance of —100Ω, a contact resistance exists at each via throughout the chain and increases the resistance value. Capacitors were also electrically …

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Junction Integrity For Low Temperature Dopant Activation In Silicon, Geoff E. Watson Jan 2006

Junction Integrity For Low Temperature Dopant Activation In Silicon, Geoff E. Watson

Journal of the Microelectronic Engineering Conference

Detailed within this paper is investigation of using low temperature processes to activate dopant in silicon. Parameters studied include breakdown voltage, turn-on voltage, leakage current, and ideality factor. Strong correlation was seen between the temperature of activation and both the ideality factor and leakage current. Breakdown voltage seemed constant except for the highest temperature processing. Turn-on voltage seemed to change for boron activation, but not for phosphorus activation

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Formation Of Self-Aligned Shallow Junction Mosfet Source/Drains By Proximity Rapid Thermal Diffusion, Scott W. Kenny Jan 2006

Formation Of Self-Aligned Shallow Junction Mosfet Source/Drains By Proximity Rapid Thermal Diffusion, Scott W. Kenny

Journal of the Microelectronic Engineering Conference

The creation of short-channel length MOSFET's requires shallow junctions and thin gate dielectrics to maintain long channel behavior. The Focus of this paper is the creation of shallow source/drain junctions by Proximity Diffusion with Rpid Thermal Processing (RTP_. PMOS devices were fabricated using Borofilm 100 Spin on Dopant with temperatures pf 950° and 1000° for 10 and 20 seconds ramped at 30 degrees per second. The source and drain regions are defined by the patterned polysilicon gate, which is also doped during this process. A 100 A gate oxide is used, incorporating nitrogen to reduce boron diffusion through the gate. …

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Fabrication And Test Characterization Of Organic Poly(3,"' Diallkylquaterthiophene) (Pqt-12) Transistors, Amy Huang Jan 2006

Fabrication And Test Characterization Of Organic Poly(3,"' Diallkylquaterthiophene) (Pqt-12) Transistors, Amy Huang

Journal of the Microelectronic Engineering Conference

Organic thin film transistors (OTFTs) are fabricated as bottom gate, top contact devices unlike conventional integrated circuits. Transistors of various dimensions with a top organic polymer layer that acts as a semiconductor known as poly(3,3” dialkylquater thiophene) (PQT-12) have been fabricated and electrically tested. Two processes have been designed prior to spin coating the PQT polymer: a) four heavily doped boron wafers using the back of the wafer as a gate with aluminum and chrome source/drain metal options and b) five moderately doped boron wafers with molybdenum or chrome gates with aluminum or molyb denum source/drains. The devices fabricated on …

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Solutions To Resist Pattern Collapse For 45nm Lithography, Jonathan Reese Jan 2006

Solutions To Resist Pattern Collapse For 45nm Lithography, Jonathan Reese

Journal of the Microelectronic Engineering Conference

Two approaches to prevent pattern collapse of 45 nm photoresist features were explored to create a process which minimizes the forces attributed to collapse while increasing adhesion forces. Two different bottom anti-reflective coatings (BARC), a first and second reflectance minimum were examined in conjunction with the experimental approaches. An initial characterization of pattern collapse was performed to act as a control to gauge the effectiveness of the experimental approaches using an exposure matrix. The first approach implemented a surfactant added to the de-ionized (DI) water rinse after develop to decrease the capillary forces between the features. The second approach created …

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Fabrication Of Eight Level Micro-Lenses, Mayank Agrawal Jan 2006

Fabrication Of Eight Level Micro-Lenses, Mayank Agrawal

Journal of the Microelectronic Engineering Conference

As imaging and photonics technology is advancing to smaller and complex devices there is increasing interest in applications that make use of small micro-level optical elements such as micro-lenses. Micro-lens fabrication is useful in developing diffractive optical elements (DOE’s) that are used in optical communication, optical storage, optical interconnection, optical information processing and micro-optical sensors. Another area where micro-lens fabrication can be used is in characterization and optimization of illuminating sources of lithographic projection systems. The objective of this project was to fabricate eight level micro-lenses on a 5”X5” quartz substrate designed for the 193nm exposing wavelength. A micro-lens is …

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Workfunction Tuning Of Molybdenum Gate By Nitrogen Incorporation (May 2006), Kazuya Tokunaga Jan 2006

Workfunction Tuning Of Molybdenum Gate By Nitrogen Incorporation (May 2006), Kazuya Tokunaga

Journal of the Microelectronic Engineering Conference

Due to the aggressive scaling of CMOS devices, it is necessary to provide a metal gate solution to replace the conventional process known as a self-aligned poly-silicon gate. Molybdenum (Mo) possesses several properties that make it attractive as a CMOS gate electrode material. In addition, Mo has been identified as a candidate for “single-metal / dual workfunction” technology, with the ability to tune the workfunction by the introduction of nitrogen. In this study, the correlation between workfunction of the Mo gate and the incorporation of nitrogen was investigated. The flat-band voltage shift was extracted from the obtained C-V Characteristic curves. …

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Biomems Wireless Pressure Sensor, Daniel V. Pearce Jan 2006

Biomems Wireless Pressure Sensor, Daniel V. Pearce

Journal of the Microelectronic Engineering Conference

A design and manufacture of a wireless pressure sensor was proposed as a future tool for use in biological monitoring. This device is designed to acquire pressure changes through a change in capacitance. This is accomplished using a large circular parallel plate capacitor separated by a micron of air. The upper and lower plates are connected together via a large planar inductor on the opposite end of the device. The inductor and capacitor in a parallel form a resonant circuit with resonant frequency equal to one over the square root of inductance times capacitance. The resonant frequency can be dependent …

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End Point Detection Of Plasma Etching Using Optical Methods, Jeff M. Czebiniak Jan 2006

End Point Detection Of Plasma Etching Using Optical Methods, Jeff M. Czebiniak

Journal of the Microelectronic Engineering Conference

The objective of this experiment is to obtain an endpoint detection unit that can be used on all plasma etch tools in the Semiconductor and Microsystems Fabrication Laboratory (SMFL). This investigation examined one of the most common methods for end point detection in plasma etching; optical emission spectroscopy. Optical emission spectroscopy involves monitoring the wavelength emission intensity of the plasma of different species within the etchant plasma. From all of the data collected in this experiment it was shown that the Ocean Optics Spectrometer can be utilized for end point detection on any toolset in the SMFL.

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Alignment In Electron Beam Lithography, Stoyan J. Jeliazkov Jan 2006

Alignment In Electron Beam Lithography, Stoyan J. Jeliazkov

Journal of the Microelectronic Engineering Conference

Alignment was accomplished as the ultimate goal in the development of an electron beam lithography process. System was based on LEO EVO 50 scanning electron microscope at RIT’s Semiconductor and Microsystems Fabrication Laboratory (SMFL) with external writing control software package NPGS v 9.0.160. Preliminary work included investigation of line- and area-pattern writing in negative tone AZ nLOF 2020 resist diluted 1:2 with PGMEA and pattern transfer into silicon substrate via plasma etch. Manual alignment with ±100 nm translational accuracy across a 100 μm writing field was demonstrated.

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Development And Characterization Of A Rie Process For Anisotropic Trenches In Silicon, Dan R. Ghiocel Jan 2006

Development And Characterization Of A Rie Process For Anisotropic Trenches In Silicon, Dan R. Ghiocel

Journal of the Microelectronic Engineering Conference

Reactive Ion Etching (RIE) is an important process widely used in the fabrication of micro-electro mechanical-systems (MEMS) especially for microfluidic channels. The purpose of this investigation was to develop a process for anisotropic trenches in silicon using the Drytek Quad reactive ion etching system available at the Semiconductor and Microsystems Fabrication Laboratory at Rochester Institute of Technology. The etch profiles were analyzed using Scanning Electron Microscopy (SEM) and the aspect ratio dependent etching (ARDE) effect, and the etch anisotropy were characterized. At the end, this investigation demonstrated highly anisotropic trenches etched in silicon. A baseline process for etching anisotropic trenches …

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