Semiconductor and Optical Materials Commons^™

Analysis Of Photoconductive Properties In Ge2Sb2Te5 (Gst) Chalcogenide Films For Applications In Novel Electronics, John R. V. Chezem

Theses and Dissertations

This thesis investigated the thermal phase-change properties in Ge₂Sb₂Te₅ (GST) chalcogenide-based films and determined the feasibility of coupling the GST with photosensitive DNA material for novel optical device applications. Modeling and testing of GST were researched with the approach that GST would react as a resistive mechanism through thermal manipulation. A test structure was fabricated with a 2-micronmeter MEMS fabrication process. GST material was deposited (by RF sputtering) on the surface of the test structures. The GST was analyzed primarily in the amorphous to crystalline transition states due to more distinct changes in the resistance …