Semiconductor and Optical Materials Commons^™

Combinatorial Cuni Alloy Thin Film Catalysts For Layer Number Regulation In Cvd Grown Graphene, Sumeer Khanna

Masters Theses

In this work, synthesis of combinatorial library of Cu_xNi_1-x (copper nickel) alloy thin films via co-sputtering from Cu (copper) and Ni (nickel) targets as catalysts for chemical vapor deposition (CVD) growth of graphene is reported. The gradient alloy morphology, composition and microstructure were characterized via scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS), and x-ray diffraction (XRD), respectively. Subsequently, the Cu_xNi_1-x alloy thin films were used to grow graphene in a CH₄-Ar-H₂ (methane-argon-hydrogen) ambient in thermal CVD tube furnace. The underlying rationale is to adjust the Cu_xNi_{1-x …}