Electromagnetics and Photonics Commons^™

Dynamic Micromechanical Fabry-Perot Cavity Sensors Fabricated By Multiphoton Absorption Onto Optical Fiber Tips, Jeremiah C. Williams

Theses and Dissertations

This research leveraged two-photon polymerization microfabrication to integrate dynamic mechanical components with Fabry-Perot resonators onto the ends of low-loss optical fibers to prototype 3 micro-optic devices. The first device featured a multi-positional mirror that enabled thin-film deposition onto cavities of any length with mirrors of significant curvature, for refractive index sensing. The second device combined an FP cavity with a spring body featuring easily scalable stiffness for pressure sensing. The third device presented a high-speed rotating micro-anemometer for measuring a wide range of gas flows. All devices represent a significant reduction in size and weight over commercially available devices.