Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Controls and Control Theory
Robust Controller Design For An Electrostatic Micromechanical Actuator, Lili Dong, Jason Edwards
Robust Controller Design For An Electrostatic Micromechanical Actuator, Lili Dong, Jason Edwards
Electrical and Computer Engineering Faculty Publications
In this paper, a robust feedback controller is developed on an electrostatic micromechanical actuator to extend the travel range of it beyond pull-in limit. The actuator system is linearized at multiple operating points, and the controller is constructed based on the linearized model. Two kinds of controller designs are developed for set-point tracking of the actuator despite the presences of sensor noise and external disturbance. One of them is a regular fourth order Active Disturbance Rejection Controller (ADRC) and is able to achieve 97% of the maximum travel range. And the other one is a novel multi-loop controller with a …