Controls and Control Theory Commons^™

Robust Controller Design For An Electrostatic Micromechanical Actuator, Lili Dong, Jason Edwards

Electrical and Computer Engineering Faculty Publications

In this paper, a robust feedback controller is developed on an electrostatic micromechanical actuator to extend the travel range of it beyond pull-in limit. The actuator system is linearized at multiple operating points, and the controller is constructed based on the linearized model. Two kinds of controller designs are developed for set-point tracking of the actuator despite the presences of sensor noise and external disturbance. One of them is a regular fourth order Active Disturbance Rejection Controller (ADRC) and is able to achieve 97% of the maximum travel range. And the other one is a novel multi-loop controller with a …