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Shape Tuning Of Silicon Nano-Tip Arrays Through Reactive Ion Etching For Cold Field Emission, Giridhar Tulasi Ram Sankabathula

Graduate Research Theses & Dissertations

Large area silicon nano-tip arrays have been predominantly used as cold cathode electron sources in the wide range of field emission applications. Various fabrication methodologies have been developed over the decades to obtain sharp-pointed field emitters. In this thesis, we mainly emphasized on reproducing high aspect ratio field emitters and to study their surface topographical changes encountered through reactive ion etching. A discrete set of high-density field emitters have been fabricated over the large area surfaces through a three-step nanofabrication process. The surface curvatures of the obtained emitter tips are finely tuned with multiple oxidation cycles to achieve a tip’s …