Engineering Physics Commons^™

Finite Element Analysis Modeling Of Chemical Vapor Deposition Of Silicon Carbide, Brandon M. Allen

Theses and Dissertations

Fiber-reinforced silicon carbide (SiC) composite materials are important for many applications due to their high temperature strength, excellent thermal shock and impact resistance, high hardness, and good chemical stability. The microstructure and phase composition of SiC composites can be tailored by fiber surface modification, the process parameters, and/or fiber preform architecture. One process by which SiC composites can be produced is chemical vapor deposition (CVD). This thesis primarily focuses on mass transport by gas-phase flow and diffusion, chemical reaction in gas phase and on solid surfaces, and thin film formation on curved surfaces, which are fundamental to the CVD process. …