Physics Commons^™

Kinetic Monte Carlo Investigations Involving Atomic Layer Deposition Of Metal-Oxide Thinfilms, David Tyler Magness

MSU Graduate Theses

Atomic Layer Deposition is a method of manufacturing thin film materials. Metal-oxides such as zinc-oxide and aluminum-oxide are particularly interesting candidates for use in microelectronic devices such as tunnel junction barriers, transistors, Schottky diodes, and more. By adopting a 3D Kinetic Monte Carlo model capable of simulating ZnO deposition, the effect of parameters including deposition temperature, chamber pressure, and composition of the initial substrate at the beginning of deposition can be investigated. This code generates two random numbers: One is used to select a chemical reaction to occur from a list of all possible reactions and the second is used …

Density Functional Theory Calculations Of Al Doped Hafnia For Different Crystal Symmetry Configurations, Joshua Steier

Seton Hall University Dissertations and Theses (ETDs)

Dogan et al.[1], investigated the causes of ferroelectricity in doped hafnia using ab initio methods. Similarly, we investigated the stability of Al doped hafnia using quantum mechanical methods.

There are many different phases of Hafnia: monoclinic, tetragonal, cubic and orthorhombic. Starting with the monoclinic phase of Hafnia, Hafnia undergoes phase transitions which result in different space groups. The temperature at which the tetragonal phase is induced is 2000 K and cubic phase is induced at 2900 K[1]. Different dielectric constants vary from phase to phase. The average dielectric constants are highest for the cubic and tetragonal phases. In order to …