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Applied Mathematics Commons

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Full-Text Articles in Applied Mathematics

Identifiability Of Semiconductor Defects From Lbic Images, Weifu Fang, Kazufumi Ito Dec 1992

Identifiability Of Semiconductor Defects From Lbic Images, Weifu Fang, Kazufumi Ito

Mathematics and Statistics Faculty Publications

The identifiability of defects in a semiconductor from its laser-beam-induced current (LBIC) image is studied. It is shown that the LBIC technique is reliable for detecting any spatial defects in the semiconductor material. Continuous dependence of the current measurements on the spatial defects is proved, and sensitivity is also discussed in certain cases.