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Full-Text Articles in Systems Science
How To Improve Project Management For Agile Federation Development, Priyanka Kotikalpudi
How To Improve Project Management For Agile Federation Development, Priyanka Kotikalpudi
Engineering Management & Systems Engineering Theses & Dissertations
Developing a simulation federation out of a variety of heterogeneous simulation solutions is a complex task requiring very effective project management support in order to accomplish the common objectives and goals of this M&S federation. This thesis study conducts a detailed survey of available literature to identify the project management methods that can be extended to be applied to manage the development of simulation systems. The literature review led to the following two main results: (a) in general, there is insufficient literature dealing with M&S challenges for project management, (b) in particular, the two challenges of often changing requirements leading …
A Study Of Reticle Non-Flatness Induced Image Placement Error In Extreme Ultraviolet Lithography, Sudharshanan Raghunathan
A Study Of Reticle Non-Flatness Induced Image Placement Error In Extreme Ultraviolet Lithography, Sudharshanan Raghunathan
Legacy Theses & Dissertations (2009 - 2024)
As the semiconductor industry continues scaling devices to smaller sizes, the need for next generation lithography technology for fabricating these small structures has always been at the forefront. Over the past few years, conventional optical lithography technology which has adopted a series of resolution enhancement techniques to support the scaling needs is expected to run out of steam in the near future. Extreme Ultra Violet lithography (EUVL) is being actively pursued by the semiconductor industry as one of the most promising next generation lithographic technologies. Most of the issues unique to EUVL arise from the use of 13.5 nm light …