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2015

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Articles 91 - 120 of 148

Full-Text Articles in Nanoscience and Nanotechnology

Relevance Of Blood Vessel Networks In Blast-Induced Traumatic Brain Injury, Yi Hua, Shengmao Lin, Linxia Gu Jan 2015

Relevance Of Blood Vessel Networks In Blast-Induced Traumatic Brain Injury, Yi Hua, Shengmao Lin, Linxia Gu

Department of Mechanical and Materials Engineering: Faculty Publications

Cerebral vasculature is a complex network that circulates blood through the brain. However, the role of this networking effect in brain dynamics has seldom been inspected. This work is to study the effects of blood vessel networks on dynamic responses of the brain under blast loading. Voronoi tessellations were implemented to represent the network of blood vessels in the brain. The brain dynamics in terms of maximumprincipal strain (MPS), shear strain (SS), and intracranial pressure (ICP) weremonitored and compared. Results show that blood vessel networks significantly affected brain responses.The increased MPS and SS were observed within the brain embedded with …


In Situ Longitudinal Pre-Stretch In The Human Femoropopliteal Artery, Alexey Kamenskiy, Andreas Seas, Grant Bowen, Paul Deegan, Anastasia Desyatova, Nick Bohlim, William Poulson, Jason N. Mactaggart Jan 2015

In Situ Longitudinal Pre-Stretch In The Human Femoropopliteal Artery, Alexey Kamenskiy, Andreas Seas, Grant Bowen, Paul Deegan, Anastasia Desyatova, Nick Bohlim, William Poulson, Jason N. Mactaggart

Department of Mechanical and Materials Engineering: Faculty Publications

In situ longitudinal (axial) pre-stretch (LPS) plays a fundamental role in the mechanics of the femoropopliteal artery (FPA). It conserves energy during pulsation and prevents buckling of the artery during limb movement. We investigated how LPS is affected by demographics and risk factors, and how these patient characteristics associate with the structural and physiologic features of the FPA. LPS was measured in n=148 fresh human FPAs (14–80 years old). Mechanical properties were characterized with biaxial extension and histopathological characteristics were quantified with Verhoeff-Van Gieson Staining. Constitutive modeling was used to calculate physiological stresses and stretches which were then analyzed …


Asphalt Composition, David Allen, Flavio Souza, Yong-Rak Kim, Roberto Soares Jan 2015

Asphalt Composition, David Allen, Flavio Souza, Yong-Rak Kim, Roberto Soares

Department of Mechanical and Materials Engineering: Faculty Publications

A computational method is provided for predicting roadway failure due to degradation of the roadway over time as a function of the input loads, the roadway geometry, the material properties of the constituents in the asphaltic pavement, the shape, distribution, orientation and volume fractions of the constituents, and environmental conditions. The unique and new feature of the method is that it employs several physically based predictive methodologies simultaneously.


Extracting Continuum-Like Deformation And Stress From Molecular Dynamics Simulations, Lili Zhang, John Jasa, George Gazonas, Antoine Jerusalem, Mehrdad Negahban Jan 2015

Extracting Continuum-Like Deformation And Stress From Molecular Dynamics Simulations, Lili Zhang, John Jasa, George Gazonas, Antoine Jerusalem, Mehrdad Negahban

Department of Mechanical and Materials Engineering: Faculty Publications

We present methods that use results from molecular dynamics (MD) simulations to construct continuum parameters, such as deformation gradient and Cauchy stress, from all or any part of an MD system. These parameters are based on the idea of minimizing the difference between MD measures for deformation and traction and their continuum counterparts. The procedures should be applicable to non-equilibrium and inhomogeneous systems, and to any part of a system, such as a polymer chain. The resulting procedures provide methods to obtain first and higher order deformation gradients associated with any subset of the MD system, and associated expressions for …


Designed Synthesis Of Nanoporous Organic Polymers For Selective Gas Uptake And Catalytic Applications, Pezhman Arab Jan 2015

Designed Synthesis Of Nanoporous Organic Polymers For Selective Gas Uptake And Catalytic Applications, Pezhman Arab

Theses and Dissertations

Design and synthesis of porous organic polymers have attracted considerable attentions during the past decade due to their wide range of applications in gas storage, gas separation, energy conversion, and catalysis. Porous organic polymers can be pre-synthetically and post-synthetically functionalized with a wide variety of functionalities for desirable applications. Along these pursuits, we introduced new synthetic strategies for preparation of porous organic polymers for selective CO2 capture.

Porous azo-linked polymers (ALPs) were synthesized by an oxidative reaction of amine-based monomers using copper(I) as a catalyst which leads to azo-linkage formation. ALPs exhibit high surface areas of up to 1200 …


Molecular Dynamics Study On Defect Reduction Strategies Towards The Fabrication Of High Performance Cd1-Xznxte/Cds Solar Cells, Jose Juan Chavez Jan 2015

Molecular Dynamics Study On Defect Reduction Strategies Towards The Fabrication Of High Performance Cd1-Xznxte/Cds Solar Cells, Jose Juan Chavez

Open Access Theses & Dissertations

Cadmium Telluride is a material widely used in terrestrial thin film photovoltaic applications due to its nearly ideal band gap (~1.5 eV) and high absorption coefficient. Due to its low manufacturing cost, this technology has the potential to become a significant energy resource if higher energy conversion efficiencies are achieved. However, the module efficiencies (~14%) are still far from the theoretical maximum (~30%) for this material in a single junction configuration. The reason behind this low performance is attributed to the high number of defects that are present within the device materials. The physics behind the formation mechanisms of these …


Novel Techniques For Quasi Three-Dimensional Nanofabrication Of Transformation Optics Devices, Paul R. West Jan 2015

Novel Techniques For Quasi Three-Dimensional Nanofabrication Of Transformation Optics Devices, Paul R. West

Open Access Dissertations

Current nanofabrication is almost exclusively limited to top-down, two-dimensional techniques. As technology moves more deeply into the nano-scale regime, fabrication of new devices with quasi three-dimensional geometries shows great potential. One excellent example of an emerging field that requires this type of non-conformal 3D fabrication technique is the field of Transformation Optics. This field involves transforming and manipulating the optical space through which light propagates. Arbitrarily manipulating the optical space requires advanced fabrication techniques, which are not possible with current two-dimensional fabrication technologies. One step toward quasi three-dimensional nanofabrication involves employing angled deposition allowing new growth mechanisms, and enabling a …


Electronic Structure Evolution Of Fullerene On Ch3Nh3Pbi3, Chenggong Wang, Congcong Wang, Xiaoliang Liu, John Kauppi, Yuchuan Shao, Zhengguo Xiao, Cheng Bi, Jinsong Huang, Yongli Gao Jan 2015

Electronic Structure Evolution Of Fullerene On Ch3Nh3Pbi3, Chenggong Wang, Congcong Wang, Xiaoliang Liu, John Kauppi, Yuchuan Shao, Zhengguo Xiao, Cheng Bi, Jinsong Huang, Yongli Gao

Department of Mechanical and Materials Engineering: Faculty Publications

The thickness dependence of fullerene on CH3NH3PbI3 perovskite film surface has been investigated by using ultraviolet photoemission spectroscopy (UPS), X-ray photoemission spectroscopy (XPS), and inverse photoemission spectroscopy (IPES). The lowest unoccupied molecular orbital and highest occupied molecular orbital (HOMO) can be observed directly with IPES and UPS. It is observed that the HOMO level in fullerene shifts to lower binding energy. The XPS results show a strong initial shift of core levels to lower binding energy in the perovskite, which indicates that electrons transfer from the perovskite film to fullerene molecules. Further deposition of fullerene …


Improving The Sensitivity Of A Near-Infrared Nanocomposite Photodetector By Enhancing Trap Induced Hole Injection, Liang Shen, Yanjun Fang, Qingfeng Dong, Zhengguo Xiao, Jinsong Huang Jan 2015

Improving The Sensitivity Of A Near-Infrared Nanocomposite Photodetector By Enhancing Trap Induced Hole Injection, Liang Shen, Yanjun Fang, Qingfeng Dong, Zhengguo Xiao, Jinsong Huang

Department of Mechanical and Materials Engineering: Faculty Publications

We report the enhancement of the photoconductive gain of nanocomposite near-infrared photodetectors by a zinc oxide nanoparticles (ZnO NPs) rich surface at the nanocomposite/cathode interface. An argon plasma etching process was used to remove polymer at the surface of nanocomposite films, which resulted in a ZnO NPs rich surface. The other way is to spin-coat a thin layer of ZnO NPs onto the nanocomposite layer. The ZnO NPs rich surface, which acts as electron traps to induce secondary hole injection under reverse bias, increased hole injection, and thus the external quantum efficiency by 2–3 times. The darkcurrent declined one order …


Color And Texture Morphing With Colloids On Multilayered Surfaces, Ziguang Chen, Shumin Li, Andrew Arkebauer, George Gogos, Li Tan Jan 2015

Color And Texture Morphing With Colloids On Multilayered Surfaces, Ziguang Chen, Shumin Li, Andrew Arkebauer, George Gogos, Li Tan

Department of Mechanical and Materials Engineering: Faculty Publications

Dynamic morphing of marine species to match with environment changes in color and texture is an advanced means for surviving, self-defense, and reproduction. Here we use colloids that are placed inside a multilayered structure to demonstrate color and texture morphing. The multilayer is composed of a thermal insulating base layer, a light absorbing mid layer, and a liquid top layer. When external light of moderate intensity (∼0.2 W cm−2) strikes the structure, colloids inside the liquid layer will be assembled to locations with an optimal absorption. When this system is exposed to continuous laser pulses, more than 18 000 times …


Quantification Of Plaque Stiffness By Brillouin Microscopy In Experimental Thin Cap Fibroatheroma, Giuseppe Antonacci, Ryan M. Pedrigi, Avinash Kondiboyina, Vikram V. Mehta, Ranil De Silva, Carl Paterson, Rob Krams, Peter Torok Jan 2015

Quantification Of Plaque Stiffness By Brillouin Microscopy In Experimental Thin Cap Fibroatheroma, Giuseppe Antonacci, Ryan M. Pedrigi, Avinash Kondiboyina, Vikram V. Mehta, Ranil De Silva, Carl Paterson, Rob Krams, Peter Torok

Department of Mechanical and Materials Engineering: Faculty Publications

Plaques vulnerable to rupture are characterized by a thin and stiff fibrous cap overlaying a soft lipid-rich necrotic core. The ability to measure local plaque stiffness directly to quantify plaque stress and predict rupture potential would be very attractive, but no current technology does so. This study seeks to validate the use of Brillouin microscopy to measure the Brillouin frequency shift, which is related to stiffness, within vulnerable plaques. The left carotid artery of an ApoE-/- mouse was instrumented with a cuff that induced vulnerable plaque development in nine weeks. Adjacent histological sections from the instrumented and control arteries …


Mammalian Synthetic Biology: Emerging Medical Applications, Zoltan Kis, Hugo Sant'ann Pereira, Takayuki Homma, Ryan M. Pedrigi, Rob Krams Jan 2015

Mammalian Synthetic Biology: Emerging Medical Applications, Zoltan Kis, Hugo Sant'ann Pereira, Takayuki Homma, Ryan M. Pedrigi, Rob Krams

Department of Mechanical and Materials Engineering: Faculty Publications

In this review, we discuss new emerging medical applications of the rapidly evolving field of mammalian synthetic biology.We start with simple mammalian synthetic biological components and move towards more complex and therapy-oriented gene circuits. A comprehensive list of ON–OFF switches, categorized into transcriptional, post-transcriptional, translational and posttranslational, is presented in the first sections. Subsequently, Boolean logic gates, synthetic mammalian oscillators and toggle switches will be described. Several synthetic gene networks are further reviewed in the medical applications section, including cancer therapy gene circuits, immuno-regulatory networks, among others. The final sections focus on the applicability of synthetic gene networks to drug …


Extraction Of Carrier Mobility And Interface Trap Density In Ingaas Metal Oxide Semiconductor Structures Using Gated Hall Method, Thenappan Chidambaram Jan 2015

Extraction Of Carrier Mobility And Interface Trap Density In Ingaas Metal Oxide Semiconductor Structures Using Gated Hall Method, Thenappan Chidambaram

Legacy Theses & Dissertations (2009 - 2024)

III-V semiconductors are potential candidates to replace Si as a channel material in next generation CMOS integrated circuits owing to their superior carrier mobilities. Low density of states (DOS) and typically high interface and border trap densities (Dit) in high mobility group III-V semiconductors provide difficulties in quantification of Dit near the conduction band edge. The trap response above the threshold voltage of a MOSFET can be very fast, and conventional Dit extraction methods, based on capacitance/conductance response (CV methods) of MOS capacitors at frequencies <1MHz, cannot distinguish conducting and trapped carriers. In addition, the CV methods have to deal with high dispersion in the accumulation region that makes it a difficult task to measure the true oxide capacitance, Cox value. Another implication of these properties of III-V interfaces is an ambiguity of determination of electron density in the MOSFET channel. Traditional evaluation of carrier density by integration of the C-V curve, gives incorrect values for Dit and mobility. Here we employ gated Hall method to quantify the Dit spectrum at the high-κ oxide/III-V semiconductor interface for buried and surface channel devices using Hall measurement and capacitance-voltage data. Determination of electron density directly from Hall measurements allows for obtaining true mobility values


Determination Of Current Density Distribution In An Electron Beam, Yudhishthir Prasad Kandel Jan 2015

Determination Of Current Density Distribution In An Electron Beam, Yudhishthir Prasad Kandel

Legacy Theses & Dissertations (2009 - 2024)

Electron beams are useful in many applications because they can be focused down to a spot far exceeding the physical limit of focusing visible light or x-rays. Additionally, electron beams are useful in transferring concentrated amounts of energy to a very small well defined region of a target for a fixed duration. This has led to the development of both scanning electron microscopes (SEMs) and electron beam lithography. The goal of this work was to develop a general method that accurately and easily yields the best estimate of the electron current density distribution of a focused electron beam, known as …


Understanding Transcriptional Enhancement In Monoclonal Antibody-Producing Chinese Hamster Ovary Cells, Sarah E. Nicoletti Jan 2015

Understanding Transcriptional Enhancement In Monoclonal Antibody-Producing Chinese Hamster Ovary Cells, Sarah E. Nicoletti

Legacy Theses & Dissertations (2009 - 2024)

With the demand for monoclonal antibody (mAB) therapeutics continually increasing, the need to better understand what makes a high productivity clone has gained substantial interest. Monoclonal antibody producing Chinese hamster ovary (CHO) cells with different productivities were provided by a biopharmaceutical company for investigation. Gene copy numbers, mRNA levels, and mAb productivities were previously determined for two low producing clones and their amplified progeny. These results showed an increase in mRNA copy number in amplified clones, which correlated to the observed increases in specific productivity of these clones. The presence of multiple copies of mRNA per one copy of DNA …


Implementation Of Strategies To Improve The Reliability Of Iii-Nitride Photodetectors Towards The Realization Of Visible And Solar-Blind Imaging Arrays, John Bulmer Jan 2015

Implementation Of Strategies To Improve The Reliability Of Iii-Nitride Photodetectors Towards The Realization Of Visible And Solar-Blind Imaging Arrays, John Bulmer

Legacy Theses & Dissertations (2009 - 2024)

Ultraviolet (UV) radiation detectors are being heavily researched for applications in non-line-of-sight (NLOS) communication systems, flame monitoring, biological detection, and astronomical studies. These applications are currently being met by the use of Si-based photomultiplier tubes (PMTs), which are bulky, fragile, expensive and require the use of external filters to achieve true visible-blind and solar-blind operation.


Creation Of A 3d Construct To Aid Cell Migration And Promote Cell Capture, Joseph Michael Sanders Jan 2015

Creation Of A 3d Construct To Aid Cell Migration And Promote Cell Capture, Joseph Michael Sanders

Legacy Theses & Dissertations (2009 - 2024)

Most cancer-related deaths are attributed to metastasis. The tumor microenvironment is a complex environment which is not fully understood. The Nano Intravital Device (NANIVID) is a versatile, biocompatible device that allows for the manipulation of the tumor microenvironment in vitro and in vivo, providing a platform to study various aspects of tumor progression. The purpose of this study is to modify the NANIVID to resemble the tumor microenvironment in order to allow for a seamless transition from the in vivo environment into the engineered environment within the NANIVID. This engineered microenvironment will promote cell migration and cell capture. It has …


Molecular Organometallic Resists Of Tin And Tellurium, Ryan Del Re Jan 2015

Molecular Organometallic Resists Of Tin And Tellurium, Ryan Del Re

Legacy Theses & Dissertations (2009 - 2024)

EUV photoresists made from organotin and organotellurium dicarboxylates were lithographically evaluated for photosensitivity and dense-line patterning. The effects of ligand structure and central metal are explored through systematic molecular modification. Through this work, two photoresists were discovered that are capable of high resolution and low line-edge roughness. Dibenzyltin dipivalate resolves 22-nm dense lines with 1.4-nm LER and dibenzyltin dibenzoate resolves 35-nm dense lines with 1.1-nm LER.


Initiated Chemical Vapor Deposition (Icvd) Polymer Thin Films : Structure-Property Effects On Thermal Degradation And Adhesion, Vijay Jain Bharamaiah Jeevendrakumar Jan 2015

Initiated Chemical Vapor Deposition (Icvd) Polymer Thin Films : Structure-Property Effects On Thermal Degradation And Adhesion, Vijay Jain Bharamaiah Jeevendrakumar

Legacy Theses & Dissertations (2009 - 2024)

Opportunities and challenges for chemical vapor deposition (CVD) of polymer thin films stems from their applications in electronics, sensors, and adhesives with demands for control over film composition, conformity and stability. Initiated chemical vapor deposition (iCVD) is a subset of the CVD technique that conjoins bulk free-radical polymerization chemistry with gas-phase processing. The novelty of iCVD technique stems from the use of an initiator that can be activated at low energies (150 – 300 °C) to react with surface adsorbed monomer to form a polymer film. This reduces risk for potential unwarranted side-reactions.


Brown Adipogenesis Of Mouse Embryonic Stem Cells In Alginate Microstrands, Andrea Mannarino Unser Jan 2015

Brown Adipogenesis Of Mouse Embryonic Stem Cells In Alginate Microstrands, Andrea Mannarino Unser

Legacy Theses & Dissertations (2009 - 2024)

The ability of brown adipocytes (fat cells) to dissipate energy as heat shows great promise for the treatment of obesity and other metabolic disorders. Employing pluripotent stem cells, with an emphasis on directed differentiation, may overcome many issues currently associated with primary fat cell cultures. However, brown adipocytes are difficult to transplant in vivo due to the instability of fat, in terms of necrosis and neovascularization, once injected. Thus, 3D cell culture systems that have the potential to mimic adipogenic microenvironments are needed, not only to advance brown fat implantation, but also to better understand the role of brown adipocytes …


High Frequency Signal Transmission In Through Silicon Via Based 3d Integrated Circuit, Min Xu Jan 2015

High Frequency Signal Transmission In Through Silicon Via Based 3d Integrated Circuit, Min Xu

Legacy Theses & Dissertations (2009 - 2024)

Through silicon vias (TSVs) enable 3-dimensional (3D) integrated circuits (ICs), which have the potential to reduce the power consumption, interconnect length and overall communication latency in modern nanoelectronics systems. High-speed signal transmission channels through stacked silicon substrates are critical for 3D heterogeneous integration. This work presents systematic analyses of fabricated 3D IC test structures. This includes test structure design, fabrication, experimental characterization, equivalent circuit modeling and full wave simulations for high-speed signal transmission of the TSV based 3D IC channels.


An Assessment Of Critical Dimension Small Angle X-Ray Scattering Metrology For Advanced Semiconductor Manufacturing, Charles Michael Settens Jan 2015

An Assessment Of Critical Dimension Small Angle X-Ray Scattering Metrology For Advanced Semiconductor Manufacturing, Charles Michael Settens

Legacy Theses & Dissertations (2009 - 2024)

Simultaneous migration of planar transistors to FinFET architectures, the introduction of a plurality of materials to ensure suitable electrical characteristics, and the establishment of reliable multiple patterning lithography schemes to pattern sub-10 nm feature sizes imposes formidable challenges to current in-line dimensional metrologies. Because the shape of a FinFET channel cross-section immediately influences the electrical characteristics, the evaluation of 3D device structures requires measurement of parameters beyond traditional critical dimension (CD), including their sidewall angles, top corner rounding and footing, roughness, recesses and undercuts at single nanometer dimensions; thus, metrologies require sub-nm and approaching atomic level measurement uncertainty.


The Development Of Iii-V Semiconductor Mosfets For Future Cmos Applications, Andrew M. Greene Jan 2015

The Development Of Iii-V Semiconductor Mosfets For Future Cmos Applications, Andrew M. Greene

Legacy Theses & Dissertations (2009 - 2024)

Alternative channel materials with superior transport properties over conventional strained silicon are required for supply voltage scaling in low power complementary metal-oxide-semiconductor (CMOS) integrated circuits. Group III-V compound semiconductor systems offer a potential solution due to their high carrier mobility, low carrier effective mass and large injection velocity. The enhancement in transistor drive current at a lower overdrive voltage allows for the scaling of supply voltage while maintaining high switching performance. This thesis focuses on overcoming several material and processing challenges associated with III-V semiconductor development including a low thermal processing budget, high interface trap state density (Dit), low resistance …


Comparison Of Glucose, Fructose And Sucrose Amperometric And Thermal Sensors For Detection Of Carbohydrates In Living Plant Tissue, Scott Mcadoo Jan 2015

Comparison Of Glucose, Fructose And Sucrose Amperometric And Thermal Sensors For Detection Of Carbohydrates In Living Plant Tissue, Scott Mcadoo

Legacy Theses & Dissertations (2009 - 2024)

Ecologists currently cannot test concentrations of carbohydrates in sap in vivo. Testing carbohydrates with current technology would require destructive tissue sampling. The tissue sampling involves large amounts of time and money to collect and test. Aphids are an insect that can bypass a tree’s passive immune system and feed off a phloem region for weeks. A series of enzymatic biosensors could be used to detect the concentration changes of specific carbohydrates. A calcium chelant can be added to defeat a tree’s immune system like an aphid. The detection of three carbohydrates, fructose, glucose and sucrose are involved in this study. …


Characterization Of Metallic And Semimetallic Oxide Nanoparticles In Industrial Wastewater And Associated Toxicity, Gary Roth Jan 2015

Characterization Of Metallic And Semimetallic Oxide Nanoparticles In Industrial Wastewater And Associated Toxicity, Gary Roth

Legacy Theses & Dissertations (2009 - 2024)

Engineered nanomaterials (ENMs) play an increasing role in manufacturing and consumer products. Currently, there is no standard approach to studying ENM toxicity, and a growing body of literature suggests that ENMs may have toxicity differing from similar compounds in bulk or dissolved form. I examined ENMs used in the semiconductor manufacturing process called chemical-mechanical planarization (CMP) for their properties, removal in the wastewater treatment system (WWT), in-vitro toxicity, and location post-inhalation in-vivo. It was found that ENMs in CMP slurries have morphology determined by their elemental composition, but assessment of size and concentration can differ substantially between accepted techniques. Particles …


The Impact Of Seed Layer Structure On The Recrystallization Of Ecd Cu And Its Alloys, Brendan B. O'Brien Jan 2015

The Impact Of Seed Layer Structure On The Recrystallization Of Ecd Cu And Its Alloys, Brendan B. O'Brien

Legacy Theses & Dissertations (2009 - 2024)

Despite the significant improvements originally offered by the use of Cu over Al as the interconnect material for semiconductor devices, the continued down-scaling of interconnects has presented significant challenges for semiconductor engineers. As the metal line widths shrink, both the conductivity and reliability of lines decrease due to a stubbornly fine-grained microstructure in narrow lines.


Two-Dimensional Chalcogenides : Material Synthesis And Nano-Device Applications, Robin Bay Jacobs-Gedrim Jan 2015

Two-Dimensional Chalcogenides : Material Synthesis And Nano-Device Applications, Robin Bay Jacobs-Gedrim

Legacy Theses & Dissertations (2009 - 2024)

Low-dimensional nanostructures exhibit distinct properties from their bulk counterparts. Here the synthesis of novel low-dimensional nanostructures is demonstrated using both top down and bottom up processes and their properties are investigated. Two-dimensional (2D) binary sesquichalcogenides are introduced as a viable material platform for phase change random access memory, photodetection, and the investigation of topological insulator surface states. An exponential relationship is observed between layer thickness and energy consumption during switching of 2D phase change devices, ultra-high responsivity in 2D photoresistors, and surface-rich conduction in 2D topological insulator nanoplates. Additionally, methods for the assessment of chemical purity, stoichiometry, and dimensions of …


Nanoparticle Generation And Interactions With Surfaces In Vacuum Systems, Yashdeep Khopkar Jan 2015

Nanoparticle Generation And Interactions With Surfaces In Vacuum Systems, Yashdeep Khopkar

Legacy Theses & Dissertations (2009 - 2024)

Extreme ultraviolet lithography (EUVL) is the most likely candidate as the next generation technology beyond immersion lithography to be used in high volume manufacturing in the semiconductor industry. One of the most problematic areas in the development process is the fabrication of mask blanks used in EUVL. As the masks are reflective, there is a chance that any surface aberrations in the form of bumps or pits could be printed on the silicon wafers. There is a strict tolerance to the number density of such defects on the mask that can be used in the final printing process. Bumps on …


Plasmonic Enhancement Of The Ellipsometric Measurement Of Thin Metal Lines, Samuel O'Mullane Jan 2015

Plasmonic Enhancement Of The Ellipsometric Measurement Of Thin Metal Lines, Samuel O'Mullane

Legacy Theses & Dissertations (2009 - 2024)

In semiconductor manufacturing, defect analysis and process control are extremely important for optimal device performance and yield enhancement. One in-line tool used for quick optical characterization is the ellipsometer. Because it is nondestructive and largely automated, ellipsometers have become key tools in this process. Scatterometry based optical critical dimension (OCD) analysis is the full optical modeling of ellipsometric measurements using regression-based structures. Specifically for metallic gratings, OCD has a couple of challenges. First, the sensitivity to changes in the width of the metal lines is decreasing for smaller widths. Second, the main scatterometry spectral simulation method (rigorous coupled wave analysis, …


Hexagonal Boron Nitride : Ubiquitous Layered Dielectric For Two-Dimensional Electronics, Nikhil Jain Jan 2015

Hexagonal Boron Nitride : Ubiquitous Layered Dielectric For Two-Dimensional Electronics, Nikhil Jain

Legacy Theses & Dissertations (2009 - 2024)

Hexagonal boron nitride (h-BN), a layer-structured dielectric with very similar crystalline lattice to that of graphene, has been studied as a ubiquitous dielectric for two-dimensional electronics. While 2D materials may lead to future platform for electronics, traditional thin-film dielectrics (e.g., various oxides) make highly invasive interface with graphene. Multiple key roles of h-BN in graphene electronics are explored in this thesis. 2D graphene/h-BN heterostructures are designed and implemented in diverse configurations in which h-BN is evaluated as a supporting substrate, a gate dielectric, a passivation layer, or an interposing barrier in “3D graphene” superlattice. First, CVD-grown graphene on h-BN substrate …