Applied Mechanics Commons^™

Numerical Simulations Of Directed Self-Assembly Methods In Di-Block Copolymer Films For Efficient Manufacturing Of Nanoscale Patterns With Long-Range Order, Joseph Hill

Graduate Theses and Dissertations

Directed self-assembly (DSA) of block copolymers (BCPs) has been shown as a viable method to achieve bulk fabrication of surface patterns with feature sizes smaller than those available through traditional photolithography. Under appropriate thermodynamic conditions, BCPs will self-assemble into ordered micro-domain morphologies, a desirable feature for many applications. One of the primary interests in this field of research is the application of thin-film BCPs to existing photolithography techniques. This “bottom-up” approach utilizes the self-assembled BCP nanostructures as a sacrificial templating layer in the lithographic process.

While self-assembly occurs spontaneously, extending orientational uniformity over centimeter-length scales remains a critical challenge. A …