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Articles 571 - 600 of 604

Full-Text Articles in Mechanical Engineering

Laser Induced Fluorescence Photobleaching Anemometer For Microfluidic Devices, Guiren Wang Jan 2005

Laser Induced Fluorescence Photobleaching Anemometer For Microfluidic Devices, Guiren Wang

Faculty Publications

We have developed a novel, non-intrusive fluid velocity measurement method based on photobleaching of a fluorescent dye for microfluidic devices. The residence time of thefluorescent dye in a laser beam depends on the flow velocity and approximately corresponds to the decaying time of the photobleaching of the dye in the laser beam. The residence time is inversely proportional to the flow velocity. The fluorescence intensity increases with the flow velocity due to the decrease of the residence time. A calibration curve between fluorescence intensity and known flow velocity should be obtained first. The calibration relationship is then used to calculate …

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Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An Jan 2005

Mechanics Of Composite Materials In Fuel Cell Systems, Kenneth Reifsnider, Xinyu Huang, G. Ju, Matthew Feshler, K. An

Faculty Publications

The science and technology that are fundamental to the concept of composite materials are also the foundation for the construction and function of fuel cells and fuel cell systems. The present paper outlines this relationship in the context of the physics and chemistry that are enabled by the specific selection and arrangement of constituents of the “functional composite” fuel cell. General principles of operation are described, and fundamental issues are defined that must be addressed by the composites community if the fuel cell science and engineering is to advance. Examples of several types of functional composite fuel cells are presented, …

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Noble Metal Nanostructures Synthesized Inside Mesoporous Nanotemplate Pores, J. Arbiol, E. Rossinyol, A. Cabot, F. Peiro, A. Cornet, J. R. Morante, Fanglin Chen, Meilin Liu Apr 2004

Noble Metal Nanostructures Synthesized Inside Mesoporous Nanotemplate Pores, J. Arbiol, E. Rossinyol, A. Cabot, F. Peiro, A. Cornet, J. R. Morante, Fanglin Chen, Meilin Liu

Faculty Publications

Noble metal impregnation has resulted in the inclusion of metal nanostructures within the SBA-15 mesoporous silica hexagonal pores (from nanoclusters to nanowires). A bright-field transmission electron microscopy three-dimensional reconstruction is proposed to analyze the localization of nanostructures within the pores of mesoporous nanotemplates. The method allows corroboration whether the nanostructures are synthesized inside the pores or they are synthesized alternatively on the nanotemplate aggregates exterior surface.

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Gas-Diffusion Process In A Tubular Cathode Substrate Of A Sofc, Part Ii: Identification Of Gas-Diffusion Process Using Ac Impedance Method, Kevin Huang Apr 2004

Gas-Diffusion Process In A Tubular Cathode Substrate Of A Sofc, Part Ii: Identification Of Gas-Diffusion Process Using Ac Impedance Method, Kevin Huang

Faculty Publications

The effects of cathodic dc bias, bulk pO2, and effective O2 -diffusivity on ac impedance spectra of Siemens Westinghouse Power Corporation’s cathode-supported solid oxide fuel cells were systematically studied over a temperature range of 800 to 1000°C. It was found that the activation process dominated the overall electrode kinetics at 800°C, by which the applied dc bias reduced the electrode resistance considerably. With increasing the temperature to above 900°C, the activation process became effectively activated, leading to a visible arc at the lowest frequency on the impedance spectrum, which is relevant to the pore gas-diffusion process. …

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Gas-Diffusion Process In A Tubular Cathode Substrate Of An Sofc, Part I: Theoretical Analysis Of Gas-Diffusion Process Under Cylindrical Coordinate System, Kevin Huang Apr 2004

Gas-Diffusion Process In A Tubular Cathode Substrate Of An Sofc, Part I: Theoretical Analysis Of Gas-Diffusion Process Under Cylindrical Coordinate System, Kevin Huang

Faculty Publications

In this the first part of a two-part paper, the gas-diffusion process through a thick and porous tubular cathode substrate of a solid oxide fuel cell-(SOFC) was theoretically analyzed using classic Fick’s diffusion equation under the cylindrical coordinate system. The effects of current density, temperature, oxygen diffusivity or porosity, wall thickness, and bulk pO2 on the concentration (or pore in this paper) polarization were calculated and are presented graphically. The results clearly show a greater impact on pore polarization by current density, oxygen diffusivity, wall thickness, and bulk pO2, but not by temperature. In addition, …

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Synthesis Of Tin Oxide Nanostructures With Controlled Particle Size Using Mesoporous Frameworks, A. Cabot, J. Arbiol, E. Rossinyol, J. R. Morante, Fanglin Chen, Meilin Liu Mar 2004

Synthesis Of Tin Oxide Nanostructures With Controlled Particle Size Using Mesoporous Frameworks, A. Cabot, J. Arbiol, E. Rossinyol, J. R. Morante, Fanglin Chen, Meilin Liu

Faculty Publications

Tin oxide nanostructures with controlled narrow particle size distribution were synthesized inside silica mesoporous templates. In this way, particle growth was blocked by physically corseting the tin compound inside the silica frameworks, the pore diameter of which determines the final tin oxide crystallite size distribution. Template structures were subsequently eliminated by chemical methods to collect the unsupported semiconductor nanoparticles. Thus obtained tin oxed nanopowders, with particle sizes in the range between 6 and 10 nm, were structurally, chemically, and electically characterized. The results are compared with those obtained from the characterization of larger crystallite materials.

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Surface States In Template Synthesized Tin Oxide Nanoparticles, A. Cabot, J. Arbiol, R. Ferre, J. R. Morante, Fanglin Chen, Meilin Liu Feb 2004

Surface States In Template Synthesized Tin Oxide Nanoparticles, A. Cabot, J. Arbiol, R. Ferre, J. R. Morante, Fanglin Chen, Meilin Liu

Faculty Publications

Tin–oxide nanoparticles with controlled narrow size distributions are synthesized while physically encapsulated inside silica mesoporous templates. By means of ultraviolet-visible spectroscopy, a redshift of the optical absorbance edge is observed. Photoluminescence measurements corroborate the existence of an optical transition at 3.2 eV. The associated band of states in the semiconductor gap is present even on template-synthesized nanopowders calcined at 800 °C, which contrasts with the evolution of the gap states measured on materials obtained by other methods. The gap states are thus considered to be surface localized, disappearing with surface faceting or being hidden by the surface-to-bulk ratio decrease.

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Distributions Of Nobel Metal Pd And Pt In Mesoporous Silica, J. Arbiol, A. Cabot, J. R. Morante, Fanglin Chen, Meilin Liu Oct 2002

Distributions Of Nobel Metal Pd And Pt In Mesoporous Silica, J. Arbiol, A. Cabot, J. R. Morante, Fanglin Chen, Meilin Liu

Faculty Publications

Mesoporous silicananostructures have been synthesized and loaded with Pd and Pt catalytic noble metals. It is found that Pd forms small nanoclusters (3–5 nm) on the surface of the mesoporous structure whereas Pt impregnation results in the inclusion of Pt nanostructures within the silica hexagonal pores (from nanoclusters to nanowires). It is observed that these materials have high catalyticproperties for CO–CH4CO–CH4CO–CH4 combustion, even in a thick film form. In particular, results indicate that the Pt and Pd dispersed in mesoporous silica are catalytically active as a selective filter for gas sensors.

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Distributions Of Noble Metal Pd And Pt In Mesoporous Silica, J. Arbiol, A. Cabot, J. R. Morante, Fanglin Chen, Meilin Liu Oct 2002

Distributions Of Noble Metal Pd And Pt In Mesoporous Silica, J. Arbiol, A. Cabot, J. R. Morante, Fanglin Chen, Meilin Liu

Faculty Publications

Mesoporous silica nanostructures have been synthesized and loaded with Pd and Pt catalytic noble metals. It is found that Pd forms small nanoclusters (3–5 nm) on the surface of the mesoporous structure whereas Pt impregnation results in the inclusion of Pt nanostructures within the silica hexagonal pores (from nanoclusters to nanowires). It is observed that these materials have high catalytic properties for CO–CH4 combustion, even in a thick film form. In particular, results indicate that the Pt and Pd dispersed in mesoporous silica are catalytically active as a selective filter for gas sensors.

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Nanofatigue Studies Of Ultrathin Hard Carbon Overcoats Used In Magnetic Storage Devices, Xiaodong Li, Bharat Bhushan May 2002

Nanofatigue Studies Of Ultrathin Hard Carbon Overcoats Used In Magnetic Storage Devices, Xiaodong Li, Bharat Bhushan

Faculty Publications

A technique to perform nanofatigue experiments was developed. This technique utilizes a depth-sensing nanoindenter with harmonic force. The nanofatigue behavior of 20 nm thick amorphous carbon coatings was studied. The contact stiffness was monitored continuously throughout the test. The abrupt decrease in the contact stiffness indicates fatigue damage has occurred. The critical load amplitude, below which no fatigue damage occurs, was identified. It was found that the filtered cathodic arc coating exhibits longer fatigue life than a direct ion beam coating. Failure mechanisms of the coatings during fatigue are also discussed in conjunction with the hardness,elastic modulus, and fracture toughness, …

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Effect Of Residual Thermal Stresses On Fracture Behavior And Mechanical Properties Of Al Sub 2 O Sub 3/Ni Cermets, Guo Jin Li, Da Ming Chen, Xiao Xian Huang, Jing Kun Guo Jan 2002

Effect Of Residual Thermal Stresses On Fracture Behavior And Mechanical Properties Of Al Sub 2 O Sub 3/Ni Cermets, Guo Jin Li, Da Ming Chen, Xiao Xian Huang, Jing Kun Guo

Faculty Publications

Effect of residual thermal stresses on fracture behavior and mechanical properties of Al2O3/Ni cermets was qualitatively explained by using theory on residual thermal stresses. When Ni particles are located within Al2O3 grains or Ni content is relatively low, tensile stresses are exerted at Al2O3-Al2O3 grain boundary. While fracturing, intergranular fracture is easily produced. When Ni particles are dispersed at Al2O3 grain boundary or Ni content is relatively high, compressive stresses are exerted at Al2O3-Al2O3grain boundary. …

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Increasing Power Density Of Lsgm-Based Solid Oxide Fuel Cells Using New Anode Materials, Kevin Huang, Jen-Hau Wan, John B. Goodenough Jun 2001

Increasing Power Density Of Lsgm-Based Solid Oxide Fuel Cells Using New Anode Materials, Kevin Huang, Jen-Hau Wan, John B. Goodenough

Faculty Publications

Chemical reactions between the superior perovskite oxide-ion conductor Sr- and Mg-doped LaGaO3 (LSGM), CeO2, and NiO have been studied by powder X-ray diffraction. The results showed that an extensive reactivity occurs as a result of La migration driven by a gradient of La chemical activity. La migration across the LSGM/electrode interfaces in a fuel cell leads to the formation of resistive phases at the interface, either LaSrGa3O7 or LaSrGaO4. Use of 40 mol % La2O3 -doped CeO2 as an interlayer between anode and electrolyte as well as in …

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Oxygen Permeation Through Cobalt-Containing Perovskites: Surface Oxygen Exchange Vs. Lattice Oxygen Diffusion, Kevin Huang, John B. Goodenough May 2001

Oxygen Permeation Through Cobalt-Containing Perovskites: Surface Oxygen Exchange Vs. Lattice Oxygen Diffusion, Kevin Huang, John B. Goodenough

Faculty Publications

The oxygen permeation fluxes from p′O2 to pnO2 (p′O2>pnO2) across cobalt-containing perovskite ceramic membranes La1−xSrxCoO3−δ and SrCo0.8Fe0.2O3−δ were measured by gas chromatography as functions of oxygen chemical potential gradient, temperature, thickness, and catalytic activity on the surface. Power indexes 0.5>n>0 for uncatalyzed La1−xSrxCoO3−δ and 1>n>0.5 for SrCo0.8Fe0.2O3−δ were obtained when JO2 vs. p′nO2−p'′nO2 …

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Reduced-Temperature Solid Oxide Fuel Cells Fabricated By Screen Printing, Changrong Xia, Fanglin Chen, Meilin Liu Mar 2001

Reduced-Temperature Solid Oxide Fuel Cells Fabricated By Screen Printing, Changrong Xia, Fanglin Chen, Meilin Liu

Faculty Publications

Electrolyte films of samaria-doped ceria (SDC, Sm0.2Ce0.8O1.9) are fabricated onto porous NiO-SDC substrates by a screen printing technique. A cathode layer, consisting of Sm0.5Sr0.5CoO3 and 10 wt % SDC, is subsequently screen printed on the electrolyte to form a single cell, which is tested at temperatures from 400 to 600°C. When humidified (3% H2O) hydrogen or methane is used  as fuel and stationary air as oxidant, the maximum power densities are 188 (or 78) and 397 (or 304) mW/cm2 at 500 and 600°C, respectively. Impedance analysis …

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Bistable Operation Of A Two-Section 1.3-Mm Inas Quantum Dot Laser—Absorption Saturation And The Quantum Confined Stark Effect, Xiaodong Huang, A. Stintz, Hua Li, Audra Rice, G. T. Liu, L.F. Lester, Julian Cheng, K.J. Malloy Mar 2001

Bistable Operation Of A Two-Section 1.3-Mm Inas Quantum Dot Laser—Absorption Saturation And The Quantum Confined Stark Effect, Xiaodong Huang, A. Stintz, Hua Li, Audra Rice, G. T. Liu, L.F. Lester, Julian Cheng, K.J. Malloy

Faculty Publications

Room temperature, continuous-wave bistability was observed in oxide-confined, two-section, 1.3- m quantum-dot (QD) lasers with an integrated intracavity quantum-dot saturable absorber. The origin of the hysteresis and bistability were shown to be due to the nonlinear saturation of the QD absorption and the electroabsorption induced by the quantum confined Stark effect.

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Preparation Of Ordered Macroporous Sr0.5sm0.5coo3 As Cathode For Solid Oxide Fuel Cells, Fanglin Chen, Changrong Xia, Meilin Liu Jan 2001

Preparation Of Ordered Macroporous Sr0.5sm0.5coo3 As Cathode For Solid Oxide Fuel Cells, Fanglin Chen, Changrong Xia, Meilin Liu

Faculty Publications

Ordered macroporous Sr0.5Sm0.5CoO3 structrures with an average pore size of 140 nm have been prepared using closepacked arrangement of monodispersed polystyrene spheres as templates. A fuel cell using ordered macroporous Sr0.5Sm0.5CoO3 as the cathode, gadolinia-doped ceria (GDC) film as the electrolyte, and GDC–NiO as the anode generated maximum power densities of 150, 196 and 267 mW/cm2 at 500, 550 and 600 °C, respectively.

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Preparation Of Mesoporous Sno2-Sio2 Composite As Electrodes For Lithium Batteries, Fanglin Chen, Zhong Shi, Meilin Liu Oct 2000

Preparation Of Mesoporous Sno2-Sio2 Composite As Electrodes For Lithium Batteries, Fanglin Chen, Zhong Shi, Meilin Liu

Faculty Publications

Mesoporous SnO2–SiO2 composite stable up to 600 °C with a BET surface area of 350 m2 g-1 and an average pore size of 3.4 nm is successfully prepared, which exhibits promising cycling properties as anodes for lithium batteries

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Preparation Of Mesoporous Yttria-Stabilized Zirconia (Ysz) And Ysz-Nio Using A Triblock Copolymer As Surfactant, Fanglin Chen, Meilin Liu Oct 2000

Preparation Of Mesoporous Yttria-Stabilized Zirconia (Ysz) And Ysz-Nio Using A Triblock Copolymer As Surfactant, Fanglin Chen, Meilin Liu

Faculty Publications

Mesoporous yttria-stabilized zirconia (YSZ) and YSZ-NiO have been prepared for the first time using Pluronic P103 as a structure-directing agent and inorganic chlorides as precursors in a nonaqueous medium. After being fired at 500°C for 2 h, mesostructured YSZ has a BET surface area of about 146 m2 g-1, with an average pore size of 3.8 nm, while mesostructured YSZ-NiO has a BET surface area of about 108 m2 g-1, with an average pore size of 4.5 nm.

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Modeling The Effect Of Plasticizer On The Viscoelastic Response Of Crosslinked Polymers Using The Tube-Junction Model, P. P. Simon, Harry J. Ploehn Jan 2000

Modeling The Effect Of Plasticizer On The Viscoelastic Response Of Crosslinked Polymers Using The Tube-Junction Model, P. P. Simon, Harry J. Ploehn

Faculty Publications

Plasticizers modify the mechanical properties of polymericmaterials. The effects of plasticizers on glass transition temperatures can be most clearly observed in isochronal temperature sweep profiles of viscoelastic dynamic moduli. However, no simple mathematical models of plasticization are available to those who wish to design and employ plasticized materials in specific applications. We extend a phenomenological, molecular-level model (known as the tube–junction model) for crosslinked polymers to describe the effect of plasticizers on dynamic moduli. We show that the increase in free volume fraction due to the presence of the plasticizer can account for the shift in the glass transition in …

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Structural And Electrical Characterization Of A Novel Mixed Conductor: Ceo2 - Sm2O3 - Zro2 Solid Solution, W. Huang, P. Shuk, M. Greenblatt, M. Croft, Fanglin Chen, M. Liu Jan 2000

Structural And Electrical Characterization Of A Novel Mixed Conductor: Ceo2 - Sm2O3 - Zro2 Solid Solution, W. Huang, P. Shuk, M. Greenblatt, M. Croft, Fanglin Chen, M. Liu

Faculty Publications

solid solutions were synthesized for the first time by the hydrothermal method. The electrical properties of the solid solutions have been studied in air and under reducing conditions. Solid solutions with the fluorite structure were formed in all of the studied range of substitution after calcination at 1500°C. With increasing substitution up to 30 mol %, the electronic conductivity increases under a reducing atmosphere. The solid solution has good mixed electronic and ionic conductivity; the total conductivity is 0.42 S/cm at and 700°C with an estimated ionic conductivity of ca. .

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Oxygen Permeation Through Composite Oxide-Ion And Electronic Conductors, Kevin Huang, Michael Schroeder, John B. Goodenough May 1999

Oxygen Permeation Through Composite Oxide-Ion And Electronic Conductors, Kevin Huang, Michael Schroeder, John B. Goodenough

Faculty Publications

Oxygen permeation through composites consisting of four well-known oxide-ion conductors and a noble metal, Pd or Ag, is reported. The oxides were Zr0.9Y0.1O1.95 (YSZ), (Bi1.75Y0.25O3)0.95(CeO2)0.05 (BYC5), Ce0.8Sm0.2O1.9 (SSC), and La0.8Sr0.2Ga0.83Mg0.17O2.815 (LSGM). The results show that (BYC5 + Ag) yields the highest oxygen permeation flux, but the composite deteriorates with time. The composites (SSC + Pd), (LSGM + Pd), and (YSZ + Pd) give stable, but relatively lower oxygen permeation flux …

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Preparation Of Mesoporous Tin Oxide For Electrochemical Applications, Fanglin Chen, Meilin Liu Jan 1999

Preparation Of Mesoporous Tin Oxide For Electrochemical Applications, Fanglin Chen, Meilin Liu

Faculty Publications

Mesoporous tin oxide stable up to 500 °C has been prepared for the first time using both cationic and neutral surfactants.

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Sr‐ And Ni‐Doped Lacoo3 And Lafeo3 Perovskites: New Cathode Materials For Solid‐Oxide Fuel Cells, Kevin Huang, Hee Y. Lee, John B. Goodenough Jan 1998

Sr‐ And Ni‐Doped Lacoo3 And Lafeo3 Perovskites: New Cathode Materials For Solid‐Oxide Fuel Cells, Kevin Huang, Hee Y. Lee, John B. Goodenough

Faculty Publications

An improved cathode material for a solid‐oxide fuel cell would be a mixed electronic and oxide‐ion conductor with a good catalytic activity for oxygen reduction at an operating temperature T op ≥ 700°C and a thermal expansion matched to that of the electrolyte and interconnect. We report on the properties of Sr‐ and Ni‐doped LaCoO3 and LaFeO3 perovskites that meet these criteria. Single‐phase regions were determined by X‐ray diffraction, and thermogravimetric analysis measurements were used to obtain the temperatures above which oxygen loss, and hence oxide‐ion conductivity, occurs. The conductivity and Seebeck measurements indicate the coexistence of both …

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Electrode Performance Test On Single Ceramic Fuel Cells Using As Electrolyte Sr‐ And Mg‐Doped Lagao3, Kevin Huang, Man Feng, John B. Goodenough, Christopher Milliken Oct 1997

Electrode Performance Test On Single Ceramic Fuel Cells Using As Electrolyte Sr‐ And Mg‐Doped Lagao3, Kevin Huang, Man Feng, John B. Goodenough, Christopher Milliken

Faculty Publications

The electrode performance of a single solid oxide fuel cell was evaluated using a 500 μm thick La0.9Sr0.1Ga0.8Mg0.2O2.85 (LSGM) as the electrolyte membrane. Comparison of La0.6Sr0.4CoO3-δ (LSCo) and La0.9Sr0.1MnO3 (LSM) as cathodes showed LSCo gave an exchange current density two orders of magnitude higher than that of LSM. Comparison of CeO2/Ni and LSGM/Ni as anodes showed a degradation of the latter with time, and studies of the anode‐electrolyte interface and the reactivity of NiO and LSGM suggest better anode …

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Chemical Stability Study Of Bace0.9Nd0.1O3−Α High Temperature Proton-Conducting Ceramic, Fanglin Chen, O. Toft Sorensen, Guangyao Meng, Dingkum Peng Jan 1997

Chemical Stability Study Of Bace0.9Nd0.1O3−Α High Temperature Proton-Conducting Ceramic, Fanglin Chen, O. Toft Sorensen, Guangyao Meng, Dingkum Peng

Faculty Publications

BaCe0.9Nd0.1O3−a (BCN) ceramic is known to be an excellent high-temperature proton conductor and is a candidate electrolyte for use in solid oxide fuel cells, hydrogen or steam sensors and steam electrolysers. In this work, the chemical stability of BCN was investigated systematically by combining XRD and DTA–TG techniques to study its processing compatibility and its feasibility in potential applications. It was found that above 1200 °C, BCN reacted with alumina or zirconia, leading to the loss of barium and an excess of cerium. In cold water, both sintered BCN disks and powder samples had very …

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Preparation Of Nd-Doped Baceo3 Proton-Conducting Ceramics By Homogeneous Oxalate Coprecipitation, Fanglin Chen, Ping Wang, O. Toft Sorensen, Guangyao Meng, Dingkum Peng Jan 1997

Preparation Of Nd-Doped Baceo3 Proton-Conducting Ceramics By Homogeneous Oxalate Coprecipitation, Fanglin Chen, Ping Wang, O. Toft Sorensen, Guangyao Meng, Dingkum Peng

Faculty Publications

Nd-doped BaCeO3 have been obtained from homogeneous coprecipitated oxalates when calcined at temperatures T≥1000 °C. Ball-milling of the calcined powders well disperses the agglomerates and consequently has a beneficial effect in the densification process. The calcination temperature has a major influence on the sintering process and powders calcined at 1100 °C possess good sinterabilities. The pressure applied to press the green pellets has no apparent influence on the sintered density at sintering temperatures of T≥1400 °C. By controlling the processing variables it was possible to obtain near fully dense Nd-doped BaCeO3 ceramics with homogeneous microstructure at a sintering …

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Characterization Of Sr‐Doped Lamno3 And Lacoo3 As Cathode Materials For A Doped Lagao3 Ceramic Fuel Cell, Kevin Huang, Man Feng, John B. Goodenough, Michael Schmerling Nov 1996

Characterization Of Sr‐Doped Lamno3 And Lacoo3 As Cathode Materials For A Doped Lagao3 Ceramic Fuel Cell, Kevin Huang, Man Feng, John B. Goodenough, Michael Schmerling

Faculty Publications

Energy dispersive spectrometry line scan and ac impedance spectroscopy were used in this study to investigate the chemical reactions between two cathode materials, La0.84Sr0.16MnO3 (LSM), La0.5Sr0.5CoO3-δ (LSC), and the electrolyte La0.9Sr0.1Ga0.8Mg0.2O2.85 (LSGM). Significant interdiffusions of Co into LSGM and Ga into LSC were found at an LSC/LSGM interface even at relatively low fabrication temperatures. In contrast, only small interdiffusions of Mn into LSGM and Ga into LSM were detected at the LSM/LSGM interface even though it was fired at 1470°C. The …

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Characterization Of The Si/Sio2 Interface Formed By Remote Plasma Enhanced Chemical Vapor Deposition From Sih4/N2O With Or Without Chlorine Addition, Young-Bae Park, Xiaodong Li, Shi-Woo Rhee Jul 1996

Characterization Of The Si/Sio2 Interface Formed By Remote Plasma Enhanced Chemical Vapor Deposition From Sih4/N2O With Or Without Chlorine Addition, Young-Bae Park, Xiaodong Li, Shi-Woo Rhee

Faculty Publications

The Si/SiO2interface formed by remote plasma enhanced chemical vapor deposition (RPECVD) at low temperature with SiH4/N2O or SiH4/N2O/Cl2 was studied and compared with thermal oxidation. The interface of the CVD SiO2 without chlorine addition is rougher than that with chlorine addition. But the surface roughness of CVD SiO2 films increases with chlorine addition. The thermal oxidation induces strong interface strains, and the strains generated by the CVD SiO2 without chlorine addition are stronger and are distributed more nonuniformly than those by the chlorinated SiO2. …

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Microstructure And Deposition Rate Of Aluminum Thin Films From Chemical Vapor Deposition With Dimethylethylamine Alane, Byoung-Youp Kim, Xiaodong Li, Shi-Woo Rhee Jun 1996

Microstructure And Deposition Rate Of Aluminum Thin Films From Chemical Vapor Deposition With Dimethylethylamine Alane, Byoung-Youp Kim, Xiaodong Li, Shi-Woo Rhee

Faculty Publications

Deposition of aluminumfilm from DMEAA in the temperature range of 100–300 °C has been studied. In this temperature range, there is a maximum deposition rate at around 150 °C. The film deposited at 190 °C has elongated blocklike grain shapes, which are ∼600 nm in width and 930 nm in length. Grains in the film deposited at 150 °C showed an equiaxed structure with grain size in the range of 100–300 nm in a film with 600 nm thickness. Aluminum oxide particle inclusion was observed especially at high deposition temperature. Plausible reaction pathways of DMEAA dissociation were suggested to explain …

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Structural Characterization Of Aluminum Films Deposited On Sputtered-Titanium Nitride/ Silicon Substrate By Metalorganic Chemical Vapor Deposition From Dimethylethylamine Alane, Xiaodong Li, Byoung-Youp Kim, Shi-Woo Rhee Dec 1995

Structural Characterization Of Aluminum Films Deposited On Sputtered-Titanium Nitride/ Silicon Substrate By Metalorganic Chemical Vapor Deposition From Dimethylethylamine Alane, Xiaodong Li, Byoung-Youp Kim, Shi-Woo Rhee

Faculty Publications

Alfilmsdeposited on sputtered‐TiN/Si substrate by metalorganic chemical vapor deposition(MOCVD) from dimethylethylamine alane (DMEAA) were characterized using x‐ray diffraction(XRD),Auger electron spectroscopy(AES),atomic force microscopy(AFM), and transmission electron microscopy (TEM). The TiN filmsputtered on the Si has a preferred orientation along the growth direction with the 〈111〉 of the film parallel to the Si〈111〉. Sputtering of the TiN film on the Si induced strains at the interface. The TiN/Si interface is flat while the Al/TiN interface is rough. There exist many dislocations at the Al/TiN interface. The Al2O3 phase was formed at the Al/TiN interface during the early stages of …

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