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Comparison Of Beta Backscatter And X-Ray Fluorescence Methods To Measure Coating Thickness, Sergio Palomo, Bernice Mills

STAR Program Research Presentations

This work compares and assesses the effectiveness of beta backscatter (BB) and x-ray fluorescence (XRF) for measuring the thickness of gold coatings on two substrates: silicon and an iron-nickel alloy. A set of samples of known gold coating thickness, ranging from 0.5 – 4.0 microns, was measured in each case along with the substrate alone. In BB the number of electrons (beta particles from a very small radioactive source, Pm-147 in this case) backscattered from a sample in a fixed time period is counted. The XRF method uses x-rays generated in the sample from a primary x-ray beam of higher …