Nanotechnology Fabrication Commons^™

Development And Integration Of Mems Based Inductive Sensors, Luyang Zhang

Electronic Thesis and Dissertation Repository

Inductive sensors are one of the most widely used sensors especially in automotive. However, with the current PCB manufacture process, the large size of the sensor limits its usage in different applications. In this thesis, a novel method of fabricating bi-layer copper micro inductive sensor is demonstrated to solve the size issue. The two coil layers were built by UV LIGA process respectively, and a polyimide insulation film sandwiched in between. At the beginning, seeding layer was deposited on the substrate as electrode, and then the copper coil layer was created through electroplating in the patterned micromold. The coil was …