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Full-Text Articles in Nanotechnology Fabrication
Fabrication And Study Of Molecular Devices And Photovoltaic Devices By Metal/Dielectric/Metal Structures, Bing Hu
University of Kentucky Doctoral Dissertations
A new class of electrodes with nanometer-scale contact spacing can be produced at the edge of patterned metal/insulator/metal this film structures. A key challenge is to produce insulator layers with low leakage current and have pristine metal contacts for controlled molecular contacts. Atomic layer deposition of high quality Al2O3 thin films onto Au electrodes was enabled by surface modification with a self-assembled monolayer of -OH groups that react with a monolayer of trimethylaluminum gas source. Ar ion milling was then used to expose the edge of the Au/dielectric/Au structure for molecular electrode contacts. The junctions are characterized …