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Theoretical Analysis Of Laterally Vibrating Hammerhead Microcantilever Sensors In A Viscous Liquid, Jinjin Zhang

Dissertations (1934 -)

Dynamically driven prismatic microcantilevers excited in the in-plane flexural mode have been investigated and used in liquid-phase sensing applications. However, the performance is restricted due to their limited surface sensing area and higher stiffness in shorter and wider prismatic microcantilevers. To increase the surface sensing area, and further improve sensing characteristics, it has been proposed to investigate symmetric hammerhead microcantilevers vibrating laterally in viscous liquid media. In this work, a theoretical model is proposed and the characteristics of the microcantilevers with symmetric shaped hammerheads (isosceles trapezoid, semi-circle, uniform rectangle and composite rectangle) are investigated. In the analysis, the stem of …