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Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang
Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang
Electronic Theses and Dissertations
Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling …
Challenges In Flexible Microsystem Manufacturing : Fabrication, Robotic Assembly, Control, And Packaging., Danming Wei
Challenges In Flexible Microsystem Manufacturing : Fabrication, Robotic Assembly, Control, And Packaging., Danming Wei
Electronic Theses and Dissertations
Microsystems have been investigated with renewed interest for the last three decades because of the emerging development of microelectromechanical system (MEMS) technology and the advancement of nanotechnology. The applications of microrobots and distributed sensors have the potential to revolutionize micro and nano manufacturing and have other important health applications for drug delivery and minimal invasive surgery. A class of microrobots studied in this thesis, such as the Solid Articulated Four Axis Microrobot (sAFAM) are driven by MEMS actuators, transmissions, and end-effectors realized by 3-Dimensional MEMS assembly. Another class of microrobots studied here, like those competing in the annual IEEE Mobile …